EP1544553A1 - Système pour conditionner de l'air de recirculation, en particulier de l'air purifié - Google Patents

Système pour conditionner de l'air de recirculation, en particulier de l'air purifié Download PDF

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Publication number
EP1544553A1
EP1544553A1 EP04027364A EP04027364A EP1544553A1 EP 1544553 A1 EP1544553 A1 EP 1544553A1 EP 04027364 A EP04027364 A EP 04027364A EP 04027364 A EP04027364 A EP 04027364A EP 1544553 A1 EP1544553 A1 EP 1544553A1
Authority
EP
European Patent Office
Prior art keywords
fan
housing
circulating air
filter
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04027364A
Other languages
German (de)
English (en)
Other versions
EP1544553B1 (fr
Inventor
Helmut Bauer
Manfred Dr. Renz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M+W Zander Products GmbH
Original Assignee
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102004016402A external-priority patent/DE102004016402A1/de
Application filed by M+W Zander Facility Engineering GmbH and Co KG, M+W Zander Facility Engineering GmbH filed Critical M+W Zander Facility Engineering GmbH and Co KG
Publication of EP1544553A1 publication Critical patent/EP1544553A1/fr
Application granted granted Critical
Publication of EP1544553B1 publication Critical patent/EP1544553B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • F24F11/77—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity by controlling the speed of ventilators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2221/00—Details or features not otherwise provided for
    • F24F2221/14—Details or features not otherwise provided for mounted on the ceiling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Definitions

