EP1090231B2 - Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type - Google Patents

Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type Download PDF

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Publication number
EP1090231B2
EP1090231B2 EP99917896.5A EP99917896A EP1090231B2 EP 1090231 B2 EP1090231 B2 EP 1090231B2 EP 99917896 A EP99917896 A EP 99917896A EP 1090231 B2 EP1090231 B2 EP 1090231B2
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EP
European Patent Office
Prior art keywords
housing
pump
pump according
stator
tie
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99917896.5A
Other languages
German (de)
English (en)
Other versions
EP1090231A1 (fr
EP1090231B1 (fr
Inventor
Ralf Adamietz
Christian Beyer
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority claimed from DE19901340.3A external-priority patent/DE19901340B4/de
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to EP03029746.9A priority Critical patent/EP1422423B2/fr
Publication of EP1090231A1 publication Critical patent/EP1090231A1/fr
Application granted granted Critical
Publication of EP1090231B1 publication Critical patent/EP1090231B1/fr
Publication of EP1090231B2 publication Critical patent/EP1090231B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F04D29/602—Mounting in cavities

Definitions

  • the invention relates to a turbomolecular vacuum pump having the features of the preamble of patent claim 1, as well as a corresponding device having the features of the preamble of claim 19.
  • connection flange on the front side, with which the friction vacuum pumps are connected to devices with chambers to be evacuated. Since there are different types of flanges and flange sizes, it is necessary for the manufacturer of friction vacuum pumps to manufacture and maintain a variety of friction vacuum pump types to meet all the customer's application needs.
  • a turbomolecular vacuum pump having the features of the preamble of claim 1 is known from DE-A-34 02 549 known.
  • the first internal component is a tie rod system, which only has the task of holding stator components together.
  • the present invention has for its object to simplify the adaptation of turbomolecular vacuum pumps to the variety of applications specified by the customer.
  • this object is achieved by the characterizing features of the claims.
  • the inner component ensures the assignment of the individual components of the vacuum pump to each other. This results in a turbomolecular vacuum pump in the form of a plug which has already undergone many functional tests, e.g. that of balancing, can be subjected.
  • the outer housing has the task of adapting the functioning even without an outer housing molecular vacuum pump to the application of the customer. It is no longer necessary to produce or maintain a variety of pump types, but only one or a few universal, compact and functional pumping units (bays, cartridges) and the outer housing adapted to the respective customer applications.
  • FIG. 1 a friction vacuum pump 1 with stator 3, rotor 4 and chassis 5 is shown.
  • the chassis 5 is the motor drive 6, 7, the armature 7 is supported on the bearings 8 in the chassis 5.
  • shaft 9 With the armature 7 which led out of the chassis 5 shaft 9 is connected, which carries the rotor 4.
  • the axis of rotation of the rotor system is denoted by 11.
  • the friction vacuum pump 1 has after FIG. 1 three pumping stages 12, 13, 14, two of which (12, 13) are designed as turbomolecular vacuum pumping stages and one (14) as molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.
  • the pump 1 is equipped with two housings 18, 19.
  • the inner housing 18 is substantially cylindrical and surrounds the stator 3. On its high vacuum side end, it is equipped with an inwardly directed edge 20 which rests on the stator 3 and in this case simultaneously forms the upper stator ring.
  • the housing 18 is fixed to the chassis 5, with the aid of the flange 21.
  • Flange 21 and chassis 5 are connected to each other vacuum-tight. For this purpose, between the flange 21 and the chassis 5 of the sealing ring 21 'is arranged.
  • the outer housing 19 has an inner bore 22 with an inwardly directed gradation 23, whose height corresponds to the width of the rim 20 on the first housing 18.
  • a seal 24 which is expediently embedded in the end face of the housing 18.
  • a radial seal is possible.
  • the housing 19 has a device, For example, the flange 25 with which it is attached to the chassis 5 or on the housing 18. After releasing this attachment, the unit formed by the inner housing 18 and the components therein can be removed as a whole from the bore 22. It forms an independent from the second housing 19 slot 27th
  • the first, high vacuum side pump stage 12 consists of four pairs of rotor blade rows and Statorschaufelschschn. Its inlet, the effective gas passage area, is designated 26. The edge 20 surrounds the gas passage surface 26 and forms a passage opening 28 for entering the pump 1 gases.
  • the first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row and one rotor blade row. Your inlet is designated 29.
  • the second pumping stage 13 is spaced from the first pumping stage 12.
  • the selected distance (height) a ensures the free accessibility of the gas molecules to be conveyed to the gas inlet 29.
  • the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.
  • the adjoining Holweck pump comprises a rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing each other.
