ES2143064T3 - Detector de radiacion. - Google Patents

Detector de radiacion.

Info

Publication number
ES2143064T3
ES2143064T3 ES95928548T ES95928548T ES2143064T3 ES 2143064 T3 ES2143064 T3 ES 2143064T3 ES 95928548 T ES95928548 T ES 95928548T ES 95928548 T ES95928548 T ES 95928548T ES 2143064 T3 ES2143064 T3 ES 2143064T3
Authority
ES
Spain
Prior art keywords
pct
sec
radiation detector
date
date apr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95928548T
Other languages
English (en)
Inventor
Andrew Ridyard
David Shrewsbury
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
4D Controls Ltd
Original Assignee
4D Controls Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 4D Controls Ltd filed Critical 4D Controls Ltd
Application granted granted Critical
Publication of ES2143064T3 publication Critical patent/ES2143064T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/429Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0256Compact construction
    • G01J3/0259Monolithic
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0262Constructional arrangements for removing stray light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29325Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
    • G02B6/29328Diffractive elements operating in reflection

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

UN DETECTOR DE RADIACION ULTRAVIOLETA COMPRENDE UNA LAMINA DE SILICE (10) QUE TIENE UNA RANURA DE ENTRADA (18) DESDE LA CUAL LA RADIACION DIVERGE HASTA UNA CARA REFLECTANTE CURVADA (20, 22) QUE LA REFLEJA HASTA UNA RETICULA DE DIFRACCION PLANA (28) COMO UN RAYO CONVERGENTE. LA RETICULA ENFOCA UN ORDEN ESPECTRAL REQUERIDO SOBRE UNA MATRIZ DE DETECTORES UV (24). USUALMENTE SE ENFOCA EL ESPECTRO DE PRIMER ORDEN. EL DETECTOR PUEDE SER DE TIPO MANUAL.
ES95928548T 1994-08-11 1995-08-11 Detector de radiacion. Expired - Lifetime ES2143064T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9416223A GB9416223D0 (en) 1994-08-11 1994-08-11 Radiation detector

Publications (1)

Publication Number Publication Date
ES2143064T3 true ES2143064T3 (es) 2000-05-01

Family

ID=10759726

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95928548T Expired - Lifetime ES2143064T3 (es) 1994-08-11 1995-08-11 Detector de radiacion.

Country Status (14)