  • the invention relates to a device for conditioning circulating air, preferably of clean air, according to the preamble of the claim 1.
  • the invention is based on the object, the generic device to train so that they are structurally simple training an optimal mode of operation allows.
  • a part of the circulating air is over the return channel fed to the fan.
  • the other part of the circulating air passes bypassing the return channel directly to the fan.
  • Will the facility be added Clean rooms used can be in the ceiling area of such Clean room, for example, arrange the fans in a grid. Since each fan of the recirculating air part fed directly to the same extent is, the supply air from each fan has the same temperature on. A subsequent change of the ceiling layout is without problems possible, as circulating air cooler and corresponding piping are not available.
  • the device is used for the conditioning of circulating air, preferably in cleanrooms.
  • Fig. 1 shows an example of a clean room 1, the one Double bottom 2 has.
  • Filter-fan units 3 are arranged, via the respective clean air down to the clean room 1 is promoted.
  • each other Pages of the clean room 1 are return air shafts 4, 5, extending from the floor 2 to the ceiling 6 of the clean room extend.
  • the filter-fan units 3 suck the circulating air the raised floor area over the return air shafts 4, 5 in known Way.
  • Each filter-fan unit 3 is a suction pipe 7 assigned, which opens into the ceiling 6 of the clean room 1 and over each one part of the circulating air directly to the respective filter-fan unit 3 is supplied.
  • the return air shafts are 4, 5 and the suction lines 7 are formed so that each 50% of Return air is supplied to the filter-fan units 3. Because not the entire circulating air via the double bottom 2 and the return air ducts 4, 5, both the clear height of the double floor 2 as also the cross-sectional area of the return air ducts 4, 5 chosen small become. Accordingly, at the end of the flow of Return air ducts 4, 5 provided circulating air cooler 8, 9 smaller inflow areas have as in conventional clean rooms. In the the ceiling 6 lying openings 10 lead a portion of the circulating air directly the filter-fan units 3 to. The air resistance of the openings 10 in the ceiling 6 is with the return air resistance in the Return air ducts 4, 5 adjusted via the radiator 8, 9.
  • the circulation resistance is due to the return of the circulating air through the raised floor 2 and the return air ducts 4, 5 determines and can be kept low become.
  • the suctioned via the openings 10 proportion of Return air is not cooled.
  • the sucked on the return air ducts 4, 5 Part of the circulating air, however, must be cooled more than at a clean room where all the circulating air through the return air ducts is returned.
  • the cooled return air is with the over the suction lines 7 returned, not cooled return air immediately above the suction area of the filter-fan units 3 optimally mixed.
  • the filter-fan units 3 are in a conventional manner on the Ceiling 6 advantageously fixed in the grid (Fig. 10 to 12).
  • Fig. 2 shows a filter-fan unit 3 with a housing 11, in a blower 12 is housed. It sucks the cooled circulating air 13 and the intake line 7 supplied, not cooled circulating air 14 on. In the area above the intake 15 of the filter-fan unit 3 are the cooled and the uncooled circulating air 13, 14 mixed together. The circulating air occurs after the passage through the filter-fan unit 3 as supply air 18 down in the Clean room.
  • the housing 11 of the filter-fan unit 3 has quadrangular example Outline.
  • the side walls 16, 17 of the housing 11 are after extended above and surround the intake 15.
  • the suction pipe 7 is connected to the one Side wall 17, the suction pipe 7 is connected.
  • the suction portion 15 is open at the top, so that from the Return air ducts 4, 5 sucked cooled circulating air 13 unhindered in can flow the intake.
  • the suction 7 can as Hose or be designed as a dimensionally stable channel.
  • the suction line 7 connects perpendicular to the side wall 17 at. From the suction line 7 flowing circulating air 14 is in the intake 15 deflected by about 90 ° downwards and mixes with the of cooling down circulating air 13 flowing downwards.
  • Fig. 3 shows the possibility of the filter-fan unit 3 two Connect suction lines 7.
  • the two intake pipes 7 to the opposite side walls 16, 17 of the housing 11 connected. Both intake pipes 7 open into the ceiling 6, so that over the suction openings 10 in the Ceiling 6 the circulating air is sucked in.
  • the suction lines 7 are L-shaped and open in the area of the extended side walls 16, 17.
  • the uncooled Circulating air 14 at a distance above the blower 12 in the intake 15 flows in, the circulating air 14 after exiting the suction lines 7 deflected by about 90 ° down.
  • the from the Return air ducts 4, 5 coming cooled circulating air 13 flows accordingly the previous embodiment from top to bottom and mixes with the uncooled circulating air 14.
