EP4506536B1 - Pompe à vide à spirales et système de pompe à vide à spirales - Google Patents

Pompe à vide à spirales et système de pompe à vide à spirales

Info

Publication number
EP4506536B1
EP4506536B1 EP24197612.5A EP24197612A EP4506536B1 EP 4506536 B1 EP4506536 B1 EP 4506536B1 EP 24197612 A EP24197612 A EP 24197612A EP 4506536 B1 EP4506536 B1 EP 4506536B1
Authority
EP
European Patent Office
Prior art keywords
spiral
scroll vacuum
vacuum pump
drive shaft
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP24197612.5A
Other languages
German (de)
English (en)
Other versions
EP4506536A1 (fr
EP4506536C0 (fr
Inventor
Gernot Bernhardt
Maik Schäfer
Heiko Schäfer
Jörn TÖNNISSEN
Jan Hofmann
Sebastian Latta
Jonas Becker
Wolfgang Söhngen
Jannik GERMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24197612.5A priority Critical patent/EP4506536B1/fr
Publication of EP4506536A1 publication Critical patent/EP4506536A1/fr
Application granted granted Critical
Publication of EP4506536B1 publication Critical patent/EP4506536B1/fr
Publication of EP4506536C0 publication Critical patent/EP4506536C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F04C18/0261—Details of the ports, e.g. location, number, geometry
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to scroll vacuum pumps, each with the features of the preamble of independent claims 1 and 10.
  • the present disclosure relates to the improvement of scroll vacuum pumps and scroll vacuum pump systems with multiple scroll vacuum pumps of different designs.
  • Each scroll vacuum pump comprises a pumping system consisting of a stationary spiral component and a movable spiral component that interacts with it effectively for pumping, a drive shaft rotating around a rotary axis during operation with an eccentric section for driving the movable spiral component, and an electric drive motor for the drive shaft.
  • Scroll vacuum pumps are generally known, e.g. from EP 3 153 708 A2 , EP 3 617 511 A2 and EP 3 647 599 A2 Furthermore, the printed document describes CN 113 431 781 A for example a scroll vacuum pump according to the preambles of independent claims 1 and 10.
  • a scroll pump is a positive displacement pump that compresses against atmospheric pressure and can be used, among other things, as a compressor.
  • a scroll vacuum pump can be used to create a vacuum in a receiver connected to a gas inlet of the scroll vacuum pump.
  • Scroll vacuum pumps are also known as spiral vacuum pumps or spiral conveying devices.
  • the pumping principle underlying a scroll vacuum pump This is generally known from the state of the art and is therefore only briefly explained below.
  • the pumping system of a scroll vacuum pump comprises two nested or interlocked spiral cylinders, for example, Archimedean spirals, which are also simply referred to as spirals.
  • Each spiral cylinder includes at least one equidistant spiral wall with a support, in particular a plate-shaped support, provided at one end face of the spiral wall.
  • the outer turns of the spiral cylinder for example, the two or three outermost turns of the spiral cylinder, can be formed by wall sections that are each at a constant circumferential distance from the center of the spirals. Even though these wall sections are strictly speaking not spiral sections but circular segments, in the context of this disclosure they are considered part of the spiral and referred to as turns of the spiral.
  • the spiral cylinders are nested inside one another in such a way that the two spiral cylinders partially enclose crescent- or sickle-shaped volumes.
  • One of the two spirals is fixed within the pump housing, while the other spiral, along with its support, can be moved along a circular path via the eccentric section of the drive shaft. This is why this spiral, together with its support, is also referred to as the orbiter.
  • This movable spiral component thus performs a so-called centrally symmetrical oscillation, which is also known as "orbiting" or "wobbling.”
  • a crescent-shaped volume enclosed between the spiral cylinders moves increasingly inwards within the spirals during the orbiting of the movable spiral component.
  • This moving volume conveys the process gas to be pumped from a radially outer gas inlet of the pump system radially inwards to a gas outlet of the pump system, which is located primarily in the center of the spiral.
  • the eccentric drive i.e., the drive shaft with the eccentric section
  • the eccentric drive is located inside the scroll vacuum pump housing on the side of the support facing away from the orbiter's spiral.
  • it is usually surrounded by a deformable sleeve, such as a bellows.
  • This sleeve serves both to seal the drive against the intake area and to prevent the orbiter from rotating, as it could otherwise spin freely without this anti-rotation device.
  • the deformable sleeve can, for example, be connected to the support at one end, while the other end of the deformable sleeve, opposite the first end, can be screwed to the base of the housing inside using several fasteners.
  • the assembly comprising the orbiter and the deformable sleeve (e.g. bellows) can be pre-assembled during pump assembly, so that this assembly can then be inserted into the pump housing as a unit, after which the aforementioned second end of the deformable sleeve can be screwed to the housing base with the fastening means.
  • the deformable sleeve e.g. bellows
  • the object of the invention is to improve scroll vacuum pumps of the type mentioned above. This object is achieved by the features of independent claim 1 (eleventh aspect of the present disclosure) and by the features of independent claim 10 (twelfth aspect of the present disclosure).
  • At least two bearing points spaced apart from each other along the axis of rotation are provided for the rotary support of the drive shaft, wherein all bearing points are located on the side of the drive motor facing the eccentric section and/or between a front balancing weight and a rear balancing weight of the drive shaft.
  • the drive motor is located behind the bearings; that is, there are no bearings behind the drive motor.
  • This concept represents a departure from a conventional arrangement in which a drive motor designed as an asynchronous motor is positioned between two bearings spaced apart along the axis of rotation.
  • the drive motor may be arranged at least partially, preferably completely, within the pump housing.
  • the drive motor is surrounded by the pump housing in the circumferential direction for at least more than half of its axial length, preferably for its entire axial length.
  • the pump housing is closed at its rear end by means of a separate motor cover. If the drive motor If the motor is not completely located within the pump housing, the motor cover may have a receiving space with an axial depth dimensioned such that this receiving space can accommodate a rear end of the drive motor projecting axially backwards out of the pump housing.
  • the electric drive motor of the scroll vacuum pump may be an asynchronous motor.
  • the electric drive motor can be a synchronous motor.
  • the drive motor is a synchronous reluctance motor.
  • a balancing weight is attached to the end face of the rear end of the drive shaft.
  • the balancing weight can perform one or more additional functions besides balancing the rotating system.
  • the front-mounted balancing weight can be used to clamp the rotor of the drive motor.
  • the rotating balancing weight creates air turbulence in the engine compartment, which can have a cooling effect and contribute to cooling the This at least contributes to the drive motor.
  • the need for cooling fins on the motor rotor can be eliminated, allowing the freed-up space in the engine compartment to be used for the balancing weight.
  • balancing weight touches the drive shaft.
  • the balancing weight is located behind the drive shaft and is connected to it in such a way that it rotates together with the drive shaft during operation.
  • the balancing weight can, for example, be screwed to the drive shaft.
  • a central screw can be provided for bolting the balancing weight to the drive shaft, the shaft of which coincides with the axis of rotation.
  • the positioning of the balancing weight in the circumferential direction relative to the drive shaft can be predetermined by a positioning aid.
  • the positioning aid can comprise a positioning element arranged radially from the axis of rotation, as well as a positioning receptacle for a portion of the positioning element, wherein the positioning element is arranged on the drive shaft and the positioning receptacle is formed on the balancing weight, or vice versa.
  • the positioning element can, for example, be pin-shaped and extend parallel to the axis of rotation.
  • the positioning element can be inserted axially into a recess.
  • the recess can be formed in the drive shaft.
  • the recess can be formed jointly by the drive shaft on one side and a motor rotor of the drive motor on the other.
  • a rotationally fixed, radially inner sleeve element is formed.
  • the drive motor may comprise a radially inner motor rotor and a radially outer motor stator, with the motor rotor clamped between a support and the balancing weight mounted on the rear end of the drive shaft.
