EP1441128A3 - Système de pompe à vide - Google Patents

Système de pompe à vide Download PDF

Info

Publication number: EP1441128A3
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; pump system; high vacuum; pump; series
Prior art date: 2003-01-24
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP03028333A

Other languages

German (de)

English (en)

Other versions

EP1441128B1 (fr

EP1441128A2 (fr

Inventor

Armin Conrad

Peter Fahrenbach

Matthias Mädler

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-01-24

Filing date

2003-12-10

Publication date

2004-09-01

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32520090&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1441128(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

2003-12-10 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2004-07-28 Publication of EP1441128A2 publication Critical patent/EP1441128A2/fr

2004-09-01 Publication of EP1441128A3 publication Critical patent/EP1441128A3/fr

2008-03-26 Application granted granted Critical

2008-03-26 Publication of EP1441128B1 publication Critical patent/EP1441128B1/fr

2023-12-10 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Non-Positive Displacement Air Blowers (AREA)
Jet Pumps And Other Pumps (AREA)

EP03028333A 2003-01-24 2003-12-10 Système de pompe à vide Expired - Lifetime EP1441128B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE10302764A DE10302764A1 (de)	2003-01-24	2003-01-24	Vakuumpumpsystem
DE10302764		2003-01-24

Publications (3)

Publication Number	Publication Date
EP1441128A2 EP1441128A2 (fr)	2004-07-28
EP1441128A3 true EP1441128A3 (fr)	2004-09-01
EP1441128B1 EP1441128B1 (fr)	2008-03-26

Family

ID=32520090

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP03028333A Expired - Lifetime EP1441128B1 (fr)	2003-01-24	2003-12-10	Système de pompe à vide

Country Status (4)

Country	Link
US (1)	US7033142B2 (fr)
EP (1)	EP1441128B1 (fr)
AT (1)	ATE390561T1 (fr)
DE (2)	DE10302764A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB0214273D0 (en) *	2002-06-20	2002-07-31	Boc Group Plc	Apparatus for controlling the pressure in a process chamber and method of operating same
JP4633370B2 (ja) *	2004-02-17	2011-02-16	財団法人国際科学振興財団	真空装置
US20050186099A1 (en) *	2004-02-19	2005-08-25	Graeme Huntley	Active vibration reduction
GB0411426D0 (en) *	2004-05-21	2004-06-23	Boc Group Plc	Pumping arrangement
GB0418771D0 (en) *	2004-08-20	2004-09-22	Boc Group Plc	Evacuation of a load lock enclosure
GB0505500D0 (en) *	2005-03-17	2005-04-27	Boc Group Plc	Vacuum pumping arrangement
US8147222B2 (en) *	2007-05-15	2012-04-03	Agilent Technologies, Inc.	Vacuum divider for differential pumping of a vacuum system
DE102007057944A1 (de) *	2007-12-01	2009-06-04	Inficon Gmbh	Verfahren und Vorrichtung zur Dichtheitsprüfung
GB2472638B (en) *	2009-08-14	2014-03-19	Edwards Ltd	Vacuum system
DE202012012359U1 (de) *	2012-12-22	2014-03-24	Oerlikon Leybold Vacuum Gmbh	Pumpstand zum Pumpen leichter Gase
DE102013218506A1 (de) *	2013-09-16	2015-03-19	Inficon Gmbh	Schnüffellecksucher mit mehrstufiger Membranpumpe
EP3304108A1 (fr) *	2015-05-26	2018-04-11	Rasco GmbH	Nacelle, ensemble et procédé de manipulation de composants électroniques
FR3070489B1 (fr) *	2017-08-29	2020-10-23	Pfeiffer Vacuum	Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) *	2017-10-19	2019-11-15	Pfeiffer Vacuum	Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
US12044313B2 (en) *	2021-02-12	2024-07-23	Kla Corporation	Dual vacuum seal
EP4224015A1 (fr) *	2022-02-07	2023-08-09	Siemens Energy Global GmbH & Co. KG	Compresseur d'hydrogène
CN116428159A (zh) *	2023-04-20	2023-07-14	上海裕达实业有限公司	多级串并联组合隔膜泵

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3828608A1 (de) *	1988-08-23	1990-03-08	Alcatel Hochvakuumtechnik Gmbh	Vakuumpumpvorrichtung
DE4410903A1 (de) *	1994-03-29	1995-10-05	Leybold Ag	System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
EP0833059A2 (fr) *	1996-09-27	1998-04-01	Linde Aktiengesellschaft	Procédé de compression du gaz

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3536418A (en) *	1969-02-13	1970-10-27	Onezime P Breaux	Cryogenic turbo-molecular vacuum pump
DD96304A1 (fr) *	1972-02-29	1973-03-12
CH625598A5 (fr) *	1977-12-01	1981-09-30	Balzers Hochvakuum
DE3639512A1 (de) *	1986-11-20	1988-06-01	Alcatel Hochvakuumtechnik Gmbh	Vakuumpumpsystem mit einer waelzkolbenpumpe
FR2621141B1 (fr) *	1987-09-25	1989-12-01	Cit Alcatel	Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
US4850806A (en) *	1988-05-24	1989-07-25	The Boc Group, Inc.	Controlled by-pass for a booster pump
EP0344345B1 (fr) *	1988-06-01	1991-09-18	Leybold Aktiengesellschaft	Système à pompe pour un appareil de détection de fuite
DE4213763B4 (de) *	1992-04-27	2004-11-25	Unaxis Deutschland Holding Gmbh	Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5733104A (en) *	1992-12-24	1998-03-31	Balzers-Pfeiffer Gmbh	Vacuum pump system
DE4442174A1 (de) *	1994-11-26	1996-05-30	Leybold Ag	Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19704234B4 (de) *	1997-02-05	2006-05-11	Pfeiffer Vacuum Gmbh	Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
JP3763193B2 (ja) *	1997-09-22	2006-04-05	アイシン精機株式会社	多段式真空ポンプ
DE19821634A1 (de) *	1998-05-14	1999-11-18	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Stator und Rotor

2003
- 2003-01-24 DE DE10302764A patent/DE10302764A1/de not_active Withdrawn
- 2003-01-24 US US10/350,935 patent/US7033142B2/en not_active Expired - Fee Related
- 2003-12-10 AT AT03028333T patent/ATE390561T1/de not_active IP Right Cessation
- 2003-12-10 DE DE50309460T patent/DE50309460D1/de not_active Expired - Lifetime
- 2003-12-10 EP EP03028333A patent/EP1441128B1/fr not_active Expired - Lifetime

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3828608A1 (de) *	1988-08-23	1990-03-08	Alcatel Hochvakuumtechnik Gmbh	Vakuumpumpvorrichtung
DE4410903A1 (de) *	1994-03-29	1995-10-05	Leybold Ag	System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
EP0833059A2 (fr) *	1996-09-27	1998-04-01	Linde Aktiengesellschaft	Procédé de compression du gaz

Also Published As

Publication number	Publication date
DE10302764A1 (de)	2004-07-29
US20040146410A1 (en)	2004-07-29
ATE390561T1 (de)	2008-04-15
US7033142B2 (en)	2006-04-25
DE50309460D1 (de)	2008-05-08
EP1441128B1 (fr)	2008-03-26
EP1441128A2 (fr)	2004-07-28

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