EP3339652B1 - Pompe à vide avec chemise intérieure recueillant des dépôts - Google Patents

Pompe à vide avec chemise intérieure recueillant des dépôts Download PDF

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Publication number
EP3339652B1
EP3339652B1 EP16206042.0A EP16206042A EP3339652B1 EP 3339652 B1 EP3339652 B1 EP 3339652B1 EP 16206042 A EP16206042 A EP 16206042A EP 3339652 B1 EP3339652 B1 EP 3339652B1
Authority
EP
European Patent Office
Prior art keywords
insert
chamber
pump
vacuum pump
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16206042.0A
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German (de)
English (en)
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EP3339652A1 (fr
Inventor
Herbert Stammler
Sönke Gilbrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP16206042.0A priority Critical patent/EP3339652B1/fr
Priority to JP2017230365A priority patent/JP6469205B2/ja
Publication of EP3339652A1 publication Critical patent/EP3339652A1/fr
Application granted granted Critical
Publication of EP3339652B1 publication Critical patent/EP3339652B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the present invention relates to a vacuum pump according to claim 1.
  • Vacuum pumps such as turbomolecular pumps, are used in different areas of technology in order to create a vacuum necessary for a particular process.
  • deposits such as process impurities, particles and / or liquid residues, accumulate or deposit from the fluid pumped by the pump in the vacuum pump and primarily there in its fore-vacuum region.
  • deposits possibly also corrosive and toxic deposits have to be removed during maintenance with great effort, in particular by mechanical, physical and / or chemical cleaning.
  • the housing of the vacuum pump and in particular the lower part of the housing enclosing the fore-vacuum region with the assemblies which may be arranged there, such as an electronic assembly, precision mechanical assemblies, seals, etc., are made more difficult cleaning because, for example, superheated steam, cleaning agents and the like can be harmful.
  • a vacuum pump according to the preamble of claim 1 is known from the US 2016/273552 A1 known. Another vacuum pump is disclosed US 2002/114695 A1 .
  • the present invention has for its object to provide a vacuum pump that is easy to clean.
  • deposits should be easy to remove from the fore-vacuum area of the vacuum pump.
  • a vacuum pump according to the invention in particular a turbomolecular pump, comprises a housing with at least one inlet and an outlet for fluid, in particular process gas or air, a recipient being connectable to the inlet.
  • the vacuum pump according to the invention also comprises at least one pump stage arranged in the housing for conveying the fluid, in particular out of the recipient, through the vacuum pump from the inlet to the outlet, a chamber also being formed in the housing, and at least one insert for receiving in the chamber of deposits is arranged, which covers at least one side delimiting the chamber.
  • the chamber preferably opens into the outlet and preferably forms a discharge area of the vacuum pump.
  • the chamber is therefore preferably in the fore-vacuum region of the pump.
  • the chamber is preferably arranged downstream of the pump stage closest to the forevacuum in the housing, as seen in the pumping direction.
  • the deposits drawn in by the pump and contained in the fluid can therefore deposit on the insert.
  • the deposits can be removed by removing the insert from the pump.
  • the insert can preferably be arranged in the chamber in such a way that it can be removed from the chamber, for example, during maintenance of the pump.
  • the removed insert can be cleaned outside the pump and then reinserted into the pump. Alternatively, the dirty insert can be replaced with a new insert.
  • the effort of cleaning the chamber from the deposits can be reduced by using the insert or, in the best case, saved entirely. This also reduces the risk of damaging sensitive components in the fore-vacuum area.
  • deposit is to be understood broadly and can include any type of substances, such as particles, liquids, gases or exotic states such as plasma or atomic gas, which are contained in the fluid conveyed by the vacuum pump and are found in the vacuum pump, for example can "settle down” through adhesion, condensation, resublimation, solidification or chemical reaction.
  • the insert has an outlet opening, which can be aligned in particular with the outlet on the housing of the vacuum pump.
  • the fluid can thus pass through the volume of the insert into the outlet opening of the insert and further into the outlet of the vacuum pump.
  • the outlet opening can have a diameter which corresponds at least substantially to the diameter of the outlet of the vacuum pump.
  • the outlet opening can be formed, for example, by removing, in particular cutting out, material from the insert.
  • the outlet of the vacuum pump has a fore-vacuum nozzle in which the Chamber opens, and the insert has a mouth section which can be introduced or introduced into the fore-vacuum nozzle.
  • the mouth section can at least partially cover the inner wall of the fore-vacuum nozzle and thus protect it from deposits.
  • the mouth section is formed by the part of the insert material which was removed or cut out from the insert to create the outlet opening, the mouth section preferably being connected in one piece to the insert. No additional material is therefore required for the mouth section. Rather, only the material of the insert is used, which has "become free" by creating the outlet opening.
  • the mouth section can be insertable into the fore-vacuum nozzle.
  • the mouth section can be designed to match the fore-vacuum nozzle.
