EP3730802B1 - Élément de bride - Google Patents

Élément de bride Download PDF

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Publication number
EP3730802B1
EP3730802B1 EP19170677.9A EP19170677A EP3730802B1 EP 3730802 B1 EP3730802 B1 EP 3730802B1 EP 19170677 A EP19170677 A EP 19170677A EP 3730802 B1 EP3730802 B1 EP 3730802B1
Authority
EP
European Patent Office
Prior art keywords
receptions
group
flange element
section
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19170677.9A
Other languages
German (de)
English (en)
Other versions
EP3730802A1 (fr
Inventor
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19170677.9A priority Critical patent/EP3730802B1/fr
Priority to JP2020052048A priority patent/JP7177113B2/ja
Publication of EP3730802A1 publication Critical patent/EP3730802A1/fr
Application granted granted Critical
Publication of EP3730802B1 publication Critical patent/EP3730802B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a flange element for arrangement between two vacuum devices, in particular between two flanges each assigned to a vacuum device, according to the preamble of claim 1.
  • the receptacles can be through openings or blind holes.
  • Such a flange element is off US 2009/0081056 A1 known.
  • the state of the art is also given on US 2002/172589 A1 , JP 2006-037930 A and US 2005/244219 A1 referenced.
  • the invention thus relates to a separate flange element, ie not a flange section which is an integral or one-piece component of a vacuum device, for example a pump or chamber housing.
  • a separate flange element ie not a flange section which is an integral or one-piece component of a vacuum device, for example a pump or chamber housing.
  • Such separate flange elements are known in principle and are used, for example, as so-called transition flanges to connect a vacuum pump to a recipient, which is also referred to as a vacuum chamber.
  • the pump can, for example, have a larger flange than the recipient, or vice versa.
  • the transition flange is also referred to as a reducing flange or reducer, since the gas inlet of the pump and the gas outlet of the recipient have cross-sectional areas of different sizes, in particular different diameters, and thus the flow cross-section for the gas to be pumped off at the transition between recipient and pump reduced.
  • the pump and recipient can also have the same diameter at the transition.
  • a transition flange arranged in this case between the pump and the recipient is then not referred to as a reducing flange or reducing piece but, for example, as an adapter flange or adapter piece - or simply as an adapter.
  • the two vacuum devices to be connected to each other by vacuum technology have the same or different diameters at the transition - or, in general, the same or different free cross-sectional areas - must be used especially when using vacuum devices operated at high speeds, such as turbo-molecular vacuum pumps in particular, but in principle also with other vacuum pumps ensure that the connection between the pump and the recipient does not tear off in the event of a so-called crash.
  • a known measure consists in providing the through openings for the fastening screws with what is known as a screw release at least on one of the flanges involved, typically on the pump flange.
  • the through-openings are each provided with an enlarged diameter over part of their axial length, ie the screws are exposed in this axial area of the through-openings from the surrounding material of the flange, which means that the fastening screws can move in the event of a crash and so the maximum load is reduced. This reduces the crash torque or - in other words - lengthened it over time.
  • the object of the invention is to further increase the crash safety of connections between two vacuum devices, in particular between a turbo-molecular vacuum pump and a recipient.
  • At least some, in particular all, recordings of the group are each designed as a safety record.
  • the flange element does not only serve as an adapter or reducer between the two vacuum devices, but the flange element according to the invention is additionally provided with a safety function.
  • the receptacles which are required anyway for fastening to a vacuum device, are used according to the invention to increase crash safety.
  • the design of the receptacles can in particular ensure that the fastening elements can move in the event of a crash and thus the maximum load is reduced, as a result of which the crash torque is reduced.
  • the receptacles are designed in such a way that they deviate in one or more dimensions from the configuration normally required for the respective fastening element.
  • these can deviate from a purely circular cylindrical shape, as would actually be sufficient for the passage of conventional fastening elements such as fastening screws.
  • a so-called clearance for the fastening element can be provided over part of the axial length of the through opening, which will be discussed in more detail below.
  • the crash torque can also be reduced in other ways by means of a special design of the receptacles, that is to say that a screw release is not the only possibility to provide the receptacles that are required anyway with a safety function to provide.
