EP1245982A2 - Appareil pour monter un élément optique dans un appareillage optique - Google Patents

Appareil pour monter un élément optique dans un appareillage optique Download PDF

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Publication number
EP1245982A2
EP1245982A2 EP02005695A EP02005695A EP1245982A2 EP 1245982 A2 EP1245982 A2 EP 1245982A2 EP 02005695 A EP02005695 A EP 02005695A EP 02005695 A EP02005695 A EP 02005695A EP 1245982 A2 EP1245982 A2 EP 1245982A2
Authority
EP
European Patent Office
Prior art keywords
optical element
parallelogram
manipulators
circumference
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02005695A
Other languages
German (de)
English (en)
Other versions
EP1245982B1 (fr
EP1245982A3 (fr
Inventor
Thomas Petasch
Hartmut MÜNKER
Klaus-Dieter Klein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of EP1245982A2 publication Critical patent/EP1245982A2/fr
Publication of EP1245982A3 publication Critical patent/EP1245982A3/fr
Application granted granted Critical
Publication of EP1245982B1 publication Critical patent/EP1245982B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Definitions

  • the invention relates to a device for mounting an optical Element in an optic, in particular a mirror or a lens, in a projection exposure system, in particular a projection lens in semiconductor lithography.
  • Optical elements such as Mirrors and lenses, in optics, especially in semiconductor lithography, are said to be isostatic and thus be decoupled from deformation, so that from the outside interfering effects do not affect the optical if possible Impact element.
  • the optical element for this purpose it is known the optical element to store accordingly "soft". The problem with a soft Storage, however, is that you do not have high enough Natural frequencies reached.
  • the present invention is therefore based on the object a device for storing an optical element create the one hand little or little forces on the optical Element, i.e. which decouples deformation very well is, but on the other hand reaches a high natural frequency becomes.
  • there should be no external disturbances Cause surface deformations on the optical element, but - if at all - a whole body movement.
  • this task is characterized by Part of claim 1 mentioned features solved.
  • a very advantageous embodiment of the invention can be found therein exist that the bearing device two parallel to the z direction (optical axis) spaced from each other in tangential Direction bending members with a intermediate link arranged therebetween.
  • each storage facility has e.g. two on Distance from each other in the tangential direction to the optical element running leaf springs and one in radial Leaf spring running in the direction of a transverse joint.
  • the between the two leaf springs running in the tangential direction arranged intermediate link can be rigid or - in one very advantageous and not obvious further education of the Invention - be designed as a manipulator device.
  • the intermediate link can be adjusted to change the length parallel to the z direction his.
  • a possible embodiment for this is a parallelogram Structure or a structure comparable to a scissor jack principle.
  • the length of the or the intermediate members arranged distributed over the circumference - with or without translation - change very sensitively.
  • the mirror is mounted isostatically, whereby no negative change due to the arrangement of the manipulators the natural frequency is reached.
  • the moments and forces of the manipulators are introduced, which has no effect on the optical element to have.
  • the one that is generally very stiff is used Basic structure for decoupling the restoring forces of the Manipulators.
  • the manipulators are supported on a fixed housing structure optics, which also serve as an interface structure, e.g. in the form of a ring.
  • This configuration allows the optical element in adjust or adjust a lens in a defined way. To do this the actual position is detected by the sensors, after which a target position is set.
  • the sensors according to the invention which e.g. three over the Non-contact distance sensors arranged around the circumference can be a direct and therefore more precise measurement, instead of a measurement via the manipulator's travel.
  • sensors e.g. non-contact distance measuring sensors
  • sensors can various sensors are used.
  • the counter surfaces can e.g. on the optical Evaporated element in an optically ineffective area his.
  • An optical element e.g. a mirror 1 is uniform over three Storage devices 2 distributed over the circumference connected to an outer basic structure 3.
  • the basic structure 3 can be part of an optic, e.g. a projection lens in of semiconductor lithography.
  • the triangular shown The shape of the basic structure can only be seen, for example. If necessary, there are other forms, such as a Circular shape possible.
  • the storage facilities 2 are constructed so that they are very strong are decoupled from deformation and therefore none from outside the basic structure 3 disturbances acting on the optical element 1 pass on.
  • the basic structure is very stiff (ceramic is advantageous) to the external forces decouple as well as possible from the bearing elements and the mirror. In this way there is a double decoupling of deformation reached.
