ES2022946T5 - Procedimiento para la aportacion de capas sobre sustratos. - Google Patents

Procedimiento para la aportacion de capas sobre sustratos.

Info

Publication number
ES2022946T5
ES2022946T5 ES88106546T ES88106546T ES2022946T5 ES 2022946 T5 ES2022946 T5 ES 2022946T5 ES 88106546 T ES88106546 T ES 88106546T ES 88106546 T ES88106546 T ES 88106546T ES 2022946 T5 ES2022946 T5 ES 2022946T5
Authority
ES
Spain
Prior art keywords
coating
electric arc
arc discharge
substrates
vaporization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES88106546T
Other languages
English (en)
Other versions
ES2022946B3 (es
Inventor
Erich Dr Bergmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=4252468&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2022946(T5) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Balzers AG filed Critical Balzers AG
Publication of ES2022946B3 publication Critical patent/ES2022946B3/es
Application granted granted Critical
Publication of ES2022946T5 publication Critical patent/ES2022946T5/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C23C14/355—Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)

Abstract

PARA CONSEGUIR CAPAS MAS DENSAS Y COMPACTAS QUE HASTA AHORA EN EL REVESTIMIENTO EN CAPAS DE SUSTRATOS MEDIANTE PULVERIZACION CATODICA APOYADA EN CAMPOS MAGNETICOS, SE CONDENSA DURANTE LA FORMACION DE LA CAPA UNA CIERTA PARTE DE VAPOR METALICO (OBTENIDO POR EVAPORACION DEL ANODO O CATODO DE UNA DESCARGA DE ARCO VOLTAICO) SOBRE LAS SUPERFICIES DE FUNCION DE LOS SUSTRATOS JUNTO CON EL MATERIAL PULVERIZADO, CONCRETAMENTE UN MINIMO DE 5% DE ATOMOS DEL TOTAL DE COMPONENTE METALICO DE LA CAPA. UNA INSTALACION DE RECUBRIMIENTO EN CAPAS AL VACIO APROPIADA PARA LA EJECUCION DE ESTE PROCESO PRESENTA DENTRO DE UNA CAMARA DE VACIO UN DISPOSITIVO PARA LA EVAPORACION DE UNA PARTE DEL MATERIAL QUE FORMARA LA CAPA POR MEDIO DE UNA DESCARGA DE ARCO VOLTAICO, ASI COMO OTRO DISPOSITIVO PARA LA PULVERIZACION APOYADA POR CAMPO MAGNETICO DE OTRA PARTE DEL MATERIAL QUE FORMARA LA CAPA.
ES88106546T 1987-08-26 1988-04-23 Procedimiento para la aportacion de capas sobre sustratos. Expired - Lifetime ES2022946T5 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH327587 1987-08-26

Publications (2)

Publication Number Publication Date
ES2022946B3 ES2022946B3 (es) 1991-12-16
ES2022946T5 true ES2022946T5 (es) 1996-04-16

Family

ID=4252468

Family Applications (1)

Application Number Title Priority Date Filing Date
ES88106546T Expired - Lifetime ES2022946T5 (es) 1987-08-26 1988-04-23 Procedimiento para la aportacion de capas sobre sustratos.

Country Status (6)

Country Link
US (1) US4877505A (es)
EP (1) EP0306612B2 (es)
JP (1) JPS6483656A (es)
AT (1) ATE65265T1 (es)
DE (1) DE3863725D1 (es)
ES (1) ES2022946T5 (es)

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US4992153A (en) * 1989-04-26 1991-02-12 Balzers Aktiengesellschaft Sputter-CVD process for at least partially coating a workpiece
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US5306407A (en) * 1989-06-27 1994-04-26 Hauzer Holding Bv Method and apparatus for coating substrates
EP0413853B1 (de) * 1989-08-21 1996-01-31 Balzers Aktiengesellschaft Beschichtetes Werkstück mit einer Mischkristallbeschichtung, Verfahren zu dessen Herstellung, sowie Vorrichtung zur Durchführung des Verfahrens
US5250779A (en) * 1990-11-05 1993-10-05 Balzers Aktiengesellschaft Method and apparatus for heating-up a substrate by means of a low voltage arc discharge and variable magnetic field
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Also Published As

Publication number Publication date
ATE65265T1 (de) 1991-08-15
EP0306612A1 (de) 1989-03-15
DE3863725D1 (de) 1991-08-22
JPS6483656A (en) 1989-03-29
ES2022946B3 (es) 1991-12-16
EP0306612B2 (de) 1996-02-28
US4877505A (en) 1989-10-31
EP0306612B1 (de) 1991-07-17

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