EP1916877A1 - Verfahren und Vorrichtung zur Regulierung der Stromversorgung eines Magnetrons und Anlage zur Behandlung von thermoplastischen Behältern, bei dem diese zum Einsatz kommen - Google Patents

Verfahren und Vorrichtung zur Regulierung der Stromversorgung eines Magnetrons und Anlage zur Behandlung von thermoplastischen Behältern, bei dem diese zum Einsatz kommen Download PDF

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Publication number
EP1916877A1
EP1916877A1 EP07118496A EP07118496A EP1916877A1 EP 1916877 A1 EP1916877 A1 EP 1916877A1 EP 07118496 A EP07118496 A EP 07118496A EP 07118496 A EP07118496 A EP 07118496A EP 1916877 A1 EP1916877 A1 EP 1916877A1
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EP
European Patent Office
Prior art keywords
instantaneous
magnetron
value
power
sampling
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EP07118496A
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English (en)
French (fr)
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EP1916877B1 (de
Inventor
Ertan Cetinel
Nicolas Chomel
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Sidel Participations SAS
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Sidel Participations SAS
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/66—Circuits
    • H05B6/68—Circuits for monitoring or control

Definitions

  • the present invention relates to improvements made in the field of regulation as a function of an instant microwave power setpoint, the power supply of a magnetron belonging to UHF electromagnetic wave generating means.
  • the improvements proposed by the invention must find a preferred application, although not exclusive, in the field of the deposition of a coating, such as a barrier coating, on one side of at least one container of thermoplastic material to using a low-pressure plasma by excitation of a precursor gas by electromagnetic waves included in the UHF band in a vacuum cavity of cylindrical shape adapted to receive said container, said UHF electromagnetic waves being emitted by a generator of UHF wave comprising a magnetron having an anode and power supply means connected to said anode for supplying it with current under a high voltage.
  • a coating such as a barrier coating
  • the document FR 2,776,540 exposes such a process of formation of a barrier layer and in particular the documents FR 2 783 667 , FR 2 792 854 , FR 2,847,912 present various examples of devices for performing such a deposit.
  • a fortiori in the case of industrial installations with a large production capacity comprising a multiplicity of deposition devices, it is important to control the precision of the level of the instantaneous microwaves energy supplied in all the cavities of all the devices of the installation so as to minimize the disparity of performance between the devices of the same machine, or even between various machines, and thus the quality disparities between the containers that have been treated respectively in a plurality of devices.
  • the magnetron which is the heart of any system using microwaves, transforms a high input voltage (several kilovolts) into a given ultra-high frequency electromagnetic wave (microwave).
  • the high voltage is delivered by a high voltage generator which is suitable for transforming a low supply voltage (in particular the voltage of a conventional power supply network, for example 400 volts three-phase) into a high voltage modulated as a function of the desired microwave energy at the output of the magnetron.
  • the magnetron manufacturers provide, for each magnetron reference, the basic curves for defining the characteristics of the high voltage generator.
  • the curve of variation of the anode current as a function of the microwave power emitted the curve of variation of the electrical efficiency as a function of the micro power can be arranged. emitted waves, and the variation curve of the high voltage to be applied to the magnetron as a function of the microwave power emitted.
  • the electrical efficiency of the magnetron is substantially stable for a given microwave power emitted and it varies slightly as a function of the microwave power emitted (in a typical example of a magnetron, the variation of the electrical efficiency is of the order of 2, 8% for an emitted microwave power ranging from 350 to 900 W).
  • the average power setpoint does not vary between these two phases of operation.
  • the variations of the voltage and the current applied to the magnetron are solely related to the behavior of the magnetron to a reflected energy which varies.
