EP3670924B1 - Pompe à vide et procédé de fabrication d'une telle pompe à vide - Google Patents

Pompe à vide et procédé de fabrication d'une telle pompe à vide Download PDF

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Publication number
EP3670924B1
EP3670924B1 EP19210020.4A EP19210020A EP3670924B1 EP 3670924 B1 EP3670924 B1 EP 3670924B1 EP 19210020 A EP19210020 A EP 19210020A EP 3670924 B1 EP3670924 B1 EP 3670924B1
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EP
European Patent Office
Prior art keywords
holweck
section
groove
vacuum pump
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19210020.4A
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German (de)
English (en)
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EP3670924A1 (fr
Inventor
Uwe Leib
Torsten Gogol
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19210020.4A priority Critical patent/EP3670924B1/fr
Publication of EP3670924A1 publication Critical patent/EP3670924A1/fr
Priority to JP2020159322A priority patent/JP7032500B2/ja
Application granted granted Critical
Publication of EP3670924B1 publication Critical patent/EP3670924B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material

Definitions

  • the present invention relates to a vacuum pump, for example a turbomolecular pump, comprising a Holweck pump stage with a Holweck stator and a Holweck rotor which rotates around a rotor axis during operation of the vacuum pump and which interacts with the Holweck stator to generate a pumping effect, the Holweck pump stage having at least one thread-like Holweck groove, which from at least one side wall is limited.
  • the invention also relates to a method for producing such a vacuum pump.
  • the invention relates in particular to a vacuum pump according to the preamble of claim 1.
  • a vacuum pump according to the preamble of claim 1.
  • Such is in US Pat GB 242,084 A disclosed.
  • Holweck grooves are usually formed by pushing. It can be desirable to produce a Holweck geometry with narrow but very deep grooves in relation to the width. Especially in the inlet area of a Holweck step, it can make sense to produce comparatively deep grooves. Such deep grooves in the inlet area prove to be advantageous, for example, when the gas conveyed by a turbomolecular pumping stage with high pumping speed is to be transferred to the Holweck pumping stage. Especially with regard to the manufacture of narrow but deep grooves in the inner diameter of a Holweck component, in particular a Holweck stator sleeve, the widespread method of pushing has disadvantages. On the one hand, very filigree tools that are prone to wear and failure must be used for this. On the other hand, only a small infeed can be achieved with each work step of the tool, which causes long production times and high costs.
  • the Holweck groove also has a groove base which defines a base envelope, the base envelope being designed to be cylindrical in at least one, in particular a second, section of the Holweck groove.
  • This geometry enables reliable and cost-effective production, in particular of Holweck grooves with great depth and relatively small width.
  • the invention is based on the idea that the side walls of the grooves do not have to be aligned straight or perpendicular to the rotor axis, as is customary in the prior art. Rather, the deviation from the vertical alignment results in considerable advantages in the manufacturing process.
  • the Holweck groove can thus be produced by a cutting process, in particular milled.
  • a cutting tool such as a milling cutter, can be aligned correspondingly at an angle during machining.
  • the Holwecknut is therefore particularly easily accessible.
  • section relates in particular to the rotor axis, that is to say to an axial section, and / or to the helical shape of the Holweck groove.
  • the Holwecknut can basically be designed differently in different sections.
  • the side wall is designed to be inclined at least in one section. For example, it can be designed to be inclined over its entire length, in particular at an angle that is the same over its length. However, it can also have different angles in different sections and / or, for example, also be arranged perpendicular to the rotor axis in at least one section.
  • the relevant cross-section is one in which the rotor axis lies. With regard to the rotor, it is ultimately a longitudinal section, which, however, runs transversely to the side wall.
  • the Holwecknut forms an internal thread.
  • the Holweck stator can have the Holweck groove.
  • the Holweck rotor can have the Holweck groove.
  • respective Holweck grooves on the rotor and stator can also be formed according to the invention.
  • the Holweck groove generally has a groove base. This can, in particular, be flat in cross section.
  • the groove base defines an envelope in particular over several turns of the groove, which can also be referred to as the base envelope.
  • the basic envelope is designed conically at least in a first section of the Holweck groove.
  • the groove base can be designed at least in a first section of the Holweck groove in the cross section obliquely with respect to the rotor axis. In the first section, in particular, the groove base can at least be arranged essentially perpendicular to the associated area of the side wall.
