EP3629366A3 - Vacuum system and vacuum pump - Google Patents

Vacuum system and vacuum pump Download PDF

Info

Publication number
EP3629366A3
EP3629366A3 EP20152401.4A EP20152401A EP3629366A3 EP 3629366 A3 EP3629366 A3 EP 3629366A3 EP 20152401 A EP20152401 A EP 20152401A EP 3629366 A3 EP3629366 A3 EP 3629366A3
Authority
EP
European Patent Office
Prior art keywords
vacuum
active
vacuum pump
pump
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20152401.4A
Other languages
German (de)
French (fr)
Other versions
EP3629366A2 (en
EP3629366B1 (en
Inventor
Michael Schweighöfer
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP20152401.4A priority Critical patent/EP3629366B1/en
Publication of EP3629366A2 publication Critical patent/EP3629366A2/en
Publication of EP3629366A3 publication Critical patent/EP3629366A3/en
Application granted granted Critical
Publication of EP3629366B1 publication Critical patent/EP3629366B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

Vakuumsystem (20), insbesondere Massenspektrometriesystem, umfassend: eine Vakuumpumpe (22) mit einem pumpaktiven Bereich (34), in dem ein Gas mittels eines aktiven Pumpelements (36) förderbar ist, eine Einrichtung zum Erzeugen eines Strahls (26, 32) von zu analysierenden Teilchen, wobei der Strahl (26, 32) in den pumpaktiven Bereich (34) geführt ist.Vacuum system (20), in particular a mass spectrometry system, comprising: a vacuum pump (22) with an active pumping area (34) in which a gas can be conveyed by means of an active pumping element (36), a device for generating a jet (26, 32) from to analyzing particles, the beam (26, 32) being guided into the pumping active area (34).

EP20152401.4A 2020-01-17 2020-01-17 Vacuum system and vacuum pump Active EP3629366B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20152401.4A EP3629366B1 (en) 2020-01-17 2020-01-17 Vacuum system and vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20152401.4A EP3629366B1 (en) 2020-01-17 2020-01-17 Vacuum system and vacuum pump

Publications (3)

Publication Number Publication Date
EP3629366A2 EP3629366A2 (en) 2020-04-01
EP3629366A3 true EP3629366A3 (en) 2020-09-02
EP3629366B1 EP3629366B1 (en) 2022-05-11

Family

ID=69177062

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20152401.4A Active EP3629366B1 (en) 2020-01-17 2020-01-17 Vacuum system and vacuum pump

Country Status (1)

Country Link
EP (1) EP3629366B1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1193497A2 (en) * 2000-09-14 2002-04-03 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Method and device for characterising surface properties of gasborne aerosol particles
US20070148020A1 (en) * 2005-12-22 2007-06-28 Mccauley Edward B Apparatus and method for pumping in an ion optical device
WO2016142683A1 (en) * 2015-03-06 2016-09-15 Micromass Uk Limited Improved ionisation of gaseous samples

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1193497A2 (en) * 2000-09-14 2002-04-03 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Method and device for characterising surface properties of gasborne aerosol particles
US20070148020A1 (en) * 2005-12-22 2007-06-28 Mccauley Edward B Apparatus and method for pumping in an ion optical device
WO2016142683A1 (en) * 2015-03-06 2016-09-15 Micromass Uk Limited Improved ionisation of gaseous samples

Also Published As

Publication number Publication date
EP3629366A2 (en) 2020-04-01
EP3629366B1 (en) 2022-05-11

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