  • Figures 2 to 3 is an enlarged view a first embodiment of a storage device 2 shown.
  • the storage device is monolithic or formed in one piece with solid-state joints between the individual moving parts. She has an upper one Fastening part 4 with which the bearing device 2 over a pivot point 4a with a socket 5 of the optical element 1 is connected. If necessary, the fastening part 4 also be connected directly to the optical element 1.
  • the bearing device 2 is connected via a connecting part 6 the basic structure 3 connected.
  • a first flexure 7 connected in the form of a leaf spring 7, which is tangential to the mount 5 or the optical element 1 is arranged.
  • the leaf spring 7 On that facing away from the connecting part 6 Side is the leaf spring 7 with a rigid intermediate member 8 connected as an anti-buckling device, which in turn is based on the Leaf spring 7 side facing away with a further bending member 9, is also connected in the form of a leaf spring.
  • the leaf spring 9 also extends tangentially with its longitudinal axis to the socket 5 or the optical element 1.
  • the leaf spring 9 is on the side facing away from the intermediate member 8 with a Transition plate 10 connected.
  • the transition plate 10 is over one in the radial direction - based on the optical element - extending flexure 11 as a transverse joint with the fastening part 4 connected.
  • the leaf spring 7 is thus via a solid-state joint 12 with the connecting part 6 and a solid body joint 13 connected to the intermediate member 8.
  • the leaf spring 9 via a solid body joint 14 with the intermediate member 8 and a solid body joint 15 with the transition plate 10 connected.
  • the flexure 11 acts due to its small axial extension overall like a solid-state joint 17.
  • a larger axial extension is possible. same for vice versa for the two leaf springs 7 and 9.
  • the storage facilities 2 are both individual as well as together through manipulators, not shown axially displaceable, the displacement then - accordingly the direction of attack - via the responsive leaf springs 7, 9 or the flexure 11 or the solid joints the optical element 1 is passed on. With this configuration virtually every storage device 2 provides a gimbal Suspension for element 1. Due to the solid joints is, however, sufficient rigidity against natural frequencies given.
  • FIG. 4 shows an embodiment of a storage device 2 in another embodiment.
  • the basic structure is identical to the storage device according to FIGS. 1 to 3, which is why the same reference numerals are used for the same parts have been retained.
  • the only difference is that the rigid intermediate link 8 by a parallelogram with the four Pages 8a, 8b, 8c and 8d has been replaced.
  • the one on one side parallelogram pages 8a and 8b are through Solid joints 18 and 19 connected to each other.
  • Between the solid body joints 18 and 19 there is an actuator member 20. Are by a Actuator not shown forces in Arrow direction 16 exerted on the actuator members 20, so changed the opening angle ⁇ of the parallelogram.
  • Opening angle ⁇ results in a corresponding step-up or step-down the displacement path, which is in relation to the optical Element 1 in a change in height in the z direction (optical axis) affects.
  • a small opening angle ⁇ becomes a correspondingly strong reduction is achieved with an opening angle of 45 ° the gear ratio is 1: 1 and with a larger opening angle ⁇ the gear ratio accordingly greater.
  • the adjustment movement can be linearized by the second parallelogram by optimizing the opening angle ⁇ and ⁇ .
  • FIGS. 6 to 8 show a further development of the invention shown, the optical element 1 by three evenly Manipulators 24 in distributed over the circumference axial direction is adjustable.
  • a sensor device is shown with which the respective position of the optical element 1 can be checked exactly.
  • the manipulators 24 are only in principle in FIGS. 6 to 8 indicated, because for this the most different engines or Adjustment devices, the axial length changes according to the arrow Generate 27, can be used as desired.
  • piezoceramic Actuators that change length when a voltage is applied experienced, possible.
  • the manipulators 24 on one side with the housing structure 25 and on the other side are connected to the basic structure 3, e.g. each through an opening 28 in the area of the corners of the triangular Basic structure 3 can be used from below (see figure 7).
  • the fixed housing structure 25 e.g. three Sensors 29 distributed over the circumference are provided.
  • the housing structure 25, which is also used as an interface ring can serve with an inward extension 25 '(only shown in dashed lines), in or on which the sensors 29 are then mounted.
  • the sensors 29 work together with counter-members 30 which the optical element 1 outside the optically active area are arranged accordingly opposite.
  • the counter members 30 on the optical element 1 can evaporated onto the optical element 1 as conductive counter surfaces his.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
EP02005695A 2001-03-30 2002-03-13 Appareil pour monter un élément optique dans un appareillage optique Expired - Lifetime EP1245982B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10115914A DE10115914A1 (de) 2001-03-30 2001-03-30 Vorrichtung zur Lagerung eines optischen Elementes in einer Optik
DE10115914 2001-03-30

