EP2440788A2 - Pompe à vide - Google Patents

Pompe à vide

Info

Publication number
EP2440788A2
EP2440788A2 EP10723116A EP10723116A EP2440788A2 EP 2440788 A2 EP2440788 A2 EP 2440788A2 EP 10723116 A EP10723116 A EP 10723116A EP 10723116 A EP10723116 A EP 10723116A EP 2440788 A2 EP2440788 A2 EP 2440788A2
Authority
EP
European Patent Office
Prior art keywords
frequency converter
vacuum pump
cooling
housing
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10723116A
Other languages
German (de)
English (en)
Other versions
EP2440788B1 (fr
Inventor
Thomas Dreifert
Wolfgang Giebmanns
Robert Jenkins
Roland Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2440788A2 publication Critical patent/EP2440788A2/fr
Application granted granted Critical
Publication of EP2440788B1 publication Critical patent/EP2440788B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/047—Cooling of electronic devices installed inside the pump housing, e.g. inverters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine

Definitions

  • the invention relates to a vacuum pump, in particular a screw vacuum pump, a Roots vacuum pump or a rotary vane vacuum pump.
  • Vacuum pumps have in a pump chamber formed by the pump chamber arranged pumping elements for conveying the fluid, in particular a gas, such as air on.
  • the pumping elements are usually driven by an electric motor.
  • the frequency converter is a sensitive electronic component.
  • In order to enable a good cooling and vibration-free arrangement of the frequency converter it is known to arrange them in a separate from the vacuum pump control cabinet separately from the pump. However, this is expensive, in particular because of the required wiring between the control cabinet and the electric motor of the vacuum pump. It is therefore generally preferred to arrange the frequency converter directly to the vacuum pump.
  • this embodiment is only possible if the ambient temperatures are correspondingly low and the pump is operated in a power range in which a strong heating of the frequency converter does not occur. Since the free inflow of air must be ensured, there is also a high risk of contamination in this embodiment.
  • the frequency converter with a direct water cooling.
  • the frequency converter is connected to a cooled surface of the vacuum pump.
  • this has the disadvantage that the frequency converter is exposed to the vibrations of the vacuum pump.
  • the cooling requirement of the vacuum pump and the cooling requirement of the frequency converter must correspond to each other.
  • the frequency converter used must therefore be adapted to the corresponding requirements.
  • cooling of the frequency converter by water cooling has the disadvantage that condensation can also occur within the frequency converter when the humidity is high.
  • the object of the invention is to provide a vacuum pump with frequency converter, with a reliable cooling of the frequency converter should be guaranteed.
  • the at least one pumping element arranged in the pump chamber is driven by an electric motor.
  • a frequency converter To change the engine speed of the electric motor is connected to a frequency converter.
  • the frequency converter is located in a frequency converter housing directly connected to the pump housing - in the following FU housing.
  • both an air cooler and a liquid cooler are arranged in the FU housing for cooling the frequency converter.
  • the FU housing and the pump housing is integrally formed, wherein the two housings can of course consist of several individual components. It is preferred in this case that the FU housing is directly connected to the pump housing and thus a compact design can be achieved.
  • the air cooler preferably has a fan which generates a cooling air flow in the FU housing. According to the invention, the cooling of the air flow through the liquid cooler. This has the advantage that the frequency converter is not directly connected to a cooling plate or the like, but the cooling of the frequency converter by one of the Liquid cooler cooled air flow takes place. As a result, the risk of the occurrence of condensate, especially within the frequency converter, significantly reduced.
  • the drive housing can be closed, so that a circulation of the air takes place. There is no need to suck in ambient air that may be dirty.
  • the liquid cooler preferably has a cooling element arranged in or on the FU housing.
  • the air flows along the cooling element, which preferably has cooling fins for surface enlargement.
  • the cooling ribs or the surface of the cooling element, along which the air flows, preferably points in the direction of the frequency converter.
  • the liquid cooler has a cooling plate, in which at least one cooling coil is arranged. The corresponding cooling plate can form part of the drive housing.
  • the liquid cooler is integrated into the coolant circuit of the vacuum pump.
  • the liquid cooler is integrated into the coolant circuit of the vacuum pump.
  • only one coolant circuit is provided. This simplifies the connection of the vacuum pump to a coolant circuit, since no additional coolant circuit for cooling the frequency converter must be connected.
  • the electric motor is also arranged in the FU housing.
  • the liquid cooler in this embodiment preferably at least partially surrounds the electric motor.
  • the liquid cooler thus serves on the one hand for cooling the electric motor and for cooling the air flow, which cools the frequency converter.