  • anodic current regulation In an attempt to maintain the microwave power effectively emitted by the magnetron at the reference value, it is known to implement anodic current regulation: an anodic current / microwave power proportionality coefficient is predefined (this characteristic may be part of the data provided by the magnetron manufacturer); in operation, the value of the anode current is measured continuously and a proportional correction is applied to the anode current as a function of the load variations of the high voltage generator so as to keep the microwave power emitted by the magnetron as constant as possible relative to the setpoint power.
  • the regulation speed of the generator is chosen relatively slow (response time greater than 100 milliseconds), whereas the transition from the highly unsuitable load condition to the better adapted load condition is very short and can correspond approximately to a period of high voltage (for example of the order of 10 to 20 ms).
  • the imbalance mentioned above can extend over several pulses of the high voltage, with an imbalance of the power delivered by the high voltage generator for a substantially similar emitted microwave power.
  • FIG. 1 of the appended drawings shows a graph characterizing the operation of a typical example of a magnetron and showing, as a function of time (in abscissae, expressed in seconds), the evolution ( solid line curve) of the high voltage across the magnetron (on the ordinate on the right scale, expressed in volts) and the evolution (dashed curve) concomitant of the anode current regulated under the aforementioned conditions (on the ordinate on the left scale, expressed in milliamperes).
  • the high voltage has a minimum value of -3.6 kV; the percentage of energy reflected by the poorly adapted charge (the plasma is not yet established) is high.
  • the high voltage takes a value of -4 kV; the plasma is established and the charge is better adapted with a percentage of reflected energy which is less.
  • the operating conditions of the current devices equipped with high-voltage generators with anodic current regulation for maintaining the microwave power emitted by the magnetron at a set value, are not optimal because the high voltage generator undergoes large and rapid variations in power.
  • the object of the invention is to propose improved means (method and device) which better meet the requirements of the practice, and which in particular make it possible to improve and optimize at lower cost the accuracy of the instantaneous microwave power emitted by the magnetron with respect to the instantaneous reference power in the context where a rapidly variable level of microwave energy is reflected towards the magnetron.
  • the arrangements according to the invention can give rise to various control variants.
  • a power-frequency conversion is performed to control resonant converter power supply means.
  • the process which has just been described can find an application that is particularly advantageous when the magnetron emits UHF electromagnetic waves into a vacuum cavity of substantially cylindrical shape adapted to receive at least one container of thermoplastic material on one side of which a coating of a barrier material is deposited using a low-pressure plasma by excitation of a precursor gas by said UHF electromagnetic waves.
  • Such a device can be arranged to implement various control variants.
  • the power supply means are of the resonance converter type whose resonant frequency is the electrical control quantity and the electric power-magnitude control converter means are power-frequency converter means.
  • the electrical efficiency of the magnetron is a predetermined constant value held in memory. .
  • the device comprises storage means capable of holding in memory a correspondence between a plurality of pairs of values. the magnitude of the anode current of the magnetron and the voltage across the magnetron and the same plurality of respective values of the electrical efficiency of the magnetron.
  • the electrical power supply means of the magnetron anode comprise a switched-mode power supply. resonance incorporating a bridge of power switches controlled in pairs respectively by two control units and a resonance filter mounted in a diagonal of said jumper bridge and said power-frequency converter means have two phase-opposite outputs which are connected respectively to said two control units.
  • the control device which has just been exposed can be implemented in a particularly advantageous manner in an installation for depositing a coating on one side of at least one container of thermoplastic material using a low pressure plasma by exciting a precursor gas by UHF electromagnetic waves in a cylindrical vacuum cavity receiving said container, said apparatus comprising a UHF wave generator and a UHF waveguide for connecting said generator to a sidewall window of the cavity, said UHF wave generator comprising a magnetron having an anode, power supply means connected to said anode for supplying said anode with current under a high supply voltage and a regulating device for regulating, in function of an instant microwave power set point, the magnetron power supply; in particular, it may be a carousel type rotating installation equipped with a multiplicity of processing stations each provided with a magnetron with its regulated power supply in accordance with the invention.
