EP3148716A1 - Behandlungsverfahren und vorrichtung mit einer überkritischen flüssigkeit und injektion eines additivs - Google Patents

Behandlungsverfahren und vorrichtung mit einer überkritischen flüssigkeit und injektion eines additivs

Info

Publication number
EP3148716A1
EP3148716A1 EP15726118.1A EP15726118A EP3148716A1 EP 3148716 A1 EP3148716 A1 EP 3148716A1 EP 15726118 A EP15726118 A EP 15726118A EP 3148716 A1 EP3148716 A1 EP 3148716A1
Authority
EP
European Patent Office
Prior art keywords
fluid
enclosure
chamber
additive
storing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15726118.1A
Other languages
English (en)
French (fr)
Inventor
Alain CHAVRIER
Sébastien FAYETTE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dfd - Dense Fluid Degreasing
Original Assignee
Dfd - Dense Fluid Degreasing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dfd - Dense Fluid Degreasing filed Critical Dfd - Dense Fluid Degreasing
Publication of EP3148716A1 publication Critical patent/EP3148716A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/045Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00Cleaning of wafers, substrates or parts of devices
    • H10P70/80Cleaning only by supercritical fluids
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0402Apparatus for fluid treatment
    • H10P72/0406Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid

Definitions

  • the invention relates to processing techniques, in particular extraction, for example cleaning, parts or objects by implementation of a dense fluid, for example super critical, including carbon dioxide.
  • a dense fluid for example super critical, including carbon dioxide.
  • This device is fed with a liquefied gas, which comes for example from a reserve, or bottle, 2, in which it is maintained at a temperature of, for example, -20 ° C.
  • This reserve 2 can supply, via a pump 3 or a filling compressor and a valve 6i, a storage chamber 6, which stores both gaseous gas and liquefied gas.
  • the gas is heated by means of heating 7, which will increase its temperature, for example to 20 ° C, and bring it to a pressure of several tens of bars, for example about 60 bar .
  • Liquefied gas taken from this chamber 6 using a va nne 63, can then be worn, by means 8, under thermodynamic conditions allowing it to be used as a cleaning fluid in the enclosure cleaning 14, also called autoclave and whose input is controlled by a valve 14i.
  • the means 8 may comprise pumping means 10 and heating means 12.
  • the pump 10 makes it possible to bring the fluid coming from the reserve 6 to an upper pressure 73, 85 bar, and the heating means 12 can raise the temperature of the fluid to a value greater than 31 ° C, these conditions ensuring the fluid a super critical state.
  • the fluid may be used in accordance with the teaching of WO 02/32193.
  • the autoclave 14 is provided with a door 15 which will allow to introduce the parts to be cleaned. After closing the door, the fluid is introduced under pressure, for example 120 bar, and the parts are cleaned by the action of the fluid.
  • the fluid is then discharged, expanded by expansion means 16 (mainly comprising a control valve 16 2 and a valve 16i), then sent to means 18 forming a separator, which will allow separating the gas from the particles and soils that have been recovered during cleaning and the gas is charged.
  • expansion means 16 mainly comprising a control valve 16 2 and a valve 16i
  • the gas thus treated can then be fed to liquefaction means 19 and then stored again in liquid form in enclosure 6.
  • gas is introduced into the autoclave , at a pressure of the order of a few bars. This gas comes from the speaker 6.
  • a valve 6 2 is disposed on a path defined by a conduit 9 which connects an upper portion of the enclosure 6 and a point disposed between the pump 10 and the heating means 12. This valve and this duct make it possible to take gas, in gaseous form. This gas is then heated by means 12.
  • This step allows, when the dense fluid gas is then introduced, under pressure, from the means 8, to prevent it from being under conditions that can lead to the formation of a block of ice (this is the phenomenon, in the case of carbon dioxide, formation of dry ice), which is to be avoided because this ice can be very difficult to eliminate quickly.
  • a liquid additive such as a cosolvent for example.
  • the injection of this additive is generally under pressure, from a storage tank 30 of this additive.
  • This tank can be arranged as shown in FIG. 1, a high-pressure pump 301 being disposed at the outlet of the tank in order to inject it into the corresponding conduit, in which high-pressure fluid circulates.
  • Such a high pressure pump 301 is expensive. Moreover, such a pump requires maintenance, and is prone to breakdowns. In other words, it also has a cost because of its maintenance.
