EP3617520A1 - Appareil sous vide, unité accessoire et système - Google Patents

Appareil sous vide, unité accessoire et système Download PDF

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Publication number
EP3617520A1
EP3617520A1 EP18191876.4A EP18191876A EP3617520A1 EP 3617520 A1 EP3617520 A1 EP 3617520A1 EP 18191876 A EP18191876 A EP 18191876A EP 3617520 A1 EP3617520 A1 EP 3617520A1
Authority
EP
European Patent Office
Prior art keywords
connection
accessory unit
vacuum device
unit
accessory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18191876.4A
Other languages
German (de)
English (en)
Other versions
EP3617520B1 (fr
Inventor
Christian Koch
Michael Schweighöfer
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP18191876.4A priority Critical patent/EP3617520B1/fr
Priority to JP2019148482A priority patent/JP2020056397A/ja
Publication of EP3617520A1 publication Critical patent/EP3617520A1/fr
Application granted granted Critical
Publication of EP3617520B1 publication Critical patent/EP3617520B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the present invention relates to a vacuum device, in particular a vacuum pump, with at least one connection for an accessory unit and with a control unit for the accessory unit.
  • the invention also relates to an accessory unit for a vacuum device, in particular a vacuum pump, with a connection for connection to a connection of the vacuum device.
  • the invention also relates to a system with a vacuum device and an accessory unit.
  • one or more connections are each provided for an accessory unit. After connection to the connection, the accessory unit is operated by a control unit of the vacuum device.
  • control unit is designed to recognize the type of an accessory unit connected to the connection.
  • connection of the accessory unit can be carried out particularly easily, in particular without manual or other external configuration.
  • the operation of the vacuum device is also particularly flexible as a result of the accessories can be connected, disconnected and / or replaced without great effort and as required.
  • a particularly convenient operation in the sense of a "plug and play" concept is realized, as is known from the remote technical field of personal computers. From the user's point of view, a connected accessory unit advantageously gains its function simply by connecting to the connection. Knowing the type of accessory unit, the control unit can control it as required.
  • control unit can recognize the accessory unit on the basis of a label and call up further information, such as maximum tolerable voltage, from a stored table.
  • control unit immediately recognizes the necessary information, in particular on the basis of a signal emitted by the accessory unit.
  • the connection can have at least one communication contact for communicatively connecting the accessory unit to the control unit.
  • This does not necessarily mean a metallic and / or electrical contact, but generally a connection point for wired communication.
  • an optical contact for example for an optical waveguide, can also be provided.
  • a communication interface in particular wireless, that is separate from the connection can also be provided.
  • the communication contact can also be used for communication with other units that are not accessory units, for example for communication with a configuration and / or diagnostic unit, a further vacuum device and / or a process control system.
  • a separate interface such as a diagnostic or configuration interface, can then advantageously be dispensed with.
  • several communication contacts, in particular per connection, can also be provided.
  • connection has at least one supply contact for the electrical supply of the accessory unit.
  • the accessory unit therefore does not require an additional power connection, which simplifies the arrangement.
  • a driver can be provided for the supply contact or for the connection. This can advantageously be designed in such a way that accessory units from older device generations can also be operated reliably, in particular without means for sending out detection signals.
  • the control unit can be designed to supply the accessory unit with different voltages, in particular via the supply contact. In the simplest case, these are two different voltages, in particular zero and a general operating voltage for all accessories. At least two non-zero different voltages are particularly advantageous. In this way, the connection of accessory units can be made more flexible, since they can be supplied as required without the need for a transformer on the accessory unit.
  • the control unit is designed to apply a first non-zero voltage, for example 5 V, in principle, in particular to the connection or to the supply contact, and, after detection and / or communication with the accessory unit, another voltage suitable for the accessory unit Voltage, for example 24 V, to apply.
  • a specific supply voltage is permanently present, for example at the supply contact.
  • the accessory unit controls itself more advantageously Way itself, in particular depending on commands or data specified by the control unit, which are advantageously transmitted via a communication contact of the connection. This simplifies the vacuum device and control unit technically.
  • the supply contact can be used, for example, both to supply energy to the accessory unit and as a mere switching means for actuating a switch, such as a relay.
  • a switch such as a relay.
  • the accessory unit can be a backing pump for the vacuum device designed here as a vacuum pump. This backing pump requires a relatively large output, which could only be provided with a special technical effort by the vacuum device. On top of this, this leads to an increased installation space, which is often undesirable. In this example, the energy supply to the accessory unit is thus advantageously outsourced.