  • the first section is an inlet section of the Holweck pumping stage with respect to a pumping direction.
  • particularly deep grooves, in particular with a relatively small width can be produced in a simple manner in the inlet section.
  • the pump performance, in particular the pumping speed, can thus be improved in a simple manner.
  • the first section can, for example, be arranged at one end of the component which has the Holweck groove, one end being meant in relation to the rotor axis.
  • the base envelope can, in principle, independently of a first section with a conical base envelope or an inclined groove base, preferably be cylindrical in a second section of the Holweck groove.
  • the groove base can be formed, for example, in a, in particular a second, section of the Holweck groove parallel to the rotor axis.
  • The, in particular the second, section can be arranged, for example, following an inlet section and / or an outlet section of the Holweck pumping stage.
  • the side wall has, in particular, a radially inner end which, in particular, defines an inner envelope over several turns of the Holweck groove.
  • the inner envelope can preferably be cylindrical in at least one section, in particular in several sections.
  • the inner envelope can preferably be cylindrical both in the first section and in the second section.
  • the side wall is arranged perpendicularly in a first section and / or inclined in a second section to an adjacent and / or assigned groove base.
  • the side wall is designed obliquely with respect to the rotor axis, that is to say that an angle between the side wall and the rotor axis is smaller than 90 ° and larger than 0 °. It when the side wall in is arranged at an angle to the rotor axis which is at least 50 ° and / or at most 80 °. An angle of approximately 70 ° is particularly preferred.
  • the side wall can be formed by a web.
  • a web can in particular be formed between two adjacent Holweck grooves or between two circumferences of the same groove.
  • the web can in particular also form a second side wall of an adjacent or the Holweck groove, in particular wherein both side walls are formed parallel to one another and / or at an angle to the rotor axis.
  • the Holweck pump stage can have several gears, i.e. several parallel, thread-like Holweck grooves.
  • one, in particular thread-like, web is provided for each aisle.
  • Two threads or Holweck grooves can be separated from one another by a web, for example.
  • the web can have an inner end which, for example, is flat and / or is arranged parallel to the rotor axis.
  • the web can generally have, for example, two, in particular parallel, side walls which delimit a respective groove or a groove.
  • the side walls can preferably both be arranged at an angle.
  • the object of the invention is also achieved by a method for producing a vacuum pump according to the type described above, the Holweck groove being produced in at least a first section by milling.
  • a milling cutter is guided obliquely with respect to a thread axis of the Holwecknut.
  • the thread axis corresponds in particular to a rotor axis in the assembly of the vacuum pump.
  • the first section can preferably be an inlet section of the Holweck pumping stage.
  • the Holweck groove can generally preferably be produced by another machining process and in particular by slotting.
  • milling in the first section and butting in the second section can therefore advantageously be combined.
  • the first section can advantageously take advantage of the fact that relatively deep grooves can be made in a simple manner by means of milling and relatively filigree webs can be formed.
  • the groove can also be produced in a simple manner in a section, in particular downstream of the inlet section in the pumping direction, which is difficult to access for a milling cutter. The respective advantages of the machining processes can therefore be used in a targeted manner.
  • the side wall delimiting the Holwecknut is formed in a cross section in which a thread axis of the Holwecknut is inclined to the thread axis.
  • an end mill and / or a disk mill can be used for milling.
  • the vacuum pump can preferably be a turbo-molecular pump with a Holweck pump stage.
  • the turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed so that it is also in operation can be taken if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.
  • the turbomolecular pump 111 comprises several turbomolecular pump stages connected in series with one another, with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form one turbomolecular pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested one inside the other.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbo molecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and with this forms a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection molded nut 185 with an outer diameter that increases towards the roller bearing 181 is provided on the rotor shaft 153.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, which each comprise a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or retainer bearing 215 is provided within the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented will.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, for example from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular to achieve better sealing of the motor compartment 217 from the radially outside Holweck pump stages.
