ES2080980T3 - Procedimiento y conjunto de medicion para la medicion en linea, sin contacto, de la rugosidad de una superficie. - Google Patents
Procedimiento y conjunto de medicion para la medicion en linea, sin contacto, de la rugosidad de una superficie.Info
- Publication number
- ES2080980T3 ES2080980T3 ES92106786T ES92106786T ES2080980T3 ES 2080980 T3 ES2080980 T3 ES 2080980T3 ES 92106786 T ES92106786 T ES 92106786T ES 92106786 T ES92106786 T ES 92106786T ES 2080980 T3 ES2080980 T3 ES 2080980T3
- Authority
- ES
- Spain
- Prior art keywords
- infrared
- field
- stored
- temperature
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 abstract 4
- 230000003746 surface roughness Effects 0.000 abstract 3
- 238000003754 machining Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Radiation Pyrometers (AREA)
Abstract
UN CAMPO DE MEDIDA (4) SOBRE UNA SUPERFICIE DE MATERIAL ASPERO SE CALIENTA MEDIANTE LA INCIDENCIA INCLINADA DE UNA RADIACON, CON UN RADIADOR (2) DE INFRARROJOS, CUYA TEMPERATURA SUPERFICIAL SE MANTIENE CONSTANTE DURANTE LA MEDIDA. SE MIDE LA TEMPERATURA DE LA RADIACION REFLEJADA CON UN TERMOTETRO (3) DE INFRARROJOS, QUE SE ENCUENTRA DISPUESTO POR ENCIMA DEL CAMPO DE MEDIDA DE FORMA QUE LA RADIACCION REFLEJADA INCIDE EN ELCAMPO DE MIRA DEL TERMOMETRO DE INFRARROJOS. EL CAMPO DE MEDIDA TOTAL DE LA SUPERFICIE DEL MATERIAL, QUE ESTA EN EL CAMPO DE MIRA DEL TERMOMETRO DEL INFRARROJO DEBE SER CALENTADA MEDIANTE RADIACION. SE ALMACENA O MEMORIZA EL CICLO DE TEMPERATURA MEDIDA DE LA RADIACION REFLEJADA EN DEPENDENCIA DE LA RUGOSIDAD SUPERFICIAL CONOCIDA DEL MATERIAL EN UN EQUIPO (7) DE COMPARACION. ESTE EQUIPO DE COMPARACION (7) TIENE ALMACENADO UN VALOR TEORICO PARA LA RUGOSIDAD SUPERFICIAL DESEADA. SE MIDE LA TEMPERATURA DEL INFRARROJO DE UNA SUPERFICIE DEL MATERIAL DESCONOCIDA EN CUANTO A SU RUGOSIDAD SUPERFICIAL Y SE COMPARA CON EL CICLO DE TEMPERATURA ALMACENADO, PARA DETERMINAR EL TAMAÑO DE LA RUGOSIDAD SUPERFICIAL. DEL VALOR OBTENIDO Y DEL VALOR TEORICO ALMACENADO SE GENERA UNA SEÑAL DIFERENCIAL, QUE ES CONDUCIDA A TRAVES DE LA SALIDA (8) DEL EQUIPO DE COMPARACION (7) DE UN CONTROLADOR (9) EN UN EQUIPO DE MECANIZADO DEL MATERIAL
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4114671A DE4114671A1 (de) | 1991-05-06 | 1991-05-06 | Verfahren und messanordnung zur beruehrungslosen on-line messung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2080980T3 true ES2080980T3 (es) | 1996-02-16 |
Family
ID=6431035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES92106786T Expired - Lifetime ES2080980T3 (es) | 1991-05-06 | 1992-04-21 | Procedimiento y conjunto de medicion para la medicion en linea, sin contacto, de la rugosidad de una superficie. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5352038A (es) |
| EP (1) | EP0512312B1 (es) |
| JP (1) | JPH06180223A (es) |
| KR (1) | KR100239838B1 (es) |
| BR (1) | BR9201678A (es) |
| CA (1) | CA2068000A1 (es) |
| DE (2) | DE4114671A1 (es) |
| ES (1) | ES2080980T3 (es) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5823853A (en) * | 1996-07-18 | 1998-10-20 | Speedfam Corporation | Apparatus for the in-process detection of workpieces with a monochromatic light source |
| US5474381A (en) * | 1993-11-30 | 1995-12-12 | Texas Instruments Incorporated | Method for real-time semiconductor wafer temperature measurement based on a surface roughness characteristic of the wafer |
| GB9415869D0 (en) * | 1994-08-05 | 1994-09-28 | Univ Mcgill | Substrate measurement by infrared spectroscopy |
| US5833367A (en) | 1996-11-12 | 1998-11-10 | Trutek, Inc. | Tympanic thermometer probe cover |
| US6030117A (en) | 1996-11-12 | 2000-02-29 | Trutek, Inc. | Tympanic thermometer probe cover |
| AU7807898A (en) | 1997-06-03 | 1998-12-21 | Trutek, Inc. | Tympanic thermometer with modular sensing probe |
| DE19739885A1 (de) * | 1997-09-11 | 1999-03-18 | Bernd Klose | Komparativer Oberflächenqualifizierer |