  • a vacuum device Insofar as a vacuum device is described above as a unit different from the accessory unit, this relates to vacuum devices which are not intended as accessories for the vacuum device according to the invention, but are operated in a subordinate manner.
  • the backing pump described here is subordinate to the vacuum pump and dependent.
  • the backing pump is also controlled via the supply contact. In principle, however, it can also be controlled via a communication contact or other means of communication.
  • the connection according to the invention can be designed and used in a variety of ways. Control and / or communication can be implemented for numerous units, in particular starting from the control unit. In all this, the automatic recognition of the accessory unit according to the invention by the control unit ensures a completely new flexibility and simplicity.
  • control unit is designed to control the accessory unit as a function of parameters of the vacuum device.
  • the speed is controlled as a function of a temperature in or on the vacuum device. This control can take place, on the one hand, via a supply contact and, on the other hand, via a communication contact, in which case the accessory unit is then prompted to adjust the speed itself.
  • the vacuum device and / or accessory unit are even designed such that both are possible.
  • a common contact can also be provided as a communication contact and supply contact. Communication and supply are then also possible via the same line. This proves to be particularly advantageous in terms of compatibility. This means that existing connections do not need to be redesigned. In addition, the construction is and remains simple.
  • control unit is designed to recognize the type of accessory unit from a signal emanating from the accessory unit.
  • the signal can include, for example, an identifier and / or information that directly relates to parameters of the accessory unit, such as the operating voltage.
  • the signal can be made available, for example, via a communication contact of the connection of the control unit. This enables particularly simple operation. Alternatively or additionally, the signal can also be made available independently of the connection, in particular via an additional connection and / or wirelessly.
  • a serial interface for the accessory unit can be provided at the connection. This enables particularly reliable communication to be implemented in a simple manner.
  • a bus interface for the accessory unit can be provided at the connection. This enables particularly flexible operation for a large number of accessory units.
  • the accessory units can be controlled individually and / or in groups. In particular, the number of accessory units can be expanded.
  • control unit can recognize an assignment of the connected accessory units to the respective connection, for example via a topology, that is to say via direct or assigned individual wiring between the control unit and the respective connections. Alternatively, however, an assignment can also be made via a bus system.
  • control unit is designed to process useful data provided by the accessory unit.
  • data that is different from recognition data are considered as useful data.
  • user data include sensor data.
  • the accessory unit can include a sensor and provide its information either analog or digital, in particular via the connection. It is possible with a cost advantage to dispense with a separate converter provided for the sensor. This not only saves a converter, but generally available parts can also be operated with the control unit without major technical adjustments.
  • control unit is designed to operate the accessory unit, even if the control unit does not recognize the type of the accessory unit.
  • an input unit for inputting the type of accessory unit to the control unit can be provided.
  • input can also be made via an additional connection for an accessory unit, it being possible for an input unit or a communication unit for receiving an input unit to be connected or connected to this connector as an accessory unit.
  • control unit can be designed to operate more than one accessory unit connected to the connection at the same time.
  • at least one accessory unit directly connected or connectable to the connector can have at least one additional connector for connecting at least one additional accessory unit.
  • the additional connection can either be connected directly to the first connection of the accessory unit, or else can be connected via a processing unit, for example a microprocessor, for example via the forwarding of data and / or voltage from a priority connected accessory unit for one or more subsequent accessory units can be decided.
  • an adapter can also be provided for the parallel connection of at least two accessory units to one connection.
  • recognition and / or assignment can take place via address selection switches or preprogrammed addresses.
  • an accessory unit can also be connected via several connections, for example by one to realize greater performance, in particular on the supply contacts, and / or a greater communication data rate, in particular on a communication contact.
  • control unit can comprise a motor controller for the vacuum device, in particular a vacuum pump, or can be part of one.
  • the control unit can be designed separately from an engine control and / or separately from other control elements.
  • One or more separate control units can each be provided for one or more connections.
  • a control unit can be provided for a connection, and in particular adjacent to or integrated in it. It is advantageous here that the control unit, in particular via the connection, can also be contacted and read out when the motor control or the other control element is not attached. This leads to a further flexibility in the operation and maintenance of the vacuum device or a vacuum system.