  • turbo molecular pump 111 which comprises a Holweck pump stage, serves to illustrate the technical background.
  • the pump 111 can in particular be developed according to the invention.
  • the vacuum pump according to the invention can, in particular, advantageously be developed further by means of individual or several features of the pump 111 described above.
  • a housing component 10 of a vacuum pump according to the invention is shown in cross section, the sectional plane running along a rotor axis 12 of a Holweck rotor, not shown here.
  • the vacuum pump comprises a Holweck pump stage 14, of which only the stator-side elements are visible, namely at least one thread-like Holweck groove 16 which is formed in the housing component 10.
  • a Holweck rotor sleeve When assembled, a Holweck rotor sleeve preferably rotates in the Holweck pump stage 14, for example as it is used in connection with the Figs. 1 to 5 is described.
  • the Holweck pump stage 14 comprises a plurality of Holweck grooves 16 running in parallel, that is to say it is designed with multiple threads.
  • side walls 18 are visible, which delimit the respective grooves 16 and separate them from one another.
  • the side walls 18 are arranged obliquely with respect to the rotor axis 12.
  • an angle 20 is indicated between a side wall 18 and the rotor axis 12 or a groove base 22. In the embodiment shown, this is approximately 70 ° and can be preferred be at least 50 ° and / or at most 80 °.
  • all side walls 18 are arranged parallel to one another and at an angle 20 obliquely to the rotor axis 12.
  • a respective Holweck groove 16 is delimited in the axial direction by the side walls 18 and in the radial direction by a groove base 22 which extends between the side walls 18.
  • the groove base 22 defines a base envelope along its axial extent and over several turns or turns. This is conical in a first section 24 and cylindrical in a second section 26.
  • the groove base 22 is generally flat, but there is an unevenness on the groove base 22 in a transition area between the first section 24 and the second section 26, which is particularly a result of the transition between the sections 24 and 26.
  • the side walls 18 are formed by webs 28 which separate the Holweck grooves 16 of the different aisles from one another.
  • the webs 28 and the side walls 18 have an inner end which defines an inner envelope.
  • the inner envelope is cylindrical here both in the first section 24 and in the second section 26. At the inner end, the webs 28 are flat and aligned parallel to the rotor axis 12.
  • the Holweck groove 16 is formed deeper in the first section 24 than in the second section 26, in particular the width of the Holweck groove 16 preferably being the same in both sections 24 and 26 or preferably constant over the entire axial length of the Holweck pumping stage.
  • the width is defined in particular by the axial distance between the inner ends of two side walls 18 or webs 28 via a groove 16.
  • the first section 24 preferably forms an inlet section of the Holweck pumping stage 14.
  • the great depth or the relatively large volume in this section 24 the groove 16 provides a particularly good pumping speed for the Holweck pump stage 14.
  • a milling cutter 30 is indicated, such as can be performed, for example, to produce the Holwecknut 16 in the first section 24.
  • the milling cutter 30 is designed here as an end mill by way of example.
  • the milling cutter 30 is aligned with its axis of rotation 32 obliquely with respect to the rotor axis 12 or a thread axis of the thread-like Holwecknut 16, which corresponds to the rotor axis 12 in the assembly of the vacuum pump.
  • the angle between the axis of rotation 32 and the rotor axis 12 corresponds to that angle 20 of the side walls 18.
  • the Holwecknut 16 in the first section 24 can be produced in a simple manner with the milling cutter 30 without the need for an angle head for the milling cutter.
  • the Holwecknut 16 can thus be produced in a simple manner.
  • the Holweck groove 16 can preferably be produced by pushing.
  • the one or more grooves 16 can generally be made with a milling cutter, for example with an end mill or disk milling cutter. Further internal machining, for example in the second section 26, may be impossible or difficult to do with an angle head on the milling machine due to the geometry (e.g. small diameter).
  • a conical first or inlet section 24, in particular with the base envelope can be milled from the outside. This manufacturing method means that the webs 28, which are in particular those of the stator here, are inclined between the slots 16 at the same angle as the milling cutter itself.
  • the grooves 16 can consequently continue to be produced by butting.
  • the butted grooves are preferably also inclined at the same angle as the milled grooves, in particular so that the cutting tool does not damage the webs 28 already present after the milling.
  • the two manufacturing processes should be synchronized with regard to the angular position of the grooves 16 and the side walls 18.