  • FIG. 2 a simplified block diagram of a preferred embodiment according to the invention of a high voltage power supply device of a magnetron designated M to from a power source which, in practice, may be a general AC power supply network, typically a three-phase network under 400 V, designated S.
  • the device is, in general, an AC-type power supply.
  • the device comprises, at the input, a stage 1 for rectifying and filtering the alternating voltage, which delivers a rectified and smoothed voltage which is applied static power supply means 2, which may have any suitable constitution, in order to generate an alternating voltage.
  • resonant-type generator power supply means 2 which comprises, as illustrated, a set of four switches Q1 to Q4 (typically fast switching transistors) mounted in bridge and two control units 3 and 4 for controlling each a pair of switches respectively Q1, Q3 and Q2, Q4.
  • a resonance filter 5 is mounted in the diagonal of the bridge between Q1, Q3 on one side and Q2, Q4 on the other side.
  • This resonant filter 5 located in the current branch of the converter is constituted by a combination of inductances and capacitors whose values are chosen so as to obtain an optimum resonant frequency with an appropriate overvoltage coefficient (or quality). .
  • the operation of this feed is known to those skilled in the art and will be briefly recalled below.
  • the resonance filter modulates the amplitude of the input signal.
  • the value of this amplitude variation is a function of the characteristics of the elements composing the filter and the frequency of the signal. It also modifies the phase difference existing between the voltage and the current.
  • the amplitude is maximum when the signal frequency corresponds to the resonant frequency of the filter. It is attenuated according to the difference between the resonance frequency and the actual signal frequency.
  • the alternating voltage is collected in an amplifier unit 6. very high frequency which is then amplified in amplitude in said amplifier unit 6. After recovery and smoothing in an output unit 7, located downstream of the amplifying unit 6, the UHF power signal is applied to the magnetron anode M.
  • the control loop may comprise, at the output of the output unit 7, intensity measuring means 8 and voltage measuring means 9, constituted by sensors, known per se, which respectively detect the intensity instantaneous anodic current Ib and the instantaneous value Ebm of the high voltage which are delivered on the anode of the magnetron M.
  • the means 8, 9 for measuring the intensity and the high voltage are connected to two respective inputs of a microcontroller 10, for example of the DSP (Digital Signal Processor) type, of which two out of phase outputs are respectively connected to the control inputs of control units 3 and 4 of switches Q1 to Q4.
  • the microcontroller 10 processes the values of anode current Ib and high voltage Ebm and manages the power regulation by acting on the control units 3, 4 which drive the power switches Q1 to Q4 in high frequency, in particular by implementing a pulse width modulation technique.
  • Microcontroller 10 is also applied, by a device 19 of human-machine interface, information Pmoy of set power (average microwave power) given by the operator and from which is established the instantaneous power microwaves desired for the operation of the device.
  • storage means 20 connected to the microcontroller 10, store in memory at least one value of the electrical efficiency n of the magnetron M which has been predetermined.
  • the difference in magnetron power between the two pulses PA and PB is only 3.4% for a near average transmitted microwave power.
  • the magnetron thus operates in conditions of regularity much better than in the current devices.
  • FIG. 3 illustrates an advantageous concrete example of embodiment of the microcontroller 10.
  • the average power Pmoy setpoint that is entered by the operator by means of the device 19 man-machine interface is processed by a conversion unit 11 which converts it into a nominal instantaneous power signal having a low frequency that can be typically of the order of 100 Hz.
  • the instantaneous reference power signal is then digitized in a sampling unit 12.
  • the sampling frequency can typically be of the order of 20 kHz, which leads to about 200 measurement points on a period T of the instantaneous reference power signal.
  • the sampling unit 12 is provided with two outputs delivering the sampling values at two consecutive sampling points n and n + 1 respectively.