  • the receptacles can each be designed as an elongated hole running in the circumferential direction, the radial dimension of which is matched to the diameter of the respective fastening element, but the dimension of which in the circumferential direction is greater than the radial dimension.
  • the space created by this expansion can be filled with a material that is different from the material of the ring section. For example, a metal foam can be used to fill this space.
  • this material is arranged on that side of the area provided for the insertion of the fastening element to which the fastening element is driven in the event of a crash, so that in the event of a crash the fastening element can interact with the material in the receptacle that is expanded in the circumferential direction so that Reduce crash torque.
  • the flange element according to the invention is particularly advantageous when it is used in a vacuum system in which one of the other flanges involved, in particular the pump flange, is also provided with safety receptacles for fastening elements, in particular with through openings.
  • a vacuum system in which one of the other flanges involved, in particular the pump flange, is also provided with safety receptacles for fastening elements, in particular with through openings.
  • several safety functions that follow one another in the axial direction are, as it were, connected in series - the flange element according to the invention and the pump flange, which is also provided with safety receptacles. Due to the safety receptacles according to the invention in the receptacles of the flange element, the vacuum system can absorb larger crash moments overall, so that the overall crash safety is increased.
  • flange elements according to the invention can be connected axially one after the other in a vacuum system, so to speak in series, ie two or more safety flange pieces according to the invention can be arranged axially one after the other between two vacuum devices to be connected to one another by vacuum technology.
  • Another advantage of the invention is that the additional safety feature of the flange element does not require any additional axial length, since the measure according to the invention, namely the design of the receptacles as safety receptacles, does not require such an axial enlargement of the flange element.
  • the safety receptacles are preferably through openings. In principle, however, they can also be designed as blind holes. Mixed groups of safety recordings with through openings and blind holes are also possible in principle
  • the safety receptacles each have a base section with a base diameter and an extension section with a diameter that is larger than the base diameter.
  • the base section and the extension section can follow one another directly in the axial direction of the receptacle. In principle, however, one or more differently designed transition sections can also be provided between them.
  • the receptacles which are already required for fastening to a vacuum device, are used in this exemplary embodiment to increase crash safety by providing what is known as an exposure of the fastening elements on at least some receptacles.
  • This safety function can be implemented without increasing the overall axial length and with minimal additional effort in the manufacture of the flange element. This is because only the receptacles to be produced in any case for the fastening elements in the ring section need to be radially expanded over part of their axial length. Only one additional work step is required for each exposure.
  • the invention also relates to a system with at least one flange element according to the invention and a plurality of identical fastening elements, the safety receptacles each having a shape or dimension in at least one section that is different from the corresponding shape or dimension of the fastening element. Protection is also claimed separately for such a system.
  • one dimension of the receptacle is greater than the corresponding dimension of the fastening element in at least one direction.
  • the diameter in the enlarged section is greater than the diameter of the fastening element.
  • the dimension in the circumferential direction is greater than the diameter of the fastening element.
  • the invention also relates to a vacuum system with at least one flange element according to the invention, with at least one vacuum device, in particular a vacuum pump or a recipient, and with several fastening elements, wherein the flange element can be fastened to the vacuum device by means of the fastening elements that each interact with one of the receptacles of the flange element or attached.
  • the number of receptacles of at least one group is preferably greater than the minimum number of receptacles required for the vacuum device.
  • the number of recordings is an integral multiple of the minimum number.
  • this can mean, for example, that a vacuum pump or its flange has a so-called ISO size, this ISO size on a counter flange, here on the flange element according to the invention, a certain number and arrangement - also referred to as a drilling pattern - of Requires recordings for fasteners or at least suggests.