  • the drive motor may comprise a radially inner motor rotor which is pushed directly or by means of a radially inner sleeve element connected to the motor rotor in a rotationally fixed manner onto the drive shaft, in particular with a clearance fit, wherein a positive locking connection effective in the circumferential direction is provided between the motor rotor and the sleeve element on the one hand and the drive shaft on the other.
  • the positive locking connection can be formed by a positioning element of a positioning aid, which defines the circumferential positioning of the balancing weight relative to the drive shaft.
  • the positioning element and/or positioning aid can be the positioning element or positioning aid described above.
  • the motor rotor of the drive motor may be provided with a radially inner sleeve element that is rotationally fixed to the motor rotor and with which the motor rotor is pushed onto the drive shaft, in particular with a clearance fit.
  • the sleeve element may be the sleeve element described above.
  • the drive motor comprises a radially inner motor rotor and a radially outer motor stator, wherein the motor rotor is provided with a radially inner sleeve element which is rotationally fixed to the motor rotor and with which the motor rotor is pushed onto the drive shaft, in particular with a clearance fit.
  • the sleeve element is in particular the sleeve element described above.
  • the inner diameter of the motor rotor can be adapted to the outer diameter of the relevant section of the drive shaft. This can be advantageous, for example, in a system with several scroll vacuum pumps of different designs that differ in the inner diameter of their motor rotors. In particular, this makes it possible to use one drive shaft for different motor rotors.
  • the sleeve element can be designed as a single piece or in multiple parts.
  • the motor rotor and the sleeve element can be pressed together.
  • the sleeve element may be provided with a circumferential shoulder against which the motor rotor rests. This shoulder can form a support for the motor rotor, which can be clamped between this support and a clamping element.
  • the clamping element can, for example, be mounted on the end face of the rear end of the drive shaft.
  • the clamping element can be a balancing weight, especially the balancing weight described above.
  • the drive shaft is equipped with a circumferential shoulder against which the sleeve element rests.
  • the shoulder of the The drive shaft can form a support for the sleeve element if the latter is clamped during assembly.
  • the sleeve element can be clamped between this support and a clamping element mounted on the end face of the rear end of the drive shaft.
  • This clamping element could be, for example, a balancing weight, in particular the balancing weight described above.
  • the drive shafts of the different scroll vacuum pumps are identical in construction.
  • scroll vacuum pumps can differ from each other with respect to the inner diameter of a radially inner motor rotor of the drive motor, whereby sleeve elements with different wall thicknesses are provided to adapt the drive shafts to the different inner diameters, each arranged between the drive shaft and the motor rotor.
  • the motor rotors are each connected to the sleeve element in a rotationally fixed manner and pushed onto the drive shaft with the sleeve element, in particular with a clearance fit.
  • motor rotor and the sleeve element are pressed together.
  • the drive shaft is provided with a front balancing weight and a rear balancing weight, wherein the front balancing weight and the rear balancing weight differ from each other with respect to the material from which they are made.
  • the concept of using different materials for the balancing weights creates an additional parameter that can be varied to adapt the balancing weights to the respective conditions.
  • the available installation space for a balancing weight can vary due to the different sizes of the pump systems.
  • this does not necessarily mean that a smaller installation space requires a smaller balancing weight, as the required balancing weight depends on the characteristics of the entire rotating system.
  • such a scroll vacuum pump system may require a relatively large balancing weight to be accommodated in a relatively small installation space in order to meet the specific balancing requirements while avoiding or at least minimizing design modifications.
  • the material of one balancing weight has a higher density than the material of the other balancing weight.
  • the front balancing weight is made of a material with a higher density. This allows for pump systems of different sizes to be used with the same dimensions for the remaining wheel. Rotating systems are compensated for by balancing weights of different densities.
  • the front balancing weight is made of brass and the rear balancing weight is made of steel.
  • the scroll vacuum pumps differ with respect to the pump system, wherein the drive shaft is provided with a front balancing weight and with a rear balancing weight, and wherein the scroll vacuum pumps differ from each other with respect to the front balancing weight and/or the rear balancing weight.
  • the drive shaft is provided with at least one balancing weight, wherein the balancing weight comprises several successive balancing sections along a longitudinal axis which, in the installed state, runs parallel to the axis of rotation of the drive shaft, each having a partial ring shape and encompassing the drive shaft with their opening pointing towards it, and wherein the balancing sections differ from one another with respect to the width of their openings.
  • the available installation space can be optimally utilized.
  • the balancing weight with the different balancing sections could be the front balancing weight of the drive shaft, which also has a rear balancing weight.
  • the opening widths of the balancing sections increase in the direction of the pump system.
  • a balancing section is arranged at the height of the eccentric section of the drive shaft, relative to the axis of rotation of the drive shaft.
  • each balancing section can be defined in a plane perpendicular to the longitudinal axis by a partial circle with a radius constant along the longitudinal axis, whereby the openings of the balancing sections differ from each other with respect to the size of the radii.
  • the partial circles are not arranged concentrically.
  • the partial circles can each encompass an angle in the range of 120° to 180°, particularly in the range of 150° and 170°.
  • the balancing weight can be manufactured in one piece. This makes it possible to produce the balancing weight from a single workpiece using machining.
  • the centers of all partial circles of at least two point segments, in particular of all point segments lie in a plane in which the bisectors of the angles encompassed by the partial circles also lie.
  • the drive shaft is provided with at least one balancing weight comprising at least one balancing section perpendicular to a plane. to a longitudinal axis which, in the installed state, runs parallel to the axis of rotation of the drive shaft, and widens conically radially outwards.
  • the conical shape of the balancing weight enables material and cost optimization.
  • the conical shape allows for an imaginary rosette-like arrangement of several balancing sections around a central axis, which means that the circular area, and thus the material, of a circular disk-shaped workpiece is optimally utilized, effectively achieving a high packing density of balancing weights within the workpiece.
  • the proportion of material unused in the production of the balancing weights can therefore be minimized.
  • the longitudinal axis can coincide with the axis of rotation.
  • the balancing section can be designed to widen in a V-shape, thus defining an opening angle in the range of 10° to 30°, particularly in the range of 15° to 25°.
  • the outline of the balancing section can be bounded by two V-shaped, radially outwardly diverging straight lines, a radially inner circular segment, and a radially outer circular segment.
  • the radially inner circular segment can have a smaller radius than the radially outer circular segment.
  • An imaginary circle on which the radially inner circular segment lies and whose center preferably lies on the longitudinal axis can lie completely within the outline of the balancing section.
  • an imaginary circle on which the radially outer circular segment lies can completely contain the outline of the balancing section.
  • Such designs of the balancing section can further increase the material yield.
  • the balancing weight may comprise several successive balancing sections along a longitudinal axis that, in the installed state, runs parallel to the axis of rotation of the drive shaft.
  • the outline of the entire balancing weight is formed by the outline of the balancing section that expands conically radially outwards. This ensures that the additional balancing section(s) do not impair the material yield.
  • At least one additional balancing section can be provided, which is shorter in the radial direction compared to the radially outwardly conical balancing section and is otherwise congruent to it and overlapping. This further simplifies the manufacturing of the balancing weight.
  • the balancing weight can have a circular cylinder segment that forms the end face of the balancing weight along its longitudinal axis and whose central axis coincides with the longitudinal axis.
  • the thickness of the circular cylinder segment, measured along its longitudinal axis, is less than the thickness of each balancing segment.
  • the circular cylinder section can, for example, serve to center the balancing weight during assembly.
  • the balancing weight can be inserted into a sleeve element along with the circular cylinder section, especially in those embodiments where the balancing weight is mounted face-up on the rear end of the drive shaft, with a motor rotor non-rotatably connected to the sleeve element and pushed onto the drive shaft along with the sleeve element.