  • the two intake pipes 7 have the same flow cross-section. But it is also possible that the two intake pipes 7 different Have flow cross-section.
  • the filter-fan unit 3 more have as two suction lines 7.
  • a suction line may, for example, on each side wall, a suction line be connected.
  • the suction openings 10 are located in the ceiling 6 with distance to the associated filter-fan unit. This ensures that the intake of the return air 14 through the supply air 18 coming out of the filter-fan unit downwards and vice versa is not disturbed.
  • the suction lines 7 can again through hoses or through dimensionally stable channels and the like be formed.
  • Fig. 4 shows the possibility of the opening 10 in the ceiling. 6 sucked circulating air 14 by means of a guide plate 19 the intake 15 of the filter-fan unit 3 supply.
  • the baffle 19 is located with a small distance above a ceiling 21 of the housing eleventh
  • the baffle 19 has a right angle angled edge 22nd on, which connects to the housing side wall 16 at the level of the ceiling 21.
  • the baffle 19 protrudes beyond the opposite side of the housing 17 and the tube 20.
  • the protruding end 23 of the baffle 19 is also angled downwards at right angles and extends over the ceiling 21 of the housing 11 containing Level.
  • the baffle 19 is at a distance above the Ceiling 21 and together with it a flow channel 24, on the both the uncooled circulating air 14 and the cooled circulating air 13 reaches the intake 15.
  • the baffle 19 covers the entire surface of the ceiling 21 of the housing 11th
  • the circulating air 14 sucked in via the opening 10 flows through the pipe 20 vertically upwards.
  • the circulating air 14 impinges on the over the housing 11 projecting portion of the guide plate 19 and is horizontal to him deflected in the direction of the flow channel 24.
  • the deflected circulating air 13 also hits the over the filter-fan unit 3 protruding part of the baffle 19 and is at him also in the direction of the current channel 24 diverted.
  • the mixing of the cooled and the uncooled Recirculation 13, 14 takes place in a mixing area 25, which in the area next to the filter-fan unit 3 is located.
  • the flow channel 15 can not only by the angled edge 22, but also closed at its lying in the flow direction sides be, so that the flow channel only in the direction of the mixing area 25 is open.
  • the coming of the return air shafts 4, 5 part 13 can also wholly or partially via at least one opening in the baffle 19 in the Area above the filter-fan unit 3 the blower 12 directly be supplied.
  • the tube 20 is the same height as the housing 11 of the filter-fan unit 3.
  • To the tube 20th connects an approximately 90 ° curved pipe section 26, from which the uncooled Recirculating air 14 flows horizontally.
  • the outlet opening 27 of the Pipe piece 26 is located, seen in side view of FIG. 10, at a distance from the housing 11.
  • the over the opening 10 in the Ceiling 6 sucked circulating air 14 flows from the outlet opening 27 in Direction to the filter-fan unit 3, through the blower 12th the circulating air is sucked in.
  • the sucked from the return air ducts 4, 5 cooled circulating air 13 flows from above into the filter-fan unit 3.
  • the horizontally flowing circulating air 14 is in the direction of the blower 12 deflected downward and mixes before the entry into the filter-fan unit 3 with the cooled circulating air 13.
  • intake port selectively blown.
  • the intake opening 10 in the ceiling 6 has according to the previous ones Embodiments sufficient distance from the outlet opening the filter-fan unit 3. This is the suction of the Recirculation 14 is not through from the outlet opening 28 down in Disturbing the clean room leaking clean air.
  • the filter-fan unit 3 according to FIG. 6 is the same design as in the embodiment of Fig. 5.
  • the tube 20 vertically upwards from, which projects beyond the housing 11.
  • a horizontal Line piece 29 connected to the in turn a End piece 30 is connected.
  • the outlet opening 31 of the end piece 30 is located at a such distance from the ceiling 21, that by the fan 12th sucked cooled circulating air 13 with the uncooled circulating air 14 in Intake area 15 can mix sufficiently.
  • suction port specifically with the uncooled circulating air 14 blown. There the outlet opening 21 immediately above the suction port is the uncooled circulating air 14 at its flow path to Blower 12 not deflected.
  • the filter-fan unit has two intake ports 10 in the clean room ceiling 6. At the openings 10 includes one each Flow channel 32, 33, in which the circulating air 14 upwards in a horizontal flow channel 34 flows. From here comes the Cooling air to the blower 12.
  • the flow channels 32 to 34 are in the Housing 11 of the filter-fan unit 3 integrated so that outside the housing located additional equipment for the supply the circulating air 14 to the fan 12 are not required.