  • the flange element then has more bores than necessary or suggested, e.g. (but not mandatory) an integral multiple of this number.
  • the vacuum pump in question can be adjusted or aligned more finely in the circumferential direction during assembly.
  • components protruding in the radial direction such as a sealing gas valve or a fore-vacuum flange, can be positioned more precisely.
  • the vacuum system according to the invention comprises two vacuum devices, between which the flange element according to the invention is or can be arranged.
  • one of the vacuum devices is a vacuum pump, preferably a turbo-molecular vacuum pump, and the other vacuum device is a recipient to be evacuated by means of the vacuum pump (hereinafter also referred to as vacuum chamber).
  • the flange element has two groups of receptacles arranged distributed in the circumferential direction, one group being assigned to one vacuum device and the other group being assigned to the other vacuum device.
  • One or both groups of receptacles can be exposed in the manner according to the invention, i.e. the respective receptacles can each have a base section with a base diameter and an extension section with a diameter larger than the base diameter in accordance with the invention.
  • the receptacles for attachment to the vacuum pump are non-exposed blind bores with internal threads, whereas the receptacles for attachment to the recipient are each designed as a through opening and exposed in the manner according to the invention.
  • the widening section with the enlarged diameter is preferably facing the recipient or the flange of the recipient.
  • the safety receptacles formed in the ring section of the flange element are preferably each formed as a through opening through which a fastening element can be passed.
  • the fastening element is in particular a screw with a bolt section, which is provided with an external thread at least at its end region, and with a screw head.
  • the arrangement of the flange element is preferably such that the base section of a respective safety receptacle faces the screw head and the extension section faces the vacuum device or the flange of the vacuum device.
  • two groups of receptacles for fastening elements are provided, one group being assigned to one vacuum device and the other group being assigned to the other vacuum device.
  • the receptacles of both groups can each be designed as through openings or as blind bores.
  • a preferred embodiment provides that the receptacles of one group are designed as through openings and the receptacles of the other group are designed as blind bores.
  • the exposure of the receptacles according to the invention is preferably provided on the through openings.
  • the blind bores can each be provided with an exemption.
  • the receptacles of one group are each designed as a through opening through which a fastening element can be passed, and the receptacles of the other group are each designed as a blind hole, in particular with an internal thread, into which a fastening element can be inserted , in particular screwable, is.
  • the ring section of the flange element has a greater axial thickness in the area of one of the two groups, in particular in the area of the group of receptacles each designed as a blind hole, than in the area of the other group. This ensures that sufficiently long fastening elements can be used. It is particularly advantageous here that the user can continue to use standard screws with a predetermined axial length that are already available despite the use of a flange element according to the invention.
  • the two groups comprise an inner group and an outer group, the inner group lying on a curve, in particular a circle, which is located everywhere radially inside a curve, in particular a circle, on which the outer group Group lies. It is preferred here if the receptacles of the inner group are each designed as a blind hole, in particular with an internal thread, and the receptacles of the outer group are each designed as a through opening.
  • Flanges used in vacuum technology are typically circular.
  • the ring section of the flange element according to the invention is therefore preferably a circular ring section which defines a plane on which a central axis is perpendicular and which extends through the passage delimited by the circular ring section.
  • the two groups of recordings lie on concentric circles around this central axis.
  • an embodiment of the invention proposes that the inner group of receptacles is assigned to a vacuum device designed as a vacuum pump, in particular as a turbo molecular pump, while the outer group of receptacles is assigned to a vacuum device, which is the recipient to be evacuated by means of the vacuum pump is trained.
  • the two groups of recordings can have the same number of recordings, for example 12, 24 or 36 recordings each. But this is not mandatory.
  • the number of recordings in the outer group can be different from the number of recordings in the inner group.
  • the two groups are offset from one another in the circumferential direction, wherein in particular one receptacle of one group is arranged in the circumferential direction, in particular in the middle, between two receptacles of the other group.
