EP3848588B1 - Appareil sous vide - Google Patents

Appareil sous vide Download PDF

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Publication number
EP3848588B1
EP3848588B1 EP20214823.5A EP20214823A EP3848588B1 EP 3848588 B1 EP3848588 B1 EP 3848588B1 EP 20214823 A EP20214823 A EP 20214823A EP 3848588 B1 EP3848588 B1 EP 3848588B1
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EP
European Patent Office
Prior art keywords
identifier
configuration parameter
device component
control apparatus
accordance
Prior art date
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EP20214823.5A
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German (de)
English (en)
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EP3848588A1 (fr
Inventor
Jochen BÖTTCHER
Christian Koch
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Priority to EP20214823.5A priority Critical patent/EP3848588B1/fr
Publication of EP3848588A1 publication Critical patent/EP3848588A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Definitions

  • the present invention relates to a vacuum device, in particular a vacuum pump, a vacuum gauge, a leak detector and/or a vacuum chamber device.
  • the invention also relates to a method for producing a vacuum device, in particular a vacuum pump, a vacuum gauge, a leak detector and/or vacuum chamber device.
  • vacuum pumps and their drive devices often form separable units and/or different vacuum pumps can be mounted on the same drive device during production, so that different configuration parameters are applied to the pump by the drive device depending on the pairing of the devices or device parts.
  • one or more characteristic resistors are installed in the vacuum pump according to common methods, which are then recognized by the drive unit, whereupon a set of configuration parameters previously stored in the drive unit is selected.
  • configuration parameters are: nominal speed, speed limits, power curves, temperature limits, behavior of accessories, curves for vibration spectra, etc.
  • the number of combinations of characteristic resistors that can be used is limited, so that only a limited number of configuration parameter sets can be stored in the drive unit.
  • Some configuration parameters are used for the absolute function of the pump or for operational safety, e.g. rated voltage of the motor, maximum phase current, rated speed or maximum speed, absolute maximum temperatures of critical components such as motors.
  • Adaptations to processes and applications sometimes require different sets of configuration parameters for one and the same combination of drive unit and pumps that are used under different environmental conditions.
  • the above-mentioned restrictions on the maximum number of combinations of characteristic resistors also limit the maximum number of configuration parameter sets and thus of pumps or applications for a given drive unit.
  • An alternative definition of the configuration parameters of the pump would be the possibility of entering all changeable parameters during manufacture or the first pairing of the drive unit and pump, ie all values contained in a set of configuration parameters to be communicated once to the drive unit in a secure manner.
  • This procedure has the following disadvantages: The number of settings requires a not inconsiderable amount of input input. A manual entry - as would be necessary, for example, in the case of service - would therefore be very difficult and error-prone. In addition, particular attention should be paid to ensuring that values are selected within the valid range and that any interdependencies are taken into account. Parts of the configuration parameters, eg rated speed and/or maximum motor temperature, can be defined, for example, by detecting characteristic resistances and Be part of a certified system for safely limiting the pump speed in terms of functional safety and cannot be changed without recertification.
  • EP 3 660 317 A shows a vacuum device with at least one device component and with an electronic device, wherein the electronic device has a plurality of configuration parameters for defining a device operating configuration and wherein at least one of the configuration parameters can be defined automatically by connecting the electronic device to an interface of the device component.
  • the vacuum device has a device component, in particular a pump component, a control device, in particular a drive device, for the device component, and an interface for connecting the control device to the device component.
  • the control device is set up to control the device component on the basis of one or more configuration parameters.
  • the known manufacturing method includes providing a permanent hardware identifier, in particular a specific identification resistor combination, on the device component and setting up the control device to recognize the hardware identifier and define the configuration parameters based on the hardware identifier.
  • a software identifier is additionally provided in a non-volatile memory on the device component and the control device for recognizing the software identifier and for determining the second configuration parameter on the basis of the software Identifier is set up so that the control device in the state connected to the device component both the first and the second configuration parameter can be defined automatically.