| US5967992A (en) | 1998-06-03 | 1999-10-19 | Trutex, Inc. | Radiometric temperature measurement based on empirical measurements and linear functions |
| US6123454A (en) | 1999-06-11 | 2000-09-26 | Trutek, Inc. | Tympanic thermometer disposable probe cover with further stretching prevention structure |
| JP3976953B2 (ja) * | 1999-08-13 | 2007-09-19 | 森永乳業株式会社 | 容器入り流動物の流動性の判別方法及びその装置 |
| DE50212854D1 (de) * | 2001-07-24 | 2008-11-20 | Tuev Automotive Gmbh Unternehm | Verfahren und System zum Überwachen des Betriebs eines Fahrzeugreifens sowie Fahrzeugreifen |
| ES2312234B1 (es) * | 2005-09-02 | 2010-01-08 | Asociacion De Investigacion Para La Industria Del Calzado Y Conexas (Inescop) | Sistema para evaluar el grado de lijado de pieles basado en la medida sin contacto de la temperatura superficial. |
| DE102007050557B4 (de) * | 2007-10-20 | 2013-01-24 | Hochschule Mittweida (Fh) | Einrichtung zur schnellen integralen und berührungslosen Messung der Rauigkeit |
| JP5624714B2 (ja) * | 2008-05-23 | 2014-11-12 | 株式会社日立ハイテクノロジーズ | 基板表面の検査方法及び検査装置 |
| US10330615B2 (en) * | 2014-10-09 | 2019-06-25 | Hamamatsu Photonics K.K. | Analysis system and analysis method |
| DE102015203369B4 (de) | 2015-02-25 | 2020-02-20 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Bestimmen der Messbedingungen eines Rauheitssensors, Verfahren zum Vermessen der Rauheit einer Werkstückoberfläche, Computerprogrammprodukt sowie Messgerät eingerichtet zur Durchführung der Verfahren |
| DE102015209193A1 (de) | 2015-05-20 | 2016-11-24 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zur Erfassung dynamischer Schwingungen eines Rauheitssensors, Verfahren zur Vermessung der Rauheit einer Werkstückoberfläche, Computerprogrammprodukt sowie Messgerät eingerichtet zur Durchführung der Verfahren. |
| PL239727B1 (pl) * | 2018-01-03 | 2022-01-03 | Genomtec Spolka Akcyjna | Zestaw do bezdotykowej kontroli temperatury, sposob generowania frontow falowych promieniowania elektromagnetycznego |
| WO2021117700A1 (ja) * | 2019-12-11 | 2021-06-17 | 国立大学法人 東京大学 | 計測装置、情報処理装置及びプログラム |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3206603A (en) * | 1962-08-16 | 1965-09-14 | Gen Electric | Infrared flaw detector method and apparatus |
| US3433052A (en) * | 1965-07-26 | 1969-03-18 | Automation Ind Inc | Material tester |
| US3667846A (en) * | 1969-07-28 | 1972-06-06 | Charles Nater | Optical surface inspection apparatus |
| US3771880A (en) * | 1971-09-29 | 1973-11-13 | Us Navy | Roughness analyzer |
| CH552197A (de) * | 1972-11-24 | 1974-07-31 | Bbc Brown Boveri & Cie | Einrichtung zum messen der rauhigkeit einer oberflaeche. |
| US3973122A (en) * | 1974-06-17 | 1976-08-03 | Ixcon Inc. | Measuring apparatus |
| US4012141A (en) * | 1974-11-18 | 1977-03-15 | Walter William Hanneman | Identification of gemstones by relative reflectance measurements coupled with a scale calibrated in gem names |
| US4017188A (en) * | 1975-02-26 | 1977-04-12 | The Bendix Corporation | Surface profile measuring device and method |
| US3978713A (en) * | 1975-05-27 | 1976-09-07 | General Electric Company | Laser generation of ultrasonic waves for nondestructive testing |
| US4136566A (en) * | 1977-06-24 | 1979-01-30 | University Of Utah | Semiconductor temperature sensor |
| IT1108255B (it) * | 1978-10-24 | 1985-12-02 | Fiat Spa | Procedimento e dispositivo per il controllo della rugosita della superficie di un pezzo che ha subito una lavorazione meccanica |
| SU857821A1 (ru) * | 1979-03-11 | 1981-08-23 | Научно-Исследовательский Институт Прикладной Математики И Механики При Томском Государственном Университете Им. В.В.Куйбышева | Способ определени термической стойкости полимерных материалов |
| GB2071316B (en) * | 1979-09-12 | 1983-11-09 | Raytek Inc | Hand-held digital temperature measuring instrument |
| US4278353A (en) * | 1980-04-11 | 1981-07-14 | Bell Telephone Laboratories, Incorporated | Optical inspection of gold surfaces |
