EP1101944A3 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number: EP1101944A3
Authority: EP; European Patent Office
Prior art keywords: molecular pump; turbo molecular; stator disks; pump; rotor
Prior art date: 1999-11-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP00124676A

Other languages

German (de)

English (en)

Other versions

EP1101944B1 (fr

EP1101944A2 (fr

Inventor

Heinrich Lotz

Jörg Stanzel

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-11-22

Filing date

2000-11-11

Publication date

2001-10-17

2000-11-11 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2001-05-23 Publication of EP1101944A2 publication Critical patent/EP1101944A2/fr

2001-10-17 Publication of EP1101944A3 publication Critical patent/EP1101944A3/fr

2006-07-19 Application granted granted Critical

2006-07-19 Publication of EP1101944B1 publication Critical patent/EP1101944B1/fr

2020-11-11 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Steroid Compounds (AREA)

EP00124676A 1999-11-22 2000-11-11 Pompe turbo-moléculaire Expired - Lifetime EP1101944B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19956015A DE19956015A1 (de)	1999-11-22	1999-11-22	Turbomolekularpumpe
DE19956015		1999-11-22

Publications (3)

Publication Number	Publication Date
EP1101944A2 EP1101944A2 (fr)	2001-05-23
EP1101944A3 true EP1101944A3 (fr)	2001-10-17
EP1101944B1 EP1101944B1 (fr)	2006-07-19

Family

ID=7929835

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP00124676A Expired - Lifetime EP1101944B1 (fr)	1999-11-22	2000-11-11	Pompe turbo-moléculaire

Country Status (5)

Country	Link
US (1)	US6561755B1 (fr)
EP (1)	EP1101944B1 (fr)
JP (1)	JP2001153088A (fr)
AT (1)	ATE333590T1 (fr)
DE (2)	DE19956015A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10142567A1 (de) *	2001-08-30	2003-03-20	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE10351451A1 (de) *	2003-11-04	2005-06-16	Friesen, Waldemar	NDM - Neue Dimension für Motoren
DE202008011489U1 (de)	2008-08-28	2010-01-07	Oerlikon Leybold Vacuum Gmbh	Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
GB2568066A (en) *	2017-11-02	2019-05-08	Edwards Ltd	Stator blade unit for a turbomolecular pump
CN110043485B (zh) *	2019-05-16	2024-07-19	江苏博联硕焊接技术有限公司	一种涡轮分子泵转子及其扩散焊接方法
CN114673671B (zh) *	2020-12-25	2024-04-02	广东美的白色家电技术创新中心有限公司	风机和吸尘装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2218615A1 (de) *	1972-04-18	1973-10-31	Leybold Heraeus Gmbh & Co Kg	Turbomolekularpumpe mit rotor und stator
US3947193A (en) *	1973-03-30	1976-03-30	Compagnie Industrielle Des Telecommunications Cit-Alcatel	Molecular vacuum pump structure
JPH01190990A (ja) *	1988-01-26	1989-08-01	Osaka Shinku Kiki Seisakusho:Kk	真空ポンプ
JPH0242195A (ja) *	1988-07-31	1990-02-13	Shimadzu Corp	ターボ分子ポンプ
US5722819A (en) *	1995-06-30	1998-03-03	Alcatel Cit	Molecular drag pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4579508A (en) *	1982-04-21	1986-04-01	Hitachi, Ltd.	Turbomolecular pump
JPH0689756B2 (ja) *	1986-05-02	1994-11-14	株式会社日立製作所	ドライ真空ポンプ
JPS6412123A (en) *	1987-07-03	1989-01-17	Ebara Corp	Rotary machine
US5063661A (en) *	1990-07-05	1991-11-12	The United States Of America As Represented By The Secretary Of The Air Force	Method of fabricating a split compressor case
US5104288A (en) *	1990-12-10	1992-04-14	Westinghouse Electric Corp.	Dual plane bolted joint for separately-supported segmental stationary turbine blade assemblies
JPH05141389A (ja) *	1991-11-15	1993-06-08	Vacuum Prod Kk	真空ポンプ

1999
- 1999-11-22 DE DE19956015A patent/DE19956015A1/de not_active Withdrawn
2000
- 2000-11-08 JP JP2000340217A patent/JP2001153088A/ja active Pending
- 2000-11-11 EP EP00124676A patent/EP1101944B1/fr not_active Expired - Lifetime
- 2000-11-11 AT AT00124676T patent/ATE333590T1/de not_active IP Right Cessation
- 2000-11-11 DE DE50013185T patent/DE50013185D1/de not_active Expired - Lifetime
- 2000-11-21 US US09/718,147 patent/US6561755B1/en not_active Expired - Fee Related

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2218615A1 (de) *	1972-04-18	1973-10-31	Leybold Heraeus Gmbh & Co Kg	Turbomolekularpumpe mit rotor und stator
US3947193A (en) *	1973-03-30	1976-03-30	Compagnie Industrielle Des Telecommunications Cit-Alcatel	Molecular vacuum pump structure
JPH01190990A (ja) *	1988-01-26	1989-08-01	Osaka Shinku Kiki Seisakusho:Kk	真空ポンプ
JPH0242195A (ja) *	1988-07-31	1990-02-13	Shimadzu Corp	ターボ分子ポンプ
US5722819A (en) *	1995-06-30	1998-03-03	Alcatel Cit	Molecular drag pump

Also Published As

Publication number	Publication date
EP1101944B1 (fr)	2006-07-19
US6561755B1 (en)	2003-05-13
EP1101944A2 (fr)	2001-05-23
JP2001153088A (ja)	2001-06-05
ATE333590T1 (de)	2006-08-15
DE50013185D1 (de)	2006-08-31
DE19956015A1 (de)	2001-05-23

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