  • the control device can therefore set the configuration parameters automatically.
  • This automatic determination takes place as a function of information stored on the device component, namely the identifiers provided on the device component.
  • a respective identifier provides the control device with information on the basis of which the device component is to be controlled.
  • the relevant configuration parameter is defined on the basis of the identifier and the device component is controlled on the basis of the configuration parameter.
  • An “identification” is basically information that can be read out and is in some way specific to the control of the device component, for example specific to the design of the device component and/or a specific, specified application scenario of the device component.
  • An identifier can, for example, include a name and/or a number, for example an article number, of the device component.
  • at least one configuration parameter can be encoded directly in the identifier.
  • the configuration parameters are different and each dependent on the relevant identifier be determined. This makes it possible to differentiate between the configuration parameters, for example with regard to their security relevance.
  • the configuration parameters can advantageously be defined by an identifier of the type that is advantageous for the relevant configuration parameter.
  • the permanent hardware identifier can be used, for example, to have particularly safety-relevant and/or certified configuration parameters automatically defined by the control device.
  • the permanent hardware identifier has the advantage, among other things, that the identifier can only be changed on the device component with great difficulty. In particular, direct and permanent manipulation of the hardware would be required, which users of vacuum devices typically refrain from doing.
  • the application-dependent configuration parameters are typically selected in any case in such a way that they apply in addition to the security-relevant configuration parameters and do not conflict with them. Accordingly, the certified definition can be retained and additional flexibility can still be created.
  • configuration parameters that are less relevant to security can be defined via the software identifier.
  • the software identifier has the particular advantage that the amount of data that can be encoded in the identifier is typically significantly larger than with a permanent hardware identifier.
  • the possible amount of data for the here relevant purposes practically infinitely large.
  • modern storage technologies make it possible to store large amounts of data in the smallest of spaces.
  • Permanent hardware identifiers typically have a poorer ratio of the encoded amount of data to the installation space.
  • the amount of data is also limited in particular by the fact that a resistor is typically assigned to a plurality of contacts of the interface between the control device and the device component. i.e.
  • the software identifier can be read out serially in particular. This means that the number of contacts at the interface required for reading remains the same, even with an increased amount of data. With the software identifier, a larger amount of information can be stored on the device component in a simple manner and read out via the control device.
  • the configuration parameters can thus be defined in a particularly flexible manner, specifically using the type of identification that is advantageous in each case for the relevant configuration parameters.
  • both the hardware identifier and the software identifier are arranged on the device component.
  • This specification refers to the fact that the identifiers are arranged on the device component side in relation to the interface.
  • the interface thus functions here as a functional separation between the control device and the device component.
  • the device component and the control device can consist of several elements and/or assemblies.
  • first and at least one second configuration parameter is mostly mentioned.
  • first and/or second configuration parameter for example, first and/or second sets of configuration parameters, ie a plurality of first or second configuration parameters.
  • a hardware identifier is characterized in that the identifier is provided by the hardware itself, for example through design features and/or a specific arrangement of physical elements.
  • the hardware identifier is not electronically programmable, but is typically provided during manufacture by forming and/or assembling physical elements on the device component.
  • the hardware identifier is designed as a permanent identifier. i.e. the hardware identifier is permanent and cannot be easily changed. In particular, no means for changing the hardware identifier, such as selector switches, are provided on the device component. Subsequent physical manipulation of the hardware ID is of course conceivable. However, the need for such a hardware identifier to change is a high psychological hurdle and is typically easy to prove, and often also readily visible.
  • the software identifier is electronically programmable, at least during production. It is stored in a storage medium, namely the non-volatile memory. It can be provided, for example, that the software identifier can no longer be programmed electronically afterwards. Subsequent changes to the software identifier are also often undesirable, but in terms of security, for example, they are less critical than with the hardware identifier.
