EP1843043A2 - Pompe à vide avec un appareil d'entraînement - Google Patents

Pompe à vide avec un appareil d'entraînement Download PDF

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Publication number
EP1843043A2
EP1843043A2 EP07006199A EP07006199A EP1843043A2 EP 1843043 A2 EP1843043 A2 EP 1843043A2 EP 07006199 A EP07006199 A EP 07006199A EP 07006199 A EP07006199 A EP 07006199A EP 1843043 A2 EP1843043 A2 EP 1843043A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
interior
separating element
housing
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07006199A
Other languages
German (de)
English (en)
Other versions
EP1843043A3 (fr
EP1843043B1 (fr
Inventor
Timo Birkenstock
Dirk Hopf
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38051875&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1843043(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1843043A2 publication Critical patent/EP1843043A2/fr
Publication of EP1843043A3 publication Critical patent/EP1843043A3/fr
Application granted granted Critical
Publication of EP1843043B1 publication Critical patent/EP1843043B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump, which is arranged in an environment with a housing, an interior and a drive unit, which contains electronic circuits for controlling arranged in the interior electronic and electrical components, wherein there is negative pressure in the interior, and with a separating element, which Interior and surroundings separate.
  • Vacuum pumps have an interior in which an increasing number of electronic components is arranged. Such components are, for example, the electric coils of the motor or Hall probes, which detect the rotation of the shaft, and the like. These arranged within the vacuum pump components are controlled by located outside of the vacuum pump, electronic circuits. These circuits are often placed in a driver. The interior of such a vacuum pump is at a pressure level which is below the atmospheric pressure. This means that the electrical lines that make electrical contact between the electronic circuits and the components arranged in the interior, must be performed by a hermetically sealed passage from the interior to the exterior.
  • a common solution in the art is to provide a hermetically sealed plug on the vacuum pump.
  • This plug has in the direction of the interior of the vacuum pump pins on which cables are soldered, which lead to the electronic components.
  • the size and shape of the vacuum pump has gained in importance in recent years.
  • the drive unit should adapt to the housing of the vacuum pump so that it must be constructed around it. Put another way: the housing of the vacuum pump sets the framework for the drive unit.
  • the connector used in the prior art turns out to be disadvantageous because it is complicated and has a large footprint.
  • the object of the invention is therefore to present a vacuum pump with a separating element between the interior and the environment, which allows the construction of a vacuum-tight and less prone to assembly errors implementation that allows a more flexible design of the electrical signal routing.
  • a vacuum pump with the features of the first claim.
  • the signal routing can be much better adapted to the spatial specifications.
  • the assembly of a board is simpler and less prone to error during assembly due to the more spacious space. It is possible to route signals on the board from the point of implementation to another point on the board to connect to the drive unit from it. Boards themselves are available inexpensively in a wide range of geometric shapes. In addition, they are sufficiently vacuum-tight.
  • a first development relates to the design of means for carrying electrical currents and voltages.
  • a technically simple and inexpensive solution is to pierce the printed circuit board, pins stuck in these holes and to solder. In this case, a vacuum-tight implementation is guaranteed by the soldering.
  • Another development of the means for carrying out the electrical currents and voltages is to provide a hermetically sealed plug on the board. This has contact pins in the direction of the interior of the vacuum pump. On the side facing away from this interior, contacts in the printed circuit board are soldered. With this variant, the vacuum tightness is further increased.
  • the invention can be further developed by constructing the printed circuit board from at least two layers. This makes it possible to provide connectors on the surface, which are in electrical contact with an inner, located between the layers and electrically conductive layer. This avoids providing through holes in the printed circuit board for the means for passing the electrical currents and voltages. It is increased in this way, the vacuum-tightness of the arrangement.
  • Functions such as fault memory, pump type detection, temperature measurement and the like can be realized without leading electrical signals through a vacuum-tight implementation. Only the unavoidable lines are led into the fore-vacuum area of the vacuum pump, for example for the engine. Everything else can be arranged on the board, which is cheaper and technically easier.
  • the number of electronic components that are operated in negative pressure is minimized.
  • a temperature sensor is arranged on the board, which is in thermal contact with the housing of the vacuum pump. This can be realized by a direct mechanical contact, even a mechanically deformable thermal conductor between the temperature sensor and the housing is a favorable design. A complex wiring of this sensor in the interior of the vacuum pump is eliminated, a defective temperature sensor can be easily replaced. Safe monitoring of the pump temperature and thus avoiding excessive temperatures can thus be ensured.
  • An advantageous development is to releasably attach the drive unit to the vacuum pump, wherein it covers the partition at least partially. As a result, a compact overall system is created and at the same time the separating element is protected against external influences.
  • the invention can be further developed by being used on a turbomolecular vacuum pump, since these have a particularly large number of electronic components and require complex control.
  • the first figure shows an example of a vacuum pump, a turbomolecular vacuum pump 1, in short: turbo pump. It has a suction flange 3, via which it is connected to a recipient in which a high vacuum is to be generated.
  • the extracted gas is compressed by blades bearing rotor disks 5 and also bearing blades stator 6.
  • the rotor disks 5 are set in rapid rotation via a shaft 4 to which they are attached.
  • the compressed gas which usually still has a pressure in the coarse / fine vacuum range, is discharged via the gas outlet 17 to a backing pump.
  • the shaft is supported rotatably by bearings 7, which are designed, for example, as ball bearings or magnetic bearings.
