EP1441128A2 - Système de pompe à vide - Google Patents

Système de pompe à vide Download PDF

Info

Publication number: EP1441128A2
Authority: EP; European Patent Office
Prior art keywords: pump; vacuum pump; pumps; pump system; high vacuum
Prior art date: 2003-01-24
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP03028333A

Other languages

German (de)

English (en)

Other versions

EP1441128A3 (fr

EP1441128B1 (fr

Inventor

Armin Conrad

Peter Fahrenbach

Matthias Mädler

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-01-24

Filing date

2003-12-10

Publication date

2004-07-28

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32520090&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1441128(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

2003-12-10 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2004-07-28 Publication of EP1441128A2 publication Critical patent/EP1441128A2/fr

2004-09-01 Publication of EP1441128A3 publication Critical patent/EP1441128A3/fr

2008-03-26 Application granted granted Critical

2008-03-26 Publication of EP1441128B1 publication Critical patent/EP1441128B1/fr

2023-12-10 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Definitions

the invention relates to a vacuum pump system for conveying light gases at least one high vacuum pump.
Pump systems for evacuating a recipient consist, for example, of a turbomolecular pump on the high vacuum side and one or more forevacuum pumps for further delivery and for compression to atmospheric pressure of the gases compressed by the turbomolecular pump.
These backing pumps can consist, for example, of a combination of a Roots pump and a rotary vane pump or a dry-compressing, atmosphere-emitting pump (DE-OS 38 28 608).
Pump systems of this type are suitable for conveying and compressing gases with medium and higher molecular weights (for example N 2 , O 2 , Ar). In contrast, they are less suitable for pumping light gases (e.g. H 2 , He), especially when it comes to pumping large amounts of gas. In these cases, several high-vacuum pumps are often used on the high-vacuum side to draw in the resulting gases.
a carrier gas is often used to transport light gases improve. This solution is also associated with great effort. moreover In these cases, measures have to be taken to get the gases back separate. In addition, the backing pressure and thus the pump properties of the entire system deteriorated again by the carrier gas become.
the backing system is at a greater distance from the gas connection part the high vacuum pump attached so that at this point still there is a big loss of conductance.
the invention has for its object to design a pump system which is suitable for pumping large quantities of gas, the main components of which are light gases.
Existing pump systems are supposed to take simple measures can be converted into pump systems suitable for the task.
the solution is to increase compression and pumping speed in the Pre-vacuum. This increase is made possible by the provision of an additional one Pump, hereinafter referred to as the intermediate pump, between the gas discharge side the high vacuum pump and the suction side of the forevacuum system. It is important according to the invention that this intermediate pump is direct connected to the discharge side of the high-vacuum pump without any major loss of conductivity becomes.
the intermediate pump is direct connected to the discharge side of the high-vacuum pump without any major loss of conductivity becomes.
one or more intermediate pumps can be provided his. If several intermediate pumps are provided, these will be in series and / or connected in parallel.
a molecular pump is proposed as the pump type, including a side channel pump, which works in the same pressure range is to be counted.
the Molecular pump is with a preferred embodiment as a turbomolecular pump educated.
the pumping speed of the at least one intermediate pump should advantageously be in the Magnitude of the pumping speed of the at least one high vacuum pump lie or amount to at least 50% of it.
the compression for light gases of such a pump is sufficiently high to ensure that the high vacuum pump output Compressed gas volume and can be further promoted without loss.
Another Improvement in conductivity and thus an increase in gas throughput in that the at least one intermediate pump directly on the discharge side the high vacuum pump is connected.
a pump system which is suitable for large amounts of gas, mainly from light gases consist of pumping more effectively and compressing to atmospheric pressure. It there is even a disproportionate increase in the pumping speed on the High vacuum side.
a particular advantage of the vacuum pump system according to the invention is that the pump system is compatible with conventional systems that means they can be used to pump larger quantities of light gases without great effort to be converted.
the intake system and that entire forevacuum system can be used unchanged.
the use a molecular pump as an intermediate pump also claimed little space, so that a compact system is created, which is simple Modification in a wide pressure range can be used effectively for all gases.
FIG. 1 shows a vacuum pump system (1).
two high vacuum pumps (3, 4) preferably turbomolecular pumps, arranged.
a forevacuum system consisting of two forevacuum pumps (8, 9), conveys and compresses the pumped gases to atmospheric pressure.
the invention is located between the high vacuum pumps (3, 4) and the forevacuum system (8, 9) another intermediate pump (6), which is located directly at the gas outlet (7) the high vacuum pump (3, 4) is connected.
the intermediate pump (6) serves the amount of gas pumped by the high vacuum pumps (3, 4) without losses to the forevacuum system (8, 9).
the forevacuum pump system is on an outlet side (5) of the intermediate pump (6) (8, 9) arranged. Between the intermediate pump (6) and the forevacuum pumps (8, 9) can be a longer distance.
Fig. 2 shows a vacuum pump system (10).
At the recipient (2) are again two turbomolecular pumps (3, 4) arranged.
Directly and without further Conductivity losses are the turbomolecular pumps (3, 4) on an outlet side (11) two intermediate pumps (12, 13) downstream.
the intermediate pumps (12, 13) are connected in parallel to increase the pumping speed.
the forevacuum system (8, 9) is arranged as in Fig. 1, the intermediate pumps (12, 13).
Fig. 3 shows a vacuum pump system (14) with a recipient (2) on which two turbomolecular pumps (3, 4) are arranged.
the turbomolecular pumps (3, 4) are intermediate pumps without any significant loss of conductivity (16, 17) downstream.
the intermediate pumps are used to increase the compression (16, 17) connected in series.
Figs. 1 and 2 is the system from the intermediate pumps (16, 17) the forevacuum system (8, 9) downstream.