  • the software identifier can therefore preferably also be permanent in the above-mentioned sense.
  • the non-volatile memory can be embodied, for example, as a memory that can only be written to once.
  • measures are taken to make it more difficult for subsequent programming to be accepted as permissible by the control device. Cryptographic measures in particular can be used for this.
  • the memory in which the software identifier is stored is non-volatile.
  • the memory is therefore particularly stable when there is no current.
  • control devices of a specific type are provided for device components of different types.
  • a respective control device can then use the identifiers to automatically define the parameters that are decisive for the relevant device component.
  • the number of parts for the control device can thus be kept low.
  • the device components can also differ not only in their design, but also in their application.
  • application-specific configuration parameters on the device component can also be encoded by an identifier and automatically defined by the control device.
  • device components can also differ, for example, only in the application and not in the design, and different configuration parameters can still be desirable.
  • Such configuration parameters can be set via the software identifier.
  • the first configuration parameter can preferably be a configuration parameter that is security-relevant, certified and/or device-specific.
  • the hardware identifier provides a simple way of identifying this type of configuration parameter with a high degree of recognition security.
  • a certification of the configuration parameter can be provided, for example, depending on a specific hardware identifier.
  • the first configuration parameter can have an absolute limit for a control variable, for example to ensure the operational reliability of the device component.
  • further, e.g. second, configuration parameters can be provided, which further limit the control variable. This can make sense, for example, specific to the application, even if the specific device component could also be operated beyond these limits and up to the absolute limit, at least with regard to the safety of the device component.
  • the control device is set up in particular to switch off the device component or to regulate the control variable in a compensating manner, in particular to regulate it down, if the limit is exceeded or if it is imminent to be exceeded.
  • the first configuration parameter can relate, for example, to a rated speed, a maximum speed, a rated motor voltage, a maximum phase current and/or a maximum temperature of a device component.
  • These configuration parameters can be defined in a simple and secure manner using the hardware identifier.
  • the second configuration parameter can be, for example, a configuration parameter that is application-specific, hazard-independent and/or certification-free.
  • a configuration parameter that is application-specific, hazard-independent and/or certification-free.
  • the advantages of the software identifier described above, in particular the large amount of data possible, can be used to advantage.
  • the second configuration parameter can be device-specific or device-unspecific.
  • the hardware identifier can be formed by at least one identification resistor, in particular a combination of identification resistors, and/or by at least one mechanical feature that can be recognized by the control device. These are simple means of realizing a permanent hardware identifier.
  • the control device can, for example, comprise a sensor system for detecting the mechanical features, for example a light barrier, a capacitance sensor and/or an inductance sensor. It is also conceivable that a mechanical feature creates a conductivity that is recognized as information. The mechanical feature can, for example, conduct itself or actuate a pushbutton switch. More generally, provision can be made for the connection to produce a state change in the control device for defining the first configuration parameter. The change in status can in principle be reversible or irreversible. In the irreversible case, the control device is then limited to a specific hardware identifier, in particular to the specific type of connected device component.
  • the non-volatile memory can be embodied, for example, as a PROM, EPROM, EEPROM, flash memory and/or magnetic memory.
  • the software identifier can be provided, for example, by programming the non-volatile memory using a programming adapter.
  • the control device itself can be designed, for example, as a means for programming the non-volatile memory.
  • the control device can, for example, have an additional interface and means for forwarding the information to be programmed to the non-volatile memory via the interface which connects the control device to the device components.
  • the interface comprises a plug connection. This enables the control device to be easily connected to the device component and simplifies the replacement of the control device.
  • an identification module is provided on the device component, which includes the hardware and/or the software identification.
  • the identifier module can preferably be exchangeable and/or provided on an outside of the device component.
  • the identification module can be designed as a circuit board, which can preferably also have a plug connector of the interface.
