EP4253720C0 - Pompe à vide à spirales et système de pompe à vide à spirales - Google Patents

Pompe à vide à spirales et système de pompe à vide à spirales

Info

Publication number
EP4253720C0
EP4253720C0 EP23190388.1A EP23190388A EP4253720C0 EP 4253720 C0 EP4253720 C0 EP 4253720C0 EP 23190388 A EP23190388 A EP 23190388A EP 4253720 C0 EP4253720 C0 EP 4253720C0
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
scroll vacuum
scroll
pump system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP23190388.1A
Other languages
German (de)
English (en)
Other versions
EP4253720A3 (fr
EP4253720A2 (fr
EP4253720B1 (fr
Inventor
Gernot Bernhardt
Maik Schäfer
Heiko Schäfer
Jörn Tönnissen
Jan Hofmann
Sebastian Latta
Jonas Becker
Jonas Söhngen
Jannik Germann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP24197612.5A priority Critical patent/EP4506536B1/fr
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23190388.1A priority patent/EP4253720B1/fr
Priority to EP25156934.9A priority patent/EP4530471B1/fr
Priority to EP24197627.3A priority patent/EP4506537B1/fr
Priority to EP25156928.1A priority patent/EP4530470A3/fr
Publication of EP4253720A2 publication Critical patent/EP4253720A2/fr
Publication of EP4253720A3 publication Critical patent/EP4253720A3/fr
Priority to PCT/EP2024/072497 priority patent/WO2025032188A1/fr
Priority to CN202480015459.0A priority patent/CN120693445A/zh
Application granted granted Critical
Publication of EP4253720C0 publication Critical patent/EP4253720C0/fr
Publication of EP4253720B1 publication Critical patent/EP4253720B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02Arrangements of bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253Details concerning the base
    • F04C18/0261Details of the ports, e.g. location, number, geometry
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269Details concerning the involute wraps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008Hermetic pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005Axial sealings for working fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/40Electric motor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/50Bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/60Shafts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components
    • F04C2240/807Balance weight, counterweight
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components
    • F04C2240/808Electronic circuits (e.g. inverters) installed inside the machine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
EP23190388.1A 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales Active EP4253720B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EP23190388.1A EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156934.9A EP4530471B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197627.3A EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP25156928.1A EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197612.5A EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
CN202480015459.0A CN120693445A (zh) 2023-08-08 2024-08-08 涡旋真空泵及涡旋真空泵系统
PCT/EP2024/072497 WO2025032188A1 (fr) 2023-08-08 2024-08-08 Pompe à vide à spirale et système de pompe à vide à spirale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23190388.1A EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Related Child Applications (8)

Application Number Title Priority Date Filing Date
EP25156934.9A Division EP4530471B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156934.9A Division-Into EP4530471B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197627.3A Division EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP24197627.3A Division-Into EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP25156928.1A Division EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156928.1A Division-Into EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197612.5A Division EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197612.5A Division-Into EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Publications (4)

Publication Number Publication Date
EP4253720A2 EP4253720A2 (fr) 2023-10-04
EP4253720A3 EP4253720A3 (fr) 2024-06-19
EP4253720C0 true EP4253720C0 (fr) 2025-10-01
EP4253720B1 EP4253720B1 (fr) 2025-10-01

Family

ID=87567462

Family Applications (5)

Application Number Title Priority Date Filing Date
EP24197627.3A Active EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP25156934.9A Active EP4530471B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP23190388.1A Active EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197612.5A Active EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156928.1A Pending EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP24197627.3A Active EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP25156934.9A Active EP4530471B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Family Applications After (2)

Application Number Title Priority Date Filing Date
EP24197612.5A Active EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156928.1A Pending EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Country Status (3)