Publications (3)

Publication Number Publication Date
EP1245982A2 true EP1245982A2 (fr) 2002-10-02
EP1245982A3 EP1245982A3 (fr) 2003-08-27
EP1245982B1 EP1245982B1 (fr) 2005-11-30

Family

ID=7679768

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02005695A Expired - Lifetime EP1245982B1 (fr) 2001-03-30 2002-03-13 Appareil pour monter un élément optique dans un appareillage optique

Country Status (5)

Country Link
US (1) US6870632B2 (fr)
EP (1) EP1245982B1 (fr)
JP (1) JP2002350699A (fr)
DE (2) DE10115914A1 (fr)
TW (1) TW548525B (fr)

Cited By (8)

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Publication number Priority date Publication date Assignee Title
WO2004019104A1 (fr) * 2002-08-08 2004-03-04 Carl Zeiss Smt Ag Dispositif de logement d'une unite optique dans un systeme de reproduction
EP1720068A1 (fr) * 2004-05-04 2006-11-08 Carl Zeiss SMT AG Interface miroir-actionneur à couple faible et reproductibilité maximale
DE102008040218A1 (de) 2007-07-11 2009-01-15 Carl Zeiss Smt Ag Drehbares optisches Element
US7581305B2 (en) 2004-04-12 2009-09-01 Carl Zeiss Smt Ag Method of manufacturing an optical component
US7920344B2 (en) 2005-07-01 2011-04-05 Carl Zeiss Smt Gmbh Arrangement for mounting an optical element
DE102010005993A1 (de) * 2010-01-27 2011-07-28 Deutsches Zentrum für Luft- und Raumfahrt e.V., 51147 Laserscanner-Einrichtung und Verfahren zur dreidimensionalen berührungslosen Umgebungserfassung mit einer Laserscanner-Einrichtung
US8988654B2 (en) 2008-09-30 2015-03-24 Carl Zeiss Smt Gmbh Support elements for an optical element
CN110412714A (zh) * 2019-06-27 2019-11-05 北京空间机电研究所 一种大口径反射镜支撑机构