  • the invention aims to solve these problems.
  • a dense fluid treatment device for example a fluid in the supercritical state, comprises:
  • an enclosure intended to receive parts to be treated, and provided with an opening and closing door (or, more generally, means for setting in fluidic communication, and then isolating, the inside of the enclosure with respect to to the outside atmosphere),
  • means for supplying said enclosure with dense fluid, for example in a supercritical state comprising first storage means for said fluid and means for carrying the fluid in the dense state, for example supercritical,
  • second storage means for storing a 2nd fluid, such as an additive, for example a solvent, also called co-solvent,
  • injection means for injecting into this chamber, at atmospheric pressure or substantially close to atmospheric pressure, or with the dense fluid, after loading the parts to be treated and then stopping or closing the fluid communication between the interior of the the enclosure and the outside atmosphere, the 2nd fluid, from the second storage means.
  • fluid communication applying to 2 volumes, means that a fluid can flow, or flow, from one volume to another.
  • the means for setting fluid communication are also means for interrupting this fluid communication, that is to say to stop any possibility of fluid flow from one volume to another.
  • the expression "at atmospheric pressure substantially close to atmospheric pressure” generally means a pressure which may be between 1 and 2 bars or between 1 and 5 bars.
  • Said injection means may comprise a low pressure pump. Or they allow a gravity injection.
  • said injection means may comprise:
  • the device may further comprise:
  • Said intermediate reservoir means may comprise:
  • said intermediate reservoir means may comprise:
  • the invention therefore also relates to a supercritical fluid treatment device comprising:
  • means for supplying said fluid enclosure, in the supercritical state comprising first storage means for said fluid and means for bringing this fluid to the supercritical state,
  • second storage means for storing a 2nd fluid, such as an additive
  • injection means for injecting into the chamber, with the supercritical fluid, after loading the parts to be cleaned and closed fluid communication means between the interior of the chamber and the external atmosphere, the 2nd fluid, from the second storage means, these injection means comprising:
  • said means intermediate container can store an amount of 2 nd independent fluid the quantity of fluid contained in the second storage means.
  • said means for introducing, into said enclosure, or at the inlet thereof, a mixture of this pressurized fluid and the second fluid comprises a valve that opens only if the pressure is greater than a given setting pressure.
  • the invention also relates to a dense fluid treatment method, for example super critical, implementing a device according to the invention, in particular of the type as described above.
  • the invention also relates to a dense fluid treatment method, possibly super critical, comprising:
  • the additive can be injected into the low-pressure chamber, for example using a low-pressure pump or only by gravity.
  • the additive can be first injected into an intermediate reservoir and then introduced into the enclosure.
  • the invention also relates to a dense fluid treatment method, for example super critical, comprising, in this order:
  • the additive may be first injected into an intermediate reservoir and then introduced into the enclosure.
  • a dense fluid, under pressure, for example in the supercritical state, can be introduced into the intermediate reservoir, after injection of the additive into the latter, a mixture of this fluid under pressure and the additive being then introduced into the said enclosure, or at the entrance thereof.
  • the introduction of the mixture into the chamber makes it possible to introduce the additive at the same time as the dense fluid, which makes it possible to dispense with the implementation of a high-pressure pump, and which offers, in in addition, a time saving compared to an introduction of the additive before the implementation of the treatment process.
  • a pressurized fluid, in the supercritical state, can be introduced into the intermediate reservoir, after injection of additive therein, a mixture of this fluid under pressure and additive being then introduced into said enclosure, or entry of it.
  • Said means forming an intermediate reservoir can store a quantity of 2nd fluid independent of the amount of fluid contained in the second storage means.
  • the workpiece may be at least partly made of a metallic material, and / or a metal alloy, and / or ceramic material, and / or a semiconductor material, and / or or in a textile material and / or a natural material, that is to say not initially treated by humans.
