ES2128028T3 - Procedimiento y dispositivo para la formacion de un revestimiento sobre un substrato de pulverizacion catodica. - Google Patents

Procedimiento y dispositivo para la formacion de un revestimiento sobre un substrato de pulverizacion catodica.

Info

Publication number
ES2128028T3
ES2128028T3 ES95870065T ES95870065T ES2128028T3 ES 2128028 T3 ES2128028 T3 ES 2128028T3 ES 95870065 T ES95870065 T ES 95870065T ES 95870065 T ES95870065 T ES 95870065T ES 2128028 T3 ES2128028 T3 ES 2128028T3
Authority
ES
Spain
Prior art keywords
substrate
elements
surface layer
coating
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95870065T
Other languages
English (en)
Inventor
Brande Pierre U L B Vanden
Stephane U L B Lucas
Rene U L B Winand
Alain Rd-Cs Weymeersch
Lucien Rd-Cs Renard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ArcelorMittal Liege Upstream SA
Original Assignee
Cockerill Sambre SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cockerill Sambre SA filed Critical Cockerill Sambre SA
Application granted granted Critical
Publication of ES2128028T3 publication Critical patent/ES2128028T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PROCESO Y DISPOSITIVO PARA LA FORMACION DE UN REVESTIMIENTO SOBRE UN SUSTRATO (17) POR PULVERIZACION CATODICA ("SPUTTERING") EN UN RECINTO (15, 16) EN PRESENCIA DE UN GAS IONIZADO, SEGUN EL CUAL SE HACE USO DE UN BLANCO (1) QUE PRESENTA UNA CAPA SUPERFICIAL (8) ORIENTADA HACIA EL SUSTRATO (17) Y QUE CONTIENE AL MENOS UNO DE LOS ELEMENTOS A DEPOSITAR SOBRE ESTE SUSTRATO (17), ESTANDO ALIMENTADA LA CAPA SUPERFICIAL POR ELEMENTOS A DEPOSITAR SOBRE EL SUSTRATO Y SIENDO MANTENIDA O LLEVADA EN ESTADO LIQUIDO, DE MANERA A PERMITIR UNA DISTRIBUCION, PREFERENTEMENTE SENSIBLEMENTE UNIFORME, DE LOS ELEMENTOS ALIMENTADOS SOBRE LA SUPERFICIE DEL BLANCO.
ES95870065T 1994-06-02 1995-06-02 Procedimiento y dispositivo para la formacion de un revestimiento sobre un substrato de pulverizacion catodica. Expired - Lifetime ES2128028T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE9400552A BE1008303A3 (fr) 1994-06-02 1994-06-02 Procede et dispositif pour la formation d'un revetement sur un substrat par pulverisation cathodique.

Publications (1)

Publication Number Publication Date
ES2128028T3 true ES2128028T3 (es) 1999-05-01

Family

ID=3888189

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95870065T Expired - Lifetime ES2128028T3 (es) 1994-06-02 1995-06-02 Procedimiento y dispositivo para la formacion de un revestimiento sobre un substrato de pulverizacion catodica.

Country Status (7)

Country Link
EP (1) EP0685571B1 (es)
AT (1) ATE174637T1 (es)
BE (1) BE1008303A3 (es)
DE (1) DE69506618T2 (es)
DK (1) DK0685571T3 (es)
ES (1) ES2128028T3 (es)
GR (1) GR3029503T3 (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6432281B2 (en) * 1995-12-20 2002-08-13 Recherche Et Developpement Due Groupe Cockerill Sambre Process for formation of a coating on a substrate
BE1009838A3 (fr) * 1995-12-20 1997-10-07 Cockerill Rech & Dev Procede et dispositif pour la formation d'un revetement sur un substrat.
BE1010797A3 (fr) * 1996-12-10 1999-02-02 Cockerill Rech & Dev Procede et dispositif pour la formation d'un revetement sur un substrat, par pulverisation cathodique.
EP1182272A1 (fr) 2000-08-23 2002-02-27 Cold Plasma Applications C.P.A. Procédé et dispositif permettant le dépôt de couches métalliques en continu par plasma froid
JP7631192B2 (ja) * 2018-10-24 2025-02-18 エヴァテック・アーゲー 液体スパッタターゲット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2528108B2 (de) * 1975-06-24 1977-11-03 Siemens AG, 1000 Berlin und 8000 München Verfahren zum aufbringen von elektrisch leitenden schichten auf eine unterlage
JPH0192384A (ja) * 1987-10-02 1989-04-11 Hitachi Ltd プラズマ処理装置
JPH0219466A (ja) * 1988-07-07 1990-01-23 Matsushita Electric Ind Co Ltd 繊維・フィルム連続蒸着装置

Also Published As

Publication number Publication date
GR3029503T3 (en) 1999-05-28
EP0685571B1 (fr) 1998-12-16
ATE174637T1 (de) 1999-01-15
DE69506618D1 (de) 1999-01-28
BE1008303A3 (fr) 1996-04-02
DK0685571T3 (da) 1999-08-23
DE69506618T2 (de) 1999-07-08
EP0685571A1 (fr) 1995-12-06

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