Country Link
EP (5) EP4506537B1 (fr)
CN (1) CN120693445A (fr)
WO (1) WO2025032188A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre
EP4467810A3 (fr) 2024-07-15 2025-02-26 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et procédé de fabrication d'une pompe à vide à spirales
EP4538532A3 (fr) * 2025-02-25 2025-08-27 Pfeiffer Vacuum Technology AG Pompe à vide à spirales
EP4621238A3 (fr) * 2025-07-16 2025-11-12 Pfeiffer Vacuum Technology AG Procédé de montage d'une pompe à vide à spirales
EP4636251A3 (fr) 2025-09-09 2026-04-29 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
JPS60206989A (ja) * 1984-03-30 1985-10-18 Mitsubishi Electric Corp スクロ−ル形流体機械
US6884047B1 (en) * 2003-10-20 2005-04-26 Varian, Inc. Compact scroll pump
DE102006058842A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Lüfter
FR2968731B1 (fr) * 2010-12-13 2015-02-27 Danfoss Commercial Compressors Systeme thermodynamique equipe d'une pluralite de compresseurs
CN102817840B (zh) * 2011-06-07 2014-08-27 思科涡旋科技(杭州)有限公司 一种带有绕动式推力轴承的涡卷式容积位移装置
US9605676B2 (en) * 2013-05-31 2017-03-28 Emerson Climate Technologies, Inc. Variable speed scroll compressor
US20150004039A1 (en) * 2013-06-28 2015-01-01 Emerson Climate Technologies, Inc. Capacity-modulated scroll compressor
JP6165576B2 (ja) * 2013-09-30 2017-07-19 株式会社日立産機システム スクロール式流体機械
CN105443377A (zh) * 2014-06-10 2016-03-30 丹佛斯(天津)有限公司 涡旋压缩机
US10954944B2 (en) * 2015-04-27 2021-03-23 Emerson Climate Technologies, Inc. Compressor having counterweight assembly
EP3153708B1 (fr) 2015-10-06 2019-07-17 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
JP6325041B2 (ja) * 2016-08-31 2018-05-16 三菱重工サーマルシステムズ株式会社 スクロール流体機械およびチップシール
DE102019108079B4 (de) * 2018-03-30 2023-08-31 Kabushiki Kaisha Toyota Jidoshokki Schneckenverdichter
EP3597922B1 (fr) * 2018-07-19 2024-08-28 Agilent Technologies, Inc. (A Delaware Corporation) Système de pompage à vide comportant une pompe à vide lubrifiée à l'huile
EP3963209B1 (fr) * 2019-04-30 2025-07-30 Agilent Technologies, Inc. Palier de butée à film d'huile double face dans une pompe à spirale
CN110159528B (zh) * 2019-05-23 2020-11-17 浙江大学 一种双侧双槽并联式无油涡旋空压机
CN110185614B (zh) * 2019-06-26 2020-10-02 浙江大学 一种干式双涡旋真空泵
JP2021014801A (ja) * 2019-07-10 2021-02-12 ダイキン工業株式会社 スクロール圧縮機
JP7220692B2 (ja) * 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、スクロールポンプ及びその製造方法
EP3754200B1 (fr) * 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Pompe à vide à spirales et procédé de montage
EP3617511B1 (fr) * 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Pompes à spirales et procédé de fabrication pour des telles pompes
EP3708840B1 (fr) * 2020-07-22 2025-02-26 Pfeiffer Vacuum Technology AG Pompe à vide avec clapet antiretour
JP7534951B2 (ja) * 2020-12-22 2024-08-15 サンデン株式会社 スクロール型圧縮機
CN113431781A (zh) * 2021-08-05 2021-09-24 临海市谭氏真空设备有限公司 干式涡旋真空泵
EP3940234B1 (fr) * 2021-09-29 2023-08-23 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'une couche antifriction
CN116470689A (zh) * 2023-03-27 2023-07-21 北京通嘉宏瑞科技有限公司 一体轴式真空泵电机