  • the from the Return air ducts 4, 5 coming cooled circulating air 13 is from above sucked. It mixes before entering the fan 12 with the flowing in the flow channel 34 uncooled circulating air 14th
  • Figs. 8 and 9 show the possibility of being on the suction side of the blower 12 of the supplied uncooled circulating air 14 a counter-rotation in with respect to the direction of rotation 35 of the blower 12. Reached this is due to the fact that the two intake pipes 7 on the side walls 16, 17 of the housing 11 of the filter-fan unit 3 not in alignment with each other, adjoin the side walls 16, 17, but offset each other.
  • the left in Figs. 8 and 9 Suction line 7 closes near the front wall 36 and the right suction line 7 near the rear wall 37 of the housing 11 to the side wall 16 or 17 at.
  • the circulating air 14 exits the suction lines 7 near the front wall 36 and near the rear wall 37 in the of the elongated housing walls 16, 17, 36, 37 enclosed Intake 15 a.
  • the inflow direction of the circulating air 14 in the intake 15 is the direction of rotation 35 of the fan 12th opposite direction. This area turns the operating area the filter-fan unit 3 extended.
  • the counter-rotation can be targeted to adjust.
  • the embodiment according to 8 and 9 are the same design as the embodiment according to FIGS Fig. 3.
  • Fig. 10 shows an example of a ceiling layout using the described Filter fan units 3.
  • the ceiling 6 of the clean room is created in a known manner in grid.
  • the return air shafts 4, 5 extend over the entire width of the clean room 1.
  • In the two return air shafts 4, 5 are each three recirculating air cooler 8, 9 arranged at a distance next to each other.
  • the return air shafts 4, 5 are narrow and extend over the Width of the clean room.
  • On the ceiling 6 are the filter-fan units 3 mounted, arranged in rows behind and next to each other are. All filter-fan units 3 are the same and each have a suction line 7, each in the corner the housing 11 of the filter-fan units is connected.
  • the suction lines 7 open in the manner described in the Ceiling 6, so that they over the openings 10 in the ceiling 6 a part can suck in the circulating air. Since the intake pipes 7 diagonally in are arranged with respect to the filter-fan units 3, are the Intake ports 10 each in the diagonal to the filter-fan units 3 adjacent raster parts of the ceiling. 6
  • the suction lines 7 close the filter-fan units 3 perpendicular to the housing 11 at.
  • the filter-fan units 3 thus have an education accordingly Fig. 2.
  • the suction openings 10 in the ceiling 6 are thus in the immediately before the filter-fan units 3 lying Raster elements of the ceiling 6.
  • the filter-fan units 3 are again in series next to and behind each other and arranged accordingly the embodiment of FIG. 10 evenly distributed arranged over the ceiling 6. All filter-fan units 3 are according to the previous embodiment Aligned the same.
  • Fig. 12 shows the possibility of the intake pipes 7 different to connect to the filter-fan units 3.
  • the filter-fan units 3 are in this embodiment with two Return air connections according to the embodiment according to Fig. 3 provided.
  • the two suction lines 7 each filter-fan unit 3 are aligned with each other and close to each other opposite side walls 16, 17 of the housing 11 at.
  • Each adjacent filter-fan units 3 have been offset by 90 ° to each other arranged suction 7.
  • the intake 10th in the ceiling 6 are in the filter-fan units 3 respectively adjacent grid elements of the ceiling 6. Since the filter-fan units 3 each only by a grid element from each other are separated, the intake pipes 7 are adjacent filter-fan units each offset by 90 ° to each other. Are located between adjacent filter-fan units 3 two grid elements, then the suction lines 7 adjacent Filter fan units should also be aligned the same.
  • filter-fan units may vary depending on the requirements and installation conditions in any suitable Be mounted on the ceiling 6 way. It is even possible on the Cover 6 different embodiments of filter-fan units 3 provide.
  • the clean room 1 is designed to that about 50% of the circulating air through the return air ducts 4, 5 and about 50% through the openings 10 in the ceiling 6 the filter-fan units 3 is supplied.
  • This division ratio may differ.
  • the bigger the over the Openings 10 sucked proportion of circulating air is the stronger the circulating air coolers 8, 9 in the return air ducts 4, 5 which sucked through them Cool circulating air.
  • the described design of the conditioning leads to a structurally very simple and especially inexpensive Construction.
  • the subsidized into the clean room 1 supply air 18 has at each Filter fan unit 3 same temperature. Because the pressure conditions in the clean room 1 and in the return air shafts 4, 5 and in the area of the fans 3 above the ceiling 6 are the same also the exiting from the filter-fan units 3 air content always the same.