  • the liquid cooler completely surrounds the electric motor corresponding to a cooling coil.
  • the FU housing is thermally coupled to the liquid cooler of the electric motor or a corresponding liquid-cooled housing of the electric motor. As a result, a good heat dissipation can be ensured.
  • the frequency converter is cooled by an air flow, it is not necessary to connect the frequency converter directly to a cooling plate. This has the advantage according to the invention that the frequency converter can be held by means of vibration damping elements.
  • the occurrence of vibration damage to the frequency converters can also be improved by the use of vibration-proof electronics as well as by gluing or casting of the components. Furthermore, the assembly can take place on a vibration-decoupled component.
  • An essential advantage of the invention is that the occurrence of condensation damage to the electronics of the frequency converter is avoided because the frequency converter is not directly connected to the water cycle.
  • the condensation taking place on the coolest component thus takes place on the air cooler or the liquid cooler, but not on the frequency converter itself, since it generates waste heat during operation. Condensation is avoided even when the pump is switched off because the frequency converter is not cooled.
  • the fan of the air cooler is preferably coupled to the operation of the frequency converter.
  • a condensate drain can be arranged in the FU housing.
  • the frequency converter is the most temperature-sensitive component, it is preferable to use the coolant first for cooling the frequency converter, then for cooling the electric motor and then for cooling the pump in a common cooling circuit. Also, an additional control of the water cooling can be done.
  • the integration of the frequency converter according to the invention in the pump housing or in the drive housing has the advantage that a small volume of air must be promoted. In particular, a very targeted air flow within the drive housing can be achieved.
  • Fig. 1 is a schematic sectional view of a first preferred embodiment
  • Fig. 2 is a schematic sectional view of a second preferred embodiment
  • a pump chamber 12 is formed by a housing 10, in which two pumping screws 14 are arranged as pumping elements, which rotate in opposite directions. This is usually done via a arranged between the two screw rotors 14, not shown in the drawings gear.
  • a medium is drawn in the direction of an arrow 16 through an inlet opening 18 and an ejection of the medium through an outlet opening 20 in the direction of an arrow 22.
  • an electric motor 24 is disposed in a part 26 of the housing. The electric motor 24 is connected via its output shaft 28 with one of the two pump screws 14.
  • a frequency converter 30 is provided, which is electrically connected to the electric motor 24.
  • the frequency converter 30 is arranged in a frequency converter housing 32 (FU housing).
  • the FU housing 32 is directly connected to the pump housing 10 or formed integrally therewith.
  • an air cooler 34 and a liquid cooler 36 is provided.
  • the air cooler 34 has a fan 38 in the illustrated embodiment.
  • the blower 38 is disposed within the FU housing 32 and serves to circulate the air within the FU housing.
  • the air flow generated by the blower 38 is directed so that it flows along the liquid cooler 36.
  • the air flows along cooling fins 40 of the liquid cooler 36.
  • the cooling fins 40 point into the interior of the FU housing 32 or in the direction of the frequency converter 30.
  • the liquid cooler has a cooling element, such as a cooling plate 42, which simultaneously forms a side wall of the FU housing 32 in the illustrated embodiment.
  • a cooling element such as a cooling plate 42
  • the cooling fins 40 are connected on the inside.
  • a cooling coil 44 is arranged within the cooling plate 42.
  • the cooling coil 44 is connected to coolant lines 46. These are shown for clarity only as approaches in FIG.
  • the coolant lines 46 are connected to the liquid cooling system of the electric motor 24 as well as the vacuum pump itself.
  • the cooling lines 46 preferably extend within the housing or directly along the housing outer walls.
  • the frequency converter 30 is held on one of the housing walls of the FU housing 32 via vibration damper 48.
  • a fan 38 is arranged inside the FU housing 32. This causes the air in the FU housing 32 to circulate, the air being guided in such a way that the air flows along the fins 52 for cooling.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)

Abstract

L'invention concerne une pompe à vide comprenant des éléments de pompe (14) dans une chambre d'aspiration (12). L'un des éléments de pompe (14) est entraîné par un moteur électrique (24). Un convertisseur de fréquence (30) servant à modifier la vitesse de rotation du moteur électrique (24) est placé dans un carter de convertisseur de fréquence (32) relié directement au corps de pompe (10). Un refroidisseur d'air (34) ainsi qu'un refroidisseur de liquide (36) sont placés à l'intérieur du carter de convertisseur de fréquence (32) pour refroidir le convertisseur de fréquence (30).
EP10723116.9A 2009-06-09 2010-06-07 Pompe à vide Active EP2440788B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009024336A DE102009024336A1 (de) 2009-06-09 2009-06-09 Vakuumpumpe
PCT/EP2010/057899 WO2010142631A2 (fr) 2009-06-09 2010-06-07 Pompe à vide