  • An offset between the two groups can make it easier to access the fastening elements provided for the receptacles at the installation site.
  • the base section and the extension section are each designed to be circular-cylindrical in the safety receptacles.
  • a transition section in particular a conical one, is preferably provided in the safety receptacles between the base section and the extension section, the inner diameter of which increases from the base diameter on the base section to the larger diameter on the extension section.
  • the safety receptacles are each produced by a method in which a through-hole with the base diameter is first produced by means of a first tool in the ring section and then this through-hole, starting from one side of the ring section, over part of it Length is extended to the enlarged diameter by means of a second tool different from the first tool, with a conical transition section between the base section formed by the remaining part of the through bore and the enlarged section having the enlarged diameter in particular by means of the second tool when enlarging the through hole is formed.
  • At least one end face, in particular each of the two end faces, of the ring section is completely formed by a flat, preferably flat, sealing surface for contacting a seal.
  • the maximum thickness of the ring section is preferably in the range between 15 mm and 35 mm.
  • the turbo molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas is used to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested in one another.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite ones
  • the outer surfaces of the Holweck rotor sleeves 163, 165 are smooth and propel the gas for operating the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection-molded nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the existing in the bearing gap 199 magnetic field causes magnetic repulsive forces between the ring magnets 195, 197, which have a radial Cause storage of the rotor shaft 153.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or retainer bearing 215 is provided within the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, e.g. from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular to achieve better sealing of the motor compartment 217 from the Holweck pump stages located radially outside.
  • the flange element 11 comprises a one-piece, for example made of stainless steel, circular ring section which can have an outer diameter of 425 mm, for example.
  • a circular passage of the flange 11 has a diameter of 261 mm, for example.
  • An inner region 33 delimiting the passage 17 has an axial thickness which is greater than the axial thickness in a radially outer region 35 which radially adjoins the inner region 33 directly.
  • the axial thickness of the inner area 33 can be, for example, 26 mm, whereas the axial thickness of the outer area 35 is, for example, 20 mm.
  • flange element according to the invention can in principle be provided in any size.
  • twelve receptacles 21 are formed, which are arranged evenly distributed in the circumferential direction and are each provided in the form of an exposed passage opening, which is shown in more detail below with reference to the enlarged sectional view AA below in Fig. 6 is described.
  • the central axes of the safety receptacles 21 lie on a circle around a central axis 45 of the ring section 19 running through the passage 17, the circle having a diameter of 395 mm, for example.
  • the blind bores 31 each start from that side of the flange 11 on which the step between the inner area 33 of greater axial thickness and the outer area 35 of smaller axial thickness is formed.
  • the two areas 33, 35 are flush with one another.
  • This end face 22 of the flange 11 is designed as a flat, ground sealing surface 22.
  • each through opening 21 comprises a base section 23 with a base diameter and an extension section 25 with a diameter that is larger than the base diameter.
  • the base diameter is, for example, 14 mm
  • the enlarged diameter of the widening section is, for example, 25 mm.
  • the manufacturing method described in the introductory part results in a conical transition section 24 with an opening angle of, for example, 118 degrees between the extension section 25 and the base section 23.
  • This transition section 24 can be produced, for example, by means of a cylindrical milling cutter or a drill with a correspondingly designed machining tip, after a through opening with the base diameter has been produced in a previous work step.
  • the part of this initial through-hole remaining after the expansion section 25 has been produced then forms the base section 23 of the respective safety receptacle 21 according to the invention.
  • the widening section 25 is formed on that side of the flange 11 which is opposite that flange side from which the blind bores 31 formed in the inner region 33 of greater axial thickness extend.
  • the blind bores 31 with their openings on the one hand and the through openings 21 with their widening sections 25 on the other hand point in opposite axial directions.
