EP2644893A3 - Appareil d'évacuation sous vide - Google Patents

Appareil d'évacuation sous vide Download PDF

Info

Publication number
EP2644893A3
EP2644893A3 EP13001550.6A EP13001550A EP2644893A3 EP 2644893 A3 EP2644893 A3 EP 2644893A3 EP 13001550 A EP13001550 A EP 13001550A EP 2644893 A3 EP2644893 A3 EP 2644893A3
Authority
EP
European Patent Office
Prior art keywords
vacuum
evacuation apparatus
vacuum evacuation
evacuating
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13001550.6A
Other languages
German (de)
English (en)
Other versions
EP2644893A2 (fr
Inventor
Hiroyuki Kawasaki
Hiroshi Sobukawa
Atsushi Oyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP2644893A2 publication Critical patent/EP2644893A2/fr
Publication of EP2644893A3 publication Critical patent/EP2644893A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP13001550.6A 2012-03-30 2013-03-26 Appareil d'évacuation sous vide Withdrawn EP2644893A3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012080559A JP6009193B2 (ja) 2012-03-30 2012-03-30 真空排気装置

Publications (2)

Publication Number Publication Date
EP2644893A2 EP2644893A2 (fr) 2013-10-02
EP2644893A3 true EP2644893A3 (fr) 2017-08-23

Family

ID=48039974

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13001550.6A Withdrawn EP2644893A3 (fr) 2012-03-30 2013-03-26 Appareil d'évacuation sous vide

Country Status (3)

Country Link
US (1) US20130259712A1 (fr)
EP (1) EP2644893A3 (fr)
JP (2) JP6009193B2 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
KR101630827B1 (ko) * 2014-06-27 2016-06-15 (주) 씨엠테크 멸균장치의 진공배기 시스템
EP3067567A1 (fr) * 2015-03-11 2016-09-14 Pfeiffer Vacuum GmbH Pompe à vide
JP6616611B2 (ja) 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
FR3042325B1 (fr) * 2015-10-13 2017-11-17 Ifp Energies Now Dispositif d'isolation thermique entre une turbine dont la roue est entrainee en rotation par un fluide chaud et une generatrice electrique avec un rotor accouple a cette roue, notamment pour une turbogeneratrice.
EP3267040B1 (fr) * 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Pompe turbomoléculaire
JP6776971B2 (ja) * 2017-03-27 2020-10-28 株式会社島津製作所 真空ポンプおよびポンプ一体型の電源装置
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
FR3076582B1 (fr) * 2018-01-09 2020-01-24 Pfeiffer Vacuum Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide
CN108194353B (zh) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 一种成对转子转轴独立的直排大气的多级罗茨干式真空泵
GB2577876B (en) * 2018-10-05 2022-02-16 Edwards Ltd Portable vacuum pump assembly and mass spectrometer
JP7766998B2 (ja) * 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ
KR102479328B1 (ko) * 2020-12-11 2022-12-19 주식회사 듀얼드론텍 추진력 형성장치 및 이를 이용한 무인비행체
CN113847244A (zh) * 2021-10-14 2021-12-28 四川莱斯特真空科技有限公司 一体式涡轮螺杆组合泵
WO2023160793A1 (fr) * 2022-02-24 2023-08-31 Ihi Bernex Ag Appareil de dépôt chimique en phase vapeur
JP2024122562A (ja) * 2023-02-28 2024-09-09 株式会社島津製作所 閉止弁、真空ポンプシステム、および真空ポンプ
FR3164314A1 (fr) * 2024-07-03 2026-01-09 Pfeiffer Vacuum Equipement et procédé de fabrication

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60247075A (ja) * 1984-05-21 1985-12-06 Hitachi Ltd 真空ポンプ装置
EP0340685A2 (fr) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Pompe à vide composite
EP1533530A1 (fr) * 2003-11-18 2005-05-25 VARIAN S.p.A. Pompe à vide avec amortisseur de vibrations
JP2006037951A (ja) * 2004-06-25 2006-02-09 Osaka Vacuum Ltd 複合分子ポンプの断熱構造
WO2006020473A1 (fr) * 2004-08-11 2006-02-23 The Boc Group, Inc. Systeme integre de pompe a vide pousse
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20090047142A1 (en) * 2006-01-31 2009-02-19 Ebara Densan Ltd. Vacuum pump unit