  • the outer diameter of the mouth section can thus essentially correspond to the inner diameter of the fore-vacuum nozzle.
  • the axial length of the mouth section can be adapted to the axial length of the fore-vacuum nozzle. The fitting mouth section inserted into the fore-vacuum nozzle can thus effectively protect the fore-vacuum nozzle from deposits.
  • the side delimiting the chamber which at least partially covers the insert, can be a side wall and / or the bottom of the chamber.
  • the insert can be designed such that it covers the largest possible surface area of the chamber or the chamber walls. As many deposits as possible can thus deposit on the insert and not on the chamber surfaces.
  • the insert can be designed like a bowl, a can or a container.
  • the insert can therefore have or define a volume that is accessible from the outside, in which the deposits can accumulate and accumulate.
  • the insert can be designed such that it covers, in particular at least largely completely, the bottom of the chamber and / or a side wall delimiting the chamber radially outwards and / or a side wall delimiting the chamber radially inwards.
  • the insert in particular the bottom and side walls thereof, preferably surrounds a volume, at least one opening being provided on at least one side of the insert, in particular on the top of the insert, so that the deposits can be caught in the volume through the opening.
  • the opening can be designed such that the insert has no wall on the corresponding side.
  • the opening can alternatively be designed such that one or more openings, such as slots, are provided in a wall.
  • the insert can thus be completely or at least partially opened on its upper side which is remote from the floor, so that the deposits can accumulate in the volume from above.
  • the insert is preferably designed and / or can be fitted in the chamber such that the at least one opening faces the pump stage upstream of the chamber. Deposits that are sucked in by the pump stage and conveyed towards the outlet can thus get directly into the volume of the insert and accumulate there. Possible contamination of the chamber walls by deposits can thus be further reduced.
  • the insert is preferably designed as a shell, the shape of which is particularly adapted to the shape of the chamber. Due to the shell shape, process impurities, deposits and other substances or particles can be captured particularly well and stored in the volume defined by the bowl.
  • the shell is preferably at least partially open on one side, in particular on the side which, in the intended installation position, is directed in the direction of the upstream pump stage. The deposits can thus be accumulated particularly well in the volume formed by the shell.
  • the chamber can extend in a ring, in particular below the pump stage, about a central axis of the vacuum pump, in particular about an axis of rotation of a rotor of the pump stage.
  • the chamber can thus form a kind of annular space under the pump stage, which among other things also has a favorable effect on the pumping speed of the pump stage.
  • the chamber preferably has an at least approximately rectangular cross section. This cross-sectional shape can be implemented particularly easily in terms of production technology.
  • the insert can be designed as a bowl-shaped shell with a bottom and, preferably vertically to the bottom, in particular upward, radially inside or radially outside, which is designed to correspond to the chamber and is at least partially open on its upper side.
  • the insert can thus be inserted, in particular in a suitable manner, into the annular chamber.
  • the shell like the chamber, can preferably have an at least approximately rectangular cross section.
  • the insert can be fixed and / or fixable in the chamber by means of at least one fixation.
  • the fixation can comprise, for example, at least one screw, by means of which the insert is fastened to the chamber or to an inner wall of the housing.
  • the screw can, for example, be screwed in or screwed into the bottom of the insert and the chamber bottom underneath.
  • a screw comes with a large one Head, such as a pan head screw or hexagon screw, because such a screw can be easily located on a floor covered with deposits and loosened with a tool.
  • the insert can also be designed and / or dimensioned in such a way that it can be fixed in the clamping assembly in the chamber with the stator package of the pump stage located above the chamber.
  • the stator package mentioned can be used as a kind of fixation for the insert.
  • the insert can be brought from a first form into a second form, in particular by pressing on the insert, the insert in the second form having a larger outside diameter and / or a smaller inside diameter compared to the first form, and / or wherein the insert has plastic and / or elastic changes in shape in the second form compared to the first form.
  • the insert can thus be inserted into the chamber in the first form and, in particular by pressing the insert or by inserting the insert into the chamber, the latter can be brought into the second form, as a result of which the outside diameter and / or the inside diameter of the Insert changes at least slightly, or as a result of plastic and / or elastic changes in shape of the insert.
  • the insert can be "clamped" in the chamber to a certain extent, so that the insert can be fixed in the chamber.
  • the shape change of the insert can be reversible. To remove or after removing the insert, it can be brought back into the first shape.
  • the change in shape can be made possible in that at least one side of the insert, in particular the radially outer side wall of the insert, is designed such that, for example, by pressing on the insert, the dimensions of the Side, especially their radial extent, is adjustable.
  • the change in shape can also be made possible in that at least one side of the insert, in particular the radially outer side wall of the insert, is designed such that the dimensioning of the side, in particular its axial extent, is adjustable, for example by pressing on the insert.