  • the rotation is effected by a drive motor 9.
  • the turbo pump has an interior space 8, in which there is a negative pressure compared to the environment of the pump.
  • This negative pressure is often in the range of Vorvakuums, which prevails at the gas outlet 17, since the interior and gas outlet are connected to each other via engine and bearing gaps.
  • the electrical lines are arranged, via which the electrical power required to generate the rotation is transmitted to the motor 9.
  • the drive unit 11 is arranged, which is connected via, for example, releasably connected to the housing of the turbo pump.
  • electronic circuits 16 are provided. These circuits take on a variety of tasks, such as the generation of currents and voltages with which the coils of the motor are driven. It can also be provided a mains voltage conditioning, in addition to come integrated circuits and / or controllers, the peripheral devices, such as fans and the like, control. Operating data of the turbo pump can also be monitored or flood processes and the like can be controlled.
  • the housing can be sealed via an outer seal 15. This makes it possible to protect the electronic circuit from splashing water, the outer seal is not used to achieve a vacuum tightness.
  • the drive unit has the same conditions as the environment, ie normally air at atmospheric pressure.
  • the circuits 16 within the drive unit electrical currents and voltages must be fed into the interior 8 of the turbo pump. The pressure difference between the environment and the interior must be maintained.
  • a separating element which is provided with means 12 for carrying electrical currents and voltages and covers the opening 23 in the housing of the turbo pump.
  • a part of this separator is a printed circuit board 10. This circuit board is pierced in some places. Through the holes electrically conductive pins are inserted and then soldered, so that the holes are sealed vacuum-tight. The pins are connected to the drive unit side facing electrical conductors that make electrical contact with the circuits 16.
  • the printed circuit board of the separator is bolted to the pump housing 2 with screws.
  • an elastomeric sealing ring 13 surrounds the opening 23.
  • the vacuum tightness can be further improved by providing a coating 14 in the region where the elastomeric seal rests on the printed circuit board.
  • FIG. 2 A second example of a separating element is shown in Figure 2, in which only the lower part of the pump and the upper part of the drive unit are shown in section.
  • the separator here comprises a printed circuit board 10 and a hermetically sealed plug 12c as means for passing electrical currents and voltages.
  • This plug has contact pins which sit in holes of the circuit board and are soldered therein. The contact pins lead to the side facing the opening 23 and are connected there to the lines 21.
  • An elastomeric sealing ring 24 is disposed between the plug and housing 2 of the turbo pump and seals the interior. To ensure mechanical safety and vacuum tightness, the plug itself is bolted to the pump housing.
  • the printed circuit board is also detachable with screws connected to the housing of the vacuum pump.
  • On the circuit board further electronic components 31 are arranged. These can be used, for example, to store pump-related data, such as pump type, serial number, etc.
  • FIG. 3 Another example of a separating element is shown in Figure 3, in which only the lower part of the pump and the upper part of the drive unit are shown in section.
  • the printed circuit board 10 contained in the separating element is constructed here from two layers 10a and 10b, wherein a higher number of layers can also be used. Between the layers, an inner, electrically conductive layer is provided, that is, there are interconnects between the layers 10a and 10b.
  • the means for passing electrical currents and voltages herein include connectors 12f mounted on the surface of the printed circuit board, fabricated, for example, in "surface mounting technology” (SMT) technology. These connectors are used in the area of the board that is exposed to negative pressure. The requirements for mechanical stability are low at this point.
  • SMT surface mounting technology
  • the "surface mounted device” (SMD) connectors can be used wherever high mechanical stability is not required.
  • SMD surface mounted device
  • a matching plug 20 is plugged, which sits at the ends of the lines 21, which lead to the electrical and electronic components in the interior of the turbo pump.
  • Only one layer 10a or 10b penetrating blind holes 12d establish an electrical connection to a conductor track 12b located between the layers. From this conductor track, an electrical connection can be guided via further blind holes and blind holes to the surface of the circuit board facing the drive unit.
  • connectors are to be used on the surface facing the drive unit, it is advantageous to first lead the electrical currents and voltages out of the region of the elastomer ring 13 via the conductor track 12b and to bring them to pins 12e, which are soldered into through holes.
  • the conductor 12b then ends in a range in which there is no difference between the gas pressure on the surfaces of the layers 10a and 10b, or none of the surfaces is subjected to a negative pressure. Through holes can be used easily in this area. This makes it possible to produce mechanically strong loadable connectors for connection to the circuits 16. With the measures presented in this example, it is possible to avoid holes that pass through the entire printed circuit board in the vacuum critical area within the elastomer seal 13.
  • a temperature sensor 30 is also provided on the board.
  • This temperature sensor allows the safe monitoring of the pump temperature, so that an excessive operating temperature of the pump detected and countermeasures can be taken. For example, the power fed into the drive can be reduced or the pump even stopped.
  • the temperature sensor is in thermal contact with the housing 2. This contact can be achieved in various ways. So it is conceivable to bring the temperature sensor in direct mechanical contact, to press it against the housing. It is also conceivable to provide thermally highly conductive means 32 between the temperature sensor and the housing. It is advantageous to make these means mechanically elastically deformable, so that there is a secure thermal transition from temperature sensor to means and from means to housing.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP07006199.9A 2006-04-07 2007-03-27 Pompe à vide avec un dispositif d'entraînement Active EP1843043B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006016405.9A DE102006016405B4 (de) 2006-04-07 2006-04-07 Vakuumpumpe mit Antriebsgerät