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752396A (en) * 1980-09-16 1982-03-27 Toshiba Corp Speed control device of induction motor
JPS6022496A (ja) * 1983-07-15 1985-02-04 Mayekawa Mfg Co Ltd 交流電動機の高効率運転速度制御方式
JPS6028298U (ja) * 1983-07-30 1985-02-26 株式会社島津製作所 タ−ボ分子ポンプ
JPS60204997A (ja) 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
US5221179A (en) * 1988-07-13 1993-06-22 Osaka Vacuum, Ltd. Vacuum pump
JPH0725632Y2 (ja) * 1988-09-20 1995-06-07 日本フェローフルイディクス株式会社 真空排気系の流量検出装置
JP2680156B2 (ja) 1990-02-15 1997-11-19 株式会社日立製作所 真空ポンプ
JPH0596580U (ja) * 1992-05-29 1993-12-27 三菱重工業株式会社 防振装置
JP3776467B2 (ja) * 1994-06-28 2006-05-17 株式会社日立製作所 排気系ネットワーク
JPH1140094A (ja) 1997-07-18 1999-02-12 Hitachi Ltd 真空装置の排気システムおよび排気方法
IT1297347B1 (it) * 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
JP3856576B2 (ja) 1998-10-27 2006-12-13 独立行政法人 日本原子力研究開発機構 核融合炉の排気装置
JP2000220467A (ja) * 1999-01-28 2000-08-08 Tokai Rubber Ind Ltd 低吸水・低吸油性防音材
JP2002147386A (ja) 2000-11-16 2002-05-22 Shimadzu Corp ターボ分子ポンプによる排気装置
JP2002168192A (ja) * 2000-12-01 2002-06-14 Seiko Instruments Inc 真空ポンプ
JP4147042B2 (ja) * 2002-03-12 2008-09-10 エドワーズ株式会社 真空ポンプ
JP2004100594A (ja) * 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
JP2005114083A (ja) * 2003-10-09 2005-04-28 Ebara Corp 真空チャンバの除振システム
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP4543920B2 (ja) * 2004-12-22 2010-09-15 株式会社デンソー 熱機関の廃熱利用装置
WO2007013619A1 (fr) * 2005-07-28 2007-02-01 Kyocera Corporation Support d’échantillons, appareil d’aspiration d’échantillons utilisant ledit support et procédé de traitement d’échantillons utilisant ledit appareil
JP5009634B2 (ja) * 2006-01-31 2012-08-22 株式会社荏原製作所 真空ポンプユニット
JP2007231938A (ja) * 2006-02-06 2007-09-13 Boc Edwards Kk 真空装置、真空装置における水蒸気分圧の急速低減方法、ロードロックチャンバー内の水蒸気分圧の上昇防止方法、および、真空装置用真空ポンプ
DE102009037010A1 (de) * 2009-08-11 2011-02-17 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60247075A (ja) * 1984-05-21 1985-12-06 Hitachi Ltd 真空ポンプ装置
EP0340685A2 (fr) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Pompe à vide composite
EP1533530A1 (fr) * 2003-11-18 2005-05-25 VARIAN S.p.A. Pompe à vide avec amortisseur de vibrations
JP2006037951A (ja) * 2004-06-25 2006-02-09 Osaka Vacuum Ltd 複合分子ポンプの断熱構造
WO2006020473A1 (fr) * 2004-08-11 2006-02-23 The Boc Group, Inc. Systeme integre de pompe a vide pousse
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20090047142A1 (en) * 2006-01-31 2009-02-19 Ebara Densan Ltd. Vacuum pump unit

Also Published As

Publication number Publication date
JP6333908B2 (ja) 2018-05-30
EP2644893A2 (fr) 2013-10-02
US20130259712A1 (en) 2013-10-03
JP2013209928A (ja) 2013-10-10
JP2016205405A (ja) 2016-12-08
JP6009193B2 (ja) 2016-10-19

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