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10136387A1 (de) 2001-07-26 2003-02-13 Zeiss Carl Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie
DE10219514A1 (de) 2002-04-30 2003-11-13 Zeiss Carl Smt Ag Beleuchtungssystem, insbesondere für die EUV-Lithographie
DE10246828A1 (de) * 2002-10-08 2004-04-22 Carl Zeiss Smt Ag Objektiv, insbesondere Projektionsobjektiv in der Mikrolithographie
AU2003219097A1 (en) * 2003-03-26 2004-10-18 Carl Zeiss Smt Ag Device for the low-deformation replaceable mounting of an optical element
JP2004343101A (ja) * 2003-04-25 2004-12-02 Canon Inc 駆動機構、それを有する露光装置、デバイスの製造方法
US7760452B2 (en) * 2003-04-25 2010-07-20 Canon Kabushiki Kaisha Driving apparatus, optical system, exposure apparatus and device fabrication method
WO2005017622A1 (fr) * 2003-07-17 2005-02-24 Carl Zeiss Smt Ag Dispositif pour loger un element optique, notamment une lentille dans un objectif
DE10344178B4 (de) * 2003-09-24 2006-08-10 Carl Zeiss Smt Ag Halte- und Positioniervorrichtung für ein optisches Element
US7448763B2 (en) * 2003-10-02 2008-11-11 Carl Zeiss Smt Ag Optical subassembly and projection objective in semiconductor lithography
DE10350574A1 (de) * 2003-10-30 2005-06-02 Carl Zeiss Jena Gmbh Festkörpergelenkführungen
DE10352820A1 (de) * 2003-11-12 2005-06-23 Carl Zeiss Smt Ag Flanschbaugruppe eines optischen Systems
JP2005166785A (ja) * 2003-12-01 2005-06-23 Canon Inc 位置検出装置及び方法、並びに、露光装置
US7265917B2 (en) 2003-12-23 2007-09-04 Carl Zeiss Smt Ag Replacement apparatus for an optical element
EP1716455B1 (fr) * 2004-02-20 2011-05-11 Carl Zeiss SMT GmbH Objectif de projection d'un systeme d'eclairage de projection microlithographique
DE102004018656A1 (de) * 2004-04-13 2005-11-03 Carl Zeiss Smt Ag Optisches Element
DE102004024755B4 (de) * 2004-05-12 2006-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Halterung für optische Elemente
US7738193B2 (en) * 2004-06-29 2010-06-15 Carl Zeiss Smt Ag Positioning unit and alignment device for an optical element
TWI372271B (en) * 2005-09-13 2012-09-11 Zeiss Carl Smt Gmbh Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device
DE102005049731A1 (de) * 2005-10-14 2007-04-19 Cube Optics Ag Optischer Aufbau mit elastischer Aufhängung und Verfahren zur Herstellung eines solchen
US8441747B2 (en) 2006-09-14 2013-05-14 Carl Zeiss Smt Gmbh Optical module with minimized overrun of the optical element
JP5043468B2 (ja) * 2007-02-23 2012-10-10 キヤノン株式会社 保持装置
JP5013906B2 (ja) * 2007-03-05 2012-08-29 キヤノン株式会社 光学素子保持装置
RU2358298C2 (ru) * 2007-06-21 2009-06-10 Открытое акционерное общество "Красногорский завод им. С.А. Зверева" Регулируемый оптический модуль
WO2009024192A1 (fr) 2007-08-23 2009-02-26 Carl Zeiss Smt Ag Module d'élément optique avec charges parasites rendues minimales
US20090219497A1 (en) * 2008-02-28 2009-09-03 Carl Zeiss Smt Ag Optical device with stiff housing
JP5127515B2 (ja) * 2008-03-12 2013-01-23 キヤノン株式会社 光学素子保持装置
DE102008000967B4 (de) 2008-04-03 2015-04-09 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die EUV-Mikrolithographie
DE102008026979B3 (de) * 2008-05-29 2009-12-24 Carl Zeiss Ag Vorrichtung zum Korrigieren von Abbildungsfehlern in einem optischen System
DE102008036574A1 (de) 2008-07-31 2010-02-04 Carl Zeiss Laser Optics Gmbh Vorrichtung zum Lagern eines optischen Elements
JP5616601B2 (ja) * 2008-09-17 2014-10-29 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学装置用の接続装置
DE102009045163B4 (de) * 2009-09-30 2017-04-06 Carl Zeiss Smt Gmbh Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage
DE102010018224A1 (de) * 2010-04-23 2012-02-16 Carl Zeiss Smt Gmbh Optisches Modul mit einem verstellbaren optischen Element
US8651677B2 (en) * 2010-06-28 2014-02-18 Lexmark International, Inc. Mounting mechanism for a component of an imaging apparatus, and methods of making and using same
US8542450B2 (en) 2011-02-08 2013-09-24 Utah State University Research Foundation Kinematic optic mount
JP5306393B2 (ja) * 2011-03-04 2013-10-02 三菱電機株式会社 鏡支持機構
DE102011075316A1 (de) * 2011-05-05 2012-11-08 Carl Zeiss Smt Gmbh Optisches Modul mit einer Messeinrichtung
DE102012102566B4 (de) 2012-03-26 2019-02-21 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Übertragungselement für eine Stellbewegung eines optischen Elementes, Positioniereinrichtung sowie Bearbeitungskopf für eine Laserbearbeitungsmaschine
DE102012209309A1 (de) * 2012-06-01 2013-12-05 Carl Zeiss Smt Gmbh Lithographievorrichtung und Verfahren zur Herstellung einer Spiegelanordnung
KR102001460B1 (ko) 2013-03-18 2019-07-19 삼성디스플레이 주식회사 레이저 빔 요동을 위한 광학 모듈
CN104076612B (zh) * 2013-03-27 2016-04-20 上海微电子装备有限公司 重载荷柔性支撑装置
DE102013109185B3 (de) * 2013-08-23 2014-05-22 Jenoptik Optical Systems Gmbh Optische Baugruppe mit einer Fassung mit Verbindungseinheiten gerichteter Nachgiebigkeit
CN104459937B (zh) * 2013-09-12 2018-01-19 上海微电子装备（集团）股份有限公司 一种反射镜精密调整装置
CN104391367B (zh) * 2014-10-15 2017-02-15 中国科学院光电研究院 一种极紫外反射镜片的四维装调装置
DE102015223520A1 (de) * 2015-11-27 2016-10-20 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie
CN105467548B (zh) * 2015-12-04 2018-05-01 中国科学院长春光学精密机械与物理研究所 高定位精度的镜片可更换的光刻物镜镜框
CN105607211B (zh) * 2015-12-31 2018-06-19 中国华录集团有限公司 透镜调整结构及投影光学系统
WO2017207016A1 (fr) * 2016-05-30 2017-12-07 Carl Zeiss Smt Gmbh Agencement d'imagerie optique ayant un dispositif piézoélectrique.
DE102016217479A1 (de) * 2016-09-14 2017-09-14 Carl Zeiss Smt Gmbh Optisches modul mit verkippbaren optischen flächen
CN106405787B (zh) * 2016-12-10 2020-08-21 中国科学院长春光学精密机械与物理研究所 一种用于反射镜光学元件的角度调整装置
DE102017115050B3 (de) * 2017-07-05 2018-03-29 Physik Instrumente (Pi) Gmbh & Co. Kg Gelenk
US11086100B2 (en) 2017-12-14 2021-08-10 Mitsubishi Electric Corporation Mirror support and mirror support mechanism
DE102018107034A1 (de) * 2018-03-23 2019-09-26 Huber+Suhner Cube Optics Ag Elastische Aufhängung für optischen Aufbau
JP7118024B2 (ja) * 2019-03-26 2022-08-15 三菱電機株式会社 減速装置及び構造体
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US12174452B2 (en) 2021-01-29 2024-12-24 Mitsubishi Electric Corporation Mirror support mechanism and optical device