  • the circuit board can be fastened, for example, by screws, for example to a housing component of the device component.
  • the circuit board can, for example, be replaced by a service employee if it is defective and/or the device component is to be used in a new application. Alternatively or additionally, a service employee can also reprogram the software identifier if the software identifier or the non-volatile memory is set up for this purpose.
  • the control device for the first and/or second configuration parameter includes a predefined table which includes an assignment of values for the configuration parameter to different identifier values, and that the first or second configuration parameter is set by the control device on the basis of the table can be specified. Accordingly, configuration parameters or sets are stored as tables predefined in the control device depending on existing identifiers. About this is a simple one in particular Admissibility check by the control device possible. Furthermore, a table can make it more difficult for third parties to assign configuration parameters to identifiers.
  • an identifier can have a numerical value. The numerical value is then encoded according to the type of identifier.
  • At least one of the identifiers includes a product designation and/or an article number of the device component. This is an easy way to specifically label the device component.
  • At least one identifier in particular the software identifier, includes check information, in particular a checksum.
  • check information in particular a checksum.
  • “not permitted” means that the control device recognizes that the identifier in question was not specified by the manufacturer or possibly an authorized service point. It can also be provided that the hardware identifier and the software identifier cannot be changed by an unauthorized person, such as a user, at least essentially - i.e. neither in a permissible nor in an impermissible manner. Alternatively, the software identifier can be changed in a permissible manner, for example by an authorized person.
  • the identifier can preferably be at least essentially pseudo-random and/or random-resistant. This means that the identifier appears random to a third party or that another permissible identifier cannot be found at least essentially by simply trying it out. In particular, it should not be possible to draw any direct conclusions about an article number and/or the configuration parameters of the device component from the identifier.
  • a simple possibility is that the identifier is generated using a hash function, the hash function using, for example, a product designation, an article number and/or directly defined configuration parameters as input values.
  • the measures described serve in particular to ensure that the identifier, in particular the software identifier, cannot be changed by the user of the vacuum device, ie not in a way that is considered permissible by the control device.
  • the measures only make it more difficult to erroneously set a valid configuration parameter set, for example by trying it out, without reference to the pump that is actually present, so that the selection of an incorrect configuration parameter set is made even more difficult.
  • the control device can nevertheless infer the selected set of configuration parameters, for example by appropriate conversion or mapping.
  • the control device can have, for example, a predefined decryption function and/or a predefined table.
  • control device is set up to prevent the operation of the device component if no permissible hardware identifier can be identified. It can thus be ensured in a simple manner that the device component is not operated in an impermissible manner and in particular not in a dangerous manner. In principle, it is also conceivable that the operation of the device component is only restricted if no permissible hardware identifier can be identified.
  • control device is set up to partially or completely prevent the operation and/or certain functionalities of the device component until a permissible software identifier has been recognized. If the second configuration parameter specified via the software identifier is not relevant to security, for example, operation or certain functionalities of the device component can be enabled even if no permissible software identifier was detected. In particular, however, it can be a prerequisite that a permissible hardware identifier has been recognized.
  • control device is set up to initiate operation on the basis of at least one preset value for the second configuration parameter until a permissible software identifier has been recognized. This makes it possible to operate the device component in a simple manner, even if no software identifier can be identified. Here, too, it can be a prerequisite that a permissible hardware identifier has been recognized.
  • a vacuum device according to the independent claim directed thereto.
  • This includes a device component, in particular a pump component, a control device, in particular a drive device, for the device component, and an interface for connecting the control device to the device component, the control device being set up to control the device component on the basis of at least a first configuration parameter and a second configuration parameter, a permanent hardware identifier being attached to the device component is provided and the control device is set up to recognize the hardware identifier and to define the first configuration parameter on the basis of the hardware identifier, a software identifier being provided in a non-volatile memory on the device component and the control device to recognize the software identifier and to Determination of the second configuration parameter is set up on the basis of the software identifier, so that both the first and the second configuration parameter are connected to the device component by the control device can be determined automatically.
