EP3617511A2 - Pompes à spirales et procédé de fabrication pour des telles pompes - Google Patents

Pompes à spirales et procédé de fabrication pour des telles pompes Download PDF

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Publication number
EP3617511A2
EP3617511A2 EP19201745.7A EP19201745A EP3617511A2 EP 3617511 A2 EP3617511 A2 EP 3617511A2 EP 19201745 A EP19201745 A EP 19201745A EP 3617511 A2 EP3617511 A2 EP 3617511A2
Authority
EP
European Patent Office
Prior art keywords
spiral
base plate
scroll pump
pump
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19201745.7A
Other languages
German (de)
English (en)
Other versions
EP3617511B1 (fr
EP3617511A3 (fr
Inventor
Erhard Harapat
Lars Pauli
Wolfgang Söhngen
Jan Hofmann
Becker Jonas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP19201745.7A priority Critical patent/EP3617511B1/fr
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3617511A2 publication Critical patent/EP3617511A2/fr
Publication of EP3617511A3 publication Critical patent/EP3617511A3/fr
Priority to JP2020160698A priority patent/JP7220692B2/ja
Priority to EP22156933.8A priority patent/EP3974655B1/fr
Priority to EP22199874.3A priority patent/EP4095387B1/fr
Priority to EP20198997.7A priority patent/EP3739166B1/fr
Priority to EP25161936.7A priority patent/EP4542048A3/fr
Priority to US17/063,912 priority patent/US11773849B2/en
Application granted granted Critical
Publication of EP3617511B1 publication Critical patent/EP3617511B1/fr
Priority to JP2022178824A priority patent/JP7549634B2/ja
Priority to US18/449,111 priority patent/US20230383750A1/en
Priority to JP2024147175A priority patent/JP2024163137A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F04C18/0284—Details of the wrap tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material

Definitions

  • the present invention relates to scroll pumps and manufacturing processes therefor.
  • a first aspect of the invention is based on a scroll pump comprising a movable spiral component which can be excentrically excited to produce a pumping effect, the spiral component having a base plate and a spiral wall extending from the base plate. It is an object of the invention to simplify the manufacture of such a scroll pump. This object is achieved by a scroll pump according to claim 1, and in particular in that at least two holding projections spaced apart over the circumference of the base plate are provided on the outside of the base plate.
  • the retaining projections are radial projections which protrude in the radial direction from the circumference of the base plate, that is to say from the radially outer edge of the base plate.
  • the spiral component can be clamped on these holding projections in a simple manner, in particular directly.
  • the holding projections are in particular arranged on the circumference and / or evenly distributed over the circumference.
  • the holding projections can preferably be designed such that the raw material dimensions are not enlarged by the holding projections.
  • a first intermediate section of the circumference of the base plate between two adjacent retaining projections can have a greater radial height than a second intermediate section.
  • a larger mass can be easily achieved in the first intermediate section, which e.g. can serve to balance the unbalance.
  • the first intermediate section is arranged at least substantially opposite an outermost 120 ° section and / or an outermost 180 ° section of the spiral wall. As a result, the mass of the outermost section of the spiral wall is easily compensated for by the first intermediate section.
  • no fastening hole is arranged in the base plate in the region or in the vicinity of at least one holding projection.
  • a fastening hole in the spiral component can serve, for example, for later fastening of a corrugated bellows and / or a bearing element.
  • the object of the first aspect is also achieved by a method according to claim 6 for producing a scroll pump, in particular of the type described above.
  • the scroll pump has a movable spiral component that can be excentrically excited to produce a pumping effect.
  • the spiral component is clamped directly into a clamping device with a base plate.
  • a base plate and a spiral wall extending from the base plate are machined together for the spiral component.
  • the clamping device can preferably comprise or be a jaw chuck.
  • the jaws of a jaw chuck of the clamping device can preferably engage at least two holding projections which are arranged on the outside of the base plate and are objected to over their circumference.