  • the output receiving the value Pinst_c at the sampling point n is connected to an input (for example the + input) of a comparator 13, such as an algebraic comparator.
  • a comparator 13 such as an algebraic comparator.
  • the other input (input -) of the algebraic comparator 13 receives the signal of a control loop which is constituted as follows.
  • the measured instantaneous high-voltage signals Ebm_m and measured instantaneous anode current Ib_m are respectively detected by the two aforementioned measurement means 9 and 8 at the terminals of the magnetron M, and are then sent to a sampling unit 16 for these two signals.
  • This quantity is in turn applied to an input of second multiplier means 18, of which another input receives the output information of the magnetron M.
  • the output signal of the second multiplier means 18 represents the measured instantaneous microwave power Pinst_m, otherwise says the power effectively transformed into microwave power by the magnetron.
  • the average microwave power is calculated using means 21 integrators. measured that is presented to the operator (human-machine interface device 19) to allow a visual comparison with the average microwave power setpoint.
  • the correction unit 14 algebraically corrects the value Pinst_c at the point n + 1 with the value of the difference ⁇ calculated at the sampling instant at the point n, as a function of the value of the instantaneous reference power sampled at said instant immediately following sampling, at the point n + 1, and the predetermined regulation law valid at said sampling time at the point n + 1.
  • the control power / electrical quantity conversion unit 15 delivers a signal of frequency as a function of time, limited to F_min and F_max values.
  • the magnetron M is supplied with a power regulated according to the power setpoint given by the user.
  • a power-to-control electrical power conversion is performed.
  • the power delivered to the magnetron is thus regulated according to a power instruction given by the user.
  • the used value of the electrical efficiency of the magnetron be as accurate as possible. This value can vary considerably depending on the operating conditions of the magnetron.
  • the stationary wave ratio typically less than about 2
  • the electrical efficiency of the magnetron can be considered as substantially constant, and its value is determined by prior measurements. It is this value that is exploited and entering the second means 18 multipliers aforementioned.
  • the advantage of the proposed solution lies in its very great simplicity and its great economy of implementation which does not use any sensor or additional calculation means; since the microcontroller is already required for the operation of the installation in which the magnetron is included with its regulated power supply and the measurements of the instantaneous anode current and the instantaneous voltage applied to the magnetron being necessary elsewhere, the only specific requirement lies in the predetermination of a table or a modeling equation giving the various values of the electrical efficiency of the magnetron as a function of the instantaneous current-current value couples, which, given the performance of current electronic equipment, does not constitute a penalizing constraint .
  • the arrangements according to the invention can find a very interesting application in an installation for depositing a coating on one side of at least one container of thermoplastic material using a low-pressure plasma by excitation of a precursor gas.
  • UHF electromagnetic waves in a cylindrical vacuum cavity receiving said container said installation comprising a UHF wave generator and a UHF waveguide for connecting said generator to a window of the cavity side wall, said generator of UHF waves comprising a magnetron M having an anode, power supply means 2 connected to said anode for supplying it with current under a high supply voltage and a regulating device for regulating, according to a microwave power set point
  • it may advantageously be a rotating carousel-type installation equipped with a multiplicity of container treatment stations, each of which includes a magnetron with its regulated power supply.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Microwave Tubes (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
EP07118496A 2006-10-25 2007-10-15 Verfahren und Vorrichtung zur Regulierung der Stromversorgung eines Magnetrons und Anlage zur Behandlung von thermoplastischen Behältern, bei dem diese zum Einsatz kommen Not-in-force EP1916877B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0609379A FR2908009B1 (fr) 2006-10-25 2006-10-25 Procede et dispositif de regulation d'alimentation electrique d'un magnetron, et installation de traitement de recipients thermoplastiques qui en fait application