  • the side wall consists of at least two partial areas, which are connected by means of at least one peripheral deformation area with deformation elements and recesses, in particular in the axial direction, and is designed such that at least one deformation element is elastic or else by pressing on the insert is plastically deformed, with at least one recess being reduced and the axial extent of the side wall also being reduced.
  • the insert can be brought from a first shape into a second shape, in particular by pressing the insert, in which the insert, in particular the radially outer side wall, has a greater or lesser axial height than the first shape .
  • the axial extent of the insert can thus be adjustable.
  • At least one seal is preferably arranged between an outside of the insert and a side wall of the chamber.
  • the chamber wall behind the outside of the insert can thus be effectively protected against deposits.
  • the seal can also pinch the insert in the chamber and thus act as a fixation.
  • the seal which is preferably inserted between the upper edge of the insert and the side wall of the chamber behind it, can also act as a type of pressure distributor and distribute any existing tolerances or forces, in particular axial tolerances or forces, in such a way that the insert is firm on the one hand is fixed in the chamber and, on the other hand, a stator packet arranged upstream of the chamber is securely clamped.
  • the insert can be made from metal, in particular as sheet metal or foil, or from a, preferably inert, plastic, such as PTFE.
  • PTFE stands for polytetrafluoroethylene.
  • the insert may have at least one coating, in particular an anti-stick layer, e.g. with nickel or PTFE, and / or a foil-like layer.
  • an anti-stick layer e.g. with nickel or PTFE
  • the surfaces of the insert can be protected from aggressive deposits, for example.
  • the coating can be such that it can be removed by means of a cleaning agent, in particular with the deposits, and in particular can be rinsed out of the chamber.
  • the insert can be formed or produced by spraying or applying at least one layer of a spray film or the like on the sides of the chamber to be covered.
  • the layer can be removed from the chamber walls, in particular with the deposits accumulated thereon.
  • the layer can be such that it can be removed by means of a cleaning agent, in particular with the deposits, and in particular can be rinsed out of the chamber. A new layer can then be formed by spraying or applying again.
  • the insert can be made in one or more parts.
  • a backing pump e.g. a rotary vane pump.
  • a vacuum pump in particular a turbomolecular pump, comprising a housing with at least one inlet for fluid, in particular process gas or air, to which a recipient can be connected, and with at least one outlet for the fluid, and at least a pump stage arranged in the housing for conveying the fluid, in particular out of the recipient, through the vacuum pump from the inlet to the outlet, wherein in the housing, in particular a chamber opening into the outlet, preferably forming an ejection area of the vacuum pump, is formed, and wherein the chamber can be heated by means of at least one heating device. The chamber can thus be baked to remove the deposits from the chamber.
  • the in the Fig. 1 and 2nd The vacuum pump 10 shown comprises a housing 16 with a pump inlet 14 surrounded by an inlet flange 12, in the housing 16 a plurality of pump stages for conveying the gas present at the pump inlet 14 to a pump outlet 74 provided on the lower part 90 of the housing. Between the lower part 90 and the housing 16 there is one Seal 81 arranged.
  • the vacuum pump 10 comprises in the housing 16 or in the lower part 90 a stator and a rotor with a rotor shaft 20 which is rotatably mounted about an axis of rotation 18.
  • the vacuum pump 10 is designed as a turbomolecular pump and comprises a plurality of turbomolecular pump stages connected in series with one another with effective pumping, with a plurality of turbomolecular rotor disks 22 connected to the rotor shaft 20 and a plurality of turbomolecular stator disks 24 arranged in the axial direction between the rotor disks 22 and fixed in the housing 16, by spacer rings 26 are held at a desired axial distance from one another.
  • the pump-active system implemented by means of the turbomolecular pump stages is therefore built up in a regular alternation of rotor disks 22 and stator disks 24. Only some of the components shown for legibility have been identified with numbers.
  • the rotor disks 22 and stator disks 24 provide an axial pumping action in the direction of the arrow 30 in a scoop area 28.
  • the vacuum pump 10 can optionally have one or more Holweck pump stages, known per se, downstream of the turbomolecular pump stages, which are not shown.
  • Holweck pump stages known per se
  • three Holweck pump stages that are arranged one inside the other in the radial direction and have a pumping effect are connected in series with one another.
  • the rotor-side part of the Holweck pump stages can have a rotor hub connected to the rotor shaft 20 and two cylindrical jacket-shaped Holweck rotor sleeves attached to and supported by the rotor hub, which are oriented coaxially to the rotor axis 18 and in a radial direction Are nested in one another.
  • one, two or three cylindrical jacket-shaped Holweck stator sleeves can be provided, which are also oriented coaxially to the axis of rotation 18 and are nested in one another in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are each formed by the radial jacket surfaces, each opposing one another with the formation of a narrow radial Holweck gap, of a Holweck rotor sleeve and a Holweck stator sleeve.