  • Another, formed by the inner housing 18 opening is arranged laterally and designated 35. It serves for the passage of gases, which are fed directly to the inlet 29 of the second pumping stage 13.
  • the outer housing 19 has the task of connecting the pump 1 or two pump stages (12, 13) of this pump with the device of the customer.
  • the housing 19 is according to the embodiment FIG. 1 formed such that the planes of all the connection openings 36, 37 are located laterally.
  • the distance of the opening 37 to the associated gas inlet 29 is very small, so that the suction capacity of the pumping stage 13 impairing conductance losses are negligible.
  • the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 29 and connection opening 37.
  • the lateral connection openings can each be equipped with a flange. According to the embodiment FIG. 1 a common flange 39 is provided.
  • the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
  • a high pumping speed is to be generated (eg 200 l / s).
  • the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
  • this goal can be achieved by appropriate design of the blades of the first pumping stage 12.
  • Another possibility is to arrange a diaphragm 38 in front of the inlet 26 of the first pumping stage, the inner diameter of which determines the desired pumping speed.
  • FIG. 2 shows a single-flow friction vacuum pump 1, the pump-active surfaces are formed solely by stator blades 41 and rotor blades 42 (turbomolecular vacuum pump).
  • the second, outer housing 19 carries the front side of the flange 43, which surrounds the front side arranged connection opening 44. To equip a pump 1 of this type with a different flange and / or flange size, it is only necessary to disassemble the outer housing 19 and replaced by a housing 19 with the desired flange.
  • FIG. 3 shows a device 51 according to the invention with evacuated chambers 52, 53, 54 and a push-in unit 27, as to FIG. 1 has been described.
  • the housing of the device - for example, a corpuscular beam device - is substantially integrally formed and designated 55.
  • the housing In the immediate vicinity of the chambers to be evacuated 53, 54, the housing is equipped with the bore 22 in which the insert 27 is located.
  • the chambers 53, 54 communicate with the respective inlets 26, 29 via the passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37.
  • the integration of the insert 27 in the housing of the device 51 accounts for separate connection means.
  • the distances between the chambers to be evacuated 53,54 and the inlets 26, 29 are optimally small.
  • the essence of the present idea is that a largely functional unit (insert, cartridge) of a friction vacuum pump in a housing adapted to the application is releasably supported.
  • the inner housing 18 described so far has the task of summarizing the functional elements of the friction vacuum pump to the desired unit.
  • other components - such as tie rods, brackets or the like - be present, which fulfill this task.
  • two components 18 and 19,55 are provided for the fulfillment of the functions of the usual housing in the subject matter of the invention.
  • the two components are formed by two concentric housings, of which the inner of the centering, assignment and support of chassis 5, stator 3 and rotor 4 is used, which thereby form the already operable, independent of the outer housing slot.
  • the outer housing 19, 55 seals the vacuum pump to the outside and serves for connection to the chambers to be evacuated, either via connecting flanges or in that it is already part of the device with the chambers to be evacuated.
  • FIGS. 4 and 5 show embodiments ( FIG. 4 : Longitudinal section through a slot 27; FIG. 5 : Cross section through a slot 27 at the level of the opening 35) for an inner slot 27 with a Glasankersystem 61.
  • This comprises three to six (or more) tie rods 62 and holes and threads in the components (chassis 5, stator 3), the Tie rod system 61 are to be joined together to form a structural unit.
  • FIGS. 4 and 5 can be seen that the opening 35 extends over the entire circumference of the insert 27 and is interrupted only by the tie rods 62.
  • the access of the gas molecules to the inlet 29 of the pumping stage 13 is thereby free almost unhindered.
  • the attachment of the outer housing - be it the second housing 18, which fulfills further functions of a pump housing, or a housing 55 which is part of a device with chambers to be evacuated - takes place on the flange 21 of the chassis 5.
  • FIG. 4 allows the construction of particularly advantageous designed tie rod 62 recognize. They are designed in two parts.
  • the vorvakuum solutionen Anlagenankerabête 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator 33 of the pumping stage 14. Their threaded ends are screwed into the flange 21 of the chassis 5.
  • the length of the heads 64 determines the axial extent of the opening 35.
  • the heads 64 are each provided with an internal thread, in each of which high-vacuum-side tie rod sections 65 can be screwed.
  • Their heads 66 are the top stator of the pumping stage 13. In addition, they enforce the stator of the pumping stage 12 and thereby cause in the screwed state not only a compound of the high vacuum stage 12 with the remaining stages 13 and 14 but also a centering of the stator rings.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (20)

