ES2051828T3 - Procedimiento para la produccion de piezas de metal duro, recubiertas con varias capas. - Google Patents

Procedimiento para la produccion de piezas de metal duro, recubiertas con varias capas.

Info

Publication number
ES2051828T3
ES2051828T3 ES88201778T ES88201778T ES2051828T3 ES 2051828 T3 ES2051828 T3 ES 2051828T3 ES 88201778 T ES88201778 T ES 88201778T ES 88201778 T ES88201778 T ES 88201778T ES 2051828 T3 ES2051828 T3 ES 2051828T3
Authority
ES
Spain
Prior art keywords
metal
layer
boronitride
layers
hard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES88201778T
Other languages
English (en)
Inventor
Wilfried Schintlmeister
Wolfgang Wallgram
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plansee Tizit AG
Original Assignee
Plansee Tizit AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee Tizit AG filed Critical Plansee Tizit AG
Application granted granted Critical
Publication of ES2051828T3 publication Critical patent/ES2051828T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12014—All metal or with adjacent metals having metal particles
    • Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
    • Y10T428/12049—Nonmetal component
    • Y10T428/12056—Entirely inorganic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12542—More than one such component
    • Y10T428/12549—Adjacent to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

LA PATENTE AFECTA A UN PROCESO DE PRODUCCION DE CAPAS DE MATERIAL DURO CVD O PVD, COMO PROTECCION ANTIDESGASTE SOBRE PIEZAS DE METAL DURO CON WC - CO O WC -NI, SOBRE TODO, ELEMENTOS CORTANTES, EN LOS QUE AL MENOS UNA DE LAS CAPAS ES METAL BORONITRURO. SEGUN LA PATENTE, SE MANTIENE LA CONCENTRACION DE BORO EN LA CAPA METAL - BORONITRURO POR DEBAJO DEL VALOR LIMITE, EN EL QUE JUNTO A LA FASE DE CRISTAL DE MEZCLA BORONITRURO APARECE EN PRINCIPIO UNA FASE DIBORURO. AL APLICAR UNA CAPA INTERMEDIA SIN BORO (O CON UNA CANTIDAD INAPRECIABLE) COMO BARRERA DE DIFUSION ENTRE METAL DURO Y LA CAPA METAL BORONITRURO SE IMPIDE LA FORMACION DE FASES WCOB O WNIB EN LOS MARGENES DEL METAL DURO DE FORMA QUE NO SE PERJUDICA LA TENACIDAD DEL METAL DURO. LA CAPA METAL - BORONITRURO SE LLEVA A CABO PREFERENTEMENTE CONO UNA CAPA DE TITANIOBORONITRURO CON UNA CONCENTRACION DE BORO ENTRE 1.5 Y 15% DE ATOMOS O COMO CAPA DE CIRCONIOBORONITRURO CON UNA CONCENTRACION DE BORO ENTRE 0.1 Y 2% ATOMOS. SE PUEDE APLICAR ENUNA SOLA CAPA O EN MAS CAPAS, ALTERNANDOSE CON OTRAS CAPAS DE MATERIAL DURO. COMO CAPA INTERMEDIA HA PROBADO SU EFICACIA UNA CAPA SIMPLE O VARIAS CAPAS DE UN CARBURO, NITRURO O CARBONITRURO DE LOS ELEMENTOS TI, ZR Y HF.
ES88201778T 1987-08-31 1988-08-19 Procedimiento para la produccion de piezas de metal duro, recubiertas con varias capas. Expired - Lifetime ES2051828T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0217387A AT387988B (de) 1987-08-31 1987-08-31 Verfahren zur herstellung mehrlagig beschichteter hartmetallteile

Publications (1)

Publication Number Publication Date
ES2051828T3 true ES2051828T3 (es) 1994-07-01

Family

ID=3529287

Family Applications (1)

Application Number Title Priority Date Filing Date
ES88201778T Expired - Lifetime ES2051828T3 (es) 1987-08-31 1988-08-19 Procedimiento para la produccion de piezas de metal duro, recubiertas con varias capas.

Country Status (6)

Country Link
US (1) US4895770A (es)
EP (1) EP0306077B1 (es)
JP (1) JPS6475679A (es)
AT (1) AT387988B (es)
DE (1) DE3888761D1 (es)
ES (1) ES2051828T3 (es)

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US5126207A (en) * 1990-07-20 1992-06-30 Norton Company Diamond having multiple coatings and methods for their manufacture
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US5127924A (en) * 1991-07-01 1992-07-07 Russell Jeffrey D Hard particle coated grinding wheel
EP0592986B1 (en) * 1992-10-12 1998-07-08 Sumitomo Electric Industries, Limited Ultra-thin film laminate
US5783295A (en) * 1992-11-09 1998-07-21 Northwestern University Polycrystalline supperlattice coated substrate and method/apparatus for making same
GB9405744D0 (en) * 1994-03-23 1994-05-11 Rolls Royce Plc A multilayer erosion resistant coating and a method for its production
US5952085A (en) * 1994-03-23 1999-09-14 Rolls-Royce Plc Multiple layer erosion resistant coating and a method for its production
EP0695731B1 (en) * 1994-08-01 2000-11-08 Sumitomo Electric Industries, Limited Super hard composite material for tools
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FR2744461B1 (fr) * 1996-02-01 1998-05-22 Tecmachine Nitrure de titane dope par du bore, revetement de substrat a base de ce nouveau compose, possedant une durete elevee et permettant une tres bonne resistance a l'usure, et pieces comportant un tel revetement
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US6200649B1 (en) * 1999-07-21 2001-03-13 Southwest Research Institute Method of making titanium boronitride coatings using ion beam assisted deposition
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US20030227068A1 (en) * 2001-05-31 2003-12-11 Jianxing Li Sputtering target
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US7087295B2 (en) * 2002-01-18 2006-08-08 Sumitomo Electric Industries, Ltd. Surface-coated cutting tool
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DE10222347C2 (de) * 2002-05-21 2003-11-27 Walter Ag TiBN-Beschichtung für einen Schneideinsatz oder ein Schneidwerkzeug
US20040123920A1 (en) * 2002-10-08 2004-07-01 Thomas Michael E. Homogenous solid solution alloys for sputter-deposited thin films
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Also Published As

Publication number Publication date
US4895770A (en) 1990-01-23
EP0306077A2 (de) 1989-03-08
ATA217387A (de) 1988-09-15
EP0306077B1 (de) 1994-03-30
AT387988B (de) 1989-04-10
DE3888761D1 (de) 1994-05-05
EP0306077A3 (en) 1990-02-07
JPS6475679A (en) 1989-03-22

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