Publications (2)

Publication Number Publication Date
EP2440788A2 true EP2440788A2 (fr) 2012-04-18
EP2440788B1 EP2440788B1 (fr) 2017-01-18

Family

ID=43122900

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10723116.9A Active EP2440788B1 (fr) 2009-06-09 2010-06-07 Pompe à vide

Country Status (8)

Country Link
US (1) US9234519B2 (fr)
EP (1) EP2440788B1 (fr)
JP (1) JP5756097B2 (fr)
KR (1) KR101740235B1 (fr)
CN (1) CN102450115B (fr)
DE (1) DE102009024336A1 (fr)
TW (1) TW201104077A (fr)
WO (1) WO2010142631A2 (fr)

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US9611852B2 (en) * 2013-03-29 2017-04-04 Agilent Technology, Inc. Thermal/noise management in a scroll pump
US10208753B2 (en) 2013-03-29 2019-02-19 Agilent Technologies, Inc. Thermal/noise management in a scroll pump
DE102013114383B4 (de) * 2013-12-18 2016-04-07 Khs Gmbh Reinigungsvorrichtung sowie Verfahren zum Reinigen von Behältern
JP6608394B2 (ja) * 2014-06-27 2019-11-20 アテリエ ビスク ソシエテ アノニム 真空ポンプシステムの圧送方法および真空ポンプシステム
DE102015219078B4 (de) * 2015-10-02 2026-06-18 Robert Bosch Gmbh Hydrostatisches Kompaktaggregat mit Kühlung
DE102016200112A1 (de) * 2016-01-07 2017-07-13 Leybold Gmbh Vakuumpumpenantrieb mit Stern-Dreieck-Umschaltung
EP3443226B1 (fr) 2016-04-12 2024-10-09 ATLAS COPCO AIRPOWER, naamloze vennootschap Dispositif de commande pour compresseur
CN106194769A (zh) * 2016-08-31 2016-12-07 池泉 一种静音离心泵
GB2553321A (en) * 2016-09-01 2018-03-07 Edwards Ltd Pump
DE102016011504A1 (de) * 2016-09-21 2018-03-22 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH System für ein Nutzfahrzeug umfassend einen Schraubenkompressor sowie einen Elektromotor
KR101869386B1 (ko) * 2016-10-14 2018-06-20 주식회사 벡스코 냉각식 진공펌프
WO2019035239A1 (fr) * 2017-08-14 2019-02-21 株式会社アルバック Dispositif d'évacuation par aspiration et procédé de refroidissement de dispositif d'évacuation par aspiration
TWI661658B (zh) 2018-06-22 2019-06-01 群光電能科技股份有限公司 馬達裝置及散熱裝置
DE102018211128B3 (de) * 2018-07-05 2019-11-28 Continental Automotive Gmbh Anordnung mit einem Gehäuse und einer darin auf einem Gehäuseboden angeordneten Leistungselektronikschaltung
CN115987057A (zh) * 2022-12-23 2023-04-18 中科仪(南通)半导体设备有限责任公司 一种干式真空泵水冷变频器安全结构

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IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
DE19749572A1 (de) * 1997-11-10 1999-05-12 Peter Dipl Ing Frieden Trockenlaufender Schraubenverdichter oder Vakuumpumpe
JP2001271777A (ja) * 2000-03-27 2001-10-05 Toyota Autom Loom Works Ltd 真空ポンプにおける冷却装置
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DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
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Also Published As

Publication number Publication date
WO2010142631A3 (fr) 2011-07-28
JP5756097B2 (ja) 2015-07-29
CN102450115B (zh) 2015-07-15
WO2010142631A2 (fr) 2010-12-16
KR20120027052A (ko) 2012-03-20
US9234519B2 (en) 2016-01-12
DE102009024336A1 (de) 2010-12-23
JP2012529590A (ja) 2012-11-22
EP2440788B1 (fr) 2017-01-18
TW201104077A (en) 2011-02-01
KR101740235B1 (ko) 2017-06-08
US20120315165A1 (en) 2012-12-13
CN102450115A (zh) 2012-05-09

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