Publications (3)

Publication Number Publication Date
EP1843043A2 true EP1843043A2 (fr) 2007-10-10
EP1843043A3 EP1843043A3 (fr) 2014-04-23
EP1843043B1 EP1843043B1 (fr) 2018-05-16

Family

ID=38051875

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07006199.9A Active EP1843043B1 (fr) 2006-04-07 2007-03-27 Pompe à vide avec un dispositif d'entraînement

Country Status (4)

Country Link
US (1) US8651838B2 (fr)
EP (1) EP1843043B1 (fr)
JP (1) JP5303114B2 (fr)
DE (1) DE102006016405B4 (fr)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009027485A1 (fr) * 2007-08-30 2009-03-05 Oerlikon Leybold Vacuum Gmbh Passage de courant dans une pompe à vide
EP2273129A2 (fr) 2009-07-06 2011-01-12 LTi DRiVES GmbH Unité de liaison électrique pouvant être raccordée sur une pompe à vide
EP3088737A1 (fr) * 2015-04-30 2016-11-02 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de production d'une pompe à vide
EP1936198B1 (fr) * 2006-12-13 2018-01-24 Pfeiffer Vacuum Gmbh Pompe à vide
EP3333429A1 (fr) 2016-12-09 2018-06-13 Pfeiffer Vacuum Gmbh Appareil a vide
EP3339652A1 (fr) 2016-12-22 2018-06-27 Pfeiffer Vacuum Gmbh Pompe à vide avec chemise intérieure recueillant des dépôts
EP3431769A1 (fr) 2017-07-21 2019-01-23 Pfeiffer Vacuum Gmbh Pompe à vide
EP3462034A1 (fr) 2017-09-28 2019-04-03 Pfeiffer Vacuum Gmbh Pompe à vide
EP3470681A1 (fr) * 2017-10-10 2019-04-17 Pfeiffer Vacuum Gmbh Traverse électrique pour appareil à vide, sous la forme d'une plaque de circuit imprimé
CN109790846A (zh) * 2016-10-21 2019-05-21 埃地沃兹日本有限公司 真空泵及应用于该真空泵的防水构造、控制装置
EP3626971A1 (fr) * 2019-08-30 2020-03-25 Pfeiffer Vacuum Gmbh Pompe à vide
EP3803943A1 (fr) * 2018-05-31 2021-04-14 Micromass UK Limited Spectromètre de masse
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DE102013222905A1 (de) * 2013-11-11 2015-05-13 Oerlikon Leybold Vacuum Gmbh Antriebs- und Steuereinrichtung für eine Vakuumpumpe, Vakuumpumpe sowie Verfahren zum Herstellen einer Steuerplatine für eine Vakuumpumpe
JP6449551B2 (ja) * 2014-03-12 2019-01-09 エドワーズ株式会社 真空ポンプの制御装置とこれを備えた真空ポンプ
JP6852457B2 (ja) * 2017-02-27 2021-03-31 株式会社島津製作所 電源一体型真空ポンプ
CN111213316B (zh) * 2017-10-31 2021-07-13 株式会社爱发科 真空泵及其控制方法
CN107986264B (zh) * 2017-11-28 2020-06-30 瑞安市任奇科技有限公司 一种基于物联网的安全的超声波石墨烯剥离制备装置
JP7088688B2 (ja) * 2018-02-16 2022-06-21 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
JP7096006B2 (ja) * 2018-02-16 2022-07-05 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
JP7244328B2 (ja) * 2019-03-28 2023-03-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプの制御装置
DE102021129376A1 (de) 2021-03-17 2022-09-22 Hanon Systems Gehäuseeinheit für ein elektronisches Bauteil eines elektrischen Kältemittelverdichters

