EP2886870A1 - Pompe à vide avec géométrie d'admission perfectionnée - Google Patents

Pompe à vide avec géométrie d'admission perfectionnée Download PDF

Info

Publication number: EP2886870A1
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; inlet; rotor; vacuum; pump
Prior art date: 2013-12-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP14196002.1A

Other languages

German (de)

English (en)

Other versions

EP2886870B2 (fr

EP2886870B1 (fr

Inventor

Bernhard Koch

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2013-12-18

Filing date

2014-12-03

Publication date

2015-06-24

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=52023216&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP2886870(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

2014-12-03 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2015-06-24 Publication of EP2886870A1 publication Critical patent/EP2886870A1/fr

2017-12-20 Application granted granted Critical

2017-12-20 Publication of EP2886870B1 publication Critical patent/EP2886870B1/fr

2020-12-23 Publication of EP2886870B2 publication Critical patent/EP2886870B2/fr

Status Not-in-force legal-status Critical Current

2034-12-03 Anticipated expiration legal-status Critical

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Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
- F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps

Definitions

the invention relates to a vacuum pump or vacuum pump stage with a housing which has at least one inlet.
Rotating sleeves have proven themselves in vacuum pumps, for example in the form of a Holweckpumpcut.
One or a plurality of sleeves are fixed on one side to a hub, which in turn is arranged on a shaft.
a hub which in turn is arranged on a shaft.
Such a structure shows, for example, the DE 10 2011 112 689 A1 ,
the inlet is not as in the prior art ( DE 10 2011 112 689 A1 ) associated pump axially to the shaft, but arranged radially to the shaft and the rotating sleeve.
the prior art also includes a vacuum pump, are provided in the deflection in the inlet area. This deflecting effect that a deflection of the particles takes place in the flow or conveying direction of the pump.
the technical problem underlying the invention is to provide a vacuum pump or vacuum pumping stage with a radially arranged inlet, in which the pumping speed is increased with an unchanged size of the inlet.
the vacuum pump or vacuum pump stage according to the invention with a housing which has at least one inlet with a rotor which has a shaft, wherein the inlet is arranged radially to the shaft, is characterized in that the inlet is designed to widen in the direction of the shaft.
the direction of movement of the molecules is influenced such that they can no longer leave the suction flange of the pump or pump stage as possible in the direction of the recipient and continue to remain in the pumping process.
the gas molecules meeting this inner wall are deflected in the direction of the rotating sleeve after hitting the inner wall and are very likely to enter the vacuum pump or vacuum pump stage.
the number of gas molecules that do not enter directly into the pumping area of the vacuum pump or vacuum pumping stage, after an impact on the inner wall of the expanding inlet it is very likely to be fed to the pump region of the vacuum pump or vacuum pumping stage, thereby significantly increasing the suction capacity of the vacuum pump or vacuum pumping stage.
this inlet can be located either on the high-vacuum side of the rotor in front of or in the region of the first rotor disk and also in the further course of the pump-active structure at any point to form an additional inlet for a split-flow pump.
the embodiment according to the invention not only increases the probability that a gas molecule successfully enters the pump-active region, but also that a gas molecule, which was already in the pump-active region, re-enters the inlet channel after an undesired exit from the pump-active region is returned to the pump active area, so that it can still be promoted and thus the pumping speed is additionally increased.
the vacuum pump has at least one Holwecklace with one-piece shaft and surrounding stator, wherein the promotional structure is located on one of the two parts, or at least a funnelgewinde Holweck note with one-piece shaft, wherein the promotional structure is an opposing thread structure or a turbo-rotor of a turbo pump, wherein the promotional structure at least one Turbo rotor disc and a turbo stator includes.
the embodiment according to the invention with the inlet widening in the direction of the shaft can be used particularly advantageously with these vacuum pumps.
the vacuum pumping stage is designed as a Holwecklace with one-piece shaft and surrounding stator, wherein the promotional structure is located on one of the two parts, or as a cross-thread Holwecklace with one-piece shaft, wherein the promotional structure a represents opposing threaded structure, is formed, or a turbo rotor of a turbo-pump, wherein the promotional structure includes at least one turbo rotor and stator.
the embodiment according to the invention can be used particularly advantageously with the inlet widening in the direction of the shaft.
a further possible embodiment of the invention provides that the vacuum pump or vacuum pump stage has at least one Holweck pumping stage with a rotor having a shaft, a hub connected to the shaft and a sleeve connected to the hub and concentric with the shaft, and that the Inlet towards sleeve is formed widening.
the gas molecules impinging on this inner wall are deflected towards the rotating sleeve after hitting the inner wall and are likely to enter the vacuum pump or vacuum pumping stage.
the inlet is designed as a channel of the rotor-conducting inlet disposed as a gas through the inlet in the direction of rotation of the rotor.
This embodiment has the advantage that the entering through the suction port Gas molecules is conveyed directly into the arranged in the direction of rotation of the rotor channels, such as a Holweckstators. This direct feed also increases the suction capacity of the vacuum pump or vacuum pump stage.
the inlet in the direction of rotation of the rotor is designed to widen.