  • the clamping device is designed such that tool access to the spiral component is made possible both from one side of the base plate on which the spiral wall is formed and from the other, in particular opposite, side of the base plate.
  • the spiral component can preferably be machined at least essentially in one clamping from both sides and / or be machined with machining from both sides.
  • the clamping device can preferably be or comprise a jaw chuck, in particular a three- or four-jaw chuck.
  • the invention generally and independently also relates to a clamping device, in particular with a jaw chuck, for, in particular directly, clamping a spiral component of a scroll pump, the clamping device being designed in such a way that tool access to the spiral component is provided both from one side of the base plate and against the spiral wall is formed, as is also possible from the other side of the base plate.
  • a jaw chuck which has, for example, a continuous recess, in particular a bore.
  • a second aspect of the invention is based on a scroll pump comprising a spiral component which has a base plate and a spiral wall extending from the base plate, the spiral wall having at its end facing away from the base plate a groove in which a sealing element is received, the Groove is delimited by two opposite side walls. It is an object to simplify the handling of the spiral component when assembling the scroll pump and / or to reduce the risk of damage to the spiral component during handling. This object is achieved by a scroll pump with the features of claim 8, and in particular in that in a first spiral section a first of the side walls is thicker than a second one of the side walls in the first spiral section and / or as one or both side walls in a second spiral section.
  • the first spiral section is an outer end section of the spiral wall. This is particularly susceptible to damage. Spiral sections located further inward are protected in particular by spiral sections located on the outside, so that no “thickening” is necessary on the inside. In the sense of an overall preferably low mass, therefore, preferably only the outer end section of the spiral wall has a thickening.
  • the first spiral section can preferably be arranged at least substantially within the last half turn of the spiral wall. This is particularly at risk of damage. This advantageously takes advantage of the fact that a penultimate half of the turn is in principle also arranged on the outside, but already a certain amount due to a larger protrusion of the base plate Protection. The mass of the spiral component can thus be kept relatively small.
  • first spiral section extends at least over 100 °, preferably at least over 140 °.
  • first spiral section can preferably extend at most over 200 °, preferably over at most 180 °.
  • the first spiral section is arranged in a non-pump-active region of the spiral wall. This advantageously takes advantage of the fact that generally less strict manufacturing tolerances are required in such a non-pumping area. The thickening is thus particularly easy to produce.
  • the first side wall can be a radially outer side wall. This enables a particularly strong reduction in the risk of damage.
  • the first side wall can preferably be thicker, for example, by at least 0.2 mm and / or by at most 1 mm, in particular at most 0.7 mm, in particular at most 0.4 mm. This enables particularly good stabilization, particularly with a relatively small additional mass.
  • spiral component is movable and excentrically excitable to produce a pumping effect.
  • the advantages according to the invention unfold to a particular degree on the movable spiral component.
  • the Fig. 1 shows a vacuum pump designed as a scroll pump 20.
  • This comprises a first housing element 22 and a second housing element 24, the second housing element 24 having a pump-active structure, namely a spiral wall 26.
  • the second housing element 24 thus forms a fixed spiral component of the scroll pump 20.
  • the spiral wall 26 acts with a spiral wall 28 of a movable one Spiral component 30 together, wherein the movable spiral component 30 is eccentrically excited to generate a pumping action via an eccentric shaft 32.
  • a gas to be pumped is conveyed from an inlet 31, which is defined in the first housing element 22, to an outlet 33, which is defined in the second housing element 24.
  • the eccentric shaft 32 is driven by a motor 34 and supported by two roller bearings 36. It comprises an eccentric pin 38 which is arranged eccentrically to its axis of rotation and which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40.
  • On the movable scroll member 30 is also in for sealing Fig. 1 attached to the left-hand end of a bellows 42, the right-hand end of which is attached to the first housing element 22.
  • the left-hand end of the corrugated bellows 42 follows the deflection of the movable spiral component 30.
  • the scroll pump 20 comprises a fan 44 for generating a cooling air flow.
