EP1843043A3 - Pompe à vide avec un appareil d'entraînement - Google Patents

Pompe à vide avec un appareil d'entraînement Download PDF

Info

Publication number
EP1843043A3
EP1843043A3 EP07006199.9A EP07006199A EP1843043A3 EP 1843043 A3 EP1843043 A3 EP 1843043A3 EP 07006199 A EP07006199 A EP 07006199A EP 1843043 A3 EP1843043 A3 EP 1843043A3
Authority
EP
European Patent Office
Prior art keywords
interior
vacuum pump
drive device
environment
separating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07006199.9A
Other languages
German (de)
English (en)
Other versions
EP1843043B1 (fr
EP1843043A2 (fr
Inventor
Timo Birkenstock
Dirk Hopf
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38051875&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1843043(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1843043A2 publication Critical patent/EP1843043A2/fr
Publication of EP1843043A3 publication Critical patent/EP1843043A3/fr
Application granted granted Critical
Publication of EP1843043B1 publication Critical patent/EP1843043B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP07006199.9A 2006-04-07 2007-03-27 Pompe à vide avec un dispositif d'entraînement Active EP1843043B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006016405.9A DE102006016405B4 (de) 2006-04-07 2006-04-07 Vakuumpumpe mit Antriebsgerät

Publications (3)

Publication Number Publication Date
EP1843043A2 EP1843043A2 (fr) 2007-10-10
EP1843043A3 true EP1843043A3 (fr) 2014-04-23
EP1843043B1 EP1843043B1 (fr) 2018-05-16

Family

ID=38051875

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07006199.9A Active EP1843043B1 (fr) 2006-04-07 2007-03-27 Pompe à vide avec un dispositif d'entraînement

Country Status (4)