  • the treatment may be an extraction treatment, for example cleaning or degreasing, or debinding, or sterilization.
  • the treatment may also be a process for impregnating or supplying product carried by the dense fluid, for example a supercritical fluid, within the material to be treated, for example a dye, or a chemical product.
  • the invention also relates to a computer program comprising the instructions for implementing a method according to the invention, in particular as described above.
  • the invention also relates to a data carrier, readable by a computer system, comprising the data, in encoded form, for implementing a method according to the invention, in particular as described above.
  • the invention also relates to a software product comprising a program data support means, readable by a computer system, for implementing a method according to the invention, in particular as described above.
  • FIG. 1 is a diagram of a supercritical fluid treatment machine, of known type
  • FIGS. 2 to 5A show various configurations of another embodiment of a supercritical fluid processing machine, according to the invention.
  • FIG. 6 is a schematic representation of the control means of a machine according to the invention.
  • FIG. 2 shows an exemplary embodiment of a machine according to the invention.
  • this machine comprises first storage means 6 (or storage enclosure, called the main storage enclosure of the system), intended to store liquefied gas at several dozen bars, for example 60 bars.
  • This enclosure may be provided with means for measuring the temperature and / or the pressure and / or the level of liquid that it contains. It can be fed by a reserve 2, which has for example the shape of a tank (which contains gas at, for example - 20 ° C and 20 bar), to which the device can be connected.
  • This reserve is placed in communication with the storage enclosure 6 via the valve 6i, and a filling pump 3 or a compressor.
  • This chamber can be carried out as follows. Liquefied gas is introduced by pumping and opening of the inlet valve 6i at the temperature of the reserve 2, for example 20 bar and -20 ° C. During the treatment, this chamber may, in addition, be fed with recycled gas from the treatment chamber 14.
  • the heating means 7 then make it possible to increase the temperature and pressure conditions in this enclosure 6, for example for CO 2 , at + 20 ° C. and 60 bars, or, more generally, at a temperature between ° C and 30 ° C, and at a pressure between 50 bar and 90 bar.
  • An autoclave 14, or treatment chamber accommodates the parts to be treated.
  • This enclosure is provided with a door 15, through which the parts can be introduced into the enclosure, and then, after treatment, extracted from the enclosure. It can also be provided with a vent, or a duct forming a vent, and a valve 14 2 .
  • Means 8, comprising, for example, a pump 10 and heating means 12 make it possible to bring the fluid taken from the chamber 6 under thermodynamic conditions that allow it to be used in the treatment chamber 14.
  • the pump 10 can carry the fluid from the reserve 6 to a higher pressure 73.85 bar, and the heating means 12 can raise the temperature of the fluid to a value greater than 31 ° C, these conditions then ensuring the fluid a so-called supercritical state.
  • the fluid flows in the conduit 27, the valve 14i opening the access of the supercritical fluid flow to the autoclave 14.
  • Means 16 allow the gas to be released at the outlet of the autoclave 14.
  • Means 18 forming a separator are used to separate the gas impurities or extracted products that it carries and that result from a previous treatment operation or ongoing.
  • Pi is for example of the order of a few tens of bars, or between 50 bars and 90 bars, or between 60 and 70 bars.
  • the opening of the door or, more generally, the setting in fluid communication of the interior of the enclosure and the outside atmosphere) and the unloading of the parts; the internal volume of the autoclave is then at atmospheric pressure.
  • a cosolvent for example, from water, aqueous solutions, alcohols, for example aliphatic alcohols of 1 to 5 C, such as ethanol, methanol, butanol or ketones, such as acetone, and mixtures thereof.
  • aqueous solutions mention may be made of detergent solutions such as anionic and / or cationic surfactants, solutions of complexing agents, chelating agents, buffer solutions, for example of phosphate and / or hydrogen phosphosphate, etc. ; solutions of antioxidants, such as ascorbic acid, to stabilize the material.
  • detergent solutions such as anionic and / or cationic surfactants, solutions of complexing agents, chelating agents, buffer solutions, for example of phosphate and / or hydrogen phosphosphate, etc.