  • the software identifier can in particular be defined by the manufacturer.
  • the vacuum device does not have a user interface that enables the software identifier to be changed.
  • Means and/or measures for preventing and/or making it more difficult for a subsequent change of the software identifier can generally be provided.
  • a vacuum device can be, for example, a vacuum pump, a vacuum chamber, a measuring and/or analysis device, a leak detector, a guide element, a valve, a vacuum feedthrough or a manipulator.
  • a guide element is an element for conducting a gas flow or a vacuum.
  • a vacuum feedthrough allows power and/or information to pass between a vacuum domain and a domain separate from the vacuum domain, such as a pressure or atmospheric domain.
  • a Manipulator is a device for transferring movement from a pressure or atmospheric area to a vacuum area.
  • Other examples of vacuum devices, particularly more complex ones, include a mass spectrometer or an electron microscope.
  • a vacuum device can also include combinations of the above devices.
  • the present idea takes up in particular the options for defining configuration parameters explained at the outset, namely the definition using identifiers on the one hand and manual input on the other hand, and combines them in an advantageous manner.
  • this is achieved in that the safety-relevant and certified parts of the configuration parameters, in particular the nominal or maximum speed, are still recognized by means of hardware identifiers, in particular by means of a combination of characteristic resistors.
  • the number and gradation of characteristic resistances can be selected in a sensible manner.
  • the configuration parameters mentioned can also be recognized and defined by other features, for example by recognition of mechanical conditions on the pump by the drive electronics. The number of different nominal speeds is significantly lower compared to the number of other configuration parameters and their future increase is foreseeable.
  • the security-relevant and certified configuration parameters mentioned can also be defined by free assignment.
  • a stored, known combination of characteristic resistances or samples is assigned to a freely selected rated speed.
  • the configuration parameters can also be derived, for example, from a mapping rule.
  • the detected characteristic resistance can be converted directly into a nominal speed using a known ratio. This can be done continuously or in defined gradations, for example, by linear assignment, rounding, spreading, offset or other unambiguous conversions and mathematical mappings.
  • the remaining, in particular second, configuration parameters are stored as assigned sets in the control device, in particular in the drive unit, and a suitable selection can then be made from these sets, in particular during production, in particular by appropriate programming of the software identifier.
  • the control device then recognizes the safety-relevant, in particular first, configuration parameters of the device component, in particular the pump, for example a specific nominal or maximum speed, by evaluating the characteristic resistances or other methods mentioned. Unless a determination has already been made in advance, one or more sets of the remaining, in particular the second, configuration parameters are available. These can now be selected with a simple identifier - in the simplest case an index, but better protected by a checksum - conveniently once during production or in the event of a service.
  • the selection can be made, for example, by specifying the item number of the device component, but also by any other type of identifier.
  • a number can also be used that does not allow any direct conclusions to be drawn about the article number of the device component, but instead has to be formed, for example, as a type of hash code or taken from a table.
  • the control device can deduce the selected set of configuration parameters by means of a corresponding conversion or mapping.
  • the selection is made only once and is kept non-volatile in the device component.
  • the former recognizes the first configuration parameter to be defined, in particular the nominal speed, through the characteristic resistors, and the selected second configuration parameter set by reading out the non-volatile memory.
  • a control device has recognized the safety-relevant parts of the configuration parameters, but the remaining parameters have not yet been selected, various measures can be taken. This can be, among other things, the complete or partial suppression of functions of the device component, in particular the operation of the device component or the activation of accessories or communication with other components or communication participants.
  • a type of default configuration parameter set can also be selected. This can be one of the sets stored for various device components, but also a special set defined solely for this case.
  • either the safest of the individual configuration parameters can be selected or another suitable value determined by the application.
  • the measures described have numerous advantages.