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1936198B1 (fr) * 2006-12-13 2018-01-24 Pfeiffer Vacuum Gmbh Pompe à vide
WO2009027485A1 (fr) * 2007-08-30 2009-03-05 Oerlikon Leybold Vacuum Gmbh Passage de courant dans une pompe à vide
EP2273129A2 (fr) 2009-07-06 2011-01-12 LTi DRiVES GmbH Unité de liaison électrique pouvant être raccordée sur une pompe à vide
EP2273129A3 (fr) * 2009-07-06 2013-07-03 LTi DRiVES GmbH Unité de liaison électrique pouvant être raccordée sur une pompe à vide
EP3088737A1 (fr) * 2015-04-30 2016-11-02 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de production d'une pompe à vide
CN109790846A (zh) * 2016-10-21 2019-05-21 埃地沃兹日本有限公司 真空泵及应用于该真空泵的防水构造、控制装置
US11215187B2 (en) 2016-10-21 2022-01-04 Edwards Japan Limited Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump
EP3333429A1 (fr) 2016-12-09 2018-06-13 Pfeiffer Vacuum Gmbh Appareil a vide
EP3339652A1 (fr) 2016-12-22 2018-06-27 Pfeiffer Vacuum Gmbh Pompe à vide avec chemise intérieure recueillant des dépôts
JP2019023469A (ja) * 2017-07-21 2019-02-14 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
EP3431769A1 (fr) 2017-07-21 2019-01-23 Pfeiffer Vacuum Gmbh Pompe à vide
EP3462034A1 (fr) 2017-09-28 2019-04-03 Pfeiffer Vacuum Gmbh Pompe à vide
EP3470681A1 (fr) * 2017-10-10 2019-04-17 Pfeiffer Vacuum Gmbh Traverse électrique pour appareil à vide, sous la forme d'une plaque de circuit imprimé
EP3803943A1 (fr) * 2018-05-31 2021-04-14 Micromass UK Limited Spectromètre de masse
US12009193B2 (en) 2018-05-31 2024-06-11 Micromass Uk Limited Bench-top Time of Flight mass spectrometer
US12027359B2 (en) 2018-05-31 2024-07-02 Micromass Uk Limited Bench-top Time of Flight mass spectrometer
EP3626971A1 (fr) * 2019-08-30 2020-03-25 Pfeiffer Vacuum Gmbh Pompe à vide

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Publication number Publication date
DE102006016405A1 (de) 2007-10-11
JP2007278278A (ja) 2007-10-25
DE102006016405B4 (de) 2024-08-01
US20070237650A1 (en) 2007-10-11
US8651838B2 (en) 2014-02-18
EP1843043A3 (fr) 2014-04-23
EP1843043B1 (fr) 2018-05-16
JP5303114B2 (ja) 2013-10-02

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