EP3629366A3 - Système à vide et pompe à vide - Google Patents
Système à vide et pompe à vide Download PDFInfo
- Publication number
- EP3629366A3 EP3629366A3 EP20152401.4A EP20152401A EP3629366A3 EP 3629366 A3 EP3629366 A3 EP 3629366A3 EP 20152401 A EP20152401 A EP 20152401A EP 3629366 A3 EP3629366 A3 EP 3629366A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum
- active
- vacuum pump
- pump
- pumping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20152401.4A EP3629366B1 (fr) | 2020-01-17 | 2020-01-17 | Système à vide et pompe à vide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20152401.4A EP3629366B1 (fr) | 2020-01-17 | 2020-01-17 | Système à vide et pompe à vide |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP3629366A2 EP3629366A2 (fr) | 2020-04-01 |
| EP3629366A3 true EP3629366A3 (fr) | 2020-09-02 |
| EP3629366B1 EP3629366B1 (fr) | 2022-05-11 |
Family
ID=69177062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP20152401.4A Active EP3629366B1 (fr) | 2020-01-17 | 2020-01-17 | Système à vide et pompe à vide |
Country Status (1)
| Country | Link |
|---|---|
| EP (1) | EP3629366B1 (fr) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1193497A2 (fr) * | 2000-09-14 | 2002-04-03 | GSF-Forschungszentrum für Umwelt und Gesundheit GmbH | Procédé et dispositif de caractérisation des propriétés de surface des particules d'aérosol portées par gaz |
| US20070148020A1 (en) * | 2005-12-22 | 2007-06-28 | Mccauley Edward B | Apparatus and method for pumping in an ion optical device |
| WO2016142683A1 (fr) * | 2015-03-06 | 2016-09-15 | Micromass Uk Limited | Ionisation améliorée d'échantillons gazeux |
-
2020
- 2020-01-17 EP EP20152401.4A patent/EP3629366B1/fr active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1193497A2 (fr) * | 2000-09-14 | 2002-04-03 | GSF-Forschungszentrum für Umwelt und Gesundheit GmbH | Procédé et dispositif de caractérisation des propriétés de surface des particules d'aérosol portées par gaz |
| US20070148020A1 (en) * | 2005-12-22 | 2007-06-28 | Mccauley Edward B | Apparatus and method for pumping in an ion optical device |
| WO2016142683A1 (fr) * | 2015-03-06 | 2016-09-15 | Micromass Uk Limited | Ionisation améliorée d'échantillons gazeux |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3629366A2 (fr) | 2020-04-01 |
| EP3629366B1 (fr) | 2022-05-11 |
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