FR2557732B1 - Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede - Google Patents

Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede

Info

Publication number
FR2557732B1
FR2557732B1 FR8320963A FR8320963A FR2557732B1 FR 2557732 B1 FR2557732 B1 FR 2557732B1 FR 8320963 A FR8320963 A FR 8320963A FR 8320963 A FR8320963 A FR 8320963A FR 2557732 B1 FR2557732 B1 FR 2557732B1
Authority
FR
France
Prior art keywords
devices
laser machining
miniature piezoelectric
producing miniature
piezoelectric devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8320963A
Other languages
English (en)
Other versions
FR2557732A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8320963A priority Critical patent/FR2557732B1/fr
Priority to GB08431895A priority patent/GB2152281B/en
Priority to DE3446589A priority patent/DE3446589A1/de
Priority to JP59281988A priority patent/JPS60170314A/ja
Publication of FR2557732A1 publication Critical patent/FR2557732A1/fr
Application granted granted Critical
Publication of FR2557732B1 publication Critical patent/FR2557732B1/fr
Priority to US07/051,263 priority patent/US4820897A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FR8320963A 1983-12-28 1983-12-28 Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede Expired FR2557732B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8320963A FR2557732B1 (fr) 1983-12-28 1983-12-28 Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede
GB08431895A GB2152281B (en) 1983-12-28 1984-12-18 Process for producing miniature piezoelectric devices using laser machining and devices obtained by this process
DE3446589A DE3446589A1 (de) 1983-12-28 1984-12-20 Verfahren zum herstellen von piezoelektrischen miniaturbauelementen mit hilfe von laser-bearbeitung
JP59281988A JPS60170314A (ja) 1983-12-28 1984-12-27 レ−ザ加工を用いて小型圧電装置を製造する方法及びこの方法によつて作られた装置
US07/051,263 US4820897A (en) 1983-12-28 1987-05-05 Process for producing miniature piezoelectric devices using laser machining and devices obtained by this process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8320963A FR2557732B1 (fr) 1983-12-28 1983-12-28 Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede

Publications (2)

Publication Number Publication Date
FR2557732A1 FR2557732A1 (fr) 1985-07-05
FR2557732B1 true FR2557732B1 (fr) 1986-04-11

Family

ID=9295672

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8320963A Expired FR2557732B1 (fr) 1983-12-28 1983-12-28 Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede

Country Status (5)

Country Link
US (1) US4820897A (fr)
JP (1) JPS60170314A (fr)
DE (1) DE3446589A1 (fr)
FR (1) FR2557732B1 (fr)
GB (1) GB2152281B (fr)