the opposite side of the inlet flange may, as known from the prior art, be formed partially cylindrical.
the inlet is formed widening in cross section with a curved outer contour.
the inlet can also be formed widening with a straight outer contour.
the curved outer contour has the advantage that the contour can be adjusted in such a way that the gas molecules are deflected with the greatest probability after an impact on the outer contour in the direction of the rotating sleeve and not in the opposite direction.
the curved outer contour allows a smaller extension of the inlet in the direction of the pump chamber than is the case with a straight outer contour.
the inlet can, as already stated, be designed to widen in a linear conical manner in cross-section. This embodiment is easy to manufacture and the suction capacity of the vacuum pump or vacuum pump stage is increased anyway.
the inlet is designed to widen in all directions.
the inlet is formed widening only in the direction of rotation of the rotor. If the inlet is formed widening only on the side which is arranged in the direction of rotation of the rotor, the costs for the widening configuration of the inlet are reduced.
the vacuum pump is designed as a molecular vacuum pump, in particular as a Holweck pump.
the vacuum pump stage is advantageously designed as a molecular vacuum pump stage advantageously as a Holweck pump stage.
the inventive design of the inlet flange can be applied to Holweckpumphn, in which the pump-active surfaces are arranged in the stator.
the invention can also be applied to Holweckpumpmeasuren, in which the pump-active structures on the sleeve, that are arranged on the rotor.
the invention can also be applied to cross-thread Holweckpump taskn in which pump-active structures are arranged both on the rotor and stator.
the invention can be applied to turbomolecular pumping stages in which the pump-active structure consists of rotor and stator blades.
Fig. 1 shows a longitudinal section through a belonging to the prior art vacuum pump 1.
a suction port 4 is provided, is sucked through the gas in the vacuum pump 1. After compression, the gas is expelled from the vacuum pump 1 through an outlet 6.
a rotor 10 which generates the pumping action together with a stator 30.
the rotor 10 has a shaft 12, whose end facing the suction opening 4 is supported by a permanent magnet bearing 14. The opposite end is from a rolling bearing 16 supported.
This bearing assembly has over other, also possible types of bearings, such as the flying bearing with bearings on the opposite side of the intake, the advantage that a lubricant-free bearing is used on the suction side and due to the rotor dynamic simpler storage narrow column and a shorter overall length can be achieved.
a permanent magnet 20 is provided, which cooperates with an energized drive coil.
the rotor 10 is set in a sufficiently fast speed. This is measured according to the pumping principle used and, with molecular principles, is generally around 10,000 revolutions per minute.
the stator 30 has one or a plurality of helical channels 30 on its surface facing the rotor.
a hub 40 is attached on the shaft 12. It has a first side 42 and a second side 44 opposite this first side 42. The second side 44 faces the suction opening.
a first sleeve 50 is secured to the first side and a second sleeve 52 to the second side. Both sleeves 50, 52 cooperate with the stator 30 and its helical channel 32 to create a holweck pumping action.
the gas flow leads through the suction opening into a gap S between the second sleeve 52 and the stator 30.
the first sleeve 50 is arranged downstream in the gas flow of the second sleeve 52 and thus compresses toward the sleeve pressure.
Fig. 2 the housing 2 is shown having the inlet 4.
the rotating sleeve 52 is shown as well as the pump-active structure 32.
FIG. 2 schematically shows how a gas molecule 60 hits the sleeve 52. Due to the probable direction of movement of the gas molecule 60, it may happen that the molecule does not enter the Holweck channels 32, but instead leaves the suction region 62 again in the direction of the recipient, that is, opposite to the direction of the arrow A. The resulting velocity is shown by the arrow 80.
Fig. 3 shows a known from practice inlet flange 4, which is designed as an asymmetrically drilled inlet channel. This embodiment directs the gas molecules 60 in different directions of the inlet 4. The resulting velocity is shown by the arrow 80.
Fig. 4 shows an inventive inlet geometry, which represents a further improvement over the prior art, in which the inlet 4 is formed widening in the direction of sleeve 52.
the direction of movement of the molecules 60 is influenced so that they can no longer leave the suction flange of the pump 1 as far as possible in the direction of the recipient, ie counter to the direction of the arrow A and continue to remain in the pumping process.
Fig. 5 shows a modified embodiment of the invention.
the inlet 64 is according to Fig. 5 formed linear conically widening. Also according to this inlet geometry, the gas molecules, which abut the inner wall of the extension 64 of the inlet flange 4, move back in the direction of the pump chamber, so that the pumping speed of the pump also increases significantly.
Fig. 6 1 shows a turbo-pumping stage 66 with a suction opening 62.
the turbo-pumping stage has a rotor 68 with rotor blades 70.
the gas molecules (not shown) enter into the vacuum pumping stage 66 in the direction of the arrow A. If the gas molecules are deflected by the rotor blades 70 in the direction of the outlet, they abut against the inner wall of the extension 64 of the suction port 62 and are in turn directed in the direction of the rotor 68.
Fig. 7 shows a schematic representation of the pumping stage 66 with the rotor 68.
the rotor 68 has rotor disks 72, 74 and stator disks 76, 78, wherein the rotor disks 72, 74 and the stator disks 76, 78 have opposite rotor and Statorbeschaufelept.
a gas molecule which enters the suction opening 62 in the direction of the arrow A is deflected by the extension 64 of the suction opening 62 and "passes" through the pumping stage 66 and exits the pumping stage 66 in the direction of the arrow B.