  • An air guide hood 46 is provided for this cooling air flow, to which the fan 44 is also attached.
  • the air guide hood 46 and the housing elements 22 and 24 are shaped such that the cooling air flow essentially flows around the entire pump housing and thus achieves good cooling performance.
  • the scroll pump 20 further comprises an electronics housing 48, in which a control device and power electronics components for driving the motor 34 are arranged.
  • the electronics housing 48 also forms a base of the pump 20. Between the electronics housing 48 and the first housing element 22, a channel 50 is visible, through which an air flow generated by the fan 44 is guided along the first housing element 22 and also along the electronics housing 48, so that both are effectively cooled become.
  • the electronics housing 48 is in Fig. 2 illustrated in more detail. It comprises several separate chambers 52. Electronic components can be cast in these chambers 52 and are therefore advantageously shielded. When potting the electronic components, it is preferred to use the least possible amount of potting material. For example, the potting material can first be introduced into the chamber 52 and then the electronic component can be pressed in.
  • the chambers 52 can preferably be designed such that different variants of the electronic components, in particular different assembly variants of a circuit board, can be arranged and / or cast in the electronics housing 48. For certain variants, individual chambers 52 can also remain empty, that is to say have no electronic components. So a so-called modular system for different pump types can be easily realized.
  • the potting material can in particular be designed to be thermally conductive and / or electrically insulating.
  • a plurality of walls or ribs 54 are formed at the rear of the electronics housing 48, which define a plurality of channels 50 for guiding a cooling air flow.
  • the chambers 52 also enable particularly good heat dissipation from the electronic components arranged in them, in particular in connection with a heat-conducting potting material, and to the ribs 54. The electronic components can thus be cooled particularly effectively and their service life is improved.
  • FIG. 3 The scroll pump 20 is shown in perspective as a whole, but the air guide hood 46 is hidden, so that in particular the fixed spiral component 24 and the fan 44 are visible.
  • a plurality of recesses 56 arranged in a star shape are provided on the fixed spiral component 24, each of which defines ribs 58 arranged between the recesses 56.
  • the cooling air flow generated by the fan 44 leads through the recesses 56 and past the ribs 58 and thus cools the fixed spiral component 24 particularly effectively.
  • the cooling air flow first flows around the fixed spiral component 24 and only then the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous since the pump-active area of the pump 20 generates a lot of heat due to the compression during operation and is therefore primarily cooled here .
  • the pump 20 comprises a pressure sensor 60 integrated in it. This is arranged inside the air guide hood 46 and screwed into the fixed spiral component 24.
  • the pressure sensor 60 is connected to the electronics housing 48 and a control device arranged therein via a cable connection which is only partially shown.
  • the pressure sensor 60 is integrated in the control of the scroll pump 20.
  • the motor 34 shown in Fig. 1 visible can be controlled as a function of a pressure measured by the pressure sensor 60.
  • the fine vacuum pump can, for example only be switched on when the pressure sensor 60 measures a sufficiently low pressure. In this way, the fine vacuum pump can be protected from damage.
  • Fig. 4 shows the pressure sensor 60 and its arrangement on the fixed spiral component 24 in a cross-sectional representation.
  • a channel 62 is provided for the pressure sensor 60, which here opens into a non-pump-active outer area between the spiral walls 26 and 28 of the fixed or movable spiral components 24 and 30.
  • the pressure sensor thus measures a suction pressure of the pump.
  • a pressure between the spiral walls 26 and 28 can also be measured in a pump-active area.
  • intermediate pressures can also be measured, for example.
  • the pressure sensor 60 permits, for example, the determination of a compression, in particular a detection of a state of wear of the pump-active components, in particular a sealing element 64, also referred to as a tip seal.
  • the measured suction pressure can also be used to regulate the pump (including the pump speed).
  • an intake pressure can be specified by the software and an intake pressure can be set by varying the pump speed. It is also conceivable that, depending on the measured pressure, a wear-related pressure increase can be compensated for by increasing the speed. A Tip Seal change can thus be postponed or longer change intervals can be realized.
