ES2104152T3 - Procedimiento para producir una pelicula delgada de polimero mediante evaporacion por laser pulsado. - Google Patents
Procedimiento para producir una pelicula delgada de polimero mediante evaporacion por laser pulsado.Info
- Publication number
- ES2104152T3 ES2104152T3 ES93912204T ES93912204T ES2104152T3 ES 2104152 T3 ES2104152 T3 ES 2104152T3 ES 93912204 T ES93912204 T ES 93912204T ES 93912204 T ES93912204 T ES 93912204T ES 2104152 T3 ES2104152 T3 ES 2104152T3
- Authority
- ES
- Spain
- Prior art keywords
- pulsed laser
- producing
- procedure
- polymer film
- thin polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 2
- 230000008020 evaporation Effects 0.000 title 1
- 238000001704 evaporation Methods 0.000 title 1
- 229920006254 polymer film Polymers 0.000 title 1
- 229920000642 polymer Polymers 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 229920002313 fluoropolymer Polymers 0.000 abstract 1
- 239000004811 fluoropolymer Substances 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
UN PROCESO PARA PRODUCIR CAPAS DELGADAS DE UN PRIMER POLIMERO DE ADICION EN UN SUBSTRATO COMPRENDIENDO BOMBARDEAR UN OBJETO, CONSISTIENDO ESENCIALMENTE DE UN SEGUNDO POLIMERO DE ADICION, CON RADIACION DE UN LASER PULSADO EN UNA ATMOSFERA DE VACIO O GAS PARA FORMAR UN PENACHO DE COMPONENTES DE DICHO SEGUNDO POLIMERO; Y DEPOSITAR DICHO PENACHO EN UN SUBSTRATO, POR EL QUE ES FORMADA UNA CAPA DE DICHO PRIMER POLIMERO. EL PRIMER Y SEGUNDO POLIMERO DE ADICION DEBEN SER IDENTICOS O DIFERENTES Y EN AMBOS CASOS DEBEN SER FLUOROPOLIMERO.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US86965192A | 1992-04-16 | 1992-04-16 | |
| US07/916,663 US5192580A (en) | 1992-04-16 | 1992-07-22 | Process for making thin polymer film by pulsed laser evaporation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2104152T3 true ES2104152T3 (es) | 1997-10-01 |
Family
ID=27128128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES93912204T Expired - Lifetime ES2104152T3 (es) | 1992-04-16 | 1993-04-12 | Procedimiento para producir una pelicula delgada de polimero mediante evaporacion por laser pulsado. |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5192580A (es) |
| EP (1) | EP0636053B1 (es) |
| JP (1) | JPH07505923A (es) |
| AT (1) | ATE154648T1 (es) |
| CA (1) | CA2118213A1 (es) |
| DE (1) | DE69311711T2 (es) |
| DK (1) | DK0636053T3 (es) |
| ES (1) | ES2104152T3 (es) |
| GR (1) | GR3023916T3 (es) |
| WO (1) | WO1993020953A1 (es) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5200230A (en) * | 1987-06-29 | 1993-04-06 | Dunfries Investments Limited | Laser coating process |
| US5773098A (en) * | 1991-06-20 | 1998-06-30 | British Technology Group, Ltd. | Applying a fluoropolymer film to a body |
| US5320789A (en) * | 1991-11-06 | 1994-06-14 | Japan Atomic Energy Research Institute | Surface modification of fluorine resin with laser light |
| US5406906A (en) * | 1994-01-18 | 1995-04-18 | Ford Motor Company | Preparation of crystallographically aligned films of silicon carbide by laser deposition of carbon onto silicon |
| US5660746A (en) * | 1994-10-24 | 1997-08-26 | University Of South Florida | Dual-laser process for film deposition |
| DE69528509T2 (de) * | 1994-10-27 | 2003-06-26 | General Electric Co., Schenectady | Stromzuleitung von supraleitender Keramik |
| WO1997000925A1 (en) * | 1995-06-23 | 1997-01-09 | E.I. Du Pont De Nemours And Company | Method for monomer recovery |
| US6025036A (en) * | 1997-05-28 | 2000-02-15 | The United States Of America As Represented By The Secretary Of The Navy | Method of producing a film coating by matrix assisted pulsed laser deposition |
| AU2514900A (en) * | 1999-01-27 | 2000-08-18 | United States Of America As Represented By The Secretary Of The Navy, The | Fabrication of conductive/non-conductive nanocomposites by laser evaporation |
| WO2000056949A1 (fr) * | 1999-03-23 | 2000-09-28 | Evgeny Stepanovich Senokosov | Procede de traitement par arc et sous vide de fil (cable, bande) metallique, dispositif de mise en oeuvre de ce procede et variantes |
| US20090169868A1 (en) * | 2002-01-29 | 2009-07-02 | Vanderbilt University | Methods and apparatus for transferring a material onto a substrate using a resonant infrared pulsed laser |
| US6998156B2 (en) * | 2002-01-29 | 2006-02-14 | The United States Of America As Represented By The Secretary Of The Navy | Deposition of thin films using an infrared laser |
| WO2003068503A1 (en) * | 2002-02-14 | 2003-08-21 | Iowa State University Research Foundation, Inc. | Novel friction and wear-resistant coatings for tools, dies and microelectromechanical systems |
| US7122828B2 (en) * | 2003-09-24 | 2006-10-17 | Lucent Technologies, Inc. | Semiconductor devices having regions of induced high and low conductivity, and methods of making the same |