  • the method described allows the number of application and device-specific configuration parameter sets to be expanded independently of the possible number of combinations of characteristic resistors.
  • the parameter sets themselves can only assume valid and meaningful values due to predefinition in the control device, and their selection is possible with simple means.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. also 3 ). Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection through which flushing gas to protect the electric motor 125 (see e.g 3 ) before the pumped gas in the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be admitted.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be conducted into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate solely on air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be operated when it is oriented in a different way than in FIG 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and arranged between the rotor disks 155 and fixed in the housing 119 stator disks 157 A rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pumping stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • Other turbomolecular vacuum pumps (not shown) exist that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Also provided are two cylinder jacket-shaped Holweck stator sleeves 167, 169, which are also oriented coaxially with respect to the axis of rotation 151 and are nested in one another when viewed in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and forming with it the first Holweck pump stage following the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can be provided at the lower end of the radially inner Holweck rotor sleeve 165 .
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running in a spiral shape around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Advance vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter that increases toward the roller bearing 181 .
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 185 and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it e.g. fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, which each comprise a ring stack of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsion forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support section 203 on the stator side, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119 .
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the stator-side ring magnets 197 are parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 209 connected to the support section 203 associated mounting ring 211 set.
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures is prevented with the stator-side structures.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the sealing gas can protect the electric motor 125 from process gas, e.g. from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • a vacuum device 250 which comprises a device component 252 and a control device 254 for controlling the device component 252 .
  • the device component 252 and the control device 254 can be connected via an interface 256 and 6 shown in the disconnected state.
  • the control device 254 In order to put the device component 252 into operation, the control device 254 must be connected to the device component 252 via the interface 256 .
  • the interface 256 is a plug-in connection, ie the control device 254 only needs to be plugged into the device component 252 and preferably also attached.
  • the device component 252 includes a pump unit 258 here, for example Figures 1 to 5 shown turbomolecular pump 111 may be formed.
  • the device component 252 also includes a hardware identifier 260 and a software identifier 262.
  • the hardware identifier 260 is designed, for example, as a characteristic resistor combination, while the software identifier 262 is stored in a non-volatile memory 263.
  • the hardware identifier 260 and the software identifier 262 are arranged on an identifier module 264, which can be subsequently exchanged by the manufacturer, for example.
  • the device component 252 can, for example, form a pumping component, for example that in FIGS Figures 1 to 5 Turbomolecular pump 111 shown.
  • This pump component includes in particular the housing 119, the lower part 121 and the components arranged within these two elements.
  • the pump component of the turbomolecular pump 111 includes an identification module 264, which in 3 is marked.
  • the identifier module 264 is designed as a circuit board that carries both the hardware identifier in the form of a characteristic resistor combination and the software identifier in a non-volatile memory.
  • the circuit board includes a plug connector, which forms the device component-side part of an interface 256 for connecting a control device.
  • the control device for the device components is accommodated in the electronics housing 123.
  • the control device includes a plug connector which corresponds to that of the device component and forms the part of the interface 256 on the control device side.
  • the control device 254 of 6 includes a detection unit 266 for detecting the hardware identifier 260 and the software identifier 262 in the state connected via the interface 256 . Based on the identifiers 260 and 262, the recognition unit 266 or another unit determines the configuration parameters 268. At least one first configuration parameter 268 is defined based on the identified hardware identifier 260 and at least one second configuration parameter 268 is defined based on the identified software identifier 262 . For example, configuration parameters 268.1 and 268.2 can be set based on detected hardware identifier 260 and configuration parameters 268.3 through 268.7 can be set based on detected software identifier 262. Other assignments are of course possible.
  • the configuration parameters 268 are preferably set automatically by the control device 254 on the basis of the identifiers 260 and 262 when the control device 254 is first connected to the device component 252 and/or after a power supply of the vacuum device is switched on.
  • the control device 254 also includes a control unit 270 that controls the pump unit 258 on the basis of the configuration parameters 268 that have been set beforehand.