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Non-Positive Displacement Air Blowers (AREA)
Jet Pumps And Other Pumps (AREA)

EP03028333A 2003-01-24 2003-12-10 Système de pompe à vide Expired - Lifetime EP1441128B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE10302764		2003-01-24
DE10302764A DE10302764A1 (de)	2003-01-24	2003-01-24	Vakuumpumpsystem

Publications (3)

Publication Number	Publication Date
EP1441128A2 true EP1441128A2 (fr)	2004-07-28
EP1441128A3 EP1441128A3 (fr)	2004-09-01
EP1441128B1 EP1441128B1 (fr)	2008-03-26

Family

ID=32520090

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP03028333A Expired - Lifetime EP1441128B1 (fr)	2003-01-24	2003-12-10	Système de pompe à vide

Country Status (4)

Country	Link
US (1)	US7033142B2 (fr)
EP (1)	EP1441128B1 (fr)
AT (1)	ATE390561T1 (fr)
DE (2)	DE10302764A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB0214273D0 (en) *	2002-06-20	2002-07-31	Boc Group Plc	Apparatus for controlling the pressure in a process chamber and method of operating same
JP4633370B2 (ja) *	2004-02-17	2011-02-16	財団法人国際科学振興財団	真空装置
US20050186099A1 (en) *	2004-02-19	2005-08-25	Graeme Huntley	Active vibration reduction
GB0411426D0 (en) *	2004-05-21	2004-06-23	Boc Group Plc	Pumping arrangement
GB0418771D0 (en) *	2004-08-20	2004-09-22	Boc Group Plc	Evacuation of a load lock enclosure
GB0505500D0 (en) *	2005-03-17	2005-04-27	Boc Group Plc	Vacuum pumping arrangement
US8147222B2 (en) *	2007-05-15	2012-04-03	Agilent Technologies, Inc.	Vacuum divider for differential pumping of a vacuum system
DE102007057944A1 (de) *	2007-12-01	2009-06-04	Inficon Gmbh	Verfahren und Vorrichtung zur Dichtheitsprüfung
GB2472638B (en) *	2009-08-14	2014-03-19	Edwards Ltd	Vacuum system
DE202012012359U1 (de) *	2012-12-22	2014-03-24	Oerlikon Leybold Vacuum Gmbh	Pumpstand zum Pumpen leichter Gase
DE102013218506A1 (de) *	2013-09-16	2015-03-19	Inficon Gmbh	Schnüffellecksucher mit mehrstufiger Membranpumpe
US10449678B2 (en) *	2015-05-26	2019-10-22	Rasco Gmbh	Boat, assembly and method for handling electronic components
FR3070489B1 (fr) *	2017-08-29	2020-10-23	Pfeiffer Vacuum	Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) *	2017-10-19	2019-11-15	Pfeiffer Vacuum	Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
US12044313B2 (en) *	2021-02-12	2024-07-23	Kla Corporation	Dual vacuum seal
EP4224015A1 (fr) *	2022-02-07	2023-08-09	Siemens Energy Global GmbH & Co. KG	Compresseur d'hydrogène
CN116428159A (zh) *	2023-04-20	2023-07-14	上海裕达实业有限公司	多级串并联组合隔膜泵