  • solutions of antioxidants such as ascorbic acid
  • an impregnating product for example a paint and / or a tanning product (for example chromium VI or a vegetable tannin), and / or an oil, and / or a hydrophobic product.
  • the embodiment of FIG. 2 further comprises second storage means 30, or tank, containing or intended to contain an additive to be injected into the front chamber. the beginning, or at the beginning, of a treatment cycle, after loading the parts of the material to be treated in this chamber and closing the door 15 and the means 14 2 (or, more generally, the stopping or closing of the fluidic communication of the interior of the chamber and the external atmosphere, that is to say the establishment of a state in which it is impossible to perform any fluid exchange between the interior of the chamber; pregnant and outside atmosphere).
  • This additive is generally stored in the means 30 in liquid form. It is injected at atmospheric pressure, or close to atmospheric pressure (between 1 and 2 bar or between 1 and 5 bar), well below the working pressure.
  • This tank 30 may be provided with means for measuring the pressure and / or the temperature and / or the level and / or the volume of the liquid or the fluid that it contains.
  • the tank 30 is connected, via a valve 32i and a duct 34, to the inlet of the autoclave 14.
  • a pump at low pressure 32 may be disposed at the outlet of the tank 30, this pump for injecting the fluid at atmospheric pressure or at a pressure of between 1 and 2 bars.
  • the additive can be injected into the autoclave 14 at a pressure close to atmospheric pressure. This pump may not be necessary if the tank 30 is above the autoclave 14, the flow being done just by the action of gravity. This injection takes place after closing the door 15 and before injection of the dense treatment fluid.
  • the injection, according to the invention, of an additive at atmospheric pressure or substantially close to the atmospheric pressure makes it possible to dispense, for the injection of an additive, the use of a high-pressure pump, which is expensive, especially in terms of maintenance.
  • sequence of steps that takes place at the beginning of a treatment cycle is for example the following:
  • FIG. 3 A variant, with a view to an injection of additive at a pressure identical to or substantially close to atmospheric pressure, is illustrated in FIG. 3.
  • This device further comprises a cartridge 36 in which an amount of additive to be injected into the autoclave can be stored temporarily, at atmospheric pressure, or close to atmospheric pressure, in liquid form, after being taken from the reservoir 30.
  • the cartridge 36 is located below the tank 30 and above the autoclave 14.
  • the outlet of the additive tank 30 can be controlled by a set of valves 32 1 , 32 2 , which will allow:
  • a first step by opening the valve 32 2 , after closing the valve 32i, temporarily store the additive in the cartridge 36, of known volume.
  • the liquid goes from the tank 30 to the cartridge 36 by simple action of gravity.
  • the cartridge 36 is extended by a duct 36i rising higher than the tank 30 and of small section thus allowing to have in the volume of the cartridge 36 an amount approximately independent of the filling of the reserve 30; the valve 32 2 can then be closed,
  • the additive stored in the cartridge 36, can be injected through the conduit 34 to the inlet of the autoclave 14.
  • sequence of steps at the beginning of the treatment cycle may be identical to the sequence of steps a-c which has been described above.
  • FIG. 4 Yet another variant, with a view to injecting an additive at the inlet of autoclave 14, is illustrated in FIG. 4.
  • references identical to those in FIGS. 1-3 designate identical elements or Similar.
  • the cartridge 36 will temporarily store a quantity of additive to be injected into the autoclave, after sampling in the reservoir 30. This time, the volume of the cartridge 36 can be put in communication with the output of the means 8 , to to send, in the cartridge 36, a quantity of dense fluid, possibly supercritical, which will allow to sweep the cartridge and introduce the additive at the inlet of the autoclave 14.
  • the outlet of the additive reservoir 30 is controlled by the valve 32 2 .
  • the additive in a first step, by opening the same valve 32 2 , the additive can be temporarily stored in the cartridge 36, of known volume.
  • the storage pressure in the cartridge is atmospheric pressure or is close to atmospheric pressure.
  • a pump 32 for example a low-pressure metering pump located between the reserve 30 and the valve 32 2 to fill the cartridge 36 with the desired amount of additive. This quantity then becomes adjustable.