  • the balancing weight can be attached to the rear end of the drive shaft, face down, using the circular cylinder section.
  • the balancing weight can have its greatest thickness, measured along the longitudinal axis, in the extension of the drive shaft.
  • the balancing weight can be designed as a single piece. This one-piece design further simplifies the manufacturing process.
  • each vacuum pump comprises a pump housing and an electronics housing, wherein the pump system, the drive shaft and the drive motor are housed in the pump housing and the electronics housing is a component separate from the pump housing, which is connected to the pump housing, in particular detachably, wherein the electronics housing comprises a housing part and an electronics assembly, wherein the scroll vacuum pumps differ from one another with respect to the electronics assembly, and wherein the housing parts of the different scroll vacuum pumps are identical in construction.
  • Different electronic configurations can result, for example, from scroll vacuum pumps being equipped with different drive motors.
  • Different drive motors may require different electronic, electrical, and/or electromechanical components and/or a different number of such components.
  • Using one housing component for different electronic equipment is equivalent to a modular system for the different scroll vacuum pumps, which simplifies manufacturing and thus reduces costs.
  • the housing parts can each be made of cast material.
  • housing components of the different scroll vacuum pumps are structurally identical does not preclude the possibility that, according to advantageous embodiments, the housing components of the different scroll vacuum pumps may differ with regard to post-processing to adapt them to the respective electronic components.
  • This post-processing could, for example, consist of adapting one or more openings to the geometry of connectors or cables of the electronic components that are to be accommodated in the housing component or routed through a wall of the housing component.
  • Post-processing could also, for example, consist of completely or partially removing existing walls within the housing component by milling in order to adapt the available installation space to the respective space requirements of the electronic components.
  • the drive motor comprises a radially inner motor rotor and a radially outer motor stator, wherein the motor rotor has a front end face and a rear end face, and wherein only one of the two end faces is provided with axially projecting cooling projections.
  • cooling protrusions may be designed and arranged such that they each act as balancing weights. These balancing weights can then collectively form an effective balancing mass with respect to the axis of rotation. It was surprisingly found that with only one-sided arrangement of these protrusions, both a sufficient cooling effect and a sufficient balancing effect can be achieved.
  • the front end face of the motor rotor which is not provided with such projections, can therefore be positioned further inwards than in a motor rotor that is provided with such projections on its front end face.
  • the cooling protrusions can be rib-shaped or plate-shaped.
  • the cooling projections can be designed to have at least two different sides that differ in width, with the wider side pointing at least substantially circumferentially and the narrower side at least substantially radially. This allows the cooling projections to generate relatively strong airflow, similar to blades, thus creating a relatively strong "whirling or stirring effect," which promotes heat dissipation and therefore the cooling effect.
  • the cooling projections can be curved such that one concave side points at least substantially circumferentially, in the direction of rotation of the motor rotor. This can further increase the scooping effect of the cooling protrusions.
  • the stationary spiral component comprises a spiral arrangement with spiral walls and a spiral base, and a support for the spiral arrangement, wherein an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the support is formed in the support, and wherein at least two bypass channels are formed in the support in addition to the outlet channel, each leading from a bypass opening formed in the spiral base to an outlet of the support and in each of which at least one pressure relief valve is arranged.
  • bypass channels may be designed to lead directly to the outflow tract. In such cases, one or more additional outlets for the bypass channels are not required.
  • bypass channels are provided. It has been found that two bypass channels are sufficient to achieve a particularly favorable ratio of power consumption to suction capacity.
  • each pressure relief valve is arranged in each bypass channel. It has been found that one pressure relief valve per bypass channel is sufficient to achieve a particularly favorable ratio of power consumption to pumping speed.
  • the stationary spiral component is formed in one piece, with the side of the support facing the movable spiral component forming the spiral base of the spiral arrangement.
  • the two bypass openings may be arranged offset from each other in the circumferential direction, in particular by an angle of less than 180°, preferably by an angle between 90° and 180°.
  • the two bypass openings are arranged at different radial positions or at least at substantially the same radial position with respect to a central axis of the stationary spiral component running parallel to the axis of rotation of the drive shaft.
  • the inlet opening of the exhaust channel is arranged radially further inwards than both bypass openings with respect to a central axis of the stationary spiral component running parallel to the axis of rotation of the drive shaft.
  • the inlet opening of the exhaust channel may be arranged at least substantially on the central axis.
  • the stationary spiral component comprises a spiral arrangement with spiral walls and a spiral base, and a support for the spiral arrangement, wherein an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the support is formed in the support, and wherein at least two bypass channels are formed in the support in addition to the outlet channel, each leading from a bypass opening formed in the spiral base to the outlet channel.
  • bypass channels By directing the bypass channels to the outlet channel, it is not necessary to provide one or more additional outlets for the bypass channels in the carrier.
  • the outlet of the carrier includes a radial outlet opening and the outlet channel includes a radially extending channel section leading to the radial outlet opening.
  • both bypass channels lead to the radial channel section.
  • one bypass channel leads to the radial channel section and the other bypass channel leads to another channel section of the outlet channel, which leads from the inlet opening to the radial channel section.
  • the further channel section of the outlet channel runs parallel to a central axis of the stationary spiral component which runs parallel to the axis of rotation of the drive shaft and in particular lies on the central axis.
  • At least one pressure relief valve is arranged in each of the bypass channels.
  • the stationary spiral component comprises a spiral arrangement with spiral walls and spiral base as well as a support for the spiral arrangement, wherein an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the support is formed in the support, and wherein the outlet of the support comprises an axial outlet opening.
  • An axial outlet is particularly advantageous when the outlet is to be used for an additional function that requires extra installation space.
  • an additional device such as a leak detector
  • this additional function would require additional radial installation space, which is often unavailable.
  • An axial outlet can be implemented in many cases without any drawbacks. Consequently, an additional device, such as a leak detector, can be connected to the axial outlet of the carrier without requiring additional radial installation space. This allows the scroll vacuum pump to be designed with a more compact profile.
  • a vacuum device can be connected or is connected to the axial outlet opening, the vacuum device being in particular a leak detection device.
  • the outlet channel can comprise a radially extending channel section and at least one further channel section leading from the radially extending channel section to the axial outlet opening.
  • the further channel section can run parallel to a central axis of the stationary spiral component that runs parallel to the axis of rotation.
  • the carrier may include a radial outlet in addition to the axial outlet, with both outlets being selectively closable, allowing the carrier to be operated with only a single outlet.
  • the outlet not currently in use can be closed, for example, with a plug.
  • an opening may be provided in surrounding components, such as a cover, through which the respective outlet or the plug temporarily closing it is accessible.
  • the outlet channel can comprise a radially extending channel section leading to the radial outlet opening, wherein a further channel section leads to the axial outlet opening from a branch point of the radial channel section located between the inlet opening and the radial outlet opening. It can also be provided that a channel section leading to a junction point, in particular located between the inlet opening and the branch point leading to the axial outlet opening, originates from a bypass opening formed in the spiral base.
  • the axial outlet opening can be formed on a radially outer region of the support.
  • the radial position Ra of the axial outlet opening can be Ra > 0.5 * r, especially Ra > 0.7 * r, especially Ra > 0.8 * r, where r is the radius of the support.
  • the movable spiral component comprises a spiral arrangement with spiral walls, spiral grooves bounded by these walls, and a spiral base forming the bottom of the spiral grooves, as well as a support for the spiral arrangement cooperating with the eccentric section of the drive shaft
  • the stationary spiral component comprises a spiral arrangement with spiral walls, spiral grooves bounded by these walls, and a spiral base forming the bottom of the spiral grooves, as well as a support for the spiral arrangement
  • the spiral grooves have a groove depth measured from the apex of the spiral walls to the spiral base along a central axis of the movable spiral component running parallel to the axis of rotation of the drive shaft, and a groove width measured perpendicular to the central axis
  • the ratio of groove depth to groove width is in the range of 3.7 to 4.2, in particular from 3.8 to 4.1, and more preferably from 3.
