JP6469205B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP6469205B2
JP6469205B2 JP2017230365A JP2017230365A JP6469205B2 JP 6469205 B2 JP6469205 B2 JP 6469205B2 JP 2017230365 A JP2017230365 A JP 2017230365A JP 2017230365 A JP2017230365 A JP 2017230365A JP 6469205 B2 JP6469205 B2 JP 6469205B2
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Japan
Prior art keywords
insole
chamber
vacuum pump
pump
shape
Prior art date
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JP2017230365A
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English (en)
Japanese (ja)
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JP2018109401A (ja
Inventor
ヘルベルト・シュタムラー
ゼンケ・ギルブリヒ
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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Publication of JP2018109401A publication Critical patent/JP2018109401A/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2017230365A 2016-12-22 2017-11-30 真空ポンプ Active JP6469205B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP16206042.0A EP3339652B1 (fr) 2016-12-22 2016-12-22 Pompe à vide avec chemise intérieure recueillant des dépôts
EP16206042.0 2016-12-22

Publications (2)

Publication Number Publication Date
JP2018109401A JP2018109401A (ja) 2018-07-12
JP6469205B2 true JP6469205B2 (ja) 2019-02-13

Family

ID=57588864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017230365A Active JP6469205B2 (ja) 2016-12-22 2017-11-30 真空ポンプ

Country Status (2)

Country Link
EP (1) EP3339652B1 (fr)
JP (1) JP6469205B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114526233B (zh) * 2022-03-02 2024-05-10 安徽理工大学 罗茨转子和螺杆转子串联的复合干式真空泵及使用方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04116693U (ja) * 1991-03-29 1992-10-19 セイコー精機株式会社 真空ポンプ
JPH0599190A (ja) * 1991-10-08 1993-04-20 Mitsubishi Electric Corp 半導体製造装置
DE19857453B4 (de) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperaturüberwachung an Rotoren von Vakuumpumpen
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102006016405B4 (de) 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
DE102007053979A1 (de) 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Schmiermittelpumpe
DE102012023727B4 (de) 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Schmiermitteleinrichtung für ein Wälzlager
DE102013208614A1 (de) 2013-05-10 2014-11-13 Pfeiffer Vacuum Gmbh Vorrichtung mit mindestens einem Kanal zum Führen eines gasförmigen oder flüssigen Betriebsmittels
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
JP6390478B2 (ja) * 2015-03-18 2018-09-19 株式会社島津製作所 真空ポンプ
EP3070335B1 (fr) 2015-03-20 2019-07-31 Pfeiffer Vacuum GmbH Boîtier pour une pompe à vide et/ou pour une partie d'une pompe à vide

Also Published As

Publication number Publication date
JP2018109401A (ja) 2018-07-12
EP3339652A1 (fr) 2018-06-27
EP3339652B1 (fr) 2020-07-01

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