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004019104A1 (fr) * 2002-08-08 2004-03-04 Carl Zeiss Smt Ag Dispositif de logement d'une unite optique dans un systeme de reproduction
US7581305B2 (en) 2004-04-12 2009-09-01 Carl Zeiss Smt Ag Method of manufacturing an optical component
US8256912B2 (en) 2004-05-04 2012-09-04 Carl Zeiss Smt Gmbh High positioning reproducible low torque mirror-actuator interface
EP1720068A1 (fr) * 2004-05-04 2006-11-08 Carl Zeiss SMT AG Interface miroir-actionneur à couple faible et reproductibilité maximale
US7699480B2 (en) 2004-05-04 2010-04-20 Carl Zeiss Smt Ag High positioning reproducible low torque mirror-actuator interface
US7920344B2 (en) 2005-07-01 2011-04-05 Carl Zeiss Smt Gmbh Arrangement for mounting an optical element
DE102008040218A1 (de) 2007-07-11 2009-01-15 Carl Zeiss Smt Ag Drehbares optisches Element
US8988654B2 (en) 2008-09-30 2015-03-24 Carl Zeiss Smt Gmbh Support elements for an optical element
US9709895B2 (en) 2008-09-30 2017-07-18 Carl Zeiss Smt Gmbh Support elements for an optical element
US8963997B2 (en) 2010-01-27 2015-02-24 Deutsches Zentrum Fuer Luft-Und Raumfahrt E.V. Laser scanner device and method for three-dimensional contactless recording of the surrounding area by means of a laser scanner device
DE102010005993A1 (de) * 2010-01-27 2011-07-28 Deutsches Zentrum für Luft- und Raumfahrt e.V., 51147 Laserscanner-Einrichtung und Verfahren zur dreidimensionalen berührungslosen Umgebungserfassung mit einer Laserscanner-Einrichtung
DE102010005993B4 (de) * 2010-01-27 2016-10-20 Deutsches Zentrum für Luft- und Raumfahrt e.V. Laserscanner-Einrichtung und Verfahren zur dreidimensionalen berührungslosen Umgebungserfassung mit einer Laserscanner-Einrichtung
CN110412714A (zh) * 2019-06-27 2019-11-05 北京空间机电研究所 一种大口径反射镜支撑机构
CN110412714B (zh) * 2019-06-27 2022-02-01 北京空间机电研究所 一种大口径反射镜支撑机构

Also Published As

Publication number Publication date
EP1245982B1 (fr) 2005-11-30
EP1245982A3 (fr) 2003-08-27
JP2002350699A (ja) 2002-12-04
DE10115914A1 (de) 2002-10-02
TW548525B (en) 2003-08-21
US6870632B2 (en) 2005-03-22
DE50205077D1 (de) 2006-01-05
US20020176094A1 (en) 2002-11-28

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