ES2293568T3 - Recubrimiento de una capa de polimero empleando plasma pulsado de baja potencioa en una camara de plasma de gran volumen. - Google Patents

Recubrimiento de una capa de polimero empleando plasma pulsado de baja potencioa en una camara de plasma de gran volumen. Download PDF

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Publication number
ES2293568T3
ES2293568T3 ES05736036T ES05736036T ES2293568T3 ES 2293568 T3 ES2293568 T3 ES 2293568T3 ES 05736036 T ES05736036 T ES 05736036T ES 05736036 T ES05736036 T ES 05736036T ES 2293568 T3 ES2293568 T3 ES 2293568T3
Authority
ES
Spain
Prior art keywords
chamber
plasma
power
formula
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES05736036T
Other languages
English (en)
Spanish (es)
Inventor
Stephen Richard Coulson
Ian Burnett
John Henry c/o JLS Designs Ltd SAMBELL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SECR DEFENCE
UK Secretary of State for Defence
Original Assignee
SECR DEFENCE
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by SECR DEFENCE, UK Secretary of State for Defence filed Critical SECR DEFENCE
Application granted granted Critical
Publication of ES2293568T3 publication Critical patent/ES2293568T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/34—Polymerisation in gaseous state
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F114/00—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F114/18—Monomers containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/52—Polymerisation initiated by wave energy or particle radiation by electric discharge, e.g. voltolisation
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/16—Chemical modification with polymerisable compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2506/00—Halogenated polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2506/00—Halogenated polymers
    • B05D2506/10—Fluorinated polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Polymerisation Methods In General (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Paints Or Removers (AREA)
  • Wrappers (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
ES05736036T 2004-03-18 2005-03-18 Recubrimiento de una capa de polimero empleando plasma pulsado de baja potencioa en una camara de plasma de gran volumen. Expired - Lifetime ES2293568T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0406049.7A GB0406049D0 (en) 2004-03-18 2004-03-18 Surface coatings
GB0406049 2004-03-18

Publications (1)

Publication Number Publication Date
ES2293568T3 true ES2293568T3 (es) 2008-03-16

Family

ID=32117905

Family Applications (1)

Application Number Title Priority Date Filing Date
ES05736036T Expired - Lifetime ES2293568T3 (es) 2004-03-18 2005-03-18 Recubrimiento de una capa de polimero empleando plasma pulsado de baja potencioa en una camara de plasma de gran volumen.

Country Status (15)

Country Link
US (2) US8389070B2 (de)
EP (1) EP1729894B1 (de)
JP (1) JP4931795B2 (de)
KR (1) KR101053043B1 (de)
CN (1) CN1946488B (de)
AT (1) ATE376891T1 (de)
AU (1) AU2005224155B2 (de)
CA (1) CA2559946C (de)
DE (1) DE602005003113T2 (de)
ES (1) ES2293568T3 (de)
GB (2) GB0406049D0 (de)
MX (1) MXPA06010611A (de)
NZ (1) NZ550498A (de)
PL (1) PL1729894T3 (de)
WO (1) WO2005089961A1 (de)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
US8852693B2 (en) 2011-05-19 2014-10-07 Liquipel Ip Llc Coated electronic devices and associated methods

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
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Also Published As

Publication number Publication date
GB2427407B (en) 2008-05-21
GB0406049D0 (en) 2004-04-21
CA2559946A1 (en) 2005-09-29
JP4931795B2 (ja) 2012-05-16
AU2005224155A1 (en) 2005-09-29
GB0618471D0 (en) 2006-11-08
CN1946488A (zh) 2007-04-11
ATE376891T1 (de) 2007-11-15
WO2005089961A9 (en) 2006-10-05
EP1729894B1 (de) 2007-10-31
DE602005003113D1 (de) 2007-12-13
WO2005089961A1 (en) 2005-09-29
CA2559946C (en) 2011-11-15
KR20070041673A (ko) 2007-04-19
EP1729894A1 (de) 2006-12-13
PL1729894T3 (pl) 2008-03-31
US20130136871A1 (en) 2013-05-30
DE602005003113T2 (de) 2008-05-29
MXPA06010611A (es) 2006-12-19
AU2005224155B2 (en) 2008-04-03
JP2007529308A (ja) 2007-10-25
US8389070B2 (en) 2013-03-05
KR101053043B1 (ko) 2011-08-01
CN1946488B (zh) 2010-12-08
US20080260965A1 (en) 2008-10-23
GB2427407A (en) 2006-12-27
NZ550498A (en) 2010-07-30

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