  • Both the recognition of the identifiers 260 and 262 and the control of the pump unit 258 take place here via one and the same interface 256. In principle, however, separate interfaces can also be provided, for example.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (15)

  1. Procédé de fabrication d'un appareil à vide (111, 250),
    l'appareil à vide (111, 250) comportant
    un composant d'appareil (225), en particulier un composant de pompage, un dispositif de commande (254), en particulier un appareil d'entraînement, pour le composant d'appareil (252), et
    une interface (256) pour connecter le dispositif de commande (254) au composant d'appareil (252),
    dans lequel
    le dispositif de commande (254) est conçu pour commander le composant d'appareil (252) en se basant sur au moins un premier paramètre de configuration (268) et un deuxième paramètre de configuration (268) ;
    le procédé de fabrication consistant à
    prévoir un identifiant matériel permanent (260) sur le composant d'appareil (252) et concevoir le dispositif de commande (254) pour reconnaître l'identifiant matériel (260) et pour définir le premier paramètre de configuration (268) en se basant sur l'identifiant matériel (260), et
    prévoir un identifiant logiciel (262) dans une mémoire non volatile sur le composant d'appareil (252), et concevoir le dispositif de commande (254) pour reconnaître l'identifiant logiciel (262) et pour définir le deuxième paramètre de configuration (268) en se basant sur l'identifiant logiciel (262), de sorte qu'aussi bien le premier que le deuxième paramètre de configuration (268) peuvent être définis automatiquement par le dispositif de commande (254) dans l'état connecté au composant d'appareil (252).
  2. Procédé selon la revendication 1,
    dans lequel
    le premier paramètre de configuration (268) est pertinent en termes de sécurité, certifié et/ou spécifique à l'appareil et/ou présente une limite absolue pour une grandeur de commande.
  3. Procédé selon la revendication 1 ou 2,
    dans lequel
    le premier paramètre de configuration (268) concerne une vitesse de rotation nominale, une vitesse de rotation maximale, une tension nominale du moteur, un courant de phase maximal et/ou une température maximale d'un composant de l'appareil.
  4. Procédé selon l'une au moins des revendications précédentes,
    dans lequel
    le deuxième paramètre de configuration (268) est spécifique à l'application, indépendant du danger et/ou exempt de certification.
  5. Procédé selon l'une au moins des revendications précédentes,
    dans lequel l'identifiant matériel (260) est formé par au moins une impédance caractéristique et/ou par au moins une caractéristique mécanique reconnaissable par le dispositif de commande (254).
  6. Procédé selon l'une au moins des revendications précédentes,
    dans lequel l'interface (256) comprend une connexion enfichable.
  7. Procédé selon l'une au moins des revendications précédentes,
    dans lequel un module d'identification (264) est prévu sur le composant d'appareil (252), lequel module inclut l'identifiant matériel (260) et/ou l'identifiant logiciel (262).
  8. Procédé selon l'une au moins des revendications précédentes,
    dans lequel le dispositif de commande (254) comprend, pour le premier et/ou le deuxième paramètre de configuration (268), un tableau prédéfini qui inclut une affectation de valeurs pour le paramètre de configuration (268) à différents identifiants, et le premier ou le deuxième paramètre de configuration (268) peut être défini par le dispositif de commande (254) sur la base du tableau.
  9. Procédé selon l'une au moins des revendications précédentes,
    dans lequel l'un au moins des identifiants (260, 262), en particulier l'identifiant logiciel (262), inclut une désignation de produit et/ou un numéro d'article ; et/ou
    l'un au moins des identifiants (260, 262), en particulier l'identifiant logiciel (262), inclut une information de contrôle, en particulier une somme de contrôle.