  • the pumping system can achieve a comparatively high suction speed.
  • the ratio of groove depth to groove width is constant over the entire spiral arrangement.
  • the groove depth can be, for example, 50 mm. Alternatively, the groove depth can be 52 mm. This results in even higher ratios of groove depth to groove width – with the same groove width – which are, for example, in the range of 4.0 and 4.2.
  • the movable spiral component comprises a spiral arrangement with spiral walls, spiral grooves bounded by these and the spiral base forming their bottom, and a support for the spiral arrangement cooperating with the eccentric section of the drive shaft
  • the stationary spiral component comprises a spiral arrangement with spiral walls and a spiral base, and a support for the spiral arrangement, wherein in the movable spiral component and/or in the stationary spiral component one or more radially outer spiral walls have a thickness greater than the thickness of radially inner spiral walls.
  • the increased thickness allows for greater stability of the radially outer spiral wall(s). This is particularly advantageous when the spiral wall in question is interrupted in the circumferential direction.
  • the support may be provided with a gas inlet in a radially outer area, in the area of which the spiral wall or spiral walls are interrupted in the circumferential direction, wherein at least one, preferably each, of the circumferentially interrupted spiral walls is provided with the greater thickness.
  • the gas inlet can comprise a recess extending radially inwards from the outer edge of the carrier, preferably in a V-shape, or be formed by such a recess.
  • the spiral wall or each spiral wall of greater thickness lies on a circle.
  • the movable spiral component comprises a spiral arrangement with spiral walls, spiral grooves bounded by these walls and a spiral base forming their bottom, as well as a support for the spiral arrangement cooperating with the eccentric section of the drive shaft
  • the stationary spiral component comprises a spiral arrangement with spiral walls and a spiral base as well as a support for the spiral arrangement
  • the spiral walls of the movable spiral component and/or the spiral walls of the stationary spiral component are provided with a sealing element at their end facing away from the spiral base, and wherein, at least in the case of one spiral wall, the sealing element extends to the end of the spiral wall reaching towards a gas inlet of the pump system.
  • the sealing element may be of an elongated shape and extend continuously from a radially outer end to a radially inner end.
  • the sealing element has a length of more than 150 cm, in particular of approximately 160 cm.
  • the sealing element can be made of a thermoplastic material, in particular PTFE (polytetrafluoroethylene), or comprise such a material.
  • PTFE polytetrafluoroethylene
  • the sealing element is received in a groove of the respective spiral wall.
  • the gas inlet of the pump system can include a recess formed in the support of the movable spiral component.
  • the recess extends from the outer edge of the support and preferably in a V-shape radially inwards.
  • the scroll vacuum pumps according to the invention as illustrated, belong to a scroll vacuum pump system with several scroll vacuum pumps of different designs.
  • the scroll vacuum pumps of this system differ from one another in several respects, but have the same basic structure, which is described below.
  • Each scroll vacuum pump comprises a pumping system with a stationary scroll element 11 and a movable scroll element 13, which interact to pump effectively during operation. Furthermore, each scroll vacuum pump includes a drive shaft 16 rotating about an axis of rotation 15 during operation, with an eccentric section 19 for driving the movable scroll element 13. Each scroll vacuum pump is also equipped with an electric drive motor 21, 23, which serves to rotate the drive shaft 17 about the axis of rotation 15.
  • the electric drive motor comprises a radially inner motor rotor 21 and a radially outer motor stator 23.
  • the drive shaft 17 of each scroll vacuum pump is rotatably mounted on the pump housing 41 at two axially spaced bearing points 25, 27.
  • the front rolling bearing 25 is designed as a fixed bearing, while the rear rolling bearing 27 is designed as a floating bearing.
  • a special feature of all scroll vacuum pumps in the system is a cantilever configuration, in which the two bearing points 25, 27 are located on the side of the drive motor 21, 23 facing the eccentric section 19 of the drive shaft 17. All bearing points 25, 27 are thus located within the pump housing 41 in front of the drive motor 21, 23.
  • the eccentric section 19 is integrally connected to the front end of the drive shaft 17, and the drive motor 21, 23 is located on the rear end of the drive shaft 17.
  • the drive motor 21, 23 can be pushed onto the rear end of the drive shaft 17 using this basic structure, which simplifies the assembly and replacement of the drive motor or parts of the drive motor.
  • the balancing concept for balancing the rotating system which includes, among other things, the drive shaft 17 and the movable spiral component 13, comprises, in each scroll vacuum pump disclosed herein, a front balancing weight 29 and a rear balancing weight 31, both attached to the drive shaft 17 by means of a screw 38.
  • the front balancing weight 29 is located in the area of the front end of the drive shaft 17 and the eccentric section 19.
  • the rear balancing weight 31 is located in front of the rear bearing point 27 and thus in front of the drive motor.
  • scroll vacuum pumps according to Fig. 2a and 2b as well as Fig.
  • the rear balancing weight 31 is formed by a pressure element which is mounted on the end face of the rear end of the drive shaft 17. This also applies to the scroll vacuum pump according to... Fig. 1a and 1b is mounted on the front side of the rear end of the drive shaft 17 Pressure element 87 ( Fig. 1b ) provided, which, however, is rotationally symmetrical and therefore does not serve as a balancing weight.
  • the pressure elements 87 and 31 are each connected to the drive shaft 17 by a central screw 83. This clamps the motor rotor 21 between the rotationally symmetrical pressure element 87 or the pressure element 31, which also serves as a balancing weight, on the one hand, and a support, this support being formed by a shoulder 17a on the drive shaft 17.
  • the drive shafts 17 of the different scroll vacuum pumps are identical in construction. Despite different motor sizes within the system, only one drive shaft 17 is therefore required for the system.
  • the drive motors of the scroll vacuum pumps of different designs differ, among other things, with regard to the inner diameter of the radially inner motor rotor 21. This is shown, for example, by comparing Fig. 2b and Fig. 3b
  • sleeve elements 33 with different wall thicknesses are provided, each arranged between the drive shaft 17 and the motor rotor 21.
  • a wave spring is arranged between the sleeve element 33 and the loose bearing 27.
  • a pin-shaped positioning element 85 serves as a positioning aid for the respective pressure element 87 or 31, as an anti-rotation device when tightening the central screw 83, and as a circumferentially effective positive-locking connection between the motor rotor 21 or the sleeve element 33 on the one hand and the drive shaft 17 on the other.
  • This positioning pin 85 extends parallel to the axis of rotation 15 of the drive shaft 17 and is arranged at a radial distance from the axis of rotation 15.
  • the positioning pin 85 can be inserted axially into a recess formed jointly by the drive shaft 17 on the one hand and the motor rotor 21 or the sleeve element 33, which is non-rotatably connected to the motor rotor 21, on the other.
  • the positioning pin 85 protrudes axially to the rear and its rear end is received in a positioning receptacle which is designed as a blind hole on the side of the pressure element 87 or 31 facing the rear end of the drive shaft 17.
  • the clamping of the motor rotor 21 by means of the pressure element 87 or 31 is effected by the pressure element 87 or 31 being connected to the axially rear end of the sleeve element 33 (cf. Fig. 1a and 1b as well as Fig. 2a and 2b ) or with the motor rotor 21 (see Fig. 3a and 3b ) works together.
  • a radial groove 101 is provided at the front end of the motor rotor 21 in the assembled state, which serves as a marking for the assembler and thus indicates the installation orientation of the motor rotor 21.
  • the drive motor is arranged completely within the pump housing 41, i.e., the The drive motor is surrounded circumferentially by the pump housing 41 along its entire axial length. At its rear end, the pump housing 41 is closed by means of a separate motor cover 103.