  • a connection can, for example, be male or female and / or comprise a plug or a socket, other types of connection also being conceivable.
  • the object of the invention is also achieved by an accessory unit with the features of the independent claim directed thereon, and in particular in that the accessory unit is designed to output a signal, in particular via the connection, in particular via a communication contact, on the basis of which the accessory unit in its Is recognizable.
  • the accessory unit can comprise, for example, a heating element, a fan, a flood valve, a sealing gas valve, a control relay, for example for a backing pump, a pressure measuring device and / or a, in particular integrated, measuring tube. More generally, the accessory unit can include, for example, at least one actuator and / or sensor. But accessories with other functional elements are also conceivable.
  • an accessory unit can also include a storage element for storing data. This can be used, for example, to record data from pump data over a longer period of time.
  • the accessory unit comprises both an actuator and a sensor, in particular for a parameter that can be influenced by the actuator.
  • the accessory unit is in particular and is designed to output data, in particular user data, from the sensor via the connection.
  • parameters that can be influenced by actuators are a temperature on a heating element and a speed on a fan.
  • the sensor data can advantageously be used for a functional check of the actuator or also for controlling it depending on the sensor data.
  • the accessory unit itself can also have an interface for communication with further devices or units.
  • the accessory unit includes a wireless interface.
  • it can form a radio module, by means of which a wireless connection can be flexibly retrofitted to a vacuum device.
  • the wireless interface can, for example, be designed in accordance with at least one of the standards for GSM, UMTS, LTE and / or other mobile radio standards, Bluetooth, NFC and / or WLAN.
  • the accessory unit can in this way one or more other devices, e.g. themselves represent an accessory unit for a vacuum device, in particular according to the invention, read, control, recognize, etc. by radio - generally wirelessly -
  • the accessory unit can advantageously be designed so that it can also be operated by a control unit of the vacuum device when the latter is the accessory unit does not recognize in its nature, for example because the vacuum device has no detection means.
  • a control unit of the vacuum device when the latter is the accessory unit does not recognize in its nature, for example because the vacuum device has no detection means.
  • the accessory unit can be designed, for example, to recognize the fact of non-detection itself, for example by the unsuccessful attempt to establish communication with the control unit, in particular via a communication contact of the connection.
  • the accessory unit has at least one second connection for connecting a further accessory unit to the accessory unit and / or to the vacuum device.
  • the second connection and its contacts can be connected directly to the first connection, and in particular the contacts and the accessory unit can be designed for connection to a bus system.
  • a processing unit of the accessory unit can also be connected between the connections.
  • the accessory unit can, for example, prevent the information and / or voltages from being forwarded and / or change them.
  • connection of the vacuum device and / or the accessory unit can be designed, for example, both for a mechanical connection and for an electrical and / or information technology connection of the accessory unit to the control unit. This enables a particularly flexible connection.
  • the object is also achieved by a recognition unit with the features of the independent claim directed thereon.
  • the detection unit can, for example, advantageously be used to retrofit an older accessory unit.
  • the signal can be output in particular via the first connection, in particular via a communication contact.
  • the detection unit can, for example, have an input unit for inputting a type of an accessory unit and / or a preprogrammed type for outputting in the signal.
  • the object of the invention is also achieved by a system which comprises a vacuum device according to the invention and an accessory unit according to the invention and / or a detection unit according to the invention.
  • the object is achieved by a method for operating a vacuum device with an accessory unit which is not currently expressly claimed, but which is hereby separately disclosed as an invention, in which a control unit of the vacuum unit recognizes the type of an accessory unit connected to a connection.
  • FIG. 1 A vacuum device 10 designed as a turbomolecular pump is shown with a control unit 12 and two connections 14 for accessory units (not shown).
  • Various accessories such as holding elements, fans, flood valves, sealing gas valves, control relays, pressure measuring devices and / or integrated measuring tubes, can each be connected to the connections 14.
  • One, as here two or more connections 14 can be provided.
  • the connections 14 are arranged on a lower part 16 of a housing of the vacuum device.
  • one or more connections 14 can also be arranged elsewhere, for example on an upper part 18 of the housing and / or on and / or in the control unit 12 or its housing.
  • FIG. 2 shown sectional view of the vacuum device 10 of the Fig. 1
  • the section plane runs essentially through the lower part 16, the vacuum device 10 being rotated essentially by 180 °, that is to say the vacuum device is viewed from below.
  • Electronics 20 is visible, which itself, alternatively or in addition to the control unit 12, can form a control unit for accessory units connected to the connections 14.
  • the control unit 12 can, for example include an engine controller.