  • one of the pump-active surfaces is smooth, in particular that of the Holweck rotor sleeve, and the opposite pump-active surface, in particular the Holweck stator sleeve, has a structure with grooves running helically around the axis of rotation 18 in the axial direction, in which through the Rotation of the rotor propels the gas and is thereby pumped.
  • the Holweck pump stages are not provided.
  • a sealing area 34 is formed by a special, in this case asymmetrically shaped stator disk 24, which keeps the remaining gaps to the rotor disks 22 minimal in order to achieve a better seal against unwanted backflows between the first and second pump stages.
  • a preload and sealing ring 32 is arranged between the inner wall of the housing 16 and the turbomolecular pump stages, in particular between two spacer rings 26.
  • the preload and sealing ring 32 ensures that the stack of spacer rings 26, which is subject to tolerances, is securely axially preloaded between the housing 16 and the lower part 90. Furthermore, it additionally seals the gap between the stack of spacer rings 26 and the wall of the housing 16 against unwanted backflows from the fore-vacuum / ejection area into the high-vacuum / suction area.
  • a flood gas inlet 36 is arranged on the housing 16, via which the vacuum pump 10 can be flooded with flood gas.
  • the flood gas inlet 36 is advantageously located Downstream of the pump or below the prestressing and sealing ring 32.
  • the spacer ring 26 located at the level of the connection is preferably provided on its outer surface with a channel or a recess over the entire circumference, so that the flood gas is first distributed throughout the ring channel with a good conductance and then penetrates the gap or the recesses in the stator stack with a lower conductivity as uniformly as possible over the circumference and reaches the pumping stages that are mechanically more stable against flooding.
  • a coolant inlet 38 and a coolant outlet 40 are arranged on the lower part 90, between which runs a coolant line formed by at least one coolant pipe 76, which is guided in turns around the lower part 90.
  • a coolant pump can be connected to the coolant inlet 38 and the coolant outlet 40, by means of which coolant can be pumped through the coolant line in order to cool the vacuum pump 10.
  • the coolant tube 76 can be in preformed recesses in the lower part 90, for example in accordance with EP 3 070 335 A1 , be pressed in.
  • the pipe ends can either protrude from the contour of the pump 10 as a respective pipe section at any angle, for example to be connected to the inlet 38 or outlet 40 using insulation displacement screw connections or special plug connectors.
  • connection blocks which form the inlet 38 or the outlet 40 and in turn are fixed to the lower part 90.
  • the tight connection of tube 76 and connection block 38, 40 can be established in different ways, e.g. by soldering, welding, clamping / pressing / stretching or with separate sealing elements, e.g. (cutting) sealing rings or bands or with special connectors with integrated Sealing system.
  • a coolant line is shown which, starting from the inlet 38, has three complete, spirally arranged wraps of the lower part 90 and then ends at the outlet 40.
  • any number or parts of wraps can intersect one or more times at different radius and / or at different axial heights of the axis of rotation 18 or can also reverse one or more times in their direction of rotation, e.g. by means of U-shaped bends or arranged deflection blocks, which take up two pipe ends similar to the connection blocks and establish a connection between them.
  • Such connection and deflection blocks can also contain a valve that regulates the coolant flow or can interrupt it if necessary.
  • any block can also have a further connection, on which e.g. An additional, in particular parallel, coolant line or one or more valves for deflecting or distributing the coolant flow into different branches of the coolant pipe system, which can also serve as a bypass or diversion, depending on the need, is or are present.
  • the rotatable mounting of the rotor shaft 20 is effected by a roller bearing 42 in the area of the pump outlet 74 and a permanent magnet bearing 44 in the area of the pump inlet 14.
  • the permanent magnet bearing 44 comprises a bearing half 46 on the rotor side and a bearing half 48 on the stator side, each of which comprises an annular stack of a plurality of permanent magnetic rings 50, 52 stacked one on top of the other in the axial direction, the magnetic rings 50, 52 lying opposite one another to form a radial bearing gap 54.
  • an emergency or catch bearing 56 is provided, which is designed as an unlubricated rolling bearing and runs empty during normal operation of the vacuum pump without contact and only comes into engagement with an excessive radial deflection of the rotor relative to the stator to form a radial stop for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
  • the emergency or catch bearing 56 is seized separately by an insert and can therefore be replaced independently of the permanent magnet bearing 44.
  • roller bearing 42 is held by a ring holder which, in turn, is received in an axially and radially decoupled manner by elastomeric elements in a roller bearing holder or roller bearing suspension 84 which is securely fixed to the lower part 90.
  • Mechanical stops limit the possible relative movements between the ring holder and rolling bearing suspension 84.
  • a conical injection screw 58 is provided on the rotor shaft 20 with an external diameter increasing toward the roller bearing 42, which can receive operating fluid, in particular lubricant, supplied by means of a lubricant channel 60 and feed it to the roller bearing.
  • the injection screw 58 can preferably according to EP 2 740 956 A2 be designed.
  • the operating medium is circulated by a lubricant pump 78.