  • the data of the pressure sensor 60 can therefore generally e.g. for wear determination, for situational control of the pump, for process control, etc.
  • pressure sensor 60 may optionally be provided.
  • a blind plug can be provided to close the channel 62.
  • a pressure sensor 60 can then, for example, if necessary be retrofitted. In particular with regard to the retrofitting, but also generally advantageous, it can be provided that the pressure sensor 60 is automatically recognized when it is connected to the control device of the pump 20.
  • the pressure sensor 60 is arranged in the cooling air flow of the fan 44. This also advantageously cools it. This also has the consequence that no special measures have to be taken for a higher temperature resistance of the pressure sensor 60 and consequently an inexpensive sensor can be used.
  • the pressure sensor 60 is in particular arranged such that the outer dimensions of the pump 20 are not enlarged by it and the pump 20 consequently remains compact.
  • the movable scroll member 30 is shown in different views.
  • the spiral structure of the spiral wall 28 is particularly well visible.
  • the spiral component 30 comprises a base plate 66, from which the spiral wall 28 extends.
  • FIG Fig. 6 One side of the base plate 66 facing away from the spiral wall 28 is shown in FIG Fig. 6 visible.
  • the base plate includes, among other things, several fastening recesses, for example for fastening the bearing 40 and the corrugated bellows 42, which are shown in FIG Fig. 1 are visible.
  • a first intermediate section 70 of the circumference of the base plate 66 extends between two of the holding projections 68. This first intermediate section 70 has a greater radial height than a second intermediate section 72 and as a third intermediate section 74.
  • the first intermediate section 70 is an outermost 120 ° section the spiral wall 28 arranged opposite.
  • the base plate 66 and the spiral wall 28 are preferably produced from a solid material together in an exciting manner, i. H. the spiral wall 28 and the base plate 66 are formed in one piece.
  • the spiral component 30 can be clamped directly onto the holding projections 68.
  • the in Fig. 6 shown side of the base plate 66 are processed, in particular the mounting recesses are introduced.
  • the machining of the spiral wall 28 from the solid material can also take place within the scope of this clamping.
  • the spiral component 30 can be clamped, for example, with a clamping device 76, as shown in FIG Fig. 7 is shown.
  • a clamping device 76 has a hydraulic three-jaw chuck 78 for direct contact with the three holding projections 68.
  • the clamping device 76 has a continuous recess 80 through which a tool access to the spiral component 30, in particular to that in FIG Fig. 6 shown side of the same is enabled. Machining operations can thus take place from both sides during a clamping, in particular at least one finishing of the spiral wall 28 and the introduction of fastening recesses.
  • the contour of the holding projections 68 and the clamping pressure of the clamping device 76 are preferably selected so that no critical deformations of the spiral component 30 take place.
  • the three holding projections 68 are preferably selected such that the outer dimension, that is to say the maximum diameter of the spiral component 30, is not enlarged. Thus, on the one hand material and on the other machining volume can be saved.
  • the holding projections 68 are in particular designed and / or arranged at such an angular position that the screw connection of the corrugated bellows 42 is accessible.
  • the number of screwing points of the bellows 42 is preferably not equal to the number of retaining projections 68 on the movable spiral component 30.
  • Fig. 1 On the eccentric shaft 32 Fig. 1 two balance weights 82 are attached to compensate for an unbalance of the excited system.
  • the area of in Fig. 1 right-hand counterweight 82 is in Fig. 8 shown enlarged.
  • the balance weight 82 is screwed onto the eccentric shaft 32.
  • FIG. 9 A similar image section is in Fig. 9 shown for another scroll pump, which is preferably the same series of the pump 20 of the Fig. 1 listened to.
  • the the Fig. 9 the underlying pump has, in particular, different dimensions and therefore requires a different balance weight 82.
  • the eccentric shafts 32, the counterweights 82 and the housing elements 22 are dimensioned such that only a certain type of the two types of counterweights 82 shown can be mounted on the eccentric shaft 32 at the fastening position shown in each case.