  • the electronics 20 can be configured as a control unit for one or more accessory units, for example, in such a way that the accessory unit can also be operated when the control unit 12 is not connected.
  • Fig. 3 shows a similar sectional view as Fig. 2 , but here two connections 22 are additionally shown, each of which is connected to a connection 14 of the vacuum device 10. Starting from a respective connection 22, a line 24 runs to a respective accessory unit, which is not shown here.
  • the connections 14 are designed as sockets and the connections 22 as plugs.
  • the first exemplary connection diagram shown is provided with two accessory units 26 for connection to a vacuum device 10.
  • the vacuum device 10 comprises a control unit 12 with two connections 14 for respective connections 22 of the accessory units 26.
  • the connections 22 are each connected to the accessory unit 26 via a line 24, but, for example, it is also conceivable to form the connector 22 directly on the accessory unit 26 .
  • An accessory unit 26 could form a plug-in module.
  • a connection 14 can also be connected to the control unit 12 or the vacuum device 10 via a line or otherwise, but be made separately.
  • a second connection diagram is in Fig. 5 shown.
  • a vacuum device 10 comprises a connection 14 provided on the housing of the vacuum device 10, an accessory unit 26 with a connection 22 being provided for connection to the connection 14 arranged on the vacuum device 10.
  • a control unit 12 comprises three connections 14.
  • a connection 22 is provided for connection to one of the three connections 14 and connects the control unit 12 to an accessory unit 26 which is attached to and / or in the vacuum device 10.
  • This Accessory unit 26 can have, for example, a heating element for heating the vacuum device 10 and / or a sensor for detecting a parameter prevailing in or on the vacuum device 10.
  • the third connection diagram shown includes a vacuum device 10, a control unit 12 with two connections 14.
  • a further connection 14 is provided on a housing part of the vacuum device 10 separately from the control unit 12.
  • the connection 14 is connected to the control unit 12 via a line 27.
  • the line 27 runs inside and / or in the housing of the vacuum device 10 or the control unit 12.
  • the connection 14 can be used, for example, both for a mechanical connection of the accessory unit 26 with the vacuum device 10 and for an electrical and / or information technology connection of the accessory unit 26 be formed on the control unit 12.
  • the control unit 12 can generally be designed as a component that is adjacent to the main housing of the vacuum device 10 and / or can also be integrated, that is to say can also be provided elsewhere in the vacuum device 10.
  • connection 22 which is connected directly to the control unit 26. No flexible line is therefore provided. However, such an arrangement can alternatively or additionally be provided. Via the connection 22, the accessory unit 26 is connected to the connection 14 of the vacuum device 10 both mechanically and electrically and / or in terms of information technology.
  • FIG. 7 A fourth connection diagram is shown, in which a control unit 12 is arranged integrated in a housing of the vacuum device 10.
  • the control unit 12 comprises a connection 14.
  • the vacuum device 10 comprises a further connection 14, which is connected to the control unit via a line 27.
  • Two connection units (not shown) can be connected to the respective connections 14 via connections 22.
  • FIG. 8 A vacuum device 10 with a connection 14 is shown.
  • an accessory unit 26 can be connected to the connector 14, which includes a connector 22 for connecting the accessory unit 26 to the connector 14 of the vacuum device 10.
  • the accessory unit 26 also includes a connector 14 for connecting one or more additional accessory units.
  • An adapter 28, for example, can be connected to one of the connections 14 via a connection 22 and has a plurality of connections 14 for connecting further accessories.
  • connection 14 of a vacuum device not shown here, is shown, which has a supply contact 30 and a communication contact 32.
  • An accessory unit 26 also has a supply contact 34 and a communication contact 36 at a connection 22.
  • the accessory unit 26 can therefore communicate with a control unit via the communication contacts 36 and 32 of the connections 22 and 14, respectively.
  • an accessory unit 26 with only one supply contact 34 is shown.
  • This accessory unit 26 can be supplied with electrical energy via the supply contacts 34 and 30.
  • This accessory unit 26 illustrates an accessory unit of an older generation than the upper accessory unit 26.
  • the vacuum device with the connection 14 can advantageously be designed such that the lower accessory unit 26 can also be operated without automatic recognition of its type.
  • a communication device and / or a communication contact can, however, also be retrofittable on an accessory unit, for example via a detection unit 38 connected between the connection 22 of the lower accessory unit 26 and the connection 14 of the vacuum device.
  • the detection unit 38 has a supply contact 30 at the connection 14 for supply of the accessory unit 26.
  • the detection unit 38 can use this, for example, to output a signal which indicates the type of the connected Accessory unit 26 displays. The signal or the type can be preprogrammed and / or can be entered, for example.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP18191876.4A 2018-08-31 2018-08-31 Appareil sous vide, unité accessoire et système Active EP3617520B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18191876.4A EP3617520B1 (fr) 2018-08-31 2018-08-31 Appareil sous vide, unité accessoire et système
JP2019148482A JP2020056397A (ja) 2018-08-31 2019-08-13 真空装置、アクセサリーユニットおよびシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18191876.4A EP3617520B1 (fr) 2018-08-31 2018-08-31 Appareil sous vide, unité accessoire et système

