EP2385257A2 - Etage de pompe à vide - Google Patents

Etage de pompe à vide Download PDF

Info

Publication number
EP2385257A2
EP2385257A2 EP11002911A EP11002911A EP2385257A2 EP 2385257 A2 EP2385257 A2 EP 2385257A2 EP 11002911 A EP11002911 A EP 11002911A EP 11002911 A EP11002911 A EP 11002911A EP 2385257 A2 EP2385257 A2 EP 2385257A2
Authority
EP
European Patent Office
Prior art keywords
rotor
channel
vacuum
pumping stage
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11002911A
Other languages
German (de)
English (en)
Other versions
EP2385257A3 (fr
EP2385257B1 (fr
Inventor
Armin Conrad
Aleksandr Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2385257A2 publication Critical patent/EP2385257A2/fr
Publication of EP2385257A3 publication Critical patent/EP2385257A3/fr
Application granted granted Critical
Publication of EP2385257B1 publication Critical patent/EP2385257B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a vacuum pumping stage according to the preamble of the first claim.
  • Vacuum pumps or vacuum pump assemblies composed of vacuum pumps are used to generate such vacuum conditions.
  • vacuum pump stages are used according to different principles of action, which are adapted to different pressure ranges to compress gas from the desired final vacuum to the atmosphere.
  • side channel pumping stages are used to compress the atmosphere.
  • These blades run around in a channel and promote a vortex-like gas flow between inlet and outlet.
  • the gas stream follows the blades during circulation and is removed at a so-called scraper and fed to the outlet.
  • the disadvantage is that designed according to this principle pumping stages operate only in the viscous flow area and lose the transition to the molecular flow very quickly compression and pumping, since no vortex-like gas flow can be generated more.
  • Gaedepump stages are used inter alia in the molecular range adjacent to the viscous flow region at lower absolute pressures. Their drawback is that compression and absorbency are good only under molecular conditions and become poor very quickly in the viscous region.
  • the object of the invention was therefore to provide a vacuum pumping stage, which provides compression and pumping both in the viscous and in the molecular flow area.
  • the vacuum pumping stage having the features of the first claim provides compression and suction in both the viscous and molecular flow regime. It can therefore be used advantageously in both flow regions and in the transition region between them.
  • the vacuum pump according to claims 6 and 7 is characterized by an advantageous power consumption, which is lower compared to vacuum pumping stages with Gaede- or side channel stages due to the compression curve and the pumping speed characteristic.
  • the vacuum pumping stage 100 after FIG. 1 has a housing 102.
  • an inlet 104 is provided, is sucked through the gas in the vacuum pumping stage.
  • an outlet 106 the pumped within the vacuum pumping stage gas is ejected.
  • Inlet and outlet are interconnected by a channel 108.
  • a rotatably arranged in the housing rotor 112 dives with a rotor portion, wherein channel and rotor portion cooperate to generate the pumping action.
  • the rotor section comprises that part of the rotor which, viewed in the radial direction from the axis of rotation of the rotor, projects beyond the inner boundary 118 of the channel into the channel.
  • the smooth section is through a zone of the rotor is formed, which projects beyond the outer surface radius 122 over the blade root radius 120 and extends along the circumference over an angular range 124.
  • the blade root radius is substantially close to the radius of the inner boundary of the channel.
  • the outer radius is chosen so that on the one hand only a small gap to a scraper remains, on the other hand, only a portion of the channel depth 126 is utilized.
  • the scraper separates the gas flow entrained at the rotor section and prevents a direct flow between inlet and outlet.
  • the smooth section creates together with the channel in the molecular flow area compression and pumping speed and acts on the Gaedezin.
  • the vanes 114 act in the viscous flow area as side channel pumping structures which cooperate with the channel.
  • smooth sections are distributed over the circumference of the rotor, resulting in a mass balance. This is achieved for example by two opposite smooth sections. Furthermore, this design can be advantageously further developed by blades and smooth sections are dimensioned so that in each case opposite masses correspond in value.
  • the channel is not arranged as shown in the disk plane but axially offset thereto.
  • the blades and the smooth section are then out of the plane of the drawing.
  • FIG. 2 Channel and rotor section are shown in a development
  • Fig. 3 shows the section along the line I-I '.
  • the channel 208 is provided with a channel depth 226. Beyond the inner boundary 218 of the channel, the rotor section projects into the channel. In it are provided as design elements blades 214 which rotate by rotation of the rotor in the channel. The blades have a thickness 228 in the direction of movement. At least one of the blades has a thickness greater than about one fifth of the distance 230 to the succeeding blade. It is achieved by this thickness that the blade surfaces 250, 252 and 254 facing the channel walls 240, 242 and 244 act in the molecular flow region like gas pumping structures. In the viscous flow region, the rotor section acts as a side channel pumping stage due to the blades.
  • the channel may also, as already mentioned in the other two examples, be offset axially relative to the plane of the rotor 234.
  • the design elements are then arranged in the figure left or right next to the rotor.
  • At least one blade (214) has a thickness which is equal to or greater than approximately the distance (230) to the subsequent blade.
  • FIGS. 4 and 5 Another embodiment is in the FIGS. 4 and 5 shown.
  • Fig. 4 Channel and rotor section are shown in a development,
  • Fig. 5 shows the section along the line II-II '.
  • the channel 308 is provided here, which is bounded by the inner boundary 318 in the direction of the axis of rotation.
  • blades 314 are provided as design elements which lead to a side channel pumping action in the viscous flow area.
  • the rotor section also has a base land 340 which projects beyond the inner boundary into the channel.
  • FIG. 5 It is shown that the base web protrudes with the web height 332 over the inner boundary.
  • the side surface 342 of the base bar This works together with the channel wall in the molecular flow area as Gaedepumplay.
  • the channel may also, as already mentioned in the other two examples, be offset axially relative to the plane of the rotor 334.
  • the design elements are then arranged in the figure left or right next to the rotor.
  • the design elements ie the base web and blades, lie in the plane 334 of the disk-like rotor 312, as a result of which the rotor-dynamic properties are improved.
  • the base web is provided only along part of the circumference of the rotor.
  • a base web with the thicker blades and / or a smooth section can be used together to achieve design elements in the rotor section, by means of which the pumping action in the molecular flow region is effected according to Gaede and in the higher pressure range according to the side channel principle.
  • Curve 70 shows the course for a pure Gaedepumpcut. There is a strong increase in the molecular flow area observed, while at higher pressures, especially above 1 hPa, no significant compression occurs.
  • Curve 72 shows the course of a pure side channel pumping stage. Here the compression reaches its maximum towards higher pressures.
  • Curve 74 shows the compression curve for the smooth-section embodiment FIG. 1
  • Curve 76 traces the course for the embodiment with thick blades FIGS. 2 and 3 ,
  • a vacuum pump 600 is shown in the basic structure, in which the advantages of the vacuum pumping stage described above are particularly good advantage.
  • a shaft 640 is provided, which is rotatably supported by bearings 650 and 652.
  • bearings 650 and 652. may be grease or oil lubricated bearings, gas, sliding or magnetic bearings. These types of bearings can be mixed, with lubricants such as oil or the like can be used in the area of the preliminary vacuum, which can be found on the side of the bearing 652.
  • This is advantageously designed as a Holweck or turbomolecular pumping stage and can itself be constructed in several stages. Different pumping principles can be used in these individual stages.
  • the inlet 604 is in gas flow communication with a suction port 612 so that the multi-section stage 610 sucks gas through both this suction port and the high vacuum pump stage outlet 622.
  • the compressed gas in it is expelled through the outlet 606 and fed to a fore-vacuum stage 630.
  • This can advantageously be designed as a side channel pumping stage and in turn comprise a plurality of pumping stages.
  • a pump outlet 682 the gas is expelled from the vacuum pump, for example against the atmosphere or in the supply line to a backing pump.
  • the pumping stages 610, 620 and 630 are commonly driven by the drive means 660.
  • the multigrade stage advantageously operates in a pressure and flow regime in which it possesses better compression and absorbency properties per power consumed than pure Gaede or side channel pumping stages.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP11002911.3A 2010-05-08 2011-04-07 Etage de pompe à vide Not-in-force EP2385257B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010019940.0A DE102010019940B4 (de) 2010-05-08 2010-05-08 Vakuumpumpstufe