  • At least one throttle device 38 preferably a flap, be provided (Fig. 1). With her, the Flow area and thus the volume flow manually or be changed controlled. In this way, possibly occurring compensate for local temperature differences in clean room 1. If, for example, the circulating air part 14 at an opening 10 in comparison very warm to the circulating air parts of the adjacent opening, then with the throttle device 38, the volume flow through this opening 10 flowing recirculating air part 14 is reduced so that the of the corresponding filter-fan unit 3 in the clean room 1 flowing Supply air 18 has the same temperature as that of the neighboring ones Filter-fan units leaking supply air.
  • the temperature compensation can also by changing the Speed of the fan 12 can be achieved. In the described Case of the locally very warm circulating air part 14, the speed is increased, so that a larger proportion of cooled circulating air 13 sucked becomes.
  • Each filter-fan unit 3 is connected via one or two suction lines 7 connected to one or two openings 10.
  • dashed lines in Fig. 11 embodiment are at least two filter-fan units 3, advantageously four Filter-fan units, a single opening 10 in the ceiling. 6 assigned.
  • the circulating air part 14 through this opening 10 sucked, enters a tube 20, from the corresponding Deduce lines to the at least two filter-fan units 3.
  • the ceiling layout can all described embodiments be used.
  • FIG. 13 largely corresponds to FIG Fig. 7. It differs from it essentially in that the fan unit 39 and the filter 40 of the filter-fan unit 3 separate units are. Accordingly, these units have Also separate flow channels 62, 63 and 32 ', 33', the mounted at Filter fan unit 3 are aligned.
  • the flow channels 32 ', 33' of the filter 40 are double-walled trained side walls formed.
  • the filter frame 40 'lies on the ceiling 6 forming rails 64, 65, the double-walled Side walls are parallel to each other and are open at the top and bottom and by advantageously formed by profile parts side walls 60, 61 ( Figure 14) connected together.
  • the fan unit 39 has the housing 11, its side walls 16, 17 are formed as hollow walls. They are in alignment with the Side walls of the filter 40.
  • the other side walls of the housing 11 are formed as in the previous embodiments,
  • the fan unit 39 is placed on the filter 40, form the double-walled side walls of the filter 40 and the double-walled Side walls 16, 17 of the fan unit 39 each have a continuous double-walled side panel of the filter-fan unit 3.
  • This Side walls form according to the embodiment according to Fig. 7 return flow channels for the uncooled circulating air 14. It flows through the lying in the ceiling 6 openings 10 in the return flow and exits horizontally above the fan 12 from the legs 45, 46 off. The coming from the return air ducts 4, 5 cooled Um Kunststoff 13 is sucked in from above and mixes before Entry into the fan 12 with the uncooled circulating air 14.
  • shields 49, 50 are preferably by T-shaped rails made of metal, plastic or the like educated. They are with their foot 42 in alignment with the inner walls 47, 48 of the flow channels 32 ', 33' attached to the filter frame 40 '. The web of the shields 49, 50 is horizontally spaced below of the filter 40.
  • the filter-fan unit 3 a pre-filter 51, which housed in a housing cover 52 is. This connects up to the housing cover 21 and has smaller footprint than the housing 11. This will stand the side walls 53, 54 of the housing attachment 52 with respect to the Inner walls 55, 56 of the housing walls 16, 17 back. Because the flow channels 62, 63 in the side walls 16, 17 vertically displaceable are arranged, these can be pulled out so far, until the short legs 45, 46 rest on the housing attachment 52. The longer legs 43, 44 then have according to the height of the essay 52 greater distance from the filter 40th
  • the side shields 49, 50 adjacent to the inlet openings 10 of the filter 40 is present.
  • the uncooled return air 14 flows horizontally from the flow channels 62, 63 above the housing attachment 52 and mixed with the cooled return air 13 before it reaches the blower 12.
  • this embodiment is the same design as the Embodiment according to FIGS. 13 and 14.
  • Fig. 16 differs from the previous one Embodiment only in that the pre-filter 51 in the housing attachment 52 is a chemical filter. Because it is thicker than the pre-filter 51 according to FIG. 15, the flow channels 16, 17 are corresponding far out of the side walls 16, 17 of the housing 11 pulled out.
  • FIGS. 13 to 16 have the advantage that arranged displaceably by the in the side walls 16, 17 Flow channels 62, 63 an adaptation to different heights Fan units or pre-filter 51 is easily possible.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
EP04027364A 2003-12-18 2004-11-18 Système pour conditionner de l'air de recirculation, en particulier de l'air purifié Expired - Lifetime EP1544553B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10361335 2003-12-18
DE10361335 2003-12-18
DE102004016402A DE102004016402A1 (de) 2003-12-18 2004-03-26 Einrichtung zur Konditionierung von Umluft, vorzugsweise von Reinluft
DE102004016402 2004-03-26