  • the balance weights 82 are in the 8 and 9 dimensioned together with certain dimensions of the space provided for them to illustrate that the counterweight 82 of the Fig. 9 cannot be mounted on the eccentric shaft 32 and vice versa. It goes without saying that the dimensions given are given purely by way of example.
  • Fig. 8 So in Fig. 8 a distance between a mounting hole 84 and a shaft shoulder 86 9.7 mm.
  • the balance weight 82 of the Fig. 8 is shorter in the corresponding direction, namely 9 mm long, so it can be easily installed.
  • the balance weight 82 of the Fig. 9 has a longitudinal extension of 11 mm measured from the mounting hole.
  • the balance weight 82 is the Fig. 9 not on the eccentric shaft 32 Fig. 8 mountable, since the shaft shoulder 86 collides with the balance weight 82 during an attempted assembly or because the balance weight 82 thus Fig. 9 not fully in contact with the eccentric shaft 82 Fig. 8 can be brought. Because the counterweight 82 of the Fig.
  • Fig. 9 is a distance in the longitudinal direction between the mounting hole 84 and a housing shoulder 88 17.5 mm.
  • the balance weight 82 of the Fig. 8 with its extension of 21.3 mm would 32 when inserting the eccentric shaft Fig. 9 collide with the housing shoulder 88 so that a complete assembly would not be possible. Incorrect assembly is possible at first, but is reliably recognized.
  • the balance weight 82 is mounted rotated about the axis of the fastening bore 84 Fig. 8 on the eccentric shaft 32 Fig. 9 the 21.3 mm extension would collide with the shaft shoulder 86, which is only 13.7 mm from the mounting hole 84.
  • the counterweights 82 are generally designed such that confusion of the counterweight with those of other sizes is avoided during assembly and / or service becomes.
  • the counterweights are preferably attached using through bolts. Similar counterweights of different pump sizes are designed in such a way that, due to adjacent shoulders on the shaft, the positions of the thread and through hole of the counterbalance, as well as shoulders within the housing, assembly of the wrong counterweight is prevented.
  • a gas ballast valve 90 of the scroll pump 20 is shown. This is also in the overall representation of the pump 20 in Fig. 3 visible and arranged on the fixed spiral component 24.
  • the gas ballast valve 90 comprises an actuating handle 92. This comprises a plastic body 94 and a base element 96, which is preferably made of stainless steel.
  • the base element 96 comprises a through bore 98 which is provided on the one hand for the connection and introduction of a ballast gas and on the other hand comprises a check valve 100.
  • the bore 98 is also closed in the illustrations by means of a plug 102.
  • a filter can also be provided, for example, the ballast gas preferably being air and in particular entering the valve 90 directly via the filter.
  • the actuating handle 92 is fastened to a rotatable element 106 of the valve 90 with three fastening screws 104, which are arranged in a respective bore 108 and of which in the selected sectional view of FIG Fig. 11 only one is visible.
  • the rotatable element 106 is rotatably fastened to the second housing element 24 by means of a fastening screw (not shown) extending through a bore 110.
  • valve 90 To actuate the valve 90, a torque manually applied to the actuating handle 92 is transmitted to the rotatable element 106 and the latter is thus rotated.
  • bore 98 communicates with an interior of the housing.
  • Three switching positions are provided for the valve 90, namely that in FIG Fig. 10 shown, which is a locking position, and a position rotated to the right and to the left, in which the bore 98 is in communication with different areas of the interior of the housing.
  • the bores 108 and 110 are closed by a cover 112.
  • the sealing effect of the gas ballast valve 90 is based on axially pressed O-rings. When valve 90 is actuated, a relative movement is exerted on the O-rings. If dirt, such as particles, reaches the surface of an O-ring, there is a risk of early failure.
  • the cover 112 prevents dirt and the like from entering the screws of the handle 92.