  • a special feature of the scroll vacuum pumps according to Fig. 2a and 2b as well as Fig. 3a and 3b The difference lies in the fact that the motor covers 103 are identical despite the different motor sizes.
  • the drive motor is smaller than in the scroll vacuum pump according to Fig. 2a and 2b
  • the pump housing 41 accordingly has a greater radial wall thickness in this area.
  • the identical motor cover 103 can be screwed onto the rear end of the motor housing 41.
  • engine cover 103 is laser engraved (not shown). This allows for more flexible design compared to printing.
  • the drive motor is not completely enclosed within the pump housing 41.
  • the motor cover 103 has a receiving space with an axial depth dimensioned such that the rear end of the drive motor, projecting axially backwards from the pump housing 41, is received in this receiving space.
  • the motor rotor 21 is provided with axially projecting cooling projections 47 on its rear end face.
  • these cooling projections 47 are arranged only on this rear end face of the motor rotor 21, and the front end face of the motor rotor 21 does not have any such cooling projections. This advantageously saves axial installation space.
  • the cooling projections 47 are designed to act as balancing weights.
  • the stationary spiral component 11 also referred to as the spiral housing, is screwed onto the front end of the pump housing 41 and is surrounded by a hood 105, which is also attached to the pump housing 41 and in which a fan 95 is also housed.
  • a special feature of the scroll vacuum pump system is that it uses a set of 95mm fans with varying power outputs, all of which have the same dimensions.
  • the system includes not only 95mm fans with a 24V supply voltage, but also those with supply voltages of, for example, 48V or 230V. This increases the system's versatility.
  • the movable spiral component 13 is connected to the eccentric section 19 via a flange bearing 91 designed as a rolling bearing.
  • a thrust washer 93 is located axially between the movable spiral component 13 and the eccentric section 19.
  • a shim 94 is located between a circumferential shoulder of the drive shaft 17 at the transition to the eccentric section 19 and the flange bearing 91. Correct circumferential alignment between the stationary spiral component 11 and the pump housing 41 is ensured by a positioning pin 97.
  • the pump housing 41 is supported on a base formed by an electronics housing 43.
  • the electronics housing 43 comprises a housing part 43a, which has feet 107 on its underside. made of rubber, which are recessed and thus accommodated in depressions formed on the underside.
  • the electronic housings 43 of the different scroll vacuum pumps differ, among other things, with regard to a housing cover 43b that forms the lower cover of the housing part 43a. This will be discussed in more detail elsewhere.
  • Each of the electronic housings 43 contains an electronic assembly 45 comprising electronic, electrical, and electromechanical components that serve, among other things, to supply power and control the respective scroll vacuum pump.
  • the scroll vacuum pumps of the scroll vacuum pump system disclosed herein also differ from one another with respect to their electronic assembly 45.
  • a special feature of the scroll vacuum pump system disclosed herein is that the housing parts 43a of the different scroll vacuum pumps are identical in construction.
  • the housing parts 43a are each designed as a cast part. Consequently, despite different electronic configurations 45 for the individual scroll vacuum pumps, only one housing part 43a is required.
  • the housing components 43a differ slightly with regard to post-processing for adaptation to the respective electronic equipment 45.
  • post-processing serves, for example, to adapt openings to the geometry of connectors or cables of the electronic equipment 45, which must be accommodated in the housing component or routed through a wall of the housing component.
  • post-processing can consist of partially or completely removing inner walls of a respective housing component 43a by milling in order to accommodate the [missing information - likely a specific component or component]. Housing part 43a to adapt the available installation space to the respective space requirements of the electronic equipment 45.
  • the pump housing 41 is screwed to the electronics housing 43.
  • the area of the scroll vacuum pump where a gas ballast valve is located is shown in the center.
  • the gas ballast valves 79 are designed differently in the individual scroll vacuum pumps.
  • the gas ballast valve 79 is equipped with a sealing cap 81.
  • the gas ballast valve 79 each has a rotary knob 82 for making adjustments.
  • the gas to be pumped enters the pumping system comprising the two spiral components 11, 13 via the inlet flange 77 and is expelled via the outlet flange 78.
  • the two scroll vacuum pumps after Fig. 1a and 1b Components 2a and 2b are each equipped with a three-phase asynchronous motor 21, 23 for driving the drive shaft 17.
  • the two scroll vacuum pumps differ, among other things, in their size.
  • the pump system with the two spiral components 11, 13 and the asynchronous motor with rotor 21 and stator 23 in the scroll vacuum pump according to Fig. 1a and 1b a smaller diameter than the scroll vacuum pump Fig. 2a and 2b , whereby – as already mentioned – the two drive shafts 17 are identical in construction and therefore have the same size.
  • the diameter of the drive shaft 17 in the area of the sleeve element 33 is 24 mm.
  • the appropriately dimensioned sleeve element 33 which is pressed onto the motor rotor 21, serves to adapt the diameter of the drive shaft 17 in this area to the respective inner diameter of the motor rotor 21.
  • the pump system also has a diameter that is larger than that of the scroll vacuum pump pump system according to Fig. 1a and 1b .
  • the scroll vacuum pump system disclosed herein is not limited to these electric drive motors.
  • a synchronous reluctance motor can also be provided as the rotary drive for the drive shaft 17.
  • the modular design principle provided for in the present disclosure is particularly advantageous with regard to the variability desired in practice, due to its diverse adaptability.
  • the balancing system for balancing the rotating system which in particular comprises the drive shaft 17 and the movable spiral component 13 of the pump system, includes a front balancing weight 29 and a rear balancing weight 31.
  • the rear balancing weight 31 is located in front of the rear bearing point 27.
  • the pressure element 87 for clamping the motor rotor 21 is designed to be rotationally symmetrical.
  • the pressure element mounted on the end face of the rear end of the drive shaft 17 simultaneously forms the rear balancing weight 31.
  • the front balancing weight 29 is made of a material with a higher density than the material of the rear balancing weight 31, due to the comparatively limited installation space available in the area of the eccentric section 19 of the drive shaft 17. Accordingly, as outlined in this disclosure, the front balancing weight 29 is made of brass and the rear balancing weight 31 of steel.
  • the two balancing weights 29, 31 are made of the same material, namely steel.
  • the eccentric drive formed by the drive shaft 17 and the eccentric section 19 is located inside the pump housing 41 and is surrounded by a deformable sleeve in the form of a bellows 89.
  • the bellows 89 serves, on the one hand, to seal the eccentric drive against the intake area of the scroll vacuum pump and, on the other hand, to prevent the movable spiral component 13 from rotating.
  • the bellows 89 is attached to the side of the movable spiral component 13 facing the drive.
  • the rear end of the bellows 89 is attached to a housing base inside the pump housing 41 by means of screws.
  • Fig. 3c shows in sections perpendicular to the axis of rotation 15 of the scroll vacuum pump Fig. 3a and 3b in the left-hand illustration (section BB in Fig. 3b ) a view of the rear balancing weight 31 and in the right-hand illustration (section AA in Fig. 3b ) the arrangement of a balancing section of the front balancing weight 39 in relation to the bellows 89, the flange bearing 91 and the eccentric section 19 of the drive shaft 17.
  • FIG. 3c This shows that the rear balancing weight, which is screwed to the drive shaft 17 by means of the central screw 83 and clamps the motor rotor 21 in the manner described above, widens conically radially outwards. While maintaining the basic geometry of this rear balancing weight 31, it can be relatively easily adapted to different drive motors during its manufacture.
  • the balancing section of the front balancing weight 29, shown in cross-section is partially ring-shaped such that the inner radius is adapted to the outer radius of the flange bearing 91. This ensures optimal use of the available installation space.
  • the left-hand illustration below shows the rear balancing weight 31 in a side view. Among other things, the bores 39a for the central screw 83 and the blind hole 39b for receiving the positioning pin 85 are shown.