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
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Claims (14)

  1. Pompe à vide comprenant un étage de pompage Holweck (14) ayant un stator Holweck et un rotor Holweck qui tourne autour d'un axe de rotor (12) pendant le fonctionnement de la pompe à vide et qui coopère avec le stator Holweck pour générer un effet de pompage,
    dans laquelle l'étage de pompage Holweck (14) présente au moins une rainure Holweck (16) en forme taraudée qui est délimitée par au moins une paroi latérale (18) et qui constitue un taraudage,
    dans une section transversale dans laquelle se trouve l'axe de rotor (12), la paroi latérale (18) est formée au moins localement en oblique par rapport à l'axe de rotor (12),
    caractérisée en ce que
    la rainure Holweck (16) présente un fond de rainure (22) qui définit une enveloppe de fond, l'enveloppe de fond étant réalisée en forme cylindrique dans au moins une portion (26) de la rainure Holweck (16).
  2. Pompe à vide selon la revendication 1,
    dans laquelle le stator Holweck comprend la rainure Holweck (16).
  3. Pompe à vide selon l'une au moins des revendications précédentes,
    dans laquelle l'enveloppe de fond est réalisée en forme conique dans au moins une première portion (24) de la rainure Holweck (16), et/ou le fond de rainure (22) est réalisé, en section transversale, en oblique par rapport à l'axe de rotor (12), dans une première portion (24) de la rainure Holweck (16).
  4. Pompe à vide selon la revendication 3,
    dans laquelle la première portion (24) est une portion d'entrée de l'étage de pompage Holweck (14) par rapport à une direction de pompage.
  5. Pompe à vide selon l'une au moins des revendications précédentes,
    dans laquelle la portion mentionnée dans la revendication 1 est une seconde portion (26) de la rainure Holweck (16), en particulier le fond de rainure (22) dans la seconde portion (26) de la rainure Holweck (16) est réalisé parallèlement à l'axe de rotor (12).
  6. Pompe à vide selon la revendication 5,
    dans laquelle la paroi latérale (18) définit, avec une extrémité radialement intérieure, une enveloppe intérieure qui est cylindrique aussi bien dans une première portion (24) que dans la seconde portion (26).
  7. Pompe à vide selon la revendication 5 ou 6,
    dans laquelle la paroi latérale (18) est disposée perpendiculairement à un fond de rainure adjacent (22), dans une première portion (24), et est disposée en oblique par rapport à celui-ci, dans la seconde portion (26).
  8. Pompe à vide selon l'une au moins des revendications précédentes,
    dans laquelle la paroi latérale (18) est disposée selon un angle (20) par rapport à l'axe du rotor (12), qui est d'au moins 50° et/ou d'au plus 80°.
  9. Pompe à vide selon l'une au moins des revendications précédentes,
    dans laquelle la paroi latérale (18) est formée par une barrette (28).
  10. Procédé de fabrication d'une pompe à vide selon l'une des revendications précédentes,
    dans lequel la rainure Holweck (16) est réalisée par fraisage dans au moins une première portion (24).
  11. Procédé selon la revendication 10,
    dans lequel une fraise (30) est guidée en oblique par rapport à un axe de taraudage (12) de la rainure Holweck (16).
  12. Procédé selon la revendication 10 ou 11,
    dans lequel la première portion (24) est une portion d'entrée de l'étage de pompage Holweck (14).
  13. Procédé selon l'une au moins des revendications 10 à 12,
    dans lequel la portion mentionnée dans la revendication 1 est une seconde portion (26) de la rainure Holweck (16), et en particulier la rainure Holweck (16) dans la seconde portion (26) est réalisée à l'étau limeur.
  14. Procédé selon la revendication 13,
    dans lequel, aussi bien dans la première portion (24) que dans la seconde portion (26), la paroi latérale (18) délimitant la rainure Holweck (16) est réalisée en oblique par rapport à un axe de taraudage (12), dans une section transversale dans laquelle se trouve ledit axe de taraudage (12) de la rainure Holweck (18).
EP19210020.4A 2019-11-19 2019-11-19 Pompe à vide et procédé de fabrication d'une telle pompe à vide Active EP3670924B1 (fr)

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Application Number Priority Date Filing Date Title
EP19210020.4A EP3670924B1 (fr) 2019-11-19 2019-11-19 Pompe à vide et procédé de fabrication d'une telle pompe à vide
JP2020159322A JP7032500B2 (ja) 2019-11-19 2020-09-24 真空ポンプ及びそのような真空ポンプを製造する方法

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Application Number Priority Date Filing Date Title
EP19210020.4A EP3670924B1 (fr) 2019-11-19 2019-11-19 Pompe à vide et procédé de fabrication d'une telle pompe à vide

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EP3670924A1 EP3670924A1 (fr) 2020-06-24
EP3670924B1 true EP3670924B1 (fr) 2021-11-17

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EP3670924A1 (fr) 2020-06-24
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