| SU1004755A1 (ru) * | 1980-09-15 | 1983-03-15 | Предприятие П/Я Р-6681 | Оптический способ измерени высоты шероховатости поверхности объекта |
| JPS5834309A (ja) * | 1981-08-25 | 1983-02-28 | Nok Corp | 非接触式面性状測定法 |
| JPS5919908A (ja) * | 1982-07-26 | 1984-02-01 | Masayuki Izutsu | 光学的温度センサ |
| US4521118A (en) * | 1982-07-26 | 1985-06-04 | Therma-Wave, Inc. | Method for detection of thermal waves with a laser probe |
| US4522510A (en) * | 1982-07-26 | 1985-06-11 | Therma-Wave, Inc. | Thin film thickness measurement with thermal waves |
| US4511800A (en) * | 1983-03-28 | 1985-04-16 | Rca Corporation | Optical reflectance method for determining the surface roughness of materials in semiconductor processing |
| US4579463A (en) * | 1984-05-21 | 1986-04-01 | Therma-Wave Partners | Detecting thermal waves to evaluate thermal parameters |
| US4634290A (en) * | 1984-05-21 | 1987-01-06 | Therma-Wave, Inc. | Method and apparatus for detecting thermal waves |
| US4679946A (en) * | 1984-05-21 | 1987-07-14 | Therma-Wave, Inc. | Evaluating both thickness and compositional variables in a thin film sample |
| US4634291A (en) * | 1984-11-26 | 1987-01-06 | General Electric Company | Coating thickness measurement |
| LU86194A1 (fr) * | 1985-12-05 | 1987-07-24 | Centre Rech Metallurgique | Procede de mesure en continu de la rugosite de la surface d'un produit lamine a froid |
| JPS62198707A (ja) * | 1986-02-27 | 1987-09-02 | Nippon Kokan Kk <Nkk> | 非接触塗装検査装置 |
| SU1395939A1 (ru) * | 1986-05-26 | 1988-05-15 | Харьковский авиационный институт им.Н.Е.Жуковского | Способ измерени толщины листового материала |
| JPH0663848B2 (ja) * | 1986-06-27 | 1994-08-22 | 新日本製鐵株式会社 | 物体の表面温度測定方法 |
| GB8706507D0 (en) * | 1987-03-19 | 1987-04-23 | Land Infrared Ltd | Radiation thermometer |
| DE3805785A1 (de) * | 1988-02-24 | 1989-09-07 | Sick Optik Elektronik Erwin | Verfahren und vorrichtung zur optischen erfassung des rauheitsprofils einer materialoberflaeche |
| GB8813423D0 (en) * | 1988-06-07 | 1988-07-13 | Atomic Energy Authority Uk | Coating inspection |
| SU1567882A1 (ru) * | 1988-07-29 | 1990-05-30 | Черновицкий Государственный Университет | Способ определени функции распределени высот и углов наклона шероховатой поверхности |
| DE3913474A1 (de) * | 1989-04-24 | 1990-10-25 | Siemens Ag | Photothermisches untersuchungsverfahren, einrichtung zu seiner durchfuehrung und verwendung des verfahrens |
| JPH03142305A (ja) * | 1989-10-30 | 1991-06-18 | Kawasaki Steel Corp | 表面粗度測定装置 |
| US5103106A (en) * | 1990-09-11 | 1992-04-07 | Moshe Golberstein | Reflective optical instrument for measuring surface reflectance |
-
1991
- 1991-05-06 DE DE4114671A patent/DE4114671A1/de not_active Withdrawn
-
1992
- 1992-04-21 DE DE59204227T patent/DE59204227D1/de not_active Expired - Fee Related
- 1992-04-21 EP EP92106786A patent/EP0512312B1/de not_active Expired - Lifetime
- 1992-04-21 ES ES92106786T patent/ES2080980T3/es not_active Expired - Lifetime
- 1992-04-30 KR KR1019920007348A patent/KR100239838B1/ko not_active Expired - Fee Related
- 1992-05-05 BR BR929201678A patent/BR9201678A/pt not_active IP Right Cessation
- 1992-05-05 CA CA002068000A patent/CA2068000A1/en not_active Abandoned
- 1992-05-06 JP JP4140912A patent/JPH06180223A/ja active Pending
-
1994
- 1994-01-24 US US08/185,168 patent/US5352038A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| BR9201678A (pt) | 1992-12-15 |
| KR920021970A (ko) | 1992-12-19 |
| EP0512312A2 (de) | 1992-11-11 |
| EP0512312B1 (de) | 1995-11-08 |
| EP0512312A3 (en) | 1993-04-28 |
| JPH06180223A (ja) | 1994-06-28 |
| CA2068000A1 (en) | 1992-11-07 |
| DE59204227D1 (de) | 1995-12-14 |
| DE4114671A1 (de) | 1992-11-12 |
| KR100239838B1 (ko) | 2000-01-15 |
| US5352038A (en) | 1994-10-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG2A | Definitive protection |
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