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Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP14196002.1A 2013-12-18 2014-12-03 Pompe à vide avec géométrie d'admission perfectionnée Not-in-force EP2886870B2 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102013114290.7A DE102013114290A1 (de)	2013-12-18	2013-12-18	Vakuumpumpe

Publications (3)

Publication Number	Publication Date
EP2886870A1 true EP2886870A1 (fr)	2015-06-24
EP2886870B1 EP2886870B1 (fr)	2017-12-20
EP2886870B2 EP2886870B2 (fr)	2020-12-23

Family

ID=52023216

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP14196002.1A Not-in-force EP2886870B2 (fr)	2013-12-18	2014-12-03	Pompe à vide avec géométrie d'admission perfectionnée

Country Status (4)

Country	Link
US (1)	US20150167679A1 (fr)
EP (1)	EP2886870B2 (fr)
JP (1)	JP6118784B2 (fr)
DE (1)	DE102013114290A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6578838B2 (ja) *	2015-09-15	2019-09-25	株式会社島津製作所	真空ポンプおよび質量分析装置
EP4293232B1 (fr) *	2023-10-17	2026-05-06	Pfeiffer Vacuum Technology AG	Pompe turbomoléculaire

Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19848406A1 (de) *	1997-10-21	1999-05-20	Varian Associates	Molekularpumpe mit gerippter Rotorkonstruktion
US6450772B1 (en) *	1999-10-18	2002-09-17	Sarcos, Lc	Compact molecular drag vacuum pump
EP1243796A2 (fr) *	2001-03-24	2002-09-25	Pfeiffer Vacuum GmbH	Pompe à vide
EP1302667A1 (fr) *	2001-10-15	2003-04-16	The BOC Group plc	Pompes à vide
EP2385257A2 (fr) *	2010-05-08	2011-11-09	Pfeiffer Vacuum Gmbh	Etage de pompe à vide
DE202010012795U1 (de)	2010-09-21	2012-01-13	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpe
DE102011112689A1 (de)	2011-09-05	2013-03-07	Pfeiffer Vacuum Gmbh	Vakuumpumpe