  • the lubricant pump 78 is preferably in accordance with EP 2 060 794 A2 built up. In particular, it can supply a lubricant feed channel, which according to at least one segment EP 2 801 725 A2 is constructed as an O-ring sealed round channel.
  • the lubricant pump 78 can be used to implement an active, regulated supply of operating media.
  • the vacuum pump 10 comprises a drive motor 62 for rotatingly driving the rotor, the rotor of which is formed by the rotor shaft 20.
  • a control unit 64 controls the drive motor 62.
  • the vacuum pump 10 and in particular the control unit 64 and the drive motor can be connected via an electrical connection 66 62 can be supplied with electrical current.
  • the control unit 64 forms the lower region of the housing and is closed by the cover 80.
  • the control unit 64 with the cover 80 closes the lower part 90.
  • one or more seals 77 can be inserted all round between the control unit 64, cover 80 and / or lower part 90 or the corresponding transitions with other sealants, such as liquid sealants, adhesives or, in particular, mold seals that can be applied be closed to gain security against the ingress of media and / or contaminants.
  • sealants such as liquid sealants, adhesives or, in particular, mold seals that can be applied be closed to gain security against the ingress of media and / or contaminants.
  • Vacuum feedthrough 86 can be configured according to EP 1 843 043 A2 be configured, in the example described here a circuit board with a plurality of sealing rings, separate voltage potentials and signals separate from one another from the pump interior, that is to say from the vacuum region, to the outside, that is to say to the “atmosphere” and in particular to the control unit 64.
  • control unit 64 or the drive motor 62 or the pump-active components can mainly introduce undesirable heat into the pump via the housing 16.
  • the coolant such as water, advantageously flows from the inlet 38 to the outlet 40 since the control unit 64 is to be kept coolest.
  • a cover 88 can be arranged on the radial outer side of the lower part 90.
  • the cladding 88 which can be designed in the form of a jacket as a sheet metal sleeve slotted along the axis of rotation 18 of the pump 10, is advantageously not shown in the external view of the pump 10 in order to obtain a better view of the solutions underneath.
  • the cladding 88 can have one or more viewing windows or cutouts around any connections of the lower part 90, for example a sealing gas inlet 68, to the outside or to reveal the type data (type plate or engraving) of the pump 10, which are attached to the lower part in a non-detachable manner.
  • the sealing gas inlet 68 is also referred to as a purge gas connection.
  • Purge gas can be introduced via the sealing gas inlet 68 to protect the engine 62 in the engine compartment in which the engine 62 is accommodated.
  • the gas admitted in the area of the engine via the sealing gas inlet 68 protects the components located in the lower part 90 from corrosive and / or deposited media which can occur in the pump system, depending on the application.
  • a seal 83 is arranged between the motor mount 82 and the lower part 90, so that a labyrinth seal 72, as the only remaining passage, on the one hand, with its low conductance, represents a lock against inflowing media in the motor and roller bearing area and furthermore an increased saturation of the roller bearing and motor area with lock - / inert gas secures.
  • the labyrinth seal 72 is provided between a motor mount 82 which delimits the motor space upwards and the lower rotor disk 22.
  • the electric drive motor 62 is advantageously protected against corrosion by a casting compound.
  • the motor mount 82 is cast integrally with the drive motor, so that the entire unit, including the stator side of the labyrinth seal 72, which is made in one piece with the motor mount, can be optimally aligned or centered in one step with the lower part 90.
  • the forevacuum area is located radially outside of the labyrinth seal 72 and below the turbomolecular pump stages, in which, in particular, a chamber 70 is formed which surrounds the axis of rotation 18 and which, as in FIG Fig. 2 and 3rd can be seen has a substantially rectangular cross section.
  • This cross-sectional shape can only be seen as an example, so that another cross-sectional shape, for example a square or circular cross-section, can also be realized.
  • the chamber 70 can also be accommodated at another location in the housing 16 or in the lower part 90.
  • chamber 70 is where most of the deposits are, typically in the fore-vacuum area.
  • the chamber 70 is thus particularly preferably between the last pump stage and the pump outlet 74.
  • the chamber 70 opens into the pump outlet 74.
  • the chamber 70 therefore forms an ejection area for the gas conveyed by the vacuum pump 10 from the inlet 14, which can reach a fore-vacuum pump (not shown) connected to it via the pump outlet 74.
  • the backing pump can then deliver the gas further, for example into a line for exhaust gas, which is under normal pressure.
  • the sectional view of the Fig. 3 corresponds to the sectional view of Fig. 2 . It is according to Fig. 3 in the chamber 70 an insert 92 is arranged on which deposits can accumulate or accumulate, which get into the pump 10 via the gas sucked in by the pump 10 and which experience has shown to predominantly deposit in the chamber 70.