| US8450723B2 (en) * | 2003-11-04 | 2013-05-28 | Alcatel Lucent | Apparatus having an aromatic dielectric and an aromatic organic semiconductor including an alkyl chain |
| US7115900B2 (en) * | 2003-11-26 | 2006-10-03 | Lucent Technologies Inc. | Devices having patterned regions of polycrystalline organic semiconductors, and methods of making the same |
| US7478637B2 (en) * | 2004-11-09 | 2009-01-20 | Philip Morris Usa Inc. | Continuous process for surface modification of cigarette filter materials |
| US10283691B2 (en) | 2013-02-14 | 2019-05-07 | Dillard University | Nano-composite thermo-electric energy converter and fabrication method thereof |
| US10316403B2 (en) | 2016-02-17 | 2019-06-11 | Dillard University | Method for open-air pulsed laser deposition |
| CA3021686A1 (en) * | 2016-05-31 | 2017-12-07 | Edgewell Personal Care Brands, Llc | Pulsed laser deposition of fluorocarbon polymers on razor blade cutting edges |
| CN105855726A (zh) * | 2016-06-15 | 2016-08-17 | 广东工业大学 | 一种微粒制造设备及其应用 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4427723A (en) * | 1982-02-10 | 1984-01-24 | Rockwell International Corporation | Method and apparatus for laser-stimulated vacuum deposition and annealing technique |
| DE3472574D1 (en) * | 1983-10-14 | 1988-08-11 | Hitachi Ltd | Process for forming an organic thin film |
| DE3720598A1 (de) * | 1987-06-22 | 1989-01-05 | Buchtal Gmbh | Aus plattenfoermigen einzelelementen bestehender keramischer wand- oder bodenbelag |
| US4915981A (en) * | 1988-08-12 | 1990-04-10 | Rogers Corporation | Method of laser drilling fluoropolymer materials |
-
1992
- 1992-07-22 US US07/916,663 patent/US5192580A/en not_active Expired - Lifetime
-
1993
- 1993-04-12 DK DK93912204.0T patent/DK0636053T3/da active
- 1993-04-12 JP JP5518545A patent/JPH07505923A/ja active Pending
- 1993-04-12 AT AT93912204T patent/ATE154648T1/de not_active IP Right Cessation
- 1993-04-12 ES ES93912204T patent/ES2104152T3/es not_active Expired - Lifetime
- 1993-04-12 WO PCT/US1993/003435 patent/WO1993020953A1/en not_active Ceased
- 1993-04-12 DE DE69311711T patent/DE69311711T2/de not_active Expired - Lifetime
- 1993-04-12 CA CA002118213A patent/CA2118213A1/en not_active Abandoned
- 1993-04-12 EP EP93912204A patent/EP0636053B1/en not_active Expired - Lifetime
-
1997
- 1997-06-26 GR GR970401564T patent/GR3023916T3/el unknown
Also Published As
| Publication number | Publication date |
|---|---|
| ATE154648T1 (de) | 1997-07-15 |
| DE69311711T2 (de) | 1997-10-30 |
| DK0636053T3 (da) | 1997-07-07 |
| JPH07505923A (ja) | 1995-06-29 |
| US5192580A (en) | 1993-03-09 |
| EP0636053A1 (en) | 1995-02-01 |
| DE69311711D1 (de) | 1997-07-24 |
| CA2118213A1 (en) | 1993-10-28 |
| GR3023916T3 (en) | 1997-09-30 |
| WO1993020953A1 (en) | 1993-10-28 |
| EP0636053B1 (en) | 1997-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES2104152T3 (es) | Procedimiento para producir una pelicula delgada de polimero mediante evaporacion por laser pulsado. | |
| DK0664927T3 (da) | Fremgangsmåde til fremstilling af tynde film ved pulserende excimer-laserfordampning. | |
| DK1332238T3 (da) | Metalliseret film, fremgangsmåde til fremstilling heraf samt anvendelse heraf | |
| ATE517437T1 (de) | Lichtemittierende halbleitervorrichtung und herstellungsverfahren für eine aus einem verbindungshalbleiter bestehende lichtemittierende halbleitervorrichtung | |
| KR910003141A (ko) | 레이저 스퍼터링 장치 | |
| KR850003455A (ko) | 유기질 박막의 제조방법 | |
| EP0496897A4 (en) | Method for manufacturing high temperature superconductive oxide thin film | |
| JP2535245B2 (ja) | 多色パタ―ン膜装飾品 | |
| CA2016354A1 (en) | Method of fabricating oxide superconducting film | |
| JPH0347959A (ja) | 有機超伝導薄膜 | |
| JPS5815226A (ja) | レ−ザアニ−リング法 | |
| CA2103085A1 (en) | Method for Preparing Superconducting Thin Film Formed of High Temperature Superconductor Oxide | |
| JPS5761644A (en) | Cover glass having diamond coating layer and its preparation | |
| JPS5784115A (en) | Manufacture of magnetic thin film | |
| KR100403799B1 (ko) | 고온 초전도 박막 제조장치 | |
| JPS6443915A (en) | Manufacture of superconductive material | |
| WO2005075700A1 (en) | Pulsed protection window for applications in pulsed laser deposition | |
| JPS57121219A (en) | Manufacture of semiconductor device | |
| CA2044439A1 (en) | Process for preparing superconducting oxide thin films | |
| GB1561784A (en) | Optical components | |
| KR970024331A (ko) | 레이저 용발에 의한 고정렬 초전도 박막 제조 장치 및 방법 | |
| KR920013558A (ko) | 새도우마스크의 안티도우밍재 증착방법 | |
| JPS5454606A (en) | Recording medium | |
| KR970077142A (ko) | 펄스파 레이저 증착법을 이용한 고온 초전도 박막 제조 장치 및 그 방법 | |
| KR940019882A (ko) | 레이저 애블레이션장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG2A | Definitive protection |
Ref document number: 636053 Country of ref document: ES |