  • Fig. 7 , 8th and 9 differ by the number of safety receptacles 21 and the blind bores 31 or by the relative arrangement of these two groups of receptacles 21, 31, the embodiment of FIG Fig. 8 the above-described embodiment of Fig. 6 corresponds to and Fig. 8 shows additional representations of this flange element.
  • the inner group of receptacles comprises twelve blind bores 31 evenly distributed in the circumferential direction, i.e. each 30 ° apart in the circumferential direction.
  • the outer group of receptacles also comprises twelve receptacles, here again designed as safety receptacles in the form of through openings 21, each having the same angular position as one of the inner blind bores 31.
  • the two groups of receptacles 31, 21 are not arranged offset from one another in the circumferential direction.
  • FIG. 8 an offset positioning of the two groups of receptacles 31, 21 is provided.
  • a blind hole 31 is arranged in the circumferential direction centrally between two outer safety receptacles 21. As already mentioned, this can facilitate the accessibility of the respective fastening elements at the installation site.
  • the embodiment of the Fig. 9 shows a variant in which the number of both the inner blind bores 31 and the outer safety receptacles 21 is twenty-four each. Both the inner blind bores 31 and the outer safety receptacles 21 are again evenly spaced in the circumferential direction. An offset in the circumferential direction between the two groups of receptacles 31, 21 is not provided here, but is nevertheless possible according to a modified embodiment not shown here.
  • the larger number of receptacles 31, 21 increases the flexibility during assembly. The user can select those receptacles 31, 21 that are easily accessible to him as a function of the respective conditions at the installation site.
  • Fig. 10 and 11 show two different applications for flange elements according to the invention.
  • a flange element 11 according to the invention is arranged between a vacuum chamber 13, which has a flange 13a, and a turbo-molecular pump 15, which has a flange 15a.
  • the pump 15 can be designed as described above in connection with the Figs. 1 to 5 has been described.
  • the vacuum chamber (recipient) 13 and the vacuum pump 15 have the same inner diameter on the inlet and outlet side, which corresponds to the inner diameter of the passage 17 of the flange element 11 according to the invention.
  • the flange element 11 consequently does not serve here as a so-called reducer, but as an adapter between the pump 15 and the vacuum chamber 13 or between the relevant flanges 15a, 13a.
  • connection between flange element 11 and flange 13a of vacuum chamber 13 is made in the illustrated embodiment by hexagon bolts 27 with washers, the head of which rests on the side of pump flange 13a facing away from flange element 11 via the washer.
  • the screws 27 On the side of the chamber flange 13a facing away from the flange element 11, the screws 27 each engage a nut 39 with a washer.
  • a centering ring 41 is arranged between the chamber flange 13a and flange element 11, which is provided with a seal 26, for example in the form of an elastically deformable O-ring, which is attached to the sealing surface 22 of the area 33 of smaller axial thickness of the flange element 11 and to an opposite sealing surface on the chamber flange 13a is present.
  • a centering ring 43 is also arranged between the flange element 11 and the pump flange 15a, which is provided with a seal 36, for example in the form of an elastic O-ring, which is attached to the sealing surface 32 on the area 33 of greater axial thickness of the flange element 11 and on an opposite sealing surface rests on the pump flange 15a.
  • a seal 36 for example in the form of an elastic O-ring, which is attached to the sealing surface 32 on the area 33 of greater axial thickness of the flange element 11 and on an opposite sealing surface rests on the pump flange 15a.
  • Fig. 11 shows that the flange element 11 according to the invention can also be used as a reducer in that it is arranged between a pump 15 and a chamber 13, the diameter of which on the inlet and outlet side is different.
  • the diameter of the vacuum chamber 13 is larger than the diameter at the gas inlet of the pump 15, which in turn corresponds to the inner diameter of the passage 17 of the flange element 11 according to the invention.
  • FIG. 10 Another difference to the embodiment of the Fig. 10 consists here in that for the screws 27 for fastening the flange element 11 to the chamber 13, the latter is provided with blind holes into which the fastening screws 27 are screwed. Furthermore, no centering ring is provided between the chamber 13 and the flange element 11, but an O-ring seal 26 is inserted into a groove formed on the end face of the chamber flange 13a.
  • the invention consequently provides a safety flange element that has both an adapter function ( Fig. 10 ) as well as a reduction function ( Fig. 11 ) and is characterized by a simple and inexpensive production, by a short axial length and in particular by the screw clearances on the through openings 21 explained above, through which the crash safety of a vacuum system comprising at least one safety flange according to the invention is increased.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (15)

