EP1524675A1 - Vorrichtung zur Verschiebung von Teilchen - Google Patents

Vorrichtung zur Verschiebung von Teilchen Download PDF

Info

Publication number: EP1524675A1
Authority: EP; European Patent Office
Prior art keywords: neff; network; substrate; index; waveguide
Prior art date: 2003-10-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP04104982A

Other languages

English (en)

French (fr)

Other versions

EP1524675B1 (de

Inventor

Stéphanie GAUGIRAN

Jérôme HAZART

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Commissariat à l'Énergie Atomique et Aux Énergies Alternatives

Original Assignee

Commissariat a lEnergie Atomique CEA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-10-14

Filing date

2004-10-12

Publication date

2005-04-20

2004-10-12 Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA

2005-04-20 Publication of EP1524675A1 publication Critical patent/EP1524675A1/de

2011-04-06 Application granted granted Critical

2011-04-06 Publication of EP1524675B1 publication Critical patent/EP1524675B1/de

2024-10-12 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

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Classifications

- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/30—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating for confining neutral particles or handling confined neutral particles, e.g. atom traps

Definitions

the invention relates to the field of techniques of movement and manipulation of particles by optical forces.
the applications envisaged are the displacement without contact, particles (balls of different materials, nano-objects, cells or other biological objects) over great distances (several centimeters) and with trajectories predefined.
particles balls of different materials, nano-objects, cells or other biological objects
trajectories predefined.
This method poses difficulties in entrapment, in particular of nanometric particles. he takes at least several seconds to trap, by for example, a gold particle of 36 nm in diameter.
This technique allows to collect, above of a guide, scattered particles randomly (thanks to the gradient forces) and then move these particles along the guide (forces of diffusion).
the method also applies to particles metal but has the disadvantage of being very dependent on the surface condition of the guide: roughness important manages to permanently stop the particle.
the invention uses forces optical generated by a diffraction grating.
the displacement forces of the particle are generated by light diffraction network and are oriented according to characteristics of the network.
the network is used as an element that decouples the light that propagates in a guide wave.
the injection of light into the guide can be made by means of a tranche coupling, a prism or using another network.
Light from the network is used as a real engine not only allowing move the particles, but also to choose their trajectories and their speeds.
the invention also relates to a device for displacement, in a nsup index medium, of a particle, comprising a substrate, a waveguide and a network formed on the waveguide.
This network makes it possible to diffract a light from wavelength ⁇ , transmitted by the guide, to a external medium of index nsuper.
the network diffracts only one only order towards the middle in which lies the particle.
no light is diffracted to the substrate.
the guide has an effective index neff, the network a step ⁇ , the substrate an index nsub such as nsuper> nsub, and the ratio ⁇ / ⁇ is included between neff - super and neff - nsub or between neff + nsub and neff + nsuper.
the device may further comprise at least an intermediate layer between the substrate and the guide wave, this layer having a refractive index less than that of the liquid.
the network has a step ⁇ higher or equal to ⁇ / (neff / nsup + 1) nsup, and / or lower or equal to 2. ⁇ / (neff / nsup + 1) nsup, where neff is the index effective waveguide.
the substrate may further comprise means of reflection of the light diffracted towards the substrate, for example a Bragg mirror.
the network comprises several types of patterns, a first type of pattern and at least one second type of pattern, different from first, for example by at least his step and / or lateral dimension and / or height.
At least a part of the guide waveform has a lower lateral extension than that of the network.
the network may also have a curvature.
the invention makes it possible to move particles having for example a diameter of between 5 nm and 5 nm and 100 ⁇ m.
the invention allows a displacement particles at a speed for example greater than 500 nm / s or at 1 ⁇ m / s or 5 ⁇ m / s.
the invention also relates to a method of sorting of particles having refractive indices different or different sizes, in which one implements a displacement method as described above.
a waveguide 2 is formed on a substrate 4.
a diffraction grating 6 is located or deposited or formed on this guide 2.
Radiation 7 (including a is designated by reference 8) is injected into the guide 2, for example using a coupling by the slice, by means to inject into the guide a radiation at the desired wavelength.
such means comprise a prism or a other network.
the network 6 makes it possible to decouple the light from the guided mode to the outside.
the diffracted light In the middle 14, the diffracted light generates an "optical force" that allows acting on, for example, a particle 10 located near the network.
a network is preferably used whose step is between the two limits given by formulas (3) and (4), so as not to diffraction only for a single order, and therefore a propulsion of particles in one direction.
FIG. 2 represents the diffraction angles of the different orders (order -1: curve I, order -2: curve II; order -3: curve III) of a network in function of the pitch of this network.