  • This cover 112 is attached via an interference fit of three centering elements. Specifically, the cover 112 has an insertion pin (not shown) for each bore 108, with which the cover 112 is held in the bores 108.
  • the bores 108 and 110 and the fastening screws arranged therein are thus protected from contamination.
  • the fastening screw not shown, which is arranged in the bore 110 and which permits a rotary movement, the entry of dirt into the valve mechanism can be effectively minimized and the service life of the valve can be improved.
  • the plastic handle with overmolded stainless steel base ensures good corrosion resistance with low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
  • the fan 44 such as in the Fig. 1 and 3 speed control is preferably provided.
  • the fan is controlled by means of PWM depending on the power consumption and temperature of the power module, which is accommodated in the electronics housing 48, for example.
  • the speed is set in the same way as the power consumption. However, the control is only permitted from a module temperature of 50 ° C. If the pump gets into the temperature range of a possible derating (temperature-related performance reduction), the max. Fan speed controlled. This regulation enables a minimum noise level to be achieved when the pump is cold, a low noise level at the end pressure or at low load - corresponding to the pump noise - to ensure that the pump is optimally cooled while the noise level is low, and before a temperature-related power reduction the max. Cooling performance is ensured.
  • the maximum fan speed can be adjustable, in particular depending on the situation. For example, it can be useful to reduce the maximum fan speed for high water vapor tolerance.
  • FIG. 12 is the movable scroll member 30 partially and opposite Fig. 5 shown enlarged.
  • the spiral wall 28 has, at its end facing away from the base plate 66 and toward a base plate of the solid spiral component 24 (not shown here), a groove 114 for inserting a sealing element 64, also not shown here, namely a so-called tip seal.
  • the arrangement in the operating state is, for example, in Fig. 4 clearly visible.
  • the groove 114 is delimited outwards and inwards by two opposite side walls, namely by an inner side wall 116 and an outer side wall 118.
  • the outer side wall 118 is made thicker than the inner side wall 116 in the first spiral section 120 and thicker than both side walls 116 and 118 in another, second spiral section 122.
  • the first spiral section 120 extends from FIG Fig. 12 indicated location up to the outer end of the spiral wall 28, as it is also for example in Fig. 5 is indicated.
  • the first spiral section 120 extends here by way of example over approximately 163 °.
  • the first spiral section 120 forms an outer end section of the spiral wall 28.
  • the first spiral section 120 is at least partially, in particular completely, arranged in a non-pumping region of the spiral wall 28.
  • the first spiral section 120 can at least substantially completely fill the non-pump-active region of the spiral wall 28.
  • the first intermediate section 70 can preferably be arranged between two holding projections 68, which has a greater radial height than other intermediate sections 72 and 74, opposite the first spiral section 120. An imbalance introduced by the thicker side wall 118 can thus be compensated for by the greater weight of the first intermediate section 70.
  • the movable spiral component should generally preferably have a low weight. Therefore, the spiral walls are generally made very thin. Furthermore, with thinner walls, there are smaller pump dimensions (significant outside diameter).
  • the side walls of the Tip Seal groove are special as a result thin.
  • the ratio of the TipSeal wall thickness to the total spiral wall thickness is, for example, at most 0.17. Due to the tip seal groove, however, the spiral wall tip is very sensitive to bumps during handling, such as when installing or changing the tip seal. By light impacts, e.g. B. also during transport, the side wall of the groove can be pressed inwards so that the tip seal can no longer be fitted.
  • the groove has an asymmetrical wall thickness, in particular a thickening of the spiral wall that is local to the outside.
  • This area is preferably not pump-active and can therefore be manufactured with a greater tolerance. Damage is significantly reduced by the one-sided thickening of the, in particular the last half, turn.
  • a thickening of the spiral wall is preferably not necessary, since the wall is protected by protruding elements of the component.
  • Air guide hood 46 shown defines an air flow as indicated by a dashed arrow 124.
  • the fan 44 is connected to a control device in the electronics housing 48 via a cable, not shown, which runs through the air guiding hood 46 and via a plug connection.