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JPS6424469A (en) * 1987-07-20 1989-01-26 Sanyo Electric Co Photosensor manufacturing equipment
JPH0251289A (ja) * 1988-08-15 1990-02-21 Sekisui Plastics Co Ltd レーザー光線による複合圧電素子材料の製作方法
US5045668A (en) * 1990-04-12 1991-09-03 Armco Inc. Apparatus and method for automatically aligning a welding device for butt welding workpieces
US5208980A (en) * 1991-12-31 1993-05-11 Compag Computer Corporation Method of forming tapered orifice arrays in fully assembled ink jet printheads
US5703631A (en) * 1992-05-05 1997-12-30 Compaq Computer Corporation Method of forming an orifice array for a high density ink jet printhead
US5585016A (en) * 1993-07-20 1996-12-17 Integrated Device Technology, Inc. Laser patterned C-V dot
US5576589A (en) * 1994-10-13 1996-11-19 Kobe Steel Usa, Inc. Diamond surface acoustic wave devices
KR970705839A (ko) * 1995-06-27 1997-10-09 제이.쥐.에이.롤페즈 다층 전자 소자 제조 방법(Method of manufacturning multilayer electronic components)
JPH10305420A (ja) 1997-03-04 1998-11-17 Ngk Insulators Ltd 酸化物単結晶からなる母材の加工方法、機能性デバイスの製造方法
US6114795A (en) * 1997-06-24 2000-09-05 Tdk Corporation Piezoelectric component and manufacturing method thereof
US6337465B1 (en) 1999-03-09 2002-01-08 Mide Technology Corp. Laser machining of electroactive ceramics
JP3473538B2 (ja) * 1999-05-14 2003-12-08 株式会社村田製作所 圧電部品の周波数調整装置及び周波数調整方法
DE19954020C2 (de) * 1999-11-10 2002-02-28 Fraunhofer Ges Forschung Verfahren zur Herstellung eines piezoelektrischen Wandlers
US6509546B1 (en) * 2000-03-15 2003-01-21 International Business Machines Corporation Laser excision of laminate chip carriers
US6951120B2 (en) * 2002-03-19 2005-10-04 Wisconsin Alumni Research Foundation Machining of lithium niobate by laser ablation
US7210332B2 (en) * 2003-03-21 2007-05-01 Symyx Technologies, Inc. Mechanical resonator
US20070272666A1 (en) * 2006-05-25 2007-11-29 O'brien James N Infrared laser wafer scribing using short pulses
US7569977B2 (en) * 2006-08-02 2009-08-04 Cts Corporation Laser capacitance trimmed piezoelectric element and method of making the same
EP2270892B1 (fr) * 2008-04-18 2016-02-24 NGK Insulators, Ltd. Procédé et appareil de test d'un actionneur piézo-électrique/électrostrictif, et procédé de son ajustement
CN102218607B (zh) * 2010-04-15 2014-11-05 鸿富锦精密工业（深圳）有限公司 块体非晶合金的脉冲激光切割方法
DE102016201718B4 (de) * 2016-02-04 2022-02-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe mit polygonförmigem Piezo-Membranwandler
JP6752638B2 (ja) * 2016-06-27 2020-09-09 株式会社ディスコ 内部クラック検出方法、および内部クラック検出装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1059249A (en) * 1965-12-29 1967-02-15 Erich Kell Improvements in and relating to the working of diamonds by laser beam
CH1335667A4 (de) * 1967-09-25 1969-01-31 Laser Tech Sa Verfahren zum Bohren von Uhrensteinen mittels Laserstrahlung
US3629545A (en) * 1967-12-19 1971-12-21 Western Electric Co Laser substrate parting
GB1292981A (en) * 1969-01-24 1972-10-18 British Oxygen Co Ltd Cutting frangible workpieces
US3899428A (en) * 1972-03-07 1975-08-12 Bell Telephone Labor Inc Millimeter wave devices utilizing electrically polarized media
CH604268B5 (fr) * 1973-04-19 1978-08-31 Oscilloquartz Sa
JPS561789B2 (fr) * 1974-04-26 1981-01-16
IT1124751B (it) * 1976-02-27 1986-05-14 Magneti Marelli Spa Procedimento per ottenere aperture o sagomature in substrati ceramici mediante laser
US4109359A (en) * 1976-06-07 1978-08-29 The United States Of America As Represented By The Secretary Of The Navy Method of making ferroelectric crystals having tailored domain patterns
US4131484A (en) * 1978-02-13 1978-12-26 Western Electric Company, Inc. Frequency adjusting a piezoelectric device by lasering
US4243300A (en) * 1978-12-19 1981-01-06 The United States Of America As Represented By The Secretary Of The Navy Large aperture phased element modulator/antenna
US4224547A (en) * 1979-02-28 1980-09-23 Bell Telephone Laboratories, Incorporated Adjusting the frequency of piezoelectric crystal devices via fracturing the crystal surface
JPS55124282A (en) * 1979-03-19 1980-09-25 Matsushita Electric Ind Co Ltd Method of fabricating piezoelectric acoustic converter
US4248369A (en) * 1979-08-02 1981-02-03 General Electric Company Laser cutting of ceramic tubing
CH637862A5 (fr) * 1980-10-23 1983-08-31 Raskin Sa Machine a decouper un materiau en feuille.
US4355457A (en) * 1980-10-29 1982-10-26 Rca Corporation Method of forming a mesa in a semiconductor device with subsequent separation into individual devices
FR2515445A1 (fr) * 1981-10-28 1983-04-29 Trt Telecom Radio Electr Procede de realisation d'un pont d'alimentation soumis a des surcharges importantes et pont d'alimentation realise suivant ce procede
US4388146A (en) * 1982-03-25 1983-06-14 The United States Of America As Represented By The Secretary Of The Army Analog correction of quartz resonator angle of cut
EP0092427B1 (fr) * 1982-04-20 1989-04-05 Fujitsu Limited Résonateur piézoélectrique et méthode d'ajustement de sa fréquence de résonance
GB2124021A (en) * 1982-07-16 1984-02-08 Philips Electronic Associated Piezo-electric resonator or filter
JPS6072409A (ja) * 1983-09-29 1985-04-24 Fujitsu Ltd 圧電振動子の製造方法

Also Published As

Publication number Publication date
DE3446589A1 (de) 1985-07-11
GB8431895D0 (en) 1985-01-30
FR2557732A1 (fr) 1985-07-05
JPS60170314A (ja) 1985-09-03
GB2152281B (en) 1988-02-24
GB2152281A (en) 1985-07-31
US4820897A (en) 1989-04-11

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Legal Events

Date Code Title Description
TP Transmission of property
TP Transmission of property
ST Notification of lapse