the superstrate 14 considered has an index of 1.33 (identical to that of water) and the waveguide 2, under the network, a effective index of 1.6.
the working wavelength is 1064 nm.
a further increase in the pace causes a reversal of the diffraction direction (positive angles) and a reversal of the direction of the particle.
We then reach the limit of diffraction of order -2 for ⁇ 726nm.
the particle 10 placed above the network 6 will be hit by the diffracted wave that goes the push in the chosen direction.
cross sections depend on directly from the optical index of the particle but also of its volume.
two particles of different materials or of different sizes will have different speeds of movement, which allows for example to perform a sort of these particles. For example, a 1 ⁇ m gold ball diameter will move faster than a latex ball same size.
the device thus described presents the property of being able to move, without contact and with high speeds (several microns per second, or more) particles (or biological objects) of micrometric or nanometric size, this size being for example between 10 microns and 50 nm. Of more, it allows to sort natures particles or of different sizes.
n sub represents the index of the substrate 4
an intensity will actually be diffracted in the latter if: eff + not sub > ⁇ ⁇
Figures 3A and 3B identify the different possible cases depending on the values relative indices of substrate 4 and superstrate 14.
Figure 3A corresponds to the case where nsuper ⁇ nsub and Figure 3B in case nsuper> nsub.
the lines D2 and D4 correspond to the case nsuper> nsub, and the lines D1 and D3 to the case nsuper ⁇ nsub.
zones A1 and A'1 of the FIG. 3B (nsuper> nsub and neff - nsuper ⁇ / ⁇ ⁇ neff - nsub (A1) or neff + nsub ⁇ / ⁇ ⁇ neff + nsuper (A'1)), there is diffraction in the superstrate and no loss in the substrate. Losses appear in the substrate for zone A2, for which there is always diffraction in the superstrate, ie when neff + nsub> ⁇ / ⁇ > neff - nsub.
This layer intermediate could be for example a layer of silica deposited by a sol-gel technology that presents an index of about 1.22.
Figure 5 Another embodiment is shown in Figure 5. It consists of placing a mirror of Bragg 20 in the substrate 4.
This mirror refers to the outside environment 14 diffracted light in the substrate 4.
the multilayer deposit 20 comprises a alternating dielectric thin films that do not absorb light at the wavelength of the 7. These successively present a subscript high refraction, noted nh (possible materials: TiO2, HfO2, Si3N4, Ta2O5, Al2O3, In2O3) and an index bottom rated nb (possible materials: SiO2, MgF2, LiF).
PVD Physical Vapor Deposition
CVD chemical Vapor Deposition
the wave reflected by the mirror will, after reflection on this mirror, then after having crossed the network, the same direction as that resulting from the network 6 to the superstrate.
the direction of particle 10 is related to no network.
Variations in the pace of the network and its lateral dimensions will for example be realized thanks to an appropriate mask. Height variations of reasons will be made either by the use of several levels of masking either by the use of layers with thickness gradients associated with a selective engraving.
the network implemented may comprise a plurality of patterns, each pattern being different from other reasons, for example by at least his step and / or a width w1 or w2 and / or its height h.
the particles are confined to a track using, under network 6, a waveguide 22 of limited width (Fig. 7A which represents a view top of the device).
Fig. 7A which represents a view top of the device.
FIG. 8A Schematic view from above
FIG. 8B This embodiment is represented on Figures 8A (schematic view from above) and 8B. he allows to generate a "lateral" diffraction of radiation, which will meet the particle and the guide along a "focal line". We will control so the position of the particle in the three dimensions of space, which makes it possible to envisage more complex trajectories (for example a nonlinear or serpentine trajectory or a curved path in a plane parallel to the substrate).
the realization of this type of device is similar to that of the basic device but uses a mask on which prints curves instead of lines traditional network.
the guide wave can be realized by an exchange method of traditional ions with silver ions on a BK7 substrate.
the thickness of the guide will be chosen from way to work with a single mode guide for the desired wavelength. We can also use everything dielectric material allowing effective guiding of light or still work on a substrate of silicon.
the network may be made of resin, titanium oxide (TiO2) or nitride. he can be engraved by a lithography technology by electron beam or by a technology of precision lithography.
Another example of embodiment concerns a structure with a Bragg mirror, as on the figure 5.
the substrate 4 is for example silicon.
a Bragg mirror 20 which avoids light leakage in the substrate.
a Bragg mirror 20 which avoids light leakage in the substrate.
the substrate for a wavelength of work of 1064 nm, we can cover the substrate a multilayer 20 constituted by the alternation of thin layers of 264 nm thick silica and thin layers of titanium dioxide 123 nm thick deposited in IBS.
the multilayer will consist of 20 thin layers then covered by a layer Silica insulation 2 ⁇ m thick.
the mirror thus realized allows to reflect all the rays arriving in an angular range of between 35 ° and 70 °.
the waveguide 2 may, for example, be made of nitride (Si3N4) by deposition techniques (LPCVD for example). We will be able to choose a thickness of 223 nm of nitride and a width of 1 ⁇ m guide.
the network 6 will be made of resin, titanium oxide (TiO2) or nitride thanks to several overlapping masking levels that allow a spatial variation of the thickness of the network.

