EP2450942A3 - Spectromètre de masse - Google Patents

Spectromètre de masse Download PDF

Info

Publication number
EP2450942A3
EP2450942A3 EP11188188.4A EP11188188A EP2450942A3 EP 2450942 A3 EP2450942 A3 EP 2450942A3 EP 11188188 A EP11188188 A EP 11188188A EP 2450942 A3 EP2450942 A3 EP 2450942A3
Authority
EP
European Patent Office
Prior art keywords
gas
ion source
mass spectrometer
mass spectroscopy
inhales
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11188188.4A
Other languages
German (de)
English (en)
Other versions
EP2450942A2 (fr
EP2450942B1 (fr
Inventor
Hidetoshi Morokuma
Yuichiro Hashimoto
Masuyuki Sugiama
Masuyoshi Yamada
Hideki Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp, Hitachi High Tech Corp filed Critical Hitachi High Technologies Corp
Publication of EP2450942A2 publication Critical patent/EP2450942A2/fr
Publication of EP2450942A3 publication Critical patent/EP2450942A3/fr
Application granted granted Critical
Publication of EP2450942B1 publication Critical patent/EP2450942B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP11188188.4A 2010-11-08 2011-11-08 Spectromètre de masse Not-in-force EP2450942B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010249260A JP5497615B2 (ja) 2010-11-08 2010-11-08 質量分析装置

Publications (3)

Publication Number Publication Date
EP2450942A2 EP2450942A2 (fr) 2012-05-09
EP2450942A3 true EP2450942A3 (fr) 2017-07-26
EP2450942B1 EP2450942B1 (fr) 2019-11-06

Family

ID=44905719

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11188188.4A Not-in-force EP2450942B1 (fr) 2010-11-08 2011-11-08 Spectromètre de masse

Country Status (4)

Country Link
US (2) US8866070B2 (fr)
EP (1) EP2450942B1 (fr)
JP (1) JP5497615B2 (fr)
CN (2) CN104681391B (fr)

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JP5596402B2 (ja) * 2010-04-19 2014-09-24 株式会社日立ハイテクノロジーズ 分析装置、イオン化装置及び分析方法
WO2012162036A1 (fr) 2011-05-20 2012-11-29 Purdue Research Foundation (Prf) Systèmes et procédés d'analyse d'un échantillon
JP6025406B2 (ja) * 2012-06-04 2016-11-16 株式会社日立ハイテクノロジーズ 質量分析装置
EP2894468A4 (fr) 2012-09-04 2016-06-08 Atonarp Inc Système et procédé de détection d'un métal dans une solution
GB2511472A (en) 2012-10-12 2014-09-10 Scient Analysis Instr Ltd Method and apparatus for analysis and ion source
CN103854953A (zh) * 2012-11-30 2014-06-11 中国科学院大连化学物理研究所 无光窗式真空紫外灯质谱电离源
WO2014120411A1 (fr) * 2013-01-31 2014-08-07 Purdue Research Foundation Systèmes et procédés pour analyser un échantillon extrait
JP6180828B2 (ja) * 2013-07-05 2017-08-16 株式会社日立ハイテクノロジーズ 質量分析装置及び質量分析装置の制御方法
US9842728B2 (en) * 2013-07-19 2017-12-12 Smiths Detection Ion transfer tube with intermittent inlet
RU2769119C2 (ru) * 2013-07-19 2022-03-28 Смитс Детекшен Инк. Способ переноса ионов, интерфейс, выполненный с возможностью переноса ионов, и система, содержащая источник газообразных ионов
WO2015107688A1 (fr) * 2014-01-20 2015-07-23 株式会社島津製作所 Dispositif d'analyse d'échantillon gazeux
JP6219760B2 (ja) * 2014-03-26 2017-10-25 株式会社日立ハイテクサイエンス Ｉｃｐ発光分光分析装置
US9558924B2 (en) * 2014-12-09 2017-01-31 Morpho Detection, Llc Systems for separating ions and neutrals and methods of operating the same
EP3324422B1 (fr) * 2015-07-13 2019-08-07 Shimadzu Corporation Obturateur
JP6547843B2 (ja) * 2015-12-17 2019-07-24 株式会社島津製作所 イオン分析装置
DE102015122155B4 (de) * 2015-12-17 2018-03-08 Jan-Christoph Wolf Verwendung einer Ionisierungsvorrichtung
US11761082B2 (en) 2017-05-02 2023-09-19 Picosun Oy ALD apparatus, method and valve
US11201045B2 (en) 2017-06-16 2021-12-14 Plasmion Gmbh Apparatus and method for ionizing an analyte, and apparatus and method for analysing an ionized analyte
CN110958914A (zh) 2017-08-10 2020-04-03 拉皮斯坎系统股份有限公司 使用热稳定收集装置的物质检测的系统和方法
CN107633996B (zh) * 2017-08-28 2024-03-08 广西电网有限责任公司电力科学研究院 六氟化硫电气设备中高压气体微型质谱分析进样系统
GB2569639B (en) * 2017-12-21 2020-06-03 Thermo Fisher Scient Bremen Gmbh Ion supply system and method to control an ion supply system
US12087565B2 (en) * 2019-07-10 2024-09-10 Hitachi High-Tech Corporation Mass spectrometer
US11609214B2 (en) 2019-07-31 2023-03-21 Rapiscan Systems, Inc. Systems and methods for improving detection accuracy in electronic trace detectors
CN111370286B (zh) * 2020-03-24 2023-02-07 中国科学院近代物理研究所 一种用于治疗装备的等离子体源及其使用方法
WO2021231625A1 (fr) 2020-05-12 2021-11-18 Rapiscan Systems, Inc. Pièges de sensibilité pour la détection de traces électroniques
GB2606024A (en) * 2021-04-23 2022-10-26 Fasmatech Science & Tech Sa Apparatus and method
EP4080547B1 (fr) * 2021-04-23 2026-04-15 Fasmatech Science And Technology SA Appareil et méthode d'analyse d'ions par spectrométrie de masse
JP2023003761A (ja) * 2021-06-24 2023-01-17 株式会社日立製作所 質量分析装置、質量分析システム及び質量分析方法
US20240363324A1 (en) * 2021-07-30 2024-10-31 Shimadzu Corporation Mass spectrometer
CN114823276A (zh) * 2022-05-31 2022-07-29 深圳至秦仪器有限公司 一种用于质谱的新型离子阱及质谱仪