Publications (2)

Publication Number Publication Date
EP1916877A1 true EP1916877A1 (de) 2008-04-30
EP1916877B1 EP1916877B1 (de) 2010-01-20

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EP07118496A Not-in-force EP1916877B1 (de) 2006-10-25 2007-10-15 Verfahren und Vorrichtung zur Regulierung der Stromversorgung eines Magnetrons und Anlage zur Behandlung von thermoplastischen Behältern, bei dem diese zum Einsatz kommen

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Country Link
US (1) US8530806B2 (de)
EP (1) EP1916877B1 (de)
JP (1) JP4888334B2 (de)
CN (1) CN101178609B (de)
AT (1) ATE456286T1 (de)
DE (1) DE602007004404D1 (de)
ES (1) ES2339712T3 (de)
FR (1) FR2908009B1 (de)
PT (1) PT1916877E (de)

Cited By (3)

* Cited by examiner, † Cited by third party
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CN105744667A (zh) * 2015-07-20 2016-07-06 广东美的厨房电器制造有限公司 微波炉及微波炉变频电源的启动控制装置和方法
WO2017012338A1 (zh) * 2015-07-20 2017-01-26 广东美的厨房电器制造有限公司 一种微波炉及微波炉变频电源的启动控制装置和方法
CN109287020A (zh) * 2018-11-15 2019-01-29 四川蔚宇电气有限责任公司 一种用于提升微波输出稳定性的微波源系统及方法

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JP5820661B2 (ja) * 2010-09-14 2015-11-24 東京エレクトロン株式会社 マイクロ波照射装置
EP2469974B1 (de) * 2010-12-21 2017-01-25 Whirlpool Corporation Verfahren zum Steuern der Kühlung in einer Mikrowellen-Heizvorrichtung und Vorrichtung dafür
CN103869871B (zh) * 2014-03-21 2015-10-28 毛晓娟 微波功率控制方法
CN104090624B (zh) * 2014-04-03 2016-03-02 湖南华冶微波科技有限公司 控制工业微波设备的功率的方法及装置
CN104315564B (zh) * 2014-10-29 2017-02-15 广东美的厨房电器制造有限公司 微波炉及微波炉的微波功率调整方法
JP6754665B2 (ja) * 2016-10-18 2020-09-16 東京エレクトロン株式会社 マイクロ波出力装置及びプラズマ処理装置
CN106535456B (zh) * 2016-11-14 2019-10-08 上海联影医疗科技有限公司 功率控制组件以及控制磁控管到设定功率的方法
CN106604517B (zh) * 2016-11-14 2019-10-08 上海联影医疗科技有限公司 功率和频率控制组件以及相应的控制磁控管的方法
CN109936346B (zh) * 2017-12-19 2023-04-14 关英怀 I/o口隔离功率可校准的微波治疗机控制装置
BE1029582B1 (de) * 2021-07-12 2023-02-06 Miele & Cie Hochfrequenz-Haushaltsgerät, vorzugsweise Hochfrequenz-Küchengerät
CN115800995B (zh) * 2023-02-06 2023-05-02 中国科学院合肥物质科学研究院 一种回旋管振荡器的输出波功率控制方法、装置及设备
CN116367374B (zh) * 2023-04-19 2025-12-12 华瓷聚力(厦门)新材料有限公司 一种微波加热炉功率控制及展平方法

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EP0252889A2 (de) * 1986-07-04 1988-01-13 Tetra Pak Processing Systems Aktiebolag Verfahren und Anordnung zur Steuerung von Magnetrons
EP1561840A1 (de) * 2002-10-09 2005-08-10 Toyo Seikan Kaisya, Ltd. Verfahren zur herstellung eines metalloxidfilms und mikrowellenleistungsquelle zur verwendung bei diesem verfahren

Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN105744667A (zh) * 2015-07-20 2016-07-06 广东美的厨房电器制造有限公司 微波炉及微波炉变频电源的启动控制装置和方法
WO2017012338A1 (zh) * 2015-07-20 2017-01-26 广东美的厨房电器制造有限公司 一种微波炉及微波炉变频电源的启动控制装置和方法
CN105744667B (zh) * 2015-07-20 2019-07-02 广东美的厨房电器制造有限公司 微波炉及微波炉变频电源的启动控制装置和方法
CN109287020A (zh) * 2018-11-15 2019-01-29 四川蔚宇电气有限责任公司 一种用于提升微波输出稳定性的微波源系统及方法

Also Published As

Publication number Publication date
PT1916877E (pt) 2010-04-14
EP1916877B1 (de) 2010-01-20
ES2339712T3 (es) 2010-05-24
US20080099472A1 (en) 2008-05-01
FR2908009A1 (fr) 2008-05-02
JP2008163450A (ja) 2008-07-17
CN101178609A (zh) 2008-05-14
ATE456286T1 (de) 2010-02-15
CN101178609B (zh) 2010-09-22
US8530806B2 (en) 2013-09-10
FR2908009B1 (fr) 2009-02-20
DE602007004404D1 (de) 2010-03-11
JP4888334B2 (ja) 2012-02-29

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