Country Link
US (1) US5812262A (es)
EP (1) EP0775297B1 (es)
JP (1) JPH10504104A (es)
KR (1) KR100344161B1 (es)
CN (1) CN1079947C (es)
AT (1) ATE188290T1 (es)
AU (1) AU685998B2 (es)
CA (1) CA2197340A1 (es)
DE (1) DE69514237T2 (es)
ES (1) ES2143064T3 (es)
GB (1) GB9416223D0 (es)
NZ (1) NZ291207A (es)
WO (1) WO1996005487A1 (es)
ZA (1) ZA956700B (es)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19622077C2 (de) * 1996-05-31 1999-11-04 Kratz Josef Gmbh Vorrichtung zur Vermessung von Bräunungsgeräten
DE19801454C2 (de) * 1998-01-16 1999-12-09 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Bestimmung eines UV-Strahlungs-Indexes
DE19845701A1 (de) * 1998-10-05 2000-04-06 Palme Dieter Anordnungen zur Überwachung der Performance von DWDM-Mehrwellenlängensystemen
WO2000040935A1 (en) * 1999-01-08 2000-07-13 Adc Telecommunications, Inc. Spectrometer
GB2362460A (en) * 2000-05-19 2001-11-21 William Howard Considine Spectroscope
WO2002004901A1 (en) * 2000-07-11 2002-01-17 Adc Telecommunications, Inc. Monitoring apparatus for optical transmission systems
US7495765B2 (en) * 2001-05-17 2009-02-24 Thorlabs Gmbh Fiber polarimeter, the use thereof, as well as polarimetric method
US6816260B2 (en) * 2001-05-17 2004-11-09 Thorlabs Gmbh Fiber polarimeter, the use thereof, as well as polarimetric method
DE10137428A1 (de) * 2001-07-27 2003-02-20 Karlsruhe Forschzent Vorrichtung zur Messung eines Spektrums
DE10304312A1 (de) * 2003-02-04 2004-08-12 Carl Zeiss Jena Gmbh Kompakt-Spektrometer
US7034935B1 (en) * 2003-03-24 2006-04-25 Mpb Technologies Inc. High performance miniature spectrometer
JP4409860B2 (ja) * 2003-05-28 2010-02-03 浜松ホトニクス株式会社 光検出器を用いた分光器
JP4627410B2 (ja) * 2004-04-20 2011-02-09 浜松ホトニクス株式会社 分光器を用いた測定装置
CN100516791C (zh) * 2006-12-28 2009-07-22 华南师范大学 紫外线强度检测方法及装置
US7817274B2 (en) 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
WO2009070459A1 (en) * 2007-11-30 2009-06-04 Jingyun Zhang Miniature spectrometers working with cellular phones and other portable electronic devices
DE102008054733B4 (de) * 2008-12-16 2021-02-25 Hitachi High-Tech Analytical Science Finland Oy Spektrometer mit mehreren Gittern
JP5592089B2 (ja) 2009-08-19 2014-09-17 浜松ホトニクス株式会社 分光モジュール及びその製造方法
KR101154714B1 (ko) * 2009-08-31 2012-06-14 전남대학교산학협력단 평판형 분광기
CN102869963A (zh) * 2010-05-05 2013-01-09 台湾超微光学股份有限公司 微型光谱仪的光学机构
JP5538194B2 (ja) * 2010-11-30 2014-07-02 ソニー株式会社 光学装置及び電子機器
DE102011078756A1 (de) * 2011-07-06 2013-01-10 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Reduzierung von Streustrahlung bei Spektrometern mittels Innenwänden
DE102012210954B4 (de) * 2012-06-27 2022-10-20 Nico Correns Spektrometeranordnung
CN102998089B (zh) * 2012-11-23 2015-11-25 北京振兴计量测试研究所 一种极远紫外探测器校准装置
CN103017905B (zh) * 2012-12-31 2016-04-20 深圳先进技术研究院 集成平面变栅距光栅和微狭缝的微型光谱仪及其制造方法
EP2857810A1 (en) * 2013-10-02 2015-04-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Monolith spectrometer
KR101587241B1 (ko) * 2013-12-20 2016-01-20 (주)럭스콤 실시간 광학 스펙트럼 분석을 위한 방법 및 장치
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
GB2537675B (en) * 2015-04-24 2018-10-17 Qioptiq Ltd Waveguide for multispectral fusion
KR101823096B1 (ko) * 2016-05-30 2018-01-30 지오씨 주식회사 평판형 분광 모듈 및 그 제조방법
TWI610066B (zh) 2016-07-12 2018-01-01 Oto Photonics Inc. 光譜儀及其製作方法
DE102016225344A1 (de) * 2016-12-16 2018-06-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben
KR102248608B1 (ko) * 2019-12-13 2021-05-06 지오씨 주식회사 분광형 압력측정장치
US11639873B2 (en) * 2020-04-15 2023-05-02 Viavi Solutions Inc. High resolution multi-pass optical spectrum analyzer
CN117870867B8 (zh) * 2024-01-23 2024-11-08 中国科学院国家天文台 全球快速扫描极紫外太阳成像光谱仪及成像光谱方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1076393A (en) * 1964-10-29 1967-07-19 Ibm An optical system
JPS556320A (en) * 1978-06-27 1980-01-17 Ritsuo Hasumi Spectral module
US4375919A (en) * 1979-04-25 1983-03-08 Baylor University Multiple entrance aperture dispersive optical spectrometer
JPS56100323A (en) * 1980-01-12 1981-08-12 Ritsuo Hasumi Thick film spectrometer for light wavelength meter
GB8629283D0 (en) * 1986-12-08 1987-01-14 Gen Electric Co Plc Radiation meters
US5026160A (en) * 1989-10-04 1991-06-25 The United States Of America As Represented By The Secretary Of The Navy Monolithic optical programmable spectrograph (MOPS)
FR2680012B1 (fr) * 1991-07-30 1994-12-09 Sextant Avionique Dispositif de dispersion spectrale.
DE4223741A1 (de) * 1992-07-18 1994-01-27 Manfred Prof Riemann Verfahren und Anordnung zur Messung von strahlungsphysikalischen und lichttechnischen Grundgrößen

Also Published As

Publication number Publication date
ATE188290T1 (de) 2000-01-15
AU3227095A (en) 1996-03-07
GB9416223D0 (en) 1994-10-05
AU685998B2 (en) 1998-01-29
DE69514237D1 (de) 2000-02-03
WO1996005487A1 (en) 1996-02-22
DE69514237T2 (de) 2000-08-10
CA2197340A1 (en) 1996-02-22
CN1155330A (zh) 1997-07-23
EP0775297B1 (en) 1999-12-29
ZA956700B (en) 1996-04-10
JPH10504104A (ja) 1998-04-14
KR100344161B1 (ko) 2002-11-29
NZ291207A (en) 1998-07-28
CN1079947C (zh) 2002-02-27
EP0775297A1 (en) 1997-05-28
US5812262A (en) 1998-09-22

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