Publications (2)

Publication Number Publication Date
EP1544553A1 true EP1544553A1 (fr) 2005-06-22
EP1544553B1 EP1544553B1 (fr) 2009-10-07

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Application Number Title Priority Date Filing Date
EP04027364A Expired - Lifetime EP1544553B1 (fr) 2003-12-18 2004-11-18 Système pour conditionner de l'air de recirculation, en particulier de l'air purifié

Country Status (5)

Country Link
US (1) US7468084B2 (fr)
EP (1) EP1544553B1 (fr)
KR (1) KR20050062366A (fr)
CN (1) CN1637356B (fr)
SG (2) SG113037A1 (fr)

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EP2071248A1 (fr) * 2007-12-14 2009-06-17 GE-Hitachi Nuclear Energy Americas LLC Filtre et manipulation de l'air pour zone d'habitabilité de réacteur nucléaire
EP2021700A4 (fr) * 2006-05-18 2013-03-20 Boeing Co Dispositif de regulation d'ecoulement d'air d'environnement personnel

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CA2655553C (fr) * 2006-06-23 2013-04-02 Veft Aerospace Technology Inc. Controle de courant d'air d'entrainement et dispositifs de filtration
KR100768044B1 (ko) 2006-12-04 2007-10-17 주식회사 카엘 순환공기 정화장치
US8003067B2 (en) * 2007-09-20 2011-08-23 Applied Materials, Inc. Apparatus and methods for ambient air abatement of electronic manufacturing effluent
US20090095157A1 (en) * 2007-10-15 2009-04-16 Kirch Joseph F Smokestack
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CN101474418B (zh) * 2009-01-16 2013-07-17 东莞市天图环保科技有限公司 利用天花板顶层空间净化室内空气的方法
CN102575856B (zh) * 2009-10-12 2015-11-25 开利公司 带气体污染物去除的建筑物终端风机盘管单元，带气体污染物去除的运输冷藏系统，及用于它们的方法
EP2501495B1 (fr) * 2009-11-19 2021-09-08 Fipak Research And Development Company Procédé et appareil d'actionnement de hottes de captation de fumées en forme de conduites présentant une efficacité énergétique améliorée
US8419837B2 (en) * 2010-03-09 2013-04-16 Huntair, Inc. Air filtration system with quick connect
US20120011816A1 (en) * 2010-07-16 2012-01-19 Fu-Chi Wu Air intake structure of an air purifier
JP5777254B2 (ja) * 2012-01-31 2015-09-09 大成建設株式会社 空調システムおよびクリーンルーム
WO2013130919A2 (fr) * 2012-02-29 2013-09-06 Inertech Ip Llc Système de distribution de flux d'air pour baies serveurs de centre de données
GB2514510A (en) * 2012-03-16 2014-11-26 Halton Group Ltd Oy Chilled beam with multiple modes
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IT201600078030A1 (it) * 2016-07-26 2018-01-26 I M A Industria Macch Automatiche S P A In Sigla Ima S P A Gruppo di ventilazione per camere a contaminazione controllata
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CN111457494B (zh) * 2020-04-01 2021-08-27 北京联合大学 洁净室内污染源污染气快速清除系统

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Also Published As

Publication number Publication date
EP1544553B1 (fr) 2009-10-07
SG133598A1 (en) 2007-07-30
SG113037A1 (en) 2005-07-28
US20050132677A1 (en) 2005-06-23
CN1637356A (zh) 2005-07-13
CN1637356B (zh) 2011-07-13
US7468084B2 (en) 2008-12-23
KR20050062366A (ko) 2005-06-23

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