  • Fig. 3d The two illustrations on the left show the construction of the front balancing weight 39, which is formed in one piece and - as mentioned above - can be made of different materials, in particular materials of different densities such as brass on the one hand and steel on the other.
  • FIG. 3d shows an enlarged section of the Fig. 3b the arrangement of the front balancing weight 29 in the area of the eccentric section 19 of the drive shaft 17 and the flange bearing 91.
  • the balancing weight 29 comprises three balancing sections 35, which, in the installed state, follow one another along the axis of rotation 15 of the drive shaft 17.
  • Each balancing section 35 has a partial ring shape, with each balancing section, in the installed state, having its opening 37 facing and encompassing the drive shaft 17.
  • balancing sections 35 differ from each other in the width of their openings 37. This is evident both from the perspective view in the upper left. Fig. 3d as well as the top view below left in Fig. 3d to be taken.
  • this front balancing weight 29 is defined by a pitch circle with a radius constant along the central axis.
  • a balancing section 35 with radius R1 encompasses a section 17b of the drive shaft 17, which lies immediately behind the eccentric section 19.
  • the adjacent balancing section 35 with radius R2 encompasses the flange bearing 91.
  • the third balancing section 35 is located in an axial area where the heads of fastening screws for attaching the flange bearing 91 to the movable spiral component are located. 13 are arranged. The radius of this balancing section 35 is therefore significantly larger than the radii R1, R2 of the other two balancing sections.
  • the two radii R1 and R2 are not the same size, and furthermore, the two partial circles are not arranged concentrically, as can be seen in particular in the illustration below left in Fig. 3d can be extracted.
  • the center of the rear balancing section 35 in the installed state lies on the axis of rotation 15, since this balancing section encompasses the central section 17b of the drive shaft 17.
  • the other center of the pitch circle with the larger radius R2 lies accordingly outside the openings 37 of the balancing sections 35.
  • This design of the balancing weight 29 has the advantage that, without increasing the outer diameter, the center of mass of the central balancing section 35 encompassing the flange bearing 91 can be positioned further radially outwards than would be the case if the two centers coincided. In other words, a higher eccentric mass can be achieved for this central balancing section 35 without increasing the outer dimensions of the balancing weight 29.
  • FIG. 3e Figure 31 on the left shows three views of the rear balancing weight 31, illustrating its construction.
  • the balancing weight 31 is manufactured in one piece.
  • the balancing weight 31 comprises two balancing sections 39 that widen conically radially outwards. Each balancing section 39 widens in a V-shape, defining an opening angle of approximately 20°.
  • the balancing weight 31 comprises a circular cylinder section 40, the central axis of which, in the installed state, coincides with the axis of rotation 15 of the drive shaft 17.
  • the thickness of this circular cylinder section 40, measured along the axis of rotation 15, is significantly smaller than the thickness of any balancing section 39.
  • Fig. 3b When installed, the balancing weight 31, with its circular cylinder section 40, faces the rear end of the drive shaft 17. (Following the example of the scroll vacuum pump%)
  • Fig. 2a and 2b It can be seen that the balancing weight 31 with its circular cylinder section 40 is inserted into the sleeve element 33.
  • the balancing section 39 located between the circular cylinder segment 40 and the outer balancing section 39 is shortened in the radial direction compared to the outer balancing section 39, but is otherwise congruent to it and overlapping. Both balancing sections 39 thus extend in a V-shape, i.e., in a projection along the axis of rotation 15, the outlines of the two balancing sections 39 are bounded by two V-shaped straight lines diverging radially outwards. Furthermore, the outlines of the two balancing sections 39 are bounded by a radially inner circular segment, which has a smaller radius than a respective radially outer circular segment that forms the radial outer boundary of the respective outline.
  • the rear balancing weight 31 allows for simple and cost-effective manufacturing as well as easy adaptation to the respective drive motor. However, adaptation is not always absolutely necessary.
  • the rear balancing weight 31 can be designed in such a way that it is compatible with both the asynchronous motor of a scroll vacuum pump Fig. 2a and 2b , in particular with the sleeve element 33, as well as with the IPM motor of a scroll vacuum pump according to Fig. 3a and 3b can work together.
  • a manufacturing arrangement 109 is shown in which several balancing weights 31 are arranged in a rosette pattern on a circle. This illustrates that a plurality of balancing weights 31 can be manufactured by cutting them from a flat disc of material and then machining them individually.
  • Fig. 4 shows a view of the rear end of a scroll vacuum pump.
  • Fig. 1a and 1b with the motor cover 103 removed. This reveals the rear end face of the motor rotor 21, which is surrounded by part of the motor stator 23.
  • the motor rotor 21 is only provided with axially projecting cooling protrusions 47 on this rear end face.
  • These cooling protrusions 47 are designed and arranged in such a way that they act as balancing weights.
  • the balancing concept of the scroll vacuum pump according to Fig. 1a and 1b This includes not only the front balancing weight 91 and the rear balancing weight 31 arranged in front of the second bearing point 27, but also the balancing weights 47 arranged on the rear end face of the motor rotor 21, which also serve for cooling.
  • These balancing weights or cooling projections 47 are plate-shaped and arranged such that their wider side faces circumferentially. This allows the cooling projections 47 to generate comparatively strong air movements during operation, similar to blades, in order to promote heat dissipation.
  • the Fig. 5a The electronics housing 43 of the scroll vacuum pump shows Fig. 3a and 3b , whose drive motor is a single-phase IPM motor with an operating voltage of 24V/DC.
  • the electronic equipment 45 includes a Sub-D connector, a standby switch, an on/off switch, and USB ports.
  • Fig. 5b The electronic housing 43 of the scroll vacuum pumps shows Fig. 1a and 1b as well as Fig. 2a and 2b , each featuring a three-phase asynchronous motor as its drive motor. These asynchronous motors can be operated with an operating voltage of up to 480V/AC.
  • Three-phase asynchronous motors require a higher protection class (especially IP44) than the single-phase IPM motor, for which a lower protection class (especially IP40) is sufficient. These different protection classes result in different concepts for sealing the electronics housing 43.
  • the electronic housing 43 for the scroll vacuum pump with single-phase IPM motor according to Fig. 5a
  • a housing cover 43b for example made of aluminum, without its own seal, is sufficient as a cover.
  • a recessed arrangement is provided for the housing cover 43b in the housing part 43a, whereby surfaces recessed inwards from the underside of a surrounding outer wall serve as a bearing for the housing cover 43b and are each provided with a sealing material. Due to its recessed arrangement, the housing cover 43b is not visible from the side.
  • housing cover 43b is placed here on the underside of housing part 43a.
  • the underside is – like the recessed contact surfaces of housing part 43a according to Fig. 5a - provided with a sealing material, wherein the inside of the housing cover 43b is additionally fully covered with a sealing material consisting, for example, of cellular rubber.
  • the electronic housings 43 also differ in their respective electronic equipment 45.
  • the electronics housing 43 is designed according to Fig. 5b fitted with a different mains plug 44, for example a mains plug of type Harting.
  • the electronic housing 43 differs according to Fig. 5b from the electronic housing 43 according to Fig. 5a due to the absence of the Sub-D connector, the standby switch, the on/off switch, and the USB ports.
  • the openings provided for these in housing component 43a are covered, for example, with a film. This allows for the electronic housing 43 according to Fig. 5b an IP protection class can be enabled.
  • FIG. 6a Figure 1 shows an overview of various views of a stationary spiral component 11, also referred to as a spiral casing, of a scroll vacuum pump according to the invention.
  • the three upper illustrations in Fig. 6a are enlarged in Fig. 6b shown, whereas the three lower illustrations of the Fig. 6a enlarged in Fig. 6c shown.
  • FIG. 7a shows an overview with various representations of a movable spiral component 13, also referred to as an orbiter, for the spiral casing 11 according to the Fig. 6a , 6b and 6c .
