ES2083154T3 - Procedimiento de deposito de una capa de oxido de silicio unida a un sustrato de material polimero. - Google Patents

Procedimiento de deposito de una capa de oxido de silicio unida a un sustrato de material polimero.

Info

Publication number
ES2083154T3
ES2083154T3 ES92902267T ES92902267T ES2083154T3 ES 2083154 T3 ES2083154 T3 ES 2083154T3 ES 92902267 T ES92902267 T ES 92902267T ES 92902267 T ES92902267 T ES 92902267T ES 2083154 T3 ES2083154 T3 ES 2083154T3
Authority
ES
Spain
Prior art keywords
substrate
silicon oxide
oxide layer
polymer material
layer attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92902267T
Other languages
English (en)
Inventor
Michel Gastiger
Franciscus Slootman
Pascal Bouard
Antoine Willemot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9403303&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2083154(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of ES2083154T3 publication Critical patent/ES2083154T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/123—Treatment by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2323/00—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers
    • C08J2323/02—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers not modified by chemical after treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Silicon Compounds (AREA)
  • Laminated Bodies (AREA)
  • Patch Boards (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Gas-Insulated Switchgears (AREA)
  • Formation Of Insulating Films (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Wrappers (AREA)

Abstract

LA INVENCION SE REFIERE A UN PROCESO DE DEPOSICION DE UNA CAPA DELGADA DE OXIDO DE SILICIO LIGADA A UN SUSTRATO DE UN MATERIAL POLIMERO QUE COMPRENDE, CONCOMITENTEMENTE O SUCESIVAMENTE (1) LA SUMISION DE UNA SUPERFICIE DEL SUSTRATO A UNA DESCARGA ELECTRICA CON BARRERA DIELECTRICA Y (2) LA EXPOSICION DE DICHA SUPERFICIE DEL SUSTRATO A UNA ATMOSFERA QUE CONTIENE UN SILANO, GRACIAS A LO QUE SE FORMA UNA DEPOSICION DE OXIDO DE SILICIO LIGADO A DICHA SUPERFICIE DEL SUSTRATO. APLICACION EN LA PRODUCCION DE HOJAS O PELICULAS UTILES PARTICULARMENTE COMO EMBALAJE ALIMENTARIO.
ES92902267T 1990-12-17 1991-12-17 Procedimiento de deposito de una capa de oxido de silicio unida a un sustrato de material polimero. Expired - Lifetime ES2083154T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9015757A FR2670506B1 (fr) 1990-12-17 1990-12-17 Procede de depot d'une couche d'oxyde de silicium liee a un substrat en polyolefine.

Publications (1)

Publication Number Publication Date
ES2083154T3 true ES2083154T3 (es) 1996-04-01

Family

ID=9403303

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92902267T Expired - Lifetime ES2083154T3 (es) 1990-12-17 1991-12-17 Procedimiento de deposito de una capa de oxido de silicio unida a un sustrato de material polimero.

Country Status (9)

Country Link
EP (1) EP0516804B1 (es)
JP (1) JP3260140B2 (es)
AT (1) ATE133437T1 (es)
CA (1) CA2076029C (es)
DE (1) DE69116683T2 (es)
DK (1) DK0516804T3 (es)
ES (1) ES2083154T3 (es)
FR (1) FR2670506B1 (es)
WO (1) WO1992011312A1 (es)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69327725T2 (de) * 1992-11-13 2000-06-21 Energy Conversion Devices, Inc. Mikrowellenvorrichtung fuer die beschichtung von duennen filmen
JPH06330326A (ja) * 1993-03-26 1994-11-29 Shin Etsu Chem Co Ltd シリカ薄膜の製造方法
FR2704558B1 (fr) * 1993-04-29 1995-06-23 Air Liquide Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement.
US5364666A (en) * 1993-09-23 1994-11-15 Becton, Dickinson And Company Process for barrier coating of plastic objects
DE4438992C2 (de) * 1994-10-31 1997-04-10 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Aufbringung von antistatischen transparenten Oberflächenbeschichtungen auf elektrisch isolierende Gegenstände
FR2751664B1 (fr) * 1996-07-23 1998-09-04 Air Liquide Procede et dispositif de commande du fonctionnement d'un systeme de traitement de surface d'un substrat solide en defilement
FR2751665B1 (fr) * 1996-07-23 1998-09-04 Air Liquide Procede et dispositif de commande du fonctionnement d'un systeme de traitement de surface
US5900317A (en) * 1996-09-13 1999-05-04 Minnesota Mining & Manufacturing Company Flame-treating process
EP1125972A1 (fr) 2000-02-11 2001-08-22 L'air Liquide Société Anonyme pour l'étude et l'exploitation des procédés Georges Claude Procédé de traitement de surface de subtrats polymères
WO2006133730A1 (en) 2005-06-16 2006-12-21 Innovative Systems & Technologies Method for producing coated polymer
US20080115444A1 (en) 2006-09-01 2008-05-22 Kalkanoglu Husnu M Roofing shingles with enhanced granule adhesion and method for producing same
FR2908137A1 (fr) 2006-11-02 2008-05-09 Lapeyre Sa Procede de depot de couche mince et produit obtenu
US8349435B2 (en) 2007-04-04 2013-01-08 Certainteed Corporation Mineral surfaced asphalt-based roofing products with encapsulated healing agents and methods of producing the same
US20090115060A1 (en) 2007-11-01 2009-05-07 Infineon Technologies Ag Integrated circuit device and method
US10730799B2 (en) 2016-12-31 2020-08-04 Certainteed Corporation Solar reflective composite granules and method of making solar reflective composite granules

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1188642A (en) * 1966-02-09 1970-04-22 Courtaulds Ltd Modified Polyolefin Articles
US3440959A (en) * 1966-02-18 1969-04-29 Hercules Inc Coated polymer
US4328646A (en) * 1978-11-27 1982-05-11 Rca Corporation Method for preparing an abrasive coating
US4563316A (en) * 1982-10-08 1986-01-07 Toyo Boseki Kabushiki Kaisha Production of polyolefin shaped product
US4927704A (en) * 1987-08-24 1990-05-22 General Electric Company Abrasion-resistant plastic articles and method for making them
US5100720A (en) * 1987-10-07 1992-03-31 Mitsubishi Monsanto Chemical Company Limited Laminated film having gas barrier properties

Also Published As

Publication number Publication date
JPH05504991A (ja) 1993-07-29
FR2670506A1 (fr) 1992-06-19
EP0516804B1 (fr) 1996-01-24
DK0516804T3 (da) 1996-04-09
CA2076029A1 (fr) 1992-06-18
DE69116683T2 (de) 1996-05-30
JP3260140B2 (ja) 2002-02-25
DE69116683D1 (de) 1996-03-07
EP0516804A1 (fr) 1992-12-09
ATE133437T1 (de) 1996-02-15
WO1992011312A1 (fr) 1992-07-09
FR2670506B1 (fr) 1993-02-19
CA2076029C (fr) 2002-02-19

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