  1. Pompe vide turbomoléculaire (1) avec un châssis (5), un stator (3) présentant des bagues de stator, un rotor (4) présentant des aubes de rotor et s'appuyant par un arbre (9) dans le châssis (5), un premier composant intérieur (18, 61) servant à regrouper des bagues de stator, et un deuxième composant de boitier extérieur (19) qui est fixé au châssis (5), reçoit le stator (3) et le rotor (4) et est muni d'un raccordement (39) pour une chambre à évacuer, caractérisée en ce que le premier composant intérieur (18, 61) regroupe le châssis (5), le stator (3) et le rotor (4) en un assemblage (27) sous forme de tiroir, indépendant et apte à fonctionner sans composant de boitier extérieur (19), assemblage qui est fixé de façon amovible dans le composant de boitier extérieur.
  2. Pompe selon la revendication 1, caractérisée en ce que le premier composant intérieur est un boitier intérieur (18) cylindrique.
  3. Pompe selon la revendication 2, caractérisée en ce qu'une garniture d'étanchéité (24) est disposée dans la zone du côté vide poussé de la pompe entre le boitier intérieur (18) et le boitier extérieur (19, 55).
  4. Pompe selon la revendication 2 ou 3, caractérisée en ce que dans la zone du côté vide préliminaire de la pompe, les boitiers intérieur et extérieur (18 ; 19, 55) sont munis de brides fixes de façon amovible au châssis (5).
  5. Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que le boitier intérieur (18) est muni du côté vide pousse d'un bord (20) dirigé vers l'intérieur.
  6. Pompe selon la revendication 5, caractérisée en ce que le bord (20) dirigé vers l'intérieur forme une première bague de stator disposée du côté vide poussé.
  7. Pompe selon l'une quelconque des revendications précédentes 2 à 6, caractérisée en ce qu'à la face frontale du côté vide poussé du boitier intérieur (18) est associé un rétrécissement (23) étagé de l'alésage (22) du boitier extérieur (19, 55).
  8. Pompe selon les revendications 3 à 7, caractérisée en ce qu'un joint torique (24) est disposé entre la face frontale du boitier intérieur (18) et l'étage (23) du boitier extérieur (19, 55) formé par le rétrécissement de diamètre.
  9. Pompe selon l'une quelconque des revendications précédentes 2 à 8, caractérisée en ce que l'extrémité du boitier intérieur (18) située du côté vide poussé forme une ouverture de passage (28) pour les gaz entrant dans la pompe.
  10. Pompe selon la revendication 9, caractérisée en ce que le boitier intérieur (18) est muni d'au moins une autre ouverture de passage (35) pour des gaz entrants située en aval.
  11. Pompe selon l'une quelconque des revendications 1 à 10, caractérisée en ce que la bride de raccordement (39) est disposée latéralement sur le deuxième boitier (19).
  12. Pompe selon la revendication 9 ou 10, caractérisée en ce que dans le boitier extérieur (19) un ou plusieurs canaux de liaison sont formés, établissant la liaison entre les ouvertures de passage (28, 35) et une ou plusieurs chambres (52 à 55) à évacuer.
  13. Pompe selon la revendication 1, caractérisée en ce que le premier composant intérieur est formé par un système de tirants (61).
  14. Pompe selon la revendication 13, caractérisée en ce que le système de tirants (61) comprend plusieurs tirants (62) qui relient le stator (3) au châssis (5).
  15. Pompe selon la revendication 14, caractérisée en ce que les tirants (62) traversent les bagues de stator.
  16. Pompe selon l'une quelconque des revendications 13 à 15, caractérisée en ce que les tirants (62) sont réalisés en deux pièces et comprennent respectivement un segment de tirant (63) avec tête (64) du côté vide préliminaire et un segment de tirant (65) avec tête (66) du côté vide poussé.
  17. Pompe selon la revendication 16, caractérisée en ce que la longueur de la tête (64) du segment de tirant (63) du côté vide préliminaire détermine l'étendue axiale d'une ouverture de passage (35) entre l'étage de vide poussée (12) et l'étage de vide préliminaire (13 ou 13, 14).
  18. Pompe selon l'une quelconque des revendications 16 ou 17, caractérisée en ce que les têtes (64) des segments de tirant (63) du côté vide préliminaire présentent chacune un filet sur la face frontale dans lequel an peut visser les segments de tirant (65) du côté vide poussé.
  19. Appareil (51) avec un boitier (55) dans lequel est située au moins une chambre (52, 53, 54) pouvant être évacuée, et une pompe à vide turbomoléculaire (1) présentant un boitier selon l'une quelconque des revendications précédentes, qui est relié à la chambre à évacuer, caractérisé en ce que le boitier (55) de l'appareil (51) présente un alésage (22) dans lequel est située l'assemblage (27) de la pompe à vide turbomoléculaire (1), et en ce que le boitier (55) forme le deuxième composant extérieur de la pompe (1).
  20. Appareil selon la revendication 19, caractérisé en ce qu'au moins deux chambres (52, 53, 54) sont prévues, la pompe turbomoléculaire (1) 20 présente plusieurs étages, au moins deux chambres (52, 53, 54) sont disposées à côté de la pompe à vide turbomoléculaire (1), et les chambres sont reliées à l'entrée (26, 29) d'étages de pompe turbomoléculaire (12, 13, 14) par des ouvertures de passage dans le boitier intérieur (18) et des ouvertures de liaison (36, 37) dans le boitier (55) commun.
EP99917896.5A 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type Expired - Lifetime EP1090231B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP03029746.9A EP1422423B2 (fr) 1998-05-26 1999-03-27 Appareil avec boîtier pouvant être mis à vide