  • This low pressure pump 32 disposed at the outlet of the tank 30, makes it possible to inject the additive into the cartridge 36 at atmospheric pressure or at a pressure of between 1 and 2 bars.
  • This pump 32 may in particular be used when it is not possible to use the action of gravity (in the case of a too viscous additive, for example).
  • means 38i may be provided downstream of the cartridge 36, on the channel 34. These means 38i can then open only under a given pressure (to which the valve is tared), greater than the pressure at which the additive is stored in the cartridge 36, then ensure the closure of the channel 34 for the additive.
  • a conduit 38 makes it possible to take dense fluid at the outlet of the means 8. If the dense fluid is carbon dioxide, it is then in the super-critical state.
  • a valve 38 2 is disposed on this duct 38, and will make it possible to control the introduction of this fluid into the cartridge 36. When this valve is open, the fluid, arriving under high pressure, scans the cartridge 36, taking with it the additive, at a pressure sufficient to open the valve 38i (when it is present). The latter could be replaced by a valve synchronized with the opening of the valve 38 2
  • the additive enters the cartridge 36, from the tank 30, and leaves, to be injected into the autoclave 14, through the same orifice, which can be located at an early end of the cartridge 36.
  • This one is different from that which may be located at a 2nd end of the cartridge 36 opposite the end the age, by which the dense fluid enters the cartridge 36. It is for example arranged opposite to the one through which the dense fluid enters the cartridge.
  • a '- loading parts and closing the door and means 14 2 (or, more generally, stopping or closing the setting in fluid communication between the interior of the enclosure and the outside atmosphere, c' that is to say the establishment of a state in which it is impossible to carry out any fluid exchange between the inside of the enclosure and the outside atmosphere),
  • the opening of the valve 38 2 and the closing of the valve 14i allow the dense fluid to pass through the cartridge 36 and to drive the additive.
  • FIG. 5 Yet another variant, with a view to injecting an additive at the inlet of the autoclave 14, is illustrated in FIG. 5.
  • references identical to those of FIG. 4 denote identical or similar elements. .
  • the volume of the cartridge 36 can be put in communication with the outlet of the means 8, in order to send, in the cartridge 36, a quantity of dense fluid, possibly supercritical, which will make it possible to scan the cartridge and introduce the additive at the inlet of the autoclave 14.
  • the outlet of the additive reservoir 30 can be controlled by the valve 32 2 .
  • the additive in a first step, by opening the same valve 32 2 , the additive can be temporarily stored in the cartridge 36, of known volume.
  • the duct 38 makes it possible to take dense fluid at the outlet of the means 8. But here, the dense fluid enters the cartridge 36 from below and leaves the top by bubbling through the additive, which allows the entrainment of the fluid. additive gradually by dissolution; the dense fluid will dissolve the additive in its path and take part of it. There is thus an action of the additive extended in time and does not saturate the dense fluid additive at one time.
  • sequence of steps at the beginning of the cleaning cycle may be identical to the sequence of steps a'-b 'which has been described above.
  • the additive is injected with the dense fluid, under pressure, it can therefore be injected when desired during the cleaning cycle, which constitutes an advantageous advantage, in time and flexibility of operation, with respect to the embodiments which have been explained above.
  • a pump 32 for example a low-pressure metering pump, situated between the reservoir 30 and the valve 32 2 is used to fill the cartridge 36 only with the quantity of additive desired. This quantity then becomes adjustable.
  • This low pressure pump 32 disposed at the outlet of the tank 30, makes it possible to inject the additive into the cartridge 36 at atmospheric pressure or at a pressure of between 1 and 2 bars.
  • the cartridge 36 may be provided with means for heating or thermostating (or maintaining it at a constant temperature), so that, or so, the dense fluid does not liquefy.
  • This cartridge is thus provided with means which make it possible to maintain the dense fluid that it contains at a temperature such that it is not in liquid form or that it does not condense.
  • the cartridge 36 may be equipped with level measuring means so as to adjust the amount of additive.
  • Valve 32 2 closes when the desired quantity is reached. This can also be done by measuring the outflow from the tank 30 or by measuring the level variation in the tank 30.