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3536418A (en) *	1969-02-13	1970-10-27	Onezime P Breaux	Cryogenic turbo-molecular vacuum pump
DD96304A1 (fr) *	1972-02-29	1973-03-12
CH625598A5 (fr) *	1977-12-01	1981-09-30	Balzers Hochvakuum
DE3639512A1 (de) *	1986-11-20	1988-06-01	Alcatel Hochvakuumtechnik Gmbh	Vakuumpumpsystem mit einer waelzkolbenpumpe
FR2621141B1 (fr) *	1987-09-25	1989-12-01	Cit Alcatel	Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
US4850806A (en) *	1988-05-24	1989-07-25	The Boc Group, Inc.	Controlled by-pass for a booster pump
EP0344345B1 (fr) *	1988-06-01	1991-09-18	Leybold Aktiengesellschaft	Système à pompe pour un appareil de détection de fuite
DE3828608A1 (de) *	1988-08-23	1990-03-08	Alcatel Hochvakuumtechnik Gmbh	Vakuumpumpvorrichtung
DE4213763B4 (de) *	1992-04-27	2004-11-25	Unaxis Deutschland Holding Gmbh	Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5733104A (en) *	1992-12-24	1998-03-31	Balzers-Pfeiffer Gmbh	Vacuum pump system
DE4410903A1 (de) *	1994-03-29	1995-10-05	Leybold Ag	System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
DE4442174A1 (de) *	1994-11-26	1996-05-30	Leybold Ag	Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19639733A1 (de) *	1996-09-27	1998-04-16	Linde Ag	Verfahren zum Verdichten eines Gases
DE19704234B4 (de) *	1997-02-05	2006-05-11	Pfeiffer Vacuum Gmbh	Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
JP3763193B2 (ja) *	1997-09-22	2006-04-05	アイシン精機株式会社	多段式真空ポンプ
DE19821634A1 (de) *	1998-05-14	1999-11-18	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Stator und Rotor

2003
- 2003-01-24 DE DE10302764A patent/DE10302764A1/de not_active Withdrawn
- 2003-01-24 US US10/350,935 patent/US7033142B2/en not_active Expired - Fee Related
- 2003-12-10 EP EP03028333A patent/EP1441128B1/fr not_active Expired - Lifetime
- 2003-12-10 DE DE50309460T patent/DE50309460D1/de not_active Expired - Lifetime
- 2003-12-10 AT AT03028333T patent/ATE390561T1/de not_active IP Right Cessation

Also Published As

Publication number	Publication date
US20040146410A1 (en)	2004-07-29
DE50309460D1 (de)	2008-05-08
DE10302764A1 (de)	2004-07-29
EP1441128A3 (fr)	2004-09-01
US7033142B2 (en)	2006-04-25
EP1441128B1 (fr)	2008-03-26
ATE390561T1 (de)	2008-04-15

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Publication	Publication Date	Title
EP1441128A2 (fr)	2004-07-28	Système de pompe à vide
EP0626516B1 (fr)	1997-06-04	Dispositif de pompe à vide sans lubrifiant
DE19632375A1 (de)	1998-02-19	Gasreibungspumpe
DE1648648A1 (de)	1972-02-10	Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
DE3728154C2 (de)	1996-04-18	Mehrstufige Molekularpumpe
DE2430314B2 (de)	1978-03-02	Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter
EP2295812B1 (fr)	2015-03-04	Récipient repliable
DE10004271A1 (de)	2001-08-02	Reibungsvakuumpumpe
EP0603694A1 (fr)	1994-06-29	Système à vide
EP1067290B1 (fr)	2003-07-30	Pompe à vide
EP1706645B1 (fr)	2008-12-17	Pompe à vide à frottement à plusieurs étages
DE3722164A1 (de)	1989-01-12	Turbomolekularpumpe
DE102007044945A1 (de)	2009-04-09	Vakuumpumpe
EP0541989B1 (fr)	1995-06-28	Système de pompe à vide multi-étage
DE10008691B4 (de)	2017-10-26	Gasreibungspumpe
DE10114585A1 (de)	2002-09-26	Vakuumpumpe
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