Country Link
US (1) US8651838B2 (fr)
EP (1) EP1843043B1 (fr)
JP (1) JP5303114B2 (fr)
DE (1) DE102006016405B4 (fr)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058843A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2008096622A1 (fr) * 2007-02-06 2008-08-14 Edwards Japan Limited Pompe à vide
DE202007012070U1 (de) * 2007-08-30 2009-01-08 Oerlikon Leybold Vacuum Gmbh Stromdurchführung einer Vakuumpumpe
DE102009031983A1 (de) 2009-07-06 2011-01-13 Lti Drives Gmbh An eine Vakuumpumpe anschließbare elektrische Verbindungseinheit
JP2011144788A (ja) * 2010-01-18 2011-07-28 Toyota Industries Corp 電動圧縮機
JP5545358B2 (ja) * 2010-03-11 2014-07-09 株式会社島津製作所 ターボ分子ポンプ装置
JP5353838B2 (ja) * 2010-07-07 2013-11-27 株式会社島津製作所 真空ポンプ
CN103228923B (zh) * 2010-10-19 2016-09-21 埃地沃兹日本有限公司 真空泵
JP5744044B2 (ja) * 2010-10-19 2015-07-01 エドワーズ株式会社 真空ポンプ
ITCO20100067A1 (it) * 2010-12-23 2012-06-24 Nuovo Pignone Spa Connessione elettrica per turbomacchina e metodo
CN103047152B (zh) * 2011-10-17 2016-06-22 株式会社岛津制作所 真空泵
JP5673497B2 (ja) * 2011-11-08 2015-02-18 株式会社島津製作所 一体型ターボ分子ポンプ
JP5768670B2 (ja) * 2011-11-09 2015-08-26 株式会社島津製作所 ターボ分子ポンプ装置
JP5963459B2 (ja) * 2012-01-31 2016-08-03 住友重機械工業株式会社 クライオポンプおよびクライオポンプの修理方法
JP5511915B2 (ja) * 2012-08-28 2014-06-04 株式会社大阪真空機器製作所 分子ポンプ
JP6069981B2 (ja) * 2012-09-10 2017-02-01 株式会社島津製作所 ターボ分子ポンプ
DE102013222905A1 (de) * 2013-11-11 2015-05-13 Oerlikon Leybold Vacuum Gmbh Antriebs- und Steuereinrichtung für eine Vakuumpumpe, Vakuumpumpe sowie Verfahren zum Herstellen einer Steuerplatine für eine Vakuumpumpe
JP6449551B2 (ja) * 2014-03-12 2019-01-09 エドワーズ株式会社 真空ポンプの制御装置とこれを備えた真空ポンプ
EP3088737B1 (fr) * 2015-04-30 2020-06-17 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de production d'une pompe à vide
JP6753759B2 (ja) 2016-10-21 2020-09-09 エドワーズ株式会社 真空ポンプ及び該真空ポンプに適用される防水構造、制御装置
EP3333429B1 (fr) 2016-12-09 2022-02-09 Pfeiffer Vacuum Gmbh Appareil a vide
EP3339652B1 (fr) 2016-12-22 2020-07-01 Pfeiffer Vacuum Gmbh Pompe à vide avec chemise intérieure recueillant des dépôts
JP6852457B2 (ja) * 2017-02-27 2021-03-31 株式会社島津製作所 電源一体型真空ポンプ
EP3431769B1 (fr) 2017-07-21 2022-05-04 Pfeiffer Vacuum Gmbh Pompe à vide
EP3462034B1 (fr) 2017-09-28 2024-09-11 Pfeiffer Vacuum Gmbh Pompe à vide
EP3470681B1 (fr) * 2017-10-10 2021-09-22 Pfeiffer Vacuum Gmbh Traverse électrique pour appareil à vide, sous la forme d'une plaque de circuit imprimé
CN111213316B (zh) * 2017-10-31 2021-07-13 株式会社爱发科 真空泵及其控制方法
CN107986264B (zh) * 2017-11-28 2020-06-30 瑞安市任奇科技有限公司 一种基于物联网的安全的超声波石墨烯剥离制备装置
JP7088688B2 (ja) * 2018-02-16 2022-06-21 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
JP7096006B2 (ja) * 2018-02-16 2022-07-05 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
GB201808893D0 (en) 2018-05-31 2018-07-18 Micromass Ltd Bench-top time of flight mass spectrometer
GB201808932D0 (en) 2018-05-31 2018-07-18 Micromass Ltd Bench-top time of flight mass spectrometer
GB201808894D0 (en) * 2018-05-31 2018-07-18 Micromass Ltd Mass spectrometer
JP7244328B2 (ja) * 2019-03-28 2023-03-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプの制御装置
EP3626971B1 (fr) * 2019-08-30 2022-05-11 Pfeiffer Vacuum Gmbh Pompe à vide
DE102021129376A1 (de) 2021-03-17 2022-09-22 Hanon Systems Gehäuseeinheit für ein elektronisches Bauteil eines elektrischen Kältemittelverdichters

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4237971A1 (de) * 1992-11-11 1994-05-19 Leybold Ag Vakuumpumpe mit Wandler
DE69717231T2 (de) * 1996-10-08 2003-09-11 Varian S.P.A., Leini Vakuumpumpgerät
US20030175132A1 (en) * 2002-03-13 2003-09-18 Takaharu Ishikawa Vacuum pump
EP1757825A1 (fr) * 2005-08-24 2007-02-28 Mecos Traxler AG Dispositif de palier magnétique avec élément de passage amélioré pour application dans des appareils sous vide