Publications (3)

Publication Number Publication Date
EP2385257A2 true EP2385257A2 (fr) 2011-11-09
EP2385257A3 EP2385257A3 (fr) 2014-09-03
EP2385257B1 EP2385257B1 (fr) 2017-10-18

Family

ID=44144686

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11002911.3A Not-in-force EP2385257B1 (fr) 2010-05-08 2011-04-07 Etage de pompe à vide

Country Status (3)

Country Link
EP (1) EP2385257B1 (fr)
JP (1) JP6302615B2 (fr)
DE (1) DE102010019940B4 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150167679A1 (en) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vacuum pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013108482A1 (de) 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE605902C (de) 1932-01-08 1934-11-20 Hugo Seemann Dr Turbohochvakuumpumpe
DE2034285A1 (de) 1970-07-10 1972-01-13 Pfeiffer Vakuumtechnik Molekularpumpe
US4141674A (en) * 1975-02-13 1979-02-27 Siemens Aktiengesellschaft Impeller for a ring compressor
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6641361B2 (en) 2001-12-12 2003-11-04 Visteon Global Technologies, Inc. Fuel pump impeller for high flow applications
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
ITTO20020370A1 (it) * 2002-05-06 2003-11-06 Varian Spa Stadio di pompaggio per pompa da vuoto.
US6974302B2 (en) 2002-06-06 2005-12-13 Hitachi Unisia Automotive, Ltd. Turbine fuel pump
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150167679A1 (en) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vacuum pump
EP2886870A1 (fr) * 2013-12-18 2015-06-24 Pfeiffer Vacuum GmbH Pompe à vide avec géométrie d'admission perfectionnée
EP2886870B1 (fr) 2013-12-18 2017-12-20 Pfeiffer Vacuum GmbH Pompe à vide avec géométrie d'admission perfectionnée

Also Published As

Publication number Publication date
JP6302615B2 (ja) 2018-03-28
DE102010019940B4 (de) 2021-09-23
EP2385257A3 (fr) 2014-09-03
EP2385257B1 (fr) 2017-10-18
JP2011236900A (ja) 2011-11-24
DE102010019940A1 (de) 2011-11-10

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