  • This comprises a socket 126 and a plug 128.
  • the socket 126 is mounted on the electronics housing 48 and / or is fastened to a circuit board arranged in the electronics housing 48.
  • the socket 126 is, for example, also in the Fig. 2 and 3 visible.
  • the plug 128 is connected to the fan 44 via the cable, not shown.
  • the plug connection 126, 128 is separated from the air flow 124 by a partition 130.
  • the air flow 124 which can contain dusts or similar contaminants, for example, is thus kept away from the plug connection 126, 128.
  • the plug connection 126, 128 itself is protected and, on the other hand, it is prevented that the contamination by the for the Socket 126 provided opening in the electronics housing 48 into this and get to the control device and / or power electronics.
  • the air dome 46 is in Fig. 14 shown separately and in perspective. Among other things, the partition 130 with the space defined behind it and intended for the plug 128 is visible.
  • the dividing wall 130 comprises a recess 132 designed here as a V-shaped notch for the passage of a cable from the plug 128 to the fan 44.
  • the partition 130 ensures that the air taken in does not reach the electronics via the opening of the connector 126, 128.
  • the cable of the fan is led laterally through the partition 130 through the V-shaped notch 132.
  • the notch 132 has a lateral offset to the connector 126, 128, whereby a labyrinth effect and thus a further reduction in the leakage of cooling air to the connector 126, 128 are achieved.
  • the air duct into the channel 50 between the electronics housing 48 and the pump housing 22 is also improved by a partition 130 within the air guide hood 46. There is less turbulence and back pressure for the fan 44.
  • the Fig. 15 shows a contact area between the first housing element 22 and the second housing element or fixed spiral component 24 in a schematic sectional view.
  • the second housing element 24 is partially inserted into the first housing element 22 with a transition fit 134.
  • a seal by means of an O-ring 136 is provided.
  • the transition fit 134 also serves, for example, to center the second housing element 24 relative to the first housing element 22.
  • the second housing element 24 For maintenance purposes, for example to replace the sealing element 64, the second housing element 24 has to be dismantled, for example. It may happen that the transition fit 134 or the O-ring 136 jam if the second housing element 24 is not pulled out just enough.
  • a forcing thread 138 is provided to solve this problem.
  • a second forcing thread can also preferably be provided at least substantially radially opposite. In order to release the second housing element 24 as straight and guided as possible, a screw can be screwed into the forcing thread 38 until the screw protrudes out of it and comes into contact with the first housing element 22. The housing elements 22 and 24 are pushed apart from one another by further screwing in.
  • the fastening screws 142 provided for fastening the second housing element 24 to the first housing element 22 can be used for pressing, as is shown, for example, in FIGS Fig. 1 and 3 are designated.
  • the forcing thread 138 preferably has the same thread type as the fastening thread provided for the fastening screws 142.
  • a depression 140 is provided on the second housing element 22 and is associated with the pull-off thread 138. If, when the screw is screwed into the forcing thread 138, abrasion particles are discharged, they collect in the depression 140. This prevents such abrasion particles, for example, from preventing the housing elements 22 and 24 from fully abutting one another.