Publications (2)

Publication Number Publication Date
EP3617520A1 true EP3617520A1 (fr) 2020-03-04
EP3617520B1 EP3617520B1 (fr) 2021-05-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP18191876.4A Active EP3617520B1 (fr) 2018-08-31 2018-08-31 Appareil sous vide, unité accessoire et système

Country Status (2)

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EP (1) EP3617520B1 (fr)
JP (1) JP2020056397A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2874703A1 (es) * 2020-05-04 2021-11-05 Cecotec Res And Development Sistema de deteccion de accesorios para electrodomestico
EP4027043A1 (fr) * 2021-12-23 2022-07-13 Pfeiffer Vacuum Technology AG Soupape à vide

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JP2002021851A (ja) * 2000-07-04 2002-01-23 Koyo Seiko Co Ltd 磁気軸受制御装置
WO2007115633A1 (fr) * 2006-03-31 2007-10-18 J. Schmalz Gmbh Dispositif de manutention à dépression
DE202012006795U1 (de) * 2012-07-13 2013-10-14 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Vakuumpumpen-Anlage
DE102014206308A1 (de) * 2014-04-02 2015-10-08 J. Schmalz Gmbh Handhabungsanlage und Verfahren zum Betreiben einer Handhabungsanlage
EP3020975A1 (fr) * 2014-11-12 2016-05-18 Pfeiffer Vacuum Gmbh Appareil a vide

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JPH0599669A (ja) * 1991-10-04 1993-04-23 Fuji Electric Co Ltd 変位計
JP3130890B2 (ja) * 1999-02-25 2001-01-31 セイコー精機株式会社 磁気軸受装置及び磁気軸受制御装置
JP3442700B2 (ja) * 1999-10-15 2003-09-02 Ｓｍｃ株式会社 圧力センサ用制御装置および圧力センサシステム
JP4919702B2 (ja) * 2006-05-23 2012-04-18 株式会社キーエンス センサ装置及びセンサシステム
JP5065703B2 (ja) * 2007-02-15 2012-11-07 株式会社荏原製作所 回転機械装置における回転機械本体の機種識別方法、回転機械装置
JP4897400B2 (ja) * 2006-08-31 2012-03-14 船井電機株式会社 スキャナ
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JP6690213B2 (ja) * 2015-12-09 2020-04-28 セイコーエプソン株式会社 ロボット、制御装置およびロボットシステム
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Publication number Priority date Publication date Assignee Title
JP2002021851A (ja) * 2000-07-04 2002-01-23 Koyo Seiko Co Ltd 磁気軸受制御装置
WO2007115633A1 (fr) * 2006-03-31 2007-10-18 J. Schmalz Gmbh Dispositif de manutention à dépression
DE202012006795U1 (de) * 2012-07-13 2013-10-14 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Vakuumpumpen-Anlage
DE102014206308A1 (de) * 2014-04-02 2015-10-08 J. Schmalz Gmbh Handhabungsanlage und Verfahren zum Betreiben einer Handhabungsanlage
EP3020975A1 (fr) * 2014-11-12 2016-05-18 Pfeiffer Vacuum Gmbh Appareil a vide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2874703A1 (es) * 2020-05-04 2021-11-05 Cecotec Res And Development Sistema de deteccion de accesorios para electrodomestico
EP4027043A1 (fr) * 2021-12-23 2022-07-13 Pfeiffer Vacuum Technology AG Soupape à vide

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Publication number Publication date
JP2020056397A (ja) 2020-04-09
EP3617520B1 (fr) 2021-05-26

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