  • Deposits 92 such as substances, particles and / or liquid droplets, are not deposited directly on the walls of chamber 70 covered or covered by insert 92, but rather on insert 92 maintenance of the pump 10 are removed from the chamber 70 and cleaned or replaced by a new insert 92. The deposits can therefore be easily removed from the pump 10.
  • the insert 92 is essentially designed to match the shape of the chamber 70.
  • the insert 92 can thus be inserted into the chamber 70 in a suitable manner.
  • the insert 92 can then lie directly in front of the chamber walls to be covered.
  • the insert 92 like the chamber 70, a circular ring shape with a substantially rectangular cross section when viewed in the radial direction.
  • the insert 92 is preferably made of sheet metal. However, it can also be made of another material, such as plastic, in particular PTFE.
  • the insert 92 comprises a bottom 94, a radially inner side wall 96 and a radially outer side wall 98, which extend approximately or completely vertically away from the bottom 94. If, for example, the insert 92 is produced at least partially in a reshaping or original manner, one or more elements can advantageously have bevels.
  • the bottom 94 and the side walls 96, 98 enclose a volume 100 which is open at the top.
  • the insert 92 is therefore in the form of an annular shell or, more generally, the shape of an annular container.
  • the upper side facing the upstream pump stage is open. Gas discharged from the pump stage can thus get into the volume 100 without being blocked by a wall or the like, so that deposits can accumulate particularly well in the volume 100.
  • the insert 92 also has an outlet opening 102 (cf. 4 and 5 ), the cross section of which preferably corresponds to the cross section of the pump outlet 74.
  • the insert 92 is arranged in the chamber 70 such that the outlet opening 102 is aligned with the pump outlet 74. The gas can thus flow through the outlet opening 102 into the pump outlet 74 and thus out of the pump 10.
  • the outlet opening 102 can in particular be created in that it is cut out of the insert 92 or otherwise separated out.
  • the insert 92 is fixed in the chamber 70, preferably by means of at least one fixation.
  • the insert 92 can, for example, be fixed in the clamping association with the package of the stator disks 24. How Fig. 3 indicates that the radially outer side wall 98 can extend so far upwards that its upper end strikes the lowermost stator disk 24.
  • the insert 92 can therefore be fixed in the chamber 70 by means of the lowest stator disk 24.
  • the upper end of the radially inner side wall 96 can be directed radially inward. However, contrary to the illustration, it is preferably ensured that there is a small gap between the upper end of the side wall 96 and the lowermost rotor disk 22 located there, so that the rotor disk 22 can rotate about the axis of rotation 18 on the side wall 96 without abrasion.
  • Fig. 4 shows a section of the sectional view of Fig. 3 , in which part of a variant of the insert 92 can be seen in cross section.
  • the part of the insert 92 is located in the region of the pump outlet 74 and has the outlet opening 102 already mentioned above.
  • an orifice section 106 extends in the fore-vacuum connection 104 of the pump 10 having the pump outlet 74.
  • the orifice section 106 can be designed as a separate part, in particular as a tubular part with an outer diameter which essentially corresponds to the inner diameter of the fore-vacuum connection 104.
  • the mouth section 106 can be introduced into the fore-vacuum connection 104.
  • the channel 108 formed by the mouth section 106 can connect to the outlet opening 102 of the insert 92.
  • the mouth section 106 can also be formed in one piece with the insert 92.
  • Fig. 5 shows a section of the sectional view of Fig. 3 , in which in turn the part of the insert 92 can be seen in cross section, which is located in the region of the pump outlet 74 and has the outlet opening 102.
  • the mouth section 106 is formed according to the invention by the material which is obtained by cutting out the outlet opening 102.
  • the mouth section 106 can be formed by triangular pieces of material 110, which are formed by a kind of star-shaped opening or cutting out of the outlet opening 102.
  • the pieces of material 110 remain connected to the insert 92.
  • the pieces of material 110 can be pressed into the fore-vacuum nozzle 104 and in particular brought into contact with the inner wall of the fore-vacuum nozzle 104.
  • the covered inner wall areas of the socket 104 are thus protected against deposits.
  • Fig. 6 shows a section of the sectional view of Fig. 3 , in which a part of another variant of the insert 92 can be seen in cross section.
  • a screw 112 can be screwed into a hole in the bottom 94 of the insert 92 and into an underlying hole in the bottom of the chamber 70 in order to fix the insert 92.
  • the screw 112, as shown, is preferably a pan head screw so that it is easy to find when the bottom 94 is covered with debris.
  • a plurality of screws 112 for fixing the insert 92 can be screwed into the bottom 94 of the insert 92 or into the chamber bottom.
  • Fig. 7 shows a section of the sectional view of Fig. 3 , in which a part of yet another variant of the insert 92 can be seen in cross section, which in comparison to the variant of FIG Fig. 6 has no screw 112 for fixation.
  • the insert 92 is again open on its top 114.
  • the openings 116 are preferably as in FIG Fig. 7 is shown, arranged in the region of the upper edge of the side wall 98.