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6146492A (ja)	1984-08-11	1986-03-06	Mitsuwa Seiki Co Ltd	分子ポンプ
JPH0213195U (fr) *	1988-06-30	1990-01-26
FR2641582B1 (fr) *	1989-01-09	1991-03-22	Cit Alcatel	Pompe a vide du type a canal de gaede
JPH0475196U (fr) *	1990-11-09	1992-06-30
DE4331589C2 (de)	1992-12-24	2003-06-26	Pfeiffer Vacuum Gmbh	Vakuumpumpsystem
JPH0717986U (ja) *	1993-09-08	1995-03-31	二国機械工業株式会社	渦流ポンプ
DE19508566A1 (de)	1995-03-10	1996-09-12	Balzers Pfeiffer Gmbh	Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
DE19821634A1 (de)	1998-05-14	1999-11-18	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Stator und Rotor
JP3961155B2 (ja) *	1999-05-28	2007-08-22	Ｂｏｃエドワーズ株式会社	真空ポンプ
DE19930952A1 (de) *	1999-07-05	2001-01-11	Pfeiffer Vacuum Gmbh	Vakuumpumpe
GB9921983D0 (en)	1999-09-16	1999-11-17	Boc Group Plc	Improvements in vacuum pumps
GB2360066A (en)	2000-03-06	2001-09-12	Boc Group Plc	Vacuum pump
JP2005042709A (ja) *	2003-07-10	2005-02-17	Ebara Corp	真空ポンプ
GB0414316D0 (en)	2004-06-25	2004-07-28	Boc Group Plc	Vacuum pump
DE202005019644U1 (de)	2005-12-16	2007-04-26	Leybold Vacuum Gmbh	Turbomolekularpumpe
DE102008024764A1 (de)	2008-05-23	2009-11-26	Oerlikon Leybold Vacuum Gmbh	Mehrstufige Vakuumpumpe
DE102009035332A1 (de)	2009-07-30	2011-02-03	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102011112691A1 (de)	2011-09-05	2013-03-07	Pfeiffer Vacuum Gmbh	Vakuumpumpe

2013
- 2013-12-18 DE DE102013114290.7A patent/DE102013114290A1/de not_active Withdrawn
2014
- 2014-12-03 EP EP14196002.1A patent/EP2886870B2/fr not_active Not-in-force
- 2014-12-05 JP JP2014246652A patent/JP6118784B2/ja not_active Expired - Fee Related
- 2014-12-16 US US14/571,355 patent/US20150167679A1/en not_active Abandoned

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19848406A1 (de) *	1997-10-21	1999-05-20	Varian Associates	Molekularpumpe mit gerippter Rotorkonstruktion
US6450772B1 (en) *	1999-10-18	2002-09-17	Sarcos, Lc	Compact molecular drag vacuum pump
EP1243796A2 (fr) *	2001-03-24	2002-09-25	Pfeiffer Vacuum GmbH	Pompe à vide
EP1302667A1 (fr) *	2001-10-15	2003-04-16	The BOC Group plc	Pompes à vide
EP2385257A2 (fr) *	2010-05-08	2011-11-09	Pfeiffer Vacuum Gmbh	Etage de pompe à vide
DE202010012795U1 (de)	2010-09-21	2012-01-13	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpe
DE102011112689A1 (de)	2011-09-05	2013-03-07	Pfeiffer Vacuum Gmbh	Vakuumpumpe

Also Published As

Publication number	Publication date
JP6118784B2 (ja)	2017-04-19
US20150167679A1 (en)	2015-06-18
JP2015117697A (ja)	2015-06-25
EP2886870B2 (fr)	2020-12-23
EP2886870B1 (fr)	2017-12-20
DE102013114290A1 (de)	2015-06-18

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