  10. Procédé selon l'une au moins des revendications précédentes,
    dans lequel l'identifiant matériel (260) et l'identifiant logiciel (262) sont chacun réalisés de telle sorte qu'une personne non autorisée ne peut pas les modifier au moins sensiblement ou non pas de manière admissible.
  11. Procédé selon l'une au moins des revendications précédentes,
    dans lequel l'un au moins des identifiants (260, 262), en particulier l'identifiant logiciel (262), est crypté, en particulier est au moins sensiblement pseudo-aléatoire et/ou résistant au hasard.
  12. Procédé selon l'une au moins des revendications précédentes,
    dans lequel le dispositif de commande (254) est conçu pour interdire le fonctionnement du composant d'appareil (252) si aucun identifiant matériel (260) admissible ne peut être reconnu.
  13. Procédé selon l'une au moins des revendications précédentes,
    dans lequel le dispositif de commande (254) est conçu pour interdire partiellement ou complètement le fonctionnement et/ou certaines fonctionnalités du composant d'appareil (252) jusqu'à ce qu'un identifiant logiciel admissible (262) ait été reconnu.
  14. Procédé selon l'une au moins des revendications précédentes,
    dans lequel le dispositif de commande (254) est conçu pour provoquer un fonctionnement sur la base d'au moins une valeur préréglée pour le deuxième paramètre de configuration (268) jusqu'à ce qu'un identifiant logiciel admissible (262) ait été reconnu.
  15. Appareil à vide (111, 250), en particulier pompe à vide, appareil de mesure du vide, appareil de détection de fuites et/ou appareil à chambre à vide, comportant
    un composant d'appareil (225), en particulier un composant de pompage, un dispositif de commande (254), en particulier un appareil d'entraînement, pour le composant d'appareil (252), et
    une interface (256) pour connecter le dispositif de commande (254) au composant d'appareil (252),
    dans lequel
    le dispositif de commande (254) est conçu pour commander le composant d'appareil (252) en se basant sur au moins un premier paramètre de configuration (268) et un deuxième paramètre de configuration (268),
    un identifiant matériel permanent (260) est prévu sur le composant d'appareil (252) et le dispositif de commande (254) est conçu pour reconnaître l'identifiant matériel (260) et pour définir le premier paramètre de configuration (268) en se basant sur l'identifiant matériel (260), et
    un identifiant logiciel (262) est prévu dans une mémoire non volatile sur le composant d'appareil (252), et le dispositif de commande (254) est conçu pour reconnaître l'identifiant logiciel (262) et pour définir le deuxième paramètre de configuration (268) en se basant sur l'identifiant logiciel (262), de sorte qu'aussi bien le premier que le deuxième paramètre de configuration (268) peuvent être définis automatiquement par le dispositif de commande (254) dans l'état connecté au composant d'appareil (252).
EP20214823.5A 2020-12-17 2020-12-17 Appareil sous vide Active EP3848588B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20214823.5A EP3848588B1 (fr) 2020-12-17 2020-12-17 Appareil sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20214823.5A EP3848588B1 (fr) 2020-12-17 2020-12-17 Appareil sous vide

Publications (2)

Publication Number Publication Date
EP3848588A1 EP3848588A1 (fr) 2021-07-14
EP3848588B1 true EP3848588B1 (fr) 2022-11-30

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ID=73855230

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Application Number Title Priority Date Filing Date
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Country Link
EP (1) EP3848588B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101761501B (zh) * 2009-12-25 2012-02-29 北京中科科仪技术发展有限责任公司 一种分子泵型号的识别方法
EP3536966B1 (fr) 2018-03-07 2020-06-17 Pfeiffer Vacuum GmbH Appareil à vide
EP3660317B1 (fr) * 2018-11-28 2022-06-22 Pfeiffer Vacuum Gmbh Appareil à vide
EP3620660B1 (fr) * 2019-08-06 2021-07-28 Pfeiffer Vacuum Gmbh Appareil à vide

Also Published As

Publication number Publication date
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