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19823270 1998-05-26
DE19823270 1998-05-26
DE19901340.3A DE19901340B4 (de) 1998-05-26 1999-01-15 Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
DE19901340 1999-01-15
PCT/EP1999/002122 WO1999061799A1 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type

Related Child Applications (3)

Application Number Title Priority Date Filing Date
EP03029746.9A Division EP1422423B2 (fr) 1998-05-26 1999-03-27 Appareil avec boîtier pouvant être mis à vide
EP03029746.9A Division-Into EP1422423B2 (fr) 1998-05-26 1999-03-27 Appareil avec boîtier pouvant être mis à vide
EP03029746.9 Division-Into 2003-12-23

Publications (3)

Publication Number Publication Date
EP1090231A1 EP1090231A1 (fr) 2001-04-11
EP1090231B1 EP1090231B1 (fr) 2005-10-05
EP1090231B2 true EP1090231B2 (fr) 2015-07-08

Family

ID=26046389

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99917896.5A Expired - Lifetime EP1090231B2 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type

Country Status (5)

Country Link
US (1) US6457954B1 (fr)
EP (1) EP1090231B2 (fr)
JP (1) JP4520636B2 (fr)
DE (2) DE59912626D1 (fr)
WO (1) WO1999061799A1 (fr)

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DE10308420A1 (de) 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
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GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US20070263477A1 (en) * 2006-05-11 2007-11-15 The Texas A&M University System Method for mixing fluids in microfluidic channels
DE102007010068B4 (de) 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
CN101981321B (zh) * 2008-03-31 2014-05-28 株式会社岛津制作所 涡轮式分子泵
GB2462804B (en) * 2008-08-04 2013-01-23 Edwards Ltd Vacuum pump
DE202008011489U1 (de) 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102009013244A1 (de) 2009-03-14 2010-09-16 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
GB2473839B (en) * 2009-09-24 2016-06-01 Edwards Ltd Mass spectrometer
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
DE202012000611U1 (de) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
CN104541063B (zh) 2012-09-26 2018-08-31 埃地沃兹日本有限公司 转子及具备该转子的真空泵
DE202013003855U1 (de) 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe
GB201314841D0 (en) 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
EP3460249B1 (fr) * 2015-07-01 2021-03-24 Pfeiffer Vacuum GmbH Pompe à vide à debit partagé
JP7196763B2 (ja) * 2018-10-25 2022-12-27 株式会社島津製作所 ターボ分子ポンプおよび質量分析装置
EP3564538B1 (fr) * 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Système à vide et procédé de fabrication d'un tel système à vide
GB2592043A (en) * 2020-02-13 2021-08-18 Edwards Ltd Axial flow vacuum pump
EP4293233B1 (fr) * 2023-10-18 2025-12-03 Pfeiffer Vacuum Technology AG Appareil à vide

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Publication number Priority date Publication date Assignee Title
US4324532A (en) † 1980-01-24 1982-04-13 Trw Inc. Cartridge pump
DE69623700T2 (de) † 1995-06-30 2003-07-31 Alcatel, Paris Turbomolekularpumpe

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Publication number Publication date
JP2002516959A (ja) 2002-06-11
EP1090231A1 (fr) 2001-04-11
WO1999061799A1 (fr) 1999-12-02
DE59912626D1 (de) 2006-02-16
EP1090231B1 (fr) 2005-10-05
US6457954B1 (en) 2002-10-01
DE59912629D1 (de) 2006-02-16
JP4520636B2 (ja) 2010-08-11

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