  1. Élément de bride (11) destiné à être disposé entre deux dispositifs à vide (13, 15), en particulier entre deux brides (13a, 15a) associées chacune à un dispositif à vide (13, 15), comportant
    une portion annulaire (19) qui délimite un passage (17) et dans laquelle est formé un premier groupe de logements (21) disposés en répartition dans la direction périphérique, en particulier situés sur un cercle, pour des éléments de fixation (27),
    dans lequel
    au moins une partie, en particulier la totalité des logements (21) du premier groupe sont réalisés chacun sous forme de logement de sécurité (21), et il est prévu un second groupe de logements (31) disposés en répartition dans la direction périphérique pour des éléments de fixation (37),
    l'un des deux groupes est associé à un dispositif à vide (13) et l'autre groupe est associé à l'autre dispositif à vide (15),
    caractérisé en ce que
    dans la zone (33) de l'un des deux groupes, la portion annulaire (19) présente une épaisseur axiale supérieure à celle dans la zone (35) de l'autre groupe.
  2. Élément de bride selon la revendication 1,
    dans lequel
    les logements (21) du groupe dans la zone (33) duquel la portion annulaire (33) présente l'épaisseur axiale plus grande sont chacun réalisés sous forme de trou borgne, en particulier taraudé, dans lequel peut être inséré, en particulier vissé, un élément de fixation (37).
  3. Élément de bride selon la revendication 1 ou 2,
    dans lequel
    les logements de sécurité (21) comprennent chacun une portion de base (23) ayant un diamètre de base, et une portion d'élargissement (25) ayant un diamètre qui est agrandi par rapport au diamètre de base.
  4. Élément de bride selon l'une des revendications précédentes,
    dans lequel
    les logements de sécurité (21) sont chacun réalisés sous forme d'ouverture traversante à travers laquelle peut être inséré un élément de fixation (27).
  5. Élément de bride selon l'une des revendications précédentes,
    dans lequel
    les logements (21) du premier groupe sont chacun réalisés sous forme d'ouverture traversante à travers laquelle peut être inséré un élément de fixation (27), et les logements (31) du second groupe sont chacun réalisés sous forme de trou borgne, en particulier taraudé, dans lequel peut être inséré, en particulier vissé, un élément de fixation (37).
  6. Élément de bride selon la revendication 5,
    dans lequel
    la portion annulaire (19) présente l'épaisseur axiale plus grande dans la zone du groupe de logements (31) réalisés chacun sous forme de trou borgne.
  7. Élément de bride selon l'une des revendications précédentes,
    dans lequel
    les deux groupes comprennent un groupe intérieur et un groupe extérieur, le groupe intérieur se trouve sur une courbe, en particulier sur un cercle, qui est situé(e) partout radialement à l'intérieur d'une courbe, en particulier d'un cercle, sur laquelle/lequel se trouve le groupe extérieur,
    de préférence, les logements (31) du groupe intérieur sont chacun réalisés sous forme de trou borgne, en particulier taraudé, et
    les logements (21) du groupe extérieur sont chacun réalisés sous forme d'ouverture traversante.
  8. Élément de bride selon la revendication 7,
    dans lequel
    le groupe intérieur est associé à un dispositif à vide réalisé sous forme de pompe à vide (15), en particulier sous forme de pompe turbomoléculaire, et le groupe extérieur est associé à un dispositif à vide réalisé sous forme de récipient (13) à évacuer au moyen de la pompe à vide (15).
  9. Élément de bride selon l'une des revendications précédentes,
    dans lequel
    les deux groupes ont le même nombre de logements (21, 31), en particulier 12, 24 ou 36 logements (21, 31).
  10. Élément de bride selon l'une des revendications précédentes,
    dans lequel
    les deux groupes sont décalés l'un par rapport à l'autre dans la direction périphérique, et
    en particulier, un logement respectif (31) de l'un des deux groupes est disposé dans la direction périphérique, en particulier au centre, entre deux logements (21) de l'autre groupe.
  11. Élément de bride selon l'une des revendications 3 à 10,
    dans lequel
    dans les logements de sécurité (21), la portion de base (23) et la portion d'élargissement (25) sont réalisées chacune en forme de cylindre circulaire.
  12. Élément de bride selon l'une des revendications 3 à 11,
    dans lequel
    dans les logements de sécurité (21), entre la portion de base (23) et la portion d'élargissement (25), il est prévu une portion de transition (24), en particulier conique, dont le diamètre intérieur augmente pour passer du diamètre de base de la portion de base (23) au diamètre plus grand de la portion d'élargissement (25).
  13. Élément de bride selon l'une des revendications 3 à 12,
    dans lequel
    les logements de sécurité (21) sont chacun fabriqués selon un procédé dans lequel, tout d'abord, un alésage traversant ayant le diamètre de base est réalisé dans la portion annulaire (19) au moyen d'un premier outil, puis cet alésage traversant est élargi pour passer au diamètre agrandi à partir d'un côté de la portion annulaire (19) sur une partie de sa longueur au moyen d'un second outil différent du premier outil,
    en particulier, lors de l'élargissement de l'alésage traversant, une portion de transition conique (24) est simultanément formée entre la portion de base (23) formée par la partie restante de l'alésage traversant et la portion d'élargissement (25) ayant le diamètre agrandi, au moyen du second outil.
  14. Élément de bride selon l'une des revendications précédentes,
    dans lequel
    au moins une face frontale (22, 32), en particulier chacune des deux faces frontales (22, 32), de la portion annulaire (19) est entièrement formée par une surface d'étanchéité plane, en particulier meulée, pour l'appui d'un joint d'étanchéité (26, 36), et/ou
    la portion annulaire (19) présente une épaisseur axiale maximale comprise entre 15 mm et 35 mm.
  15. Système à vide comportant au moins un élément de bride (11) selon l'une des revendications précédentes, comportant au moins un dispositif à vide (13, 15), en particulier une pompe à vide ou un récipient, et plusieurs éléments de fixation (27, 37), l'élément de bride (11) étant fixé ou pouvant être fixé au dispositif à vide (13, 15) au moyen des éléments de fixation (27, 37) qui coopèrent chacun avec l'un des logements (21, 31) de l'élément de bride (11), le nombre de logements d'au moins un groupe, en particulier le nombre de logements de sécurité, étant de préférence supérieur au nombre minimal de logements requis pour le dispositif à vide.
EP19170677.9A 2019-04-23 2019-04-23 Élément de bride Active EP3730802B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19170677.9A EP3730802B1 (fr) 2019-04-23 2019-04-23 Élément de bride
JP2020052048A JP7177113B2 (ja) 2019-04-23 2020-03-24 フランジ要素