  • the air guide hood 46 has at least one, in particular additional, in Fig. 14 shown dome 144, which allows mounting of the air guide hood 46 only when the screws used for pressing, in particular the fastening screws 142, have been removed again. This is because the air-guiding hood 46 with the dome 144 is designed such that it would collide with a screw head of a jack-off screw possibly screwed into the forcing thread 138, so that the air-guiding hood 46 would not be completely mountable. In particular, the air guide hood 46 can only be installed when the jack screws are completely removed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP19201745.7A 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes Active EP3617511B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
EP19201745.7A EP3617511B1 (fr) 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes
JP2020160698A JP7220692B2 (ja) 2019-10-07 2020-09-25 真空ポンプ、スクロールポンプ及びその製造方法
EP22156933.8A EP3974655B1 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales et son procédé de fabrication
EP25161936.7A EP4542048A3 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales avec capteur de pression intégré
EP22199874.3A EP4095387B1 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales avec capteur de pression intégré
EP20198997.7A EP3739166B1 (fr) 2019-10-07 2020-09-29 Pompe à vide, pompe d'extraction et procédé de fabrication de telles pompes et clapet anti-retour
US17/063,912 US11773849B2 (en) 2019-10-07 2020-10-06 Vacuum pump, scroll pump, and manufacturing method for such
JP2022178824A JP7549634B2 (ja) 2019-10-07 2022-11-08 真空ポンプ、スクロールポンプ及びその製造方法
US18/449,111 US20230383750A1 (en) 2019-10-07 2023-08-14 Vacuum pump, scroll pump, and manufacturing method for such
JP2024147175A JP2024163137A (ja) 2019-10-07 2024-08-29 真空ポンプ、スクロールポンプ及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19201745.7A EP3617511B1 (fr) 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes

Publications (3)

Publication Number Publication Date
EP3617511A2 true EP3617511A2 (fr) 2020-03-04
EP3617511A3 EP3617511A3 (fr) 2020-07-15
EP3617511B1 EP3617511B1 (fr) 2021-12-08

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Application Number Title Priority Date Filing Date
EP19201745.7A Active EP3617511B1 (fr) 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253720A2 (fr) 2023-08-08 2023-10-04 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre
EP4467810A2 (fr) 2024-07-15 2024-11-27 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et procédé de fabrication d'une pompe à vide à spirales
EP4538532A2 (fr) 2025-02-25 2025-04-16 Pfeiffer Vacuum Technology AG Pompe à vide à spirales
EP4636251A2 (fr) 2025-09-09 2025-10-22 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029975A (ja) * 1988-06-27 1990-01-12 Toshiba Corp スクロール型圧縮機
DE59300185D1 (de) * 1992-11-07 1995-06-14 Aginfor Ag Verdrängermaschine nach dem Spiralprinzip.
US6074185A (en) * 1998-11-27 2000-06-13 General Motors Corporation Scroll compressor with improved tip seal
US7963752B2 (en) * 2007-01-26 2011-06-21 Emerson Climate Technologies, Inc. Powder metal scroll hub joint
GB0914230D0 (en) * 2009-08-14 2009-09-30 Edwards Ltd Scroll pump
US9181949B2 (en) * 2012-03-23 2015-11-10 Bitzer Kuehlmaschinenbau Gmbh Compressor with oil return passage formed between motor and shell
CN103084887A (zh) * 2012-11-14 2013-05-08 柳州易舟汽车空调有限公司 涡旋盘型线加工夹具
CN206010470U (zh) * 2016-08-10 2017-03-15 鞍山新磁电子有限公司 一种可精确定位的动涡旋盘结构的工装夹具

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253720A2 (fr) 2023-08-08 2023-10-04 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4253720A3 (fr) * 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4506536A1 (fr) 2023-08-08 2025-02-12 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4506537A1 (fr) 2023-08-08 2025-02-12 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
WO2025032188A1 (fr) 2023-08-08 2025-02-13 Pfeiffer Vacuum Technology AG Pompe à vide à spirale et système de pompe à vide à spirale
EP4530471A2 (fr) 2023-08-08 2025-04-02 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4530470A2 (fr) 2023-08-08 2025-04-02 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4530471A3 (fr) * 2023-08-08 2025-07-02 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre
EP4467810A2 (fr) 2024-07-15 2024-11-27 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et procédé de fabrication d'une pompe à vide à spirales
EP4538532A2 (fr) 2025-02-25 2025-04-16 Pfeiffer Vacuum Technology AG Pompe à vide à spirales
EP4636251A2 (fr) 2025-09-09 2025-10-22 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

Also Published As

Publication number Publication date
EP3617511B1 (fr) 2021-12-08
EP3617511A3 (fr) 2020-07-15

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