Also Published As

Publication number Publication date
EP4530470A3 (fr) 2025-07-02
EP4253720A3 (fr) 2024-06-19
WO2025032188A1 (fr) 2025-02-13
EP4530471A2 (fr) 2025-04-02
EP4506536B1 (fr) 2025-12-17
EP4530471C0 (fr) 2026-02-25
EP4506537C0 (fr) 2025-10-08
EP4506536A1 (fr) 2025-02-12
CN120693445A (zh) 2025-09-23
EP4530471A3 (fr) 2025-07-02
EP4506536C0 (fr) 2025-12-17
EP4253720A2 (fr) 2023-10-04
EP4506537B1 (fr) 2025-10-08
EP4530471B1 (fr) 2026-02-25
EP4253720B1 (fr) 2025-10-01
EP4506537A1 (fr) 2025-02-12
EP4530470A2 (fr) 2025-04-02

Similar Documents

Publication Publication Date Title
EP4253720C0 (fr) Pompe à vide à spirales et système de pompe à vide à spirales
JP1733628S (ja) エアポンプ
EP4166790A4 (fr) Pompe à vide
EP4212729A4 (fr) Pompe à vide
EP3921515C0 (fr) Corps de pompe multiétagée et pompe à gaz multiétagée
EP4187089A4 (fr) Compresseur et système de compresseur
EP4187090A4 (fr) Compresseur et système de compression
EP4285029A4 (fr) Compresseur à aspiration dirigée
EP4110539A4 (fr) Systèmes et pompes à vide de haute pureté à faible coût
EP4102079A4 (fr) Pompe à vide et élément de pompe à vide
EP4357618A4 (fr) Pompe à vide
EP3957858A4 (fr) Ensemble corps de pompe, compresseur et climatiseur
EP4303446A4 (fr) Pompe à vide
EP4283126A4 (fr) Compresseur à spirale
EP4170175C0 (fr) Ensemble rotor et compresseur
EP4123181A4 (fr) Pompe à vide et élément de pompe à vide
EP3816453A4 (fr) Pompe à vide, colonne de stator, base et système d'échappement de pompe à vide
EP4357617A4 (fr) Pompe à vide
EP4206474C0 (fr) Pompe à vide
EP4102074A4 (fr) Compresseur à spirale
GB202212161D0 (en) Vacuum pump and vacuum exhaust system
GB202212159D0 (en) Vacuum pump and vacuum exhaust system
EP4581317A4 (fr) Systèmes et pompes à vide de haute pureté à faible coût
EP4474654C0 (fr) Pompe à vide turbomoléculaire
EP3990785A4 (fr) Compresseur à volutes

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR

RIN1 Information on inventor provided before grant (corrected)

Inventor name: GERMANN, JANNIK

Inventor name: SOEHNGEN, JONAS

Inventor name: BECKER, JONAS

Inventor name: LATTA, SEBASTIAN

Inventor name: HOFMANN, JAN

Inventor name: TOENNISSEN, JOERN

Inventor name: SCHAEFER, HEIKO

Inventor name: SCHAEFER, MAIK

Inventor name: BERNHARDT, GERNOT

RIC1 Information provided on ipc code assigned before grant

Ipc: F04C 27/00 20060101ALI20240318BHEP

Ipc: F04C 25/02 20060101ALI20240318BHEP

Ipc: F04C 23/00 20060101ALI20240318BHEP

Ipc: F04C 18/02 20060101ALI20240318BHEP

Ipc: F01C 21/02 20060101AFI20240318BHEP

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR

RIC1 Information provided on ipc code assigned before grant

Ipc: F04C 27/00 20060101ALI20240515BHEP

Ipc: F04C 25/02 20060101ALI20240515BHEP

Ipc: F04C 23/00 20060101ALI20240515BHEP

Ipc: F04C 18/02 20060101ALI20240515BHEP

Ipc: F01C 21/02 20060101AFI20240515BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20241218

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20250313

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20250602

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

Ref country code: CH

Ref legal event code: F10

Free format text: ST27 STATUS EVENT CODE: U-0-0-F10-F00 (AS PROVIDED BY THE NATIONAL OFFICE)

Effective date: 20251001

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

U01 Request for unitary effect filed

Effective date: 20251006

U07 Unitary effect registered

Designated state(s): AT BE BG DE DK EE FI FR IT LT LU LV MT NL PT RO SE SI

Effective date: 20251014

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20251001

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20260101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20251001

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20260101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20260201