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19170677.9A EP3730802B1 (fr) 2019-04-23 2019-04-23 Élément de bride

Publications (2)

Publication Number Publication Date
EP3730802A1 EP3730802A1 (fr) 2020-10-28
EP3730802B1 true EP3730802B1 (fr) 2021-04-07

Family

ID=66251590

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19170677.9A Active EP3730802B1 (fr) 2019-04-23 2019-04-23 Élément de bride

Country Status (2)

Country Link
EP (1) EP3730802B1 (fr)
JP (1) JP7177113B2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115653942A (zh) * 2022-10-26 2023-01-31 西安航天发动机有限公司 一种液体火箭发动机用涡轮泵轴系转动装置
EP4269804B1 (fr) * 2023-08-14 2025-10-29 Pfeiffer Vacuum Technology AG Pompe à vide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080226387A1 (en) * 2004-12-20 2008-09-18 Boc Edwarda Japan Limited Structure for Connecting End Parts and Vacuum System Using the Structure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6608648B1 (en) * 1999-10-21 2003-08-19 Hewlett-Packard Development Company, L.P. Digital camera cursor control by sensing finger position on lens cap
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
FR2844016B1 (fr) * 2002-08-29 2004-11-19 Cit Alcatel Dispositif de fixation de pompe a vide
JP4461944B2 (ja) * 2004-07-30 2010-05-12 株式会社島津製作所 ターボ分子ポンプ
JP4949746B2 (ja) * 2006-03-15 2012-06-13 エドワーズ株式会社 分子ポンプ、及びフランジ
JP5343884B2 (ja) * 2010-02-16 2013-11-13 株式会社島津製作所 ターボ分子ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080226387A1 (en) * 2004-12-20 2008-09-18 Boc Edwarda Japan Limited Structure for Connecting End Parts and Vacuum System Using the Structure

Also Published As

Publication number Publication date
JP2020193619A (ja) 2020-12-03
JP7177113B2 (ja) 2022-11-22
EP3730802A1 (fr) 2020-10-28

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