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WO2009023361A2 (fr) * 2007-06-01 2009-02-19 Purdue Research Foundation Interface de pression atmosphérique discontinue
US20090278038A1 (en) * 2006-10-25 2009-11-12 Gesellschaft Zur Foerderung Der Analytischen Wissenschaften E.V. Method and device for generating positively and/or negatively ionized gas analytes for gas analysis
US20100019139A1 (en) * 2008-07-25 2010-01-28 Honeywell International Inc. Micro discharge device ionizer and method of fabricating the same
EP2378539A2 (fr) * 2010-04-19 2011-10-19 Hitachi High-Technologies Corporation Spectromètre de masse
US20110253889A1 (en) * 2010-04-19 2011-10-20 Hitachi High-Technologies Corporation Analyzer, ionization apparatus and analyzing method
EP2498272A1 (fr) * 2011-03-04 2012-09-12 Hitachi High-Technologies Corporation Procédé spectrométrique de masse et spectromètre de masse
EP2562787A2 (fr) * 2011-08-26 2013-02-27 Hitachi High-Technologies Corporation Spectromètre de masse et procédé d'analyse de masse

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US20090278038A1 (en) * 2006-10-25 2009-11-12 Gesellschaft Zur Foerderung Der Analytischen Wissenschaften E.V. Method and device for generating positively and/or negatively ionized gas analytes for gas analysis
WO2009023361A2 (fr) * 2007-06-01 2009-02-19 Purdue Research Foundation Interface de pression atmosphérique discontinue
US20100019139A1 (en) * 2008-07-25 2010-01-28 Honeywell International Inc. Micro discharge device ionizer and method of fabricating the same
EP2378539A2 (fr) * 2010-04-19 2011-10-19 Hitachi High-Technologies Corporation Spectromètre de masse
US20110253889A1 (en) * 2010-04-19 2011-10-20 Hitachi High-Technologies Corporation Analyzer, ionization apparatus and analyzing method
EP2498272A1 (fr) * 2011-03-04 2012-09-12 Hitachi High-Technologies Corporation Procédé spectrométrique de masse et spectromètre de masse
EP2562787A2 (fr) * 2011-08-26 2013-02-27 Hitachi High-Technologies Corporation Spectromètre de masse et procédé d'analyse de masse

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LIANG GAO: "Miniaturization of the ion trap mass spectrometer", 1 December 2009 (2009-12-01), Ann Arbor (US), XP055381846, ISBN: 978-1-109-74547-4, Retrieved from the Internet <URL:https://search.proquest.com/docview/304989444?accountid=29404> [retrieved on 20170614] *

Also Published As

Publication number Publication date
JP2012104247A (ja) 2012-05-31
CN104681391B (zh) 2017-08-25
EP2450942A2 (fr) 2012-05-09
CN102468111A (zh) 2012-05-23
US8866070B2 (en) 2014-10-21
JP5497615B2 (ja) 2014-05-21
US9171704B2 (en) 2015-10-27
CN104681391A (zh) 2015-06-03
EP2450942B1 (fr) 2019-11-06
US20150041641A1 (en) 2015-02-12
US20120112061A1 (en) 2012-05-10
CN102468111B (zh) 2015-03-04

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