ES2130295T3 - Aparato de tipo robot. - Google Patents

Aparato de tipo robot.

Info

Publication number
ES2130295T3
ES2130295T3 ES94101717T ES94101717T ES2130295T3 ES 2130295 T3 ES2130295 T3 ES 2130295T3 ES 94101717 T ES94101717 T ES 94101717T ES 94101717 T ES94101717 T ES 94101717T ES 2130295 T3 ES2130295 T3 ES 2130295T3
Authority
ES
Spain
Prior art keywords
vacuum chamber
robot
wall
type device
robot type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94101717T
Other languages
English (en)
Inventor
Robert B Lowrance
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ES2130295T3 publication Critical patent/ES2130295T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J21/00—Chambers provided with manipulation devices
    • B25J21/005—Clean rooms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

UN APARATO DE ROBOT QUE CONSTA DE UNA CAMARA DE VACIO CON ROBOT (1003) QUE TIENE UNA PARED EXTERIOR (1004), UNA PARED SUPERIOR (1001) Y UNA PARED INFERIOR (1002); UN ROBOT (1008) COLOCADO DENTRO DE DICHA CAMARA DE VACIO (1003) Y UN SOPORTE (1005, 1006, 1007) COLOCADO DENTRO DE DICHA CAMARA DE VACIO (1003) QUE SE EXTIENDE DESDE LA PARED SUPERIOR (1001) HASTA LA PARED INFERIOR (1002), DE MODO QUE CUANDO SE PRODUCE EL VACIO DENTRO DE DICHA CAMARA DE VACIO (1003), DICHO SOPORTE (1005, 1006, 1007) REDUCE SIGNIFICATIVAMENTE EL DESPLAZAMIENTO VERTICAL DE DICHAS PAREDES SUPERIOR E INFERIOR (1001, 1002) EN UNA PRESION AMBIENTE.
ES94101717T 1989-10-20 1990-10-10 Aparato de tipo robot. Expired - Lifetime ES2130295T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US42477189A 1989-10-20 1989-10-20

Publications (1)

Publication Number Publication Date
ES2130295T3 true ES2130295T3 (es) 1999-07-01

Family

ID=23683794

Family Applications (2)

Application Number Title Priority Date Filing Date
ES94101717T Expired - Lifetime ES2130295T3 (es) 1989-10-20 1990-10-10 Aparato de tipo robot.
ES90119433T Expired - Lifetime ES2090074T3 (es) 1989-10-20 1990-10-10 Robot biaxial con acoplamiento magnetico.

Family Applications After (1)

Application Number Title Priority Date Filing Date
ES90119433T Expired - Lifetime ES2090074T3 (es) 1989-10-20 1990-10-10 Robot biaxial con acoplamiento magnetico.

Country Status (6)

Country Link
US (5) US5583408A (es)
EP (3) EP0858867A3 (es)
JP (1) JPH0755464B2 (es)
KR (1) KR100204161B1 (es)
DE (2) DE69027273T2 (es)
ES (2) ES2130295T3 (es)

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Also Published As

Publication number Publication date
EP0600851A3 (en) 1994-08-17
US5990585A (en) 1999-11-23
JPH03136779A (ja) 1991-06-11
US5583408A (en) 1996-12-10
DE69032945T2 (de) 1999-09-16
EP0600851A2 (en) 1994-06-08
JPH0755464B2 (ja) 1995-06-14
EP0858867A3 (en) 1999-03-17
EP0858867A2 (en) 1998-08-19
EP0423608B1 (en) 1996-06-05
US5656902A (en) 1997-08-12
KR910007637A (ko) 1991-05-30
DE69027273T2 (de) 1997-01-23
DE69032945D1 (de) 1999-03-18
ES2090074T3 (es) 1996-10-16
DE69027273D1 (de) 1996-07-11
KR100204161B1 (ko) 1999-06-15
EP0423608A1 (en) 1991-04-24
EP0600851B1 (en) 1999-02-03
US5764012A (en) 1998-06-09
US5469035A (en) 1995-11-21

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