  • a device may comprise means 5, of electronic and / or computer type, for controlling and regulating the operation of each of the machine components, including pumps and valves, according to a programmed sequence of steps.
  • controller means 5 can comprise circuits, which make it possible to send to each of the components of the machine the instructions and / or the voltages making it possible to drive it according to a predefined sequence.
  • these means will make it possible to implement a cleaning preparation cycle and / or a cleaning cycle as described above, and in particular to regulate the gas transfer steps between the means 2 and 6 of a on the other hand, and the storage means 20 on the other hand. More specifically, these means will control the duration of the opening or closing of the valves 32i, 32 2 , 38i, 38 2 , 383, but also other valves of the system, and the operation, in particular, of the pump 10, and means 12.
  • This assembly 5 may further optionally receive signals corresponding to measurements made with the aid of one or more pressure sensors, for example arranged to measure the pressure in the autoclave 14, or in the storage means 20, and can process and use them to control one or more of the machine components.
  • one or more pressure sensors for example arranged to measure the pressure in the autoclave 14, or in the storage means 20, and can process and use them to control one or more of the machine components.
  • This controller assembly 5 can communicate with a user interface to inform a user about the state of the machine, in particular its operating cycle.
  • these means comprise storage means 53 for storing the instructions relating to data processing, for example to perform a method of the type described above.
  • the controller 5 comprises a central unit, which itself comprises a microprocessor 56, a set of non-volatile memories and RAM 57, peripheral circuits, all these elements being coupled to a bus 55.
  • Data can stored in the memory areas, including data for implementing a method according to the present invention or for controlling a machine according to the present invention.
  • Means 59 will make it possible to manage the flow input and output data from and to the other components of the machine.
  • this controller assembly 5 can be implemented as an FPGA (Field Programmable Gate Array, or programmable logic circuit) or an ASIC (Application Specifies Integrated Circuit or specialized integrated circuit).
  • FPGA Field Programmable Gate Array, or programmable logic circuit
  • ASIC Application Specifies Integrated Circuit or specialized integrated circuit
  • the means 54 which may comprise display means, may optionally allow a user to interact with the operation of a machine according to the invention, for example by intervening on a particular step of an operating cycle.
  • a machine according to the invention and a method of operating such a machine, as described above, makes it possible to economize a high-pressure pump such as one of the pumps 301 of FIG.
  • another fluid may be used, for example a fluid selected from methane, ethanol, propane, nitrous oxide, a fluorinated gas, ammonia, alcohol, ethanol, isopropanol, water.
  • C0 2 can be used.
  • the fluid used bathes the treated parts.
  • the contact, more or less long, between the latter and the fluid causes the desired treatment.
  • a debinding process makes it possible to extract a binder from a part made of an alloy, for example from a powder such as a powder assembled in a paraffin, and / or to extract any binder suitable for the manufacture of the alloy.
  • a process for extracting one or more natural substances can be implemented, in particular in the pharmaceutical or agri-food industry.
  • a method of extraction, or degreasing can also be used to treat natural wool, in order to extract the ooze.
  • the invention also makes it possible to implement a sterilization process (for example in the agri-food or medical field), at low temperature, based on the penetration power of the gas, at high pressure, which will be able to penetrate into the material to be treated. and go neutralize, or kill, infectious agents.
  • a sterilization process for example in the agri-food or medical field
  • the invention can also be used in processes for impregnating or supplying product carried by the supercritical fluid within the material to be treated.
  • any type of part can be treated by a method according to the invention.
  • the materials which can be processed by a process according to the invention, are generally solid materials, for example:
  • metallic alloys possibly plated, such as aluminum, titanium, steel, stainless steel, copper, brass, and any other alloy, or metal plated, ceramic materials, polymer materials, powders, especially powders of the materials mentioned above,
  • the processed parts can be, for example:

