FR1428330A - Dispositif d'évaporation électronique sous vide de certaines substances, avec dépôt sur des objets - Google Patents

Dispositif d'évaporation électronique sous vide de certaines substances, avec dépôt sur des objets

Info

Publication number
FR1428330A
FR1428330A FR8381A FR8381A FR1428330A FR 1428330 A FR1428330 A FR 1428330A FR 8381 A FR8381 A FR 8381A FR 8381 A FR8381 A FR 8381A FR 1428330 A FR1428330 A FR 1428330A
Authority
FR
France
Prior art keywords
deposit
objects
under vacuum
device under
evaporation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8381A
Other languages
English (en)
French (fr)
Inventor
Erich Zollinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Application granted granted Critical
Publication of FR1428330A publication Critical patent/FR1428330A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
FR8381A 1964-03-09 1965-03-09 Dispositif d'évaporation électronique sous vide de certaines substances, avec dépôt sur des objets Expired FR1428330A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH300364A CH441928A (de) 1964-03-09 1964-03-09 Anordnung zur elektronischen Aufdampfung von Substanzen auf isolierende Unterlagen

Publications (1)

Publication Number Publication Date
FR1428330A true FR1428330A (fr) 1966-02-11

Family

ID=4246434

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8381A Expired FR1428330A (fr) 1964-03-09 1965-03-09 Dispositif d'évaporation électronique sous vide de certaines substances, avec dépôt sur des objets

Country Status (6)

Country Link
AT (1) AT252682B (de)
CH (1) CH441928A (de)
DE (1) DE1270354C2 (de)
FR (1) FR1428330A (de)
GB (1) GB1065745A (de)
NL (1) NL6404974A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099969A (en) * 1974-10-10 1978-07-11 Xerox Corporation Coating method to improve adhesion of photoconductors
US4013463A (en) 1975-08-15 1977-03-22 Leder Lewis B Photoreceptor fabrication utilizing AC ion plating
CH610013A5 (de) 1975-11-19 1979-03-30 Battelle Memorial Institute

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE875249C (de) * 1950-12-05 1953-04-30 Sueddeutsche Lab G M B H Bedampfungseinrichtung

Also Published As

Publication number Publication date
AT252682B (de) 1967-03-10
DE1270354B (de) 1968-06-12
NL6404974A (de) 1965-09-10
GB1065745A (en) 1967-04-19
DE1270354C2 (de) 1977-02-24
CH441928A (de) 1967-08-15

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