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Physics & Mathematics (AREA)
Spectroscopy & Molecular Physics (AREA)
Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
High Energy & Nuclear Physics (AREA)
Diffracting Gratings Or Hologram Optical Elements (AREA)
Optical Integrated Circuits (AREA)
Control And Other Processes For Unpacking Of Materials (AREA)
Physical Or Chemical Processes And Apparatus (AREA)
Glanulating (AREA)
Developing Agents For Electrophotography (AREA)
Combined Means For Separation Of Solids (AREA)

EP04104982A 2003-10-14 2004-10-12 Vorrichtung und Verfahren zur Verschiebung von Teilchen Expired - Lifetime EP1524675B1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
FR0350679A FR2860886B1 (fr)	2003-10-14	2003-10-14	Dispositif de deplacement de particules
FR0350679		2003-10-14

Publications (2)

Publication Number	Publication Date
EP1524675A1 true EP1524675A1 (de)	2005-04-20
EP1524675B1 EP1524675B1 (de)	2011-04-06

Family

ID=34355522

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP04104982A Expired - Lifetime EP1524675B1 (de)	2003-10-14	2004-10-12	Vorrichtung und Verfahren zur Verschiebung von Teilchen

Country Status (6)

Country	Link
US (2)	US7211787B2 (de)
EP (1)	EP1524675B1 (de)
JP (1)	JP2005161514A (de)
AT (1)	ATE504925T1 (de)
DE (1)	DE602004032097D1 (de)
FR (1)	FR2860886B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2863182B1 (fr) *	2003-12-04	2006-10-13	Commissariat Energie Atomique	Procede de concentration de particules.
JP5284036B2 (ja) *	2007-11-14	2013-09-11	キヤノン株式会社	発光装置
JP2011065546A (ja) *	2009-09-18	2011-03-31	Hitachi Solutions Ltd	ファイル検索システム及びプログラム
KR101817638B1 (ko)	2016-08-31	2018-01-11	국방과학연구소	유전체다층박막 회절격자
RU2666416C1 (ru) *	2017-07-14	2018-09-07	федеральное государственное автономное образовательное учреждение высшего образования "Тюменский государственный университет"	Способ очистки твердой поверхности от микрочастиц
DE112022001270T5 (de)	2021-06-25	2024-01-04	Ams-Osram Ag	Schwebstoffdetektor und verfahren zum nachweis von schwebstoffen

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US20030111594A1 (en) *	2001-12-13	2003-06-19	Commissariat A L'energie Atomique	Optical device and optical process for particle displacement
WO2003065774A1 (en) *	2002-01-29	2003-08-07	Forskningscenter Risø	Multi-beam optical tweezers

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GB2256477B (en) *	1991-06-07	1995-03-08	Marconi Gec Ltd	An optical sensor
US6797942B2 (en) *	2001-09-13	2004-09-28	University Of Chicago	Apparatus and process for the lateral deflection and separation of flowing particles by a static array of optical tweezers
US6055106A (en) *	1998-02-03	2000-04-25	Arch Development Corporation	Apparatus for applying optical gradient forces
US6956230B1 (en) *	1999-09-17	2005-10-18	California Institute Of Technology	Integrated particles sensor formed on single substrate using fringes formed by diffractive elements
US6744038B2 (en) *	2000-11-13	2004-06-01	Genoptix, Inc.	Methods of separating particles using an optical gradient
US6833542B2 (en) *	2000-11-13	2004-12-21	Genoptix, Inc.	Method for sorting particles
AU3053002A (en) *	2000-11-28	2002-06-11	Univ California	Optical switching and sorting of biological samples and microparticles transported in a micro-fluidic device, including integrated bio-chip devices
US6778724B2 (en) *	2000-11-28	2004-08-17	The Regents Of The University Of California	Optical switching and sorting of biological samples and microparticles transported in a micro-fluidic device, including integrated bio-chip devices
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2003
- 2003-10-14 FR FR0350679A patent/FR2860886B1/fr not_active Expired - Fee Related
2004
- 2004-10-12 EP EP04104982A patent/EP1524675B1/de not_active Expired - Lifetime
- 2004-10-12 AT AT04104982T patent/ATE504925T1/de not_active IP Right Cessation
- 2004-10-12 DE DE602004032097T patent/DE602004032097D1/de not_active Expired - Lifetime
- 2004-10-13 US US10/962,603 patent/US7211787B2/en not_active Expired - Fee Related
- 2004-10-13 JP JP2004299273A patent/JP2005161514A/ja active Pending
2007
- 2007-02-05 US US11/671,050 patent/US7633056B2/en not_active Expired - Fee Related

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WO2000069554A1 (en) *	1999-05-17	2000-11-23	Marchitto Kevin S	Electromagnetic energy driven separation methods
US20030111594A1 (en) *	2001-12-13	2003-06-19	Commissariat A L'energie Atomique	Optical device and optical process for particle displacement
WO2003065774A1 (en) *	2002-01-29	2003-08-07	Forskningscenter Risø	Multi-beam optical tweezers

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Also Published As

Publication number	Publication date
US7211787B2 (en)	2007-05-01
US20050184230A1 (en)	2005-08-25
FR2860886B1 (fr)	2005-12-23
US20070145256A1 (en)	2007-06-28
ATE504925T1 (de)	2011-04-15
FR2860886A1 (fr)	2005-04-15
JP2005161514A (ja)	2005-06-23
EP1524675B1 (de)	2011-04-06
US7633056B2 (en)	2009-12-15
DE602004032097D1 (de)	2011-05-19

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