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Extraction Or Liquid Replacement (AREA)
EP15726118.1A 2014-05-28 2015-05-28 Behandlungsverfahren und vorrichtung mit einer überkritischen flüssigkeit und injektion eines additivs Withdrawn EP3148716A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1454890A FR3021554A1 (fr) 2014-05-28 2014-05-28 Procede et dispositif de traitement par fluide supercritique avec injection d'additif
PCT/EP2015/061885 WO2015181313A1 (fr) 2014-05-28 2015-05-28 Procédé et dispositif de traitement par fluide super critique avec injection d'additif

Publications (1)

Publication Number Publication Date
EP3148716A1 true EP3148716A1 (de) 2017-04-05

Family

ID=51518956

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15726118.1A Withdrawn EP3148716A1 (de) 2014-05-28 2015-05-28 Behandlungsverfahren und vorrichtung mit einer überkritischen flüssigkeit und injektion eines additivs

Country Status (5)

Country Link
US (1) US20170182523A1 (de)
EP (1) EP3148716A1 (de)
CA (1) CA2949891A1 (de)
FR (1) FR3021554A1 (de)
WO (1) WO2015181313A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3053340B1 (fr) * 2016-06-30 2019-07-12 Hitex Procede et installation pour la depolymerisation partielle controlee de polysaccharides
DK201970267A1 (en) * 2019-04-29 2020-05-13 Ecco Sko A/S Apparatus for dyeing of leather

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6148645A (en) * 1999-05-14 2000-11-21 Micell Technologies, Inc. Detergent injection systems for carbon dioxide cleaning apparatus
JP2002237481A (ja) * 2001-02-09 2002-08-23 Kobe Steel Ltd 微細構造体の洗浄方法
JP3978023B2 (ja) * 2001-12-03 2007-09-19 株式会社神戸製鋼所 高圧処理方法

Also Published As

Publication number Publication date
CA2949891A1 (en) 2015-12-03
US20170182523A1 (en) 2017-06-29
WO2015181313A1 (fr) 2015-12-03
FR3021554A1 (fr) 2015-12-04

Similar Documents

Publication Publication Date Title
JP5522124B2 (ja) 基板処理装置、基板処理方法および記憶媒体
EP3148716A1 (de) Behandlungsverfahren und vorrichtung mit einer überkritischen flüssigkeit und injektion eines additivs
WO2017118800A1 (fr) Procede et dispositif pour la fabrication et la distribution d'un produit personnalise avec capsules
KR20120127203A (ko) 기판 처리 장치, 기판 처리 방법, 및 컴퓨터 판독 가능한 기억 매체
EP3148717B1 (de) Behandlungsverfahren und vorrichtung mit einem verdichteten fluid und einem ausstossspeichervolumen
EP4058797A1 (de) Vorrichtungen und verfahren zum mischen von flüssigkeiten durch hin- und herbewegen dieser flüssigkeiten zwischen einer pumpe und einer messzelle und physikalisch-chemische analyse der so gemischten flüssigkeiten
WO2015181317A1 (fr) Procédé et dispositif de traitement par fluide super critique avec pompage passif
WO2017089372A1 (fr) Procédé et dispositif de traitement par fluide super critique avec pompage passif gravitaire
FR2918292A1 (fr) Nouveau procede d'extraction par des fluides supercritiques utilisant des cycles compression-decompression appliques a la pression de travail
EP3587287B1 (de) Vorrichtung und verfahren zum herstellen einer kontrollierten atmosphäre in höhe der gasphase eines lagerbehälters eines produkts
KR102832234B1 (ko) 처리액 제조 장치 및 방법
EP2336745B1 (de) Verfahren zur Vorbereitung metallischer Proben und Autoklav zur Umsetzung dieses Verfahrens
EP4286036B1 (de) Mischanlage mit zwischenspülung und verfahren zur steuerung davon
FR3113466A1 (fr) installation de filtration tangentielle d’un liquide en particulier de vin
FR3061193A1 (fr) Dispositif de liquefaction hydrothermale
FR2903701A1 (fr) Systeme et procede d'injection gazeuse, notamment du so2, dans un liquide, notamment du jus de vendange.
FR3159751A1 (fr) Appareil de traitement d’un échantillon liquide ou solide avec du dioxyde de carbone supercritique
CN116569038A (zh) 方法
EP3006113B1 (de) Verfahren und vorrichtung zur gaszuführung in einen flüssig- / feststofftrennapparat und einrichtung zum behandeln von fluidströmen mit dieser vorrichtung
ITRM20100171A1 (it) Processo ed impianto di estrazione di oli ed essenze da sostanze organiche e loro eventuale deodorizzazione
FR3031752A1 (fr) Dispositif pour realiser des essais de fermentation avec un petit volume de mout
FR3128536A1 (fr) Appareil et dispositif de prelevement d’echantillon
BE623217A (de)
FR2584819A1 (fr) Procede et dispositif pour realiser des analyses chimiques
FR2959567A1 (fr) Procede pour evaluer au moins une caracteristique du vin lors de son elevage et dispositif pour sa mise en oeuvre

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20161201

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIN1 Information on inventor provided before grant (corrected)

Inventor name: FAYETTE, SEBASTIEN

Inventor name: CHAVRIER, ALAIN

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20201201