  • the stationary spiral component 11 comprises a spiral arrangement with spiral walls 49 and a spiral base 51, as well as a support 53 for the spiral arrangement.
  • the two radially outer spiral walls 49 lie on concentric circles and are interrupted in the circumferential direction. This creates a parallel pumping structure consisting of parallel pumping channels formed by the respective spiral grooves 50, which transition into a helical pumping channel formed by a helically extending spiral groove 50 and bounded by a helically extending spiral wall 49.
  • the second semicircular spiral wall 49 viewed from the radial outside, has a greater thickness WD2 than the spirally extending spiral wall 49, which has a wall thickness WD1 in its radially inner section.
  • WD2 3.71 mm
  • WD1 3.47 mm.
  • the stability of the circumferentially interrupted circular spiral wall 49 is increased by this greater thickness WD2.
  • the spiral walls 49 are each provided at their end furthest from the spiral base 51 with an elongated sealing element 75, also referred to as a tip seal.
  • the sealing element 75 for the outermost spiral wall 49 is comparatively long, as it extends to the innermost spiral wall 49 and reaches the innermost spiral wall 49 in the region of the central axis of the spiral housing. 11.
  • the end of this spiral wall 49 is located at point 11.
  • a special feature of this long sealing element 75 is that it extends radially outwards along the semicircular spiral wall 49 to the end 76 of this spiral wall 49, which reaches a gas inlet 67 (see figure 1).
  • Fig. 7a and 7b of the pump system.
  • These openings 55, 61a, 63a are each formed in the spiral base 51.
  • the two bypass openings 61a, 63a are arranged circumferentially offset from each other and are located on the same radius with respect to a central axis of the spiral housing 11.
  • openings 55, 61a, 63a, openings 56a, 61c, 63c are formed on the side of the carrier 53 facing away from the spiral arrangement. These openings 56a, 61c, 63c serve to accommodate valves, which will be discussed in more detail elsewhere.
  • an axial outlet opening 65 is formed radially further outwards, which can optionally either be closed or form an axial gas outlet of the spiral housing 11 and thus of the pumping system of the scroll vacuum pump.
  • the central inlet opening 55 leads to an outlet channel 59 designed as a straight bore, which opens at the radial outlet 57 of the spiral housing 11.
  • One bypass opening 63a leads directly to this outlet channel 59.
  • the channel section leading from there to the radial outlet 57 is therefore not only a section of the outlet channel 59, but also forms a bypass channel 63 for gas originating from the bypass opening 63a.
  • bypass channel 61 leads from the further bypass opening 61c to the outlet channel 59.
  • This bypass channel 61 is part of a straight bore 64, which is created to produce the bypass channel 61.
  • This bore 64 and the outlet channel 69 run at an angle to each other, which corresponds to the angular offset of the two bypass openings 61c, 63c in the circumferential direction.
  • the groove depth NT is comparatively large.
  • the groove depth is 50 mm.
  • the ratios are 3.93 and 3.87, respectively.
  • a groove depth of 52 mm can alternatively be provided. This results in even larger ratios of groove depth to groove width.
  • the movable spiral component 13 according to Fig. 7a and 7b
  • the assembly also comprises a spiral arrangement with spiral walls 69 and a spiral base 71, as well as a plate-shaped support 73 for the spiral arrangement.
  • the two radially outer spiral walls 69 run on concentric circles and are interrupted circumferentially in the area of a gas inlet 67.
  • a radially inner spiral wall 69 runs in a spiral shape.
  • the spiral walls 69 are each provided with a sealing element 75 (tip seal) at their end facing away from the spiral base 71.
  • these spiral walls 69 are designed with a thickness WD2 that is greater than the thickness WD1 of the spiral spiral wall 69.
  • WD2 3.71 mm
  • WD1 3.46 mm.
  • the radially outer spiral groove 70 between the two semicircular spiral walls 69 has a groove width NB2, while the spirally extending spiral groove 70 bounded by the spiral spiral wall 69 has a groove width NB1.
  • NB2 12.92 mm
  • NB1 12.58 mm.
  • NT 50 mm
  • a groove depth of 52 mm can alternatively be provided. This would result in even larger ratios of groove depth to groove width.
  • FIG. 8a An overview shows various views of the spiral casing. Fig. 6a , 6b and 6c and the orbiter of Fig. 7a and 7b comprehensive pumping system of the scroll vacuum pump according to Fig. 3a and 3b The pumping system of scroll vacuum pumps according to Fig. 1a and 1b as well as Fig. 2a and 2b is appropriately trained.
  • Fig. 8b shows an enlarged representation in the upper left (section AA) of Fig. 8a .
  • Fig. 8c shows an enlarged view of the top right (section BB) of Fig. 8a .
  • Fig. 8d shows an enlarged representation in the lower right (section CC) of Fig. 8a .
  • Fig. 8b The interaction of the interlocking spiral walls 49, 69, which enclose crescent- or sickle-shaped volumes in sections, can be seen.
  • gas enters via the gas inlet 67, which is located in Fig. 8b only hinted at with regard to his position (see, for example, Fig. 7b ), inflowing gas to the center of the pumping system and via the inlet opening 55 in the outlet channel 59 when the outlet valve 56 (see e.g. Fig. 8d ) opens at sufficiently high pressure.
  • the pumped gas passes through the outlet channel 59 to the radial outlet 57 and thus to the outlet flange 78, if - as in Fig. 8d shown - the axial outlet opening 65 is closed by means of a plug 66.
  • the radial outlet 57 can be closed and the plug 66 removed to create an axial outlet from the pump system.
  • Fig. 9 shows a concept that is referred to as a conical gap design and can be provided in the scroll vacuum pumps according to the present disclosure in the area where the spirally extending spiral wall 49 of the stationary spiral component interacts with the spirally extending spiral wall 69 of the movable spiral component.
  • the path of the movable spiral wall 69 in the pumping direction P relative to the stationary spiral walls 49 is shown in a development.
  • the upper stationary spiral wall 49 is located radially further outwards than the lower stationary spiral wall 49, which is indicated by the arrow r (radial direction).
  • the numerical values each represent the radial distance (in mm) between the opposing wall surfaces, i.e., the size of the radial gap between the wall surfaces.
  • the scroll vacuum pump is not in operation, i.e., the drive shaft is not rotating and the orbiter, and thus its spiral wall 69, is stationary.
  • the spiral casing and the orbiter are at ambient temperature.
  • the special feature described here is that in this initial state the movable spiral wall 69 is arranged in such a way that the gaps between the movable spiral wall 69 and the fixed spiral walls 49 each have a conical shape in the pumping direction P.
  • the path of the movable spiral wall 69 is chosen such that, when the scroll vacuum pump is running, i.e., during operation, the deformation of the movable spiral wall 69 reduces the taper of the gaps, as can be seen from the distance values, according to state II. In state II, the movable spiral wall 69 therefore runs almost parallel to the two stationary spiral walls 49. The deformation of the movable spiral wall 69 results from the higher temperatures and the movement of the orbiter.
  • Fig. 10 shows various external views of a scroll vacuum pump Fig. 3a and 3b .
  • the pump housing 41 sits on the electronics housing 43 and is closed on the motor side by the motor cover 103 and on the opposite side by the hood 105.
  • the outlet flange 78 and the inlet flange 77 are also shown.
  • this pump housing 41 The special feature of this pump housing 41 is that the inlet flange 77, also referred to as the suction flange, is set back at this axial position relative to the highest point of the pump housing 41. This saves on overall height. This is particularly advantageous when an alternative flange (not shown) is used, which is formed by an angle flange.