  • the upper edge of the side wall 98 has a wavy structure due to the openings 116.
  • the insert 92 can be brought from a first shape into a second shape, in particular by pressing the side wall 98 from above, the insert 92 being reduced or compressed in the second shape as seen in the axial direction.
  • the upper edge of the side wall 98 with the openings 116 forms a circumferential deformation area.
  • the openings 116 can be plastically or elastically deformed and reduced, so that the axial extension of the side wall 98 is reduced and the insert 92 is thus compressed in the axial direction.
  • the openings 114 therefore allow the side wall 98 to be axially deflected to vary the overall height.
  • the insert 92 can behave like a kind of spiral spring and can thus be clamped between the lowest stator disk 24 and the chamber bottom.
  • the insert 92 can also be designed such that the outer side wall 98 can be moved at least slightly radially outward and / or the inner side wall 96 radially inward by "pressing in” the insert 92, so that it lies in contact with the inner or reaches outer chamber wall.
  • the insert 92 can thereby also be fixed or tensioned in the chamber 70.
  • This can be made possible, for example, by the fact that the side wall 98 has a plurality of through openings 116 which are offset with respect to one another in the circumferential direction and which, starting from the upper edge of the side wall, run at least substantially in the axial direction downward (not shown).
  • the side wall 98 has a number offset at its upper edge in the circumferential direction tabs lying opposite one another, which can tilt radially outward, for example, in order to clamp the insert 98 in the chamber 70.
  • Fig. 7 also shows, in the radially outer wall of the chamber 70 one in the circumferential direction of the side wall 98 or in the direction of rotation of the axis of rotation 18 (cf. Fig. 3 ) circumferential groove 118 may be formed.
  • the radially outward, upper end of the side wall 98 can engage in the groove 118, as a result of which the fixation of the insert 92 in the chamber 70 can be further improved.
  • the groove 118 preferably runs directly below the lowermost stator disk 24.
  • the radially outer side wall 98 also has a slightly cranked, raised edge which abuts the first or lowermost stator disk 24 axially and is under axial pressure.
  • Fig. 8 shows a section of the sectional view of Fig. 3 , in which part of a variant of the insert 92 can be seen in cross section.
  • a seal 120 which extends around the axis of rotation 18 is arranged between the radially outer side wall 98 of the insert 92 and the outer wall of the chamber 70.
  • the seal 120 is preferably inserted into a circumferential groove 118 which is introduced into the outer side wall 98.
  • a seal 122 is inserted which extends around the axis of rotation 18.
  • the seals 120 and 122 act as a type of pressure distributor and fix the insert 92 in the chamber 70. In addition, they provide a sealing effect between the respective side wall 96, 98 of the insert 92 and the respective chamber wall located behind it.
  • Fig. 9 shows a section of the sectional view of Fig. 3 , in which part of a variant of the insert 92 can be seen in cross section.
  • a seal 124 is inserted which surrounds the axis of rotation 18, as a result of which the insert 92 is fixed in the chamber 70.
  • the in the 8 and 9 Seals 120, 122 and 124 shown are preferably designed as O-ring seals.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (12)

  1. Pompe à vide, en particulier pompe turbomoléculaire, comportant
    un boîtier (16, 90) pourvu d'au moins une entrée (14) pour fluide, en particulier pour gaz de traitement ou air, à laquelle peut être raccordé au moins un récipient, et d'au moins une sortie (74) pour le fluide, et
    au moins un étage de pompage disposé dans le boîtier (16, 90) et destiné à refouler le fluide, en particulier hors du récipient, à travers la pompe è vide (10) depuis l'entrée (14) jusqu'à la sortie (74),
    dans laquelle
    une chambre (70) est réalisée dans le boîtier (16, 90), et
    au moins un insert (92) destiné à accueillir des dépôts est disposé dans la chambre (70) et recouvre au moins une face de la chambre (70) qui délimite la chambre (70),
    l'insert (92) présente une ouverture de sortie (102) qui peut en particulier être alignée avec la sortie (74) sur le boîtier (16, 90) de la pompe à vide (10),
    la sortie (74) de la pompe (10) comprend un manchon de vide primaire (104) dans lequel débouche la chambre (70), et l'insert (92) comprend au moins une portion d'embouchure (106) qui peut être insérée ou qui est insérée dans le manchon de vide primaire (104),
    caractérisée en ce que
    la portion d'embouchure (106) est formée, en particulier exclusivement, par la partie du matériau de l'insert (92) qui a été séparée de l'insert (92) pour créer l'ouverture de sortie (102).
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    l'insert (92) est réalisé de manière à recouvrir en particulier au moins largement complètement le fond de la chambre (70) et/ou une paroi latérale de la chambre (70) délimitant la chambre (70) radialement vers l'extérieur et/ou une paroi latérale de la chambre (70) délimitant la chambre (70) radialement vers l'intérieur.