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2119857A1 (de) 1971-04-23 1972-11-02 Leybold-Heraeus GmbH & Co KG, 5000 Köln Einrichtung zur Ölversorgung von Lagerstellen
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
GB8622878D0 (en) * 1986-09-23 1986-10-29 Marconi Instruments Ltd Electrical interface arrangement
US4804330A (en) * 1987-05-14 1989-02-14 The United States Of America As Represented By The Secretary Of The Air Force Hermetic, vacuum and pressure tight electrical feedthru
US4797007A (en) * 1987-12-18 1989-01-10 Emhart Industries, Inc. Temperature and line pressure probe
GB8830057D0 (en) * 1988-12-23 1989-02-22 Lucas Ind Plc An electrical connection arrangement and a method of providing an electrical connection
JPH0434873U (fr) * 1990-07-16 1992-03-24
US5247424A (en) * 1992-06-16 1993-09-21 International Business Machines Corporation Low temperature conduction module with gasket to provide a vacuum seal and electrical connections
US5393931A (en) * 1993-03-04 1995-02-28 Photmetrics, Ltd. Electrical access to a hermetically sealed chamber using a printed circuit board
JP2778894B2 (ja) * 1993-03-12 1998-07-23 山洋電気株式会社 ブラシレス直流モータ及び軸受ホルダ
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
KR0140034B1 (ko) * 1993-12-16 1998-07-15 모리시다 요이치 반도체 웨이퍼 수납기, 반도체 웨이퍼의 검사용 집적회로 단자와 프로브 단자와의 접속방법 및 그 장치, 반도체 집적회로의 검사방법, 프로브카드 및 그 제조방법
JP3572117B2 (ja) * 1995-06-12 2004-09-29 光洋精工株式会社 磁気軸受装置を含む真空ポンプ
US6316768B1 (en) * 1997-03-14 2001-11-13 Leco Corporation Printed circuit boards as insulated components for a time of flight mass spectrometer
JP3456426B2 (ja) * 1998-11-24 2003-10-14 住友電気工業株式会社 電子制御ユニット
EP1024294A3 (fr) * 1999-01-29 2002-03-13 Ibiden Co., Ltd. Moteur et pompe turbomoléculaire
US6251471B1 (en) * 1999-05-12 2001-06-26 University Of New Hampshire Surface trace electrical feedthru
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
US6305975B1 (en) * 2000-10-12 2001-10-23 Bear Instruments, Inc. Electrical connector feedthrough to low pressure chamber
US6350964B1 (en) * 2000-11-09 2002-02-26 Applied Materials, Inc. Power distribution printed circuit board for a semiconductor processing system
JP2002276587A (ja) * 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP4409892B2 (ja) * 2003-09-11 2010-02-03 日本電産コパル株式会社 ファンモータ
FR2861142B1 (fr) * 2003-10-16 2006-02-03 Mecanique Magnetique Sa Pompe a vide turbo moleculaire
CN101713397B (zh) * 2003-12-30 2014-07-09 艾默生环境优化技术有限公司 压缩机保护和诊断系统
JP4211658B2 (ja) * 2004-03-31 2009-01-21 株式会社島津製作所 ターボ分子ポンプ
JP4594689B2 (ja) * 2004-09-27 2010-12-08 エドワーズ株式会社 真空ポンプ
JP4661278B2 (ja) * 2005-03-10 2011-03-30 株式会社島津製作所 ターボ分子ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4237971A1 (de) * 1992-11-11 1994-05-19 Leybold Ag Vakuumpumpe mit Wandler
DE69717231T2 (de) * 1996-10-08 2003-09-11 Varian S.P.A., Leini Vakuumpumpgerät
US20030175132A1 (en) * 2002-03-13 2003-09-18 Takaharu Ishikawa Vacuum pump
EP1757825A1 (fr) * 2005-08-24 2007-02-28 Mecos Traxler AG Dispositif de palier magnétique avec élément de passage amélioré pour application dans des appareils sous vide

Also Published As

Publication number Publication date
DE102006016405A1 (de) 2007-10-11
JP2007278278A (ja) 2007-10-25
DE102006016405B4 (de) 2024-08-01
US20070237650A1 (en) 2007-10-11
US8651838B2 (en) 2014-02-18
EP1843043B1 (fr) 2018-05-16
EP1843043A2 (fr) 2007-10-10
JP5303114B2 (ja) 2013-10-02

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