  • Such a recessed arrangement of the inlet flange 77 is also used in the scroll vacuum pump according to Fig. 2a and 2b planned.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (15)

  1. Pompe à vide à spirales, comprenant :
    - un système de pompage (11, 13) comprenant un composant spiralé fixe (11) et un composant spiralé (13) coopérant avec ce dernier pour le pompage,
    - un arbre d'entraînement (17) tournant autour d'un axe de rotation (15) pendant le fonctionnement, doté d'une portion excentrique (19) pour entraîner le composant spiralé mobile (13), et
    - un moteur électrique d'entraînement (21, 23) pour l'arbre d'entraînement (17),
    dans laquelle
    le composant spiralé fixe (11) comprend un agencement en spirale avec des parois spiralées (49) et une base spiralée (51), ainsi qu'un support (53) pour l'agencement en spirale, et
    un canal de sortie (59) qui mène d'une ouverture d'entrée (55), ménagée dans la base spiralée (51), vers une sortie (57) du support est réalisé dans le support (53),
    caractérisée en ce que
    en plus du canal de sortie (59), au moins deux canaux de dérivation (61, 63) sont réalisés dans le support (53), qui mènent chacun d'une ouverture de dérivation (61a, 63a), ménagée dans la base spiralée (51), vers une sortie (57, 65) du support (53) et dans chacun desquels est disposée au moins une soupape de surpression (61b, 63b).
  2. Pompe à vide à spirales selon la revendication 1,
    dans laquelle les canaux de dérivation (61, 63) mènent chacun au canal de sortie (59).
  3. Pompe à vide à spirales selon la revendication 1 ou 2,
    dans laquelle sont prévus précisément deux canaux de dérivation (61, 63).
  4. Pompe à vide à spirales selon l'une des revendications précédentes,
    dans laquelle précisément une soupape de surpression (61b, 63b) est disposée dans chaque canal de dérivation (61, 63).
  5. Pompe à vide à spirales selon l'une des revendications précédentes,
    dans laquelle le composant spiralé fixe (11) est réalisé d'un seul tenant, et la face du support (53) tournée vers le composant spiralé mobile (13) forme la base spiralée (51) de l'agencement en spirale.
  6. Pompe à vide à spirales selon l'une des revendications précédentes,
    dans laquelle les deux ouvertures de dérivation (61a, 63a) sont décalées l'une par rapport à l'autre dans le sens circonférentiel, en particulier d'un angle inférieur à 180°, de préférence d'un angle compris entre 90° et 180°.
  7. Pompe à vide à spirales selon l'une des revendications précédentes,
    dans laquelle les deux ouvertures de dérivation (61a, 63a) sont disposées à des positions radiales différentes ou au moins sensiblement à la même position radiale par rapport à un axe central du composant spiralé fixe (11) s'étendant parallèlement à l'axe de rotation (15) de l'arbre d'entraînement (17).
  8. Pompe à vide à spirales selon l'une des revendications précédentes,
    dans laquelle, par rapport à un axe central du composant spiralé fixe (11) s'étendant parallèlement à l'axe de rotation (15) de l'arbre d'entraînement (17), l'ouverture d'entrée (55) du canal de sortie (59) est disposée radialement plus à l'intérieur que les deux ouvertures de dérivation (61a, 63a).
  9. Pompe à vide à spirales selon la revendication 8,
    dans laquelle l'ouverture d'entrée (55) du canal de sortie (59) est disposée au moins sensiblement sur l'axe central.
  10. Pompe à vide à spirales, comprenant :
    - un système de pompage (11, 13) comprenant un composant spiralé fixe (11) et un composant spiralé (13) coopérant avec ce dernier pour le pompage,
    - un arbre d'entraînement (17) tournant autour d'un axe de rotation (15) pendant le fonctionnement, doté d'une portion excentrique (19) pour entraîner le composant spiralé mobile (13), et
    - un moteur électrique d'entraînement (21, 23) pour l'arbre d'entraînement (17),
    dans laquelle
    le composant spiralé fixe (11) comprend un agencement en spirale avec des parois spiralées (49) et une base spiralée (51), ainsi qu'un support (53) pour l'agencement en spirale, et
    un canal de sortie (59) qui mène d'une ouverture d'entrée (55), ménagée dans la base spiralée (51), vers une sortie (57) du support (53) est réalisé dans le support (53),
    caractérisée en ce que
    en plus du canal de sortie (59), au moins deux canaux de dérivation (61, 63) sont réalisés dans le support (53), qui mènent chacun d'une ouverture de dérivation (61a, 63a), ménagée dans la base spiralée (51), vers le canal de sortie (59).
  11. Pompe à vide à spirales selon la revendication 10,
    dans laquelle la sortie (57) du support (53) présente une ouverture de sortie radiale, et le canal de sortie (59) comprend une portion de canal s'étendant radialement et menant vers l'ouverture de sortie radiale.
  12. Pompe à vide à spirales selon la revendication 10 ou 11,
    dans laquelle les deux canaux de dérivation (61, 63) mènent chacun à la portion de canal radiale.
  13. Pompe à vide à spirales selon la revendication 10 ou 11,
    dans laquelle l'un des canaux de dérivation mène vers la portion de canal radiale et l'autre canal de dérivation mène vers une autre portion du canal de sortie (59), laquelle mène de l'ouverture d'entrée (55) vers la portion de canal radiale.
  14. Pompe à vide à spirales selon la revendication 13,
    dans laquelle l'autre portion du canal de sortie (59) s'étend parallèlement à un axe central du composant spiralé fixe (11) s'étendant parallèlement à l'axe de rotation (15) de l'arbre d'entraînement (17) et se trouve en particulier sur l'axe central.
  15. Pompe à vide à spirales selon l'une des revendications 10 à 14,
    dans laquelle au moins une soupape de surpression est disposée dans chacun des canaux de dérivation (61, 63).
EP24197612.5A 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales Active EP4506536B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP24197612.5A EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP23190388.1A EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197612.5A EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Related Parent Applications (2)

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EP23190388.1A Division EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP23190388.1A Division-Into EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

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EP4506536A1 EP4506536A1 (fr) 2025-02-12
EP4506536B1 true EP4506536B1 (fr) 2025-12-17
EP4506536C0 EP4506536C0 (fr) 2025-12-17

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ID=87567462

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Application Number Title Priority Date Filing Date
EP24197627.3A Active EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP25156934.9A Active EP4530471B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP23190388.1A Active EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197612.5A Active EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156928.1A Pending EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

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EP24197627.3A Active EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP25156934.9A Active EP4530471B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP23190388.1A Active EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

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* Cited by examiner, † Cited by third party
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EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre
EP4467810A3 (fr) 2024-07-15 2025-02-26 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et procédé de fabrication d'une pompe à vide à spirales
EP4538532A3 (fr) * 2025-02-25 2025-08-27 Pfeiffer Vacuum Technology AG Pompe à vide à spirales
EP4621238A3 (fr) * 2025-07-16 2025-11-12 Pfeiffer Vacuum Technology AG Procédé de montage d'une pompe à vide à spirales
EP4636251A3 (fr) 2025-09-09 2026-04-29 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

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Also Published As

Publication number Publication date
EP4530470A3 (fr) 2025-07-02
EP4253720A3 (fr) 2024-06-19
WO2025032188A1 (fr) 2025-02-13
EP4530471A2 (fr) 2025-04-02
EP4253720C0 (fr) 2025-10-01
EP4530471C0 (fr) 2026-02-25
EP4506537C0 (fr) 2025-10-08
EP4506536A1 (fr) 2025-02-12
CN120693445A (zh) 2025-09-23
EP4530471A3 (fr) 2025-07-02
EP4506536C0 (fr) 2025-12-17
EP4253720A2 (fr) 2023-10-04
EP4506537B1 (fr) 2025-10-08
EP4530471B1 (fr) 2026-02-25
EP4253720B1 (fr) 2025-10-01
EP4506537A1 (fr) 2025-02-12
EP4530470A2 (fr) 2025-04-02

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