  3. Pompe à vide selon la revendication 1 ou 2,
    caractérisée en ce que
    l'insert (92) enferme au moins partiellement un volume (100) et présente au moins une ouverture dans au moins une face, en particulier dans la face supérieure (114), ou est complètement ouvert sur ladite face.
  4. Pompe à vide selon la revendication 3,
    caractérisée en ce que
    l'insert (92) peut être monté dans la chambre (70) de telle sorte que la face, en particulier la face supérieure (114), est tournée vers l'étage de pompage.
  5. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    la forme de l'insert (92) réalisé en particulier en forme de coque est adaptée au moins sensiblement à la forme de la chambre (70).
  6. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    en particulier au-dessous de l'étage de pompage, la chambre (70) s'étend en forme annulaire autour d'un axe central de la pompe à vide, en particulier autour d'un axe de rotation (18) d'un arbre de rotor (20) de la pompe (10), et
    de préférence, la chambre (70) présente une section transversale au moins approximativement rectangulaire.
  7. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'insert (92) est conçu sous la forme d'une coque de préférence annulaire, au moins partiellement ouverte en haut, conçue en correspondance de la chambre (70), coque qui comprend un fond (94) et des parois latérales (96, 98) s'étendant de préférence verticalement vers le fond (94) et situées radialement à l'intérieur ou radialement à l'extérieur.
  8. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'insert (92) est fixé et/ou peut être fixé dans la chambre (70) au moyen d'au moins une fixation (112, 120, 122, 124).
  9. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'insert (92) peut être amené d'une première forme en une seconde forme, en particulier par le fait d'appuyer sur l'insert (92), dans laquelle l'insert (92) présente un diamètre extérieur plus grand et/ou un diamètre intérieur plus petit que celui de la première forme, et/ou dans laquelle l'insert (92) présente des modifications de forme plastiques et/ou élastiques, et/ou dans laquelle l'insert (92) présente une hauteur axiale supérieure ou inférieure à celle de la première forme.
  10. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    au moins un joint d'étanchéité (120, 122, 124) est disposé entre une paroi (94, 96, 98) de l'insert (92) et une paroi de la chambre (70).
  11. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'insert (92) est réalisé en métal, en particulier sous la forme d'une tôle ou d'une feuille, ou en matière plastique de préférence inerte, tel que le PTFE.
  12. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'insert (92) présente au moins un revêtement, en particulier une couche antiadhésive, par exemple à base de nickel ou de PTFE, une couche du type feuille ou une couche formée par un film pulvérisé.
EP16206042.0A 2016-12-22 2016-12-22 Pompe à vide avec chemise intérieure recueillant des dépôts Active EP3339652B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP16206042.0A EP3339652B1 (fr) 2016-12-22 2016-12-22 Pompe à vide avec chemise intérieure recueillant des dépôts
JP2017230365A JP6469205B2 (ja) 2016-12-22 2017-11-30 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP16206042.0A EP3339652B1 (fr) 2016-12-22 2016-12-22 Pompe à vide avec chemise intérieure recueillant des dépôts

Publications (2)

Publication Number Publication Date
EP3339652A1 EP3339652A1 (fr) 2018-06-27
EP3339652B1 true EP3339652B1 (fr) 2020-07-01

Family

ID=57588864

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16206042.0A Active EP3339652B1 (fr) 2016-12-22 2016-12-22 Pompe à vide avec chemise intérieure recueillant des dépôts

Country Status (2)

Country Link
EP (1) EP3339652B1 (fr)
JP (1) JP6469205B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114526233B (zh) * 2022-03-02 2024-05-10 安徽理工大学 罗茨转子和螺杆转子串联的复合干式真空泵及使用方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04116693U (ja) * 1991-03-29 1992-10-19 セイコー精機株式会社 真空ポンプ
JPH0599190A (ja) * 1991-10-08 1993-04-20 Mitsubishi Electric Corp 半導体製造装置
DE19857453B4 (de) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperaturüberwachung an Rotoren von Vakuumpumpen
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102006016405B4 (de) 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
DE102007053979A1 (de) 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Schmiermittelpumpe
DE102012023727B4 (de) 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Schmiermitteleinrichtung für ein Wälzlager
DE102013208614A1 (de) 2013-05-10 2014-11-13 Pfeiffer Vacuum Gmbh Vorrichtung mit mindestens einem Kanal zum Führen eines gasförmigen oder flüssigen Betriebsmittels
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
JP6390478B2 (ja) * 2015-03-18 2018-09-19 株式会社島津製作所 真空ポンプ
EP3070335B1 (fr) 2015-03-20 2019-07-31 Pfeiffer Vacuum GmbH Boîtier pour une pompe à vide et/ou pour une partie d'une pompe à vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP2018109401A (ja) 2018-07-12
EP3339652A1 (fr) 2018-06-27
JP6469205B2 (ja) 2019-02-13

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