FR2814599B1 - Dispositif laser de forte puissance crete et application a la generation de lumiere dans l'extreme ultra violet - Google Patents

Dispositif laser de forte puissance crete et application a la generation de lumiere dans l'extreme ultra violet

Info

Publication number
FR2814599B1
FR2814599B1 FR0012286A FR0012286A FR2814599B1 FR 2814599 B1 FR2814599 B1 FR 2814599B1 FR 0012286 A FR0012286 A FR 0012286A FR 0012286 A FR0012286 A FR 0012286A FR 2814599 B1 FR2814599 B1 FR 2814599B1
Authority
FR
France
Prior art keywords
application
laser device
light generation
ultra violet
extreme ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0012286A
Other languages
English (en)
Other versions
FR2814599A1 (fr
Inventor
Jean Marc Weulersse
Flanchec Vincent Le
Michel Gilbert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0012286A priority Critical patent/FR2814599B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to US10/381,015 priority patent/US20040022295A1/en
Priority to EP01965537A priority patent/EP1320913B1/fr
Priority to KR10-2003-7004352A priority patent/KR20030036839A/ko
Priority to JP2002531558A priority patent/JP5036118B2/ja
Priority to AU2001286170A priority patent/AU2001286170A1/en
Priority to RU2003112229/28A priority patent/RU2301485C2/ru
Priority to DE60102597T priority patent/DE60102597T2/de
Priority to AT01965537T priority patent/ATE263447T1/de
Priority to PCT/IB2001/001714 priority patent/WO2002027872A1/fr
Priority to CNB018162320A priority patent/CN1279666C/zh
Priority to KR1020087013881A priority patent/KR100900164B1/ko
Priority to TW090123750A priority patent/TW515134B/zh
Publication of FR2814599A1 publication Critical patent/FR2814599A1/fr
Application granted granted Critical
Publication of FR2814599B1 publication Critical patent/FR2814599B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383—Parallel arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
  • X-Ray Techniques (AREA)
  • Laser Surgery Devices (AREA)
FR0012286A 2000-09-27 2000-09-27 Dispositif laser de forte puissance crete et application a la generation de lumiere dans l'extreme ultra violet Expired - Fee Related FR2814599B1 (fr)

Priority Applications (13)

Application Number Priority Date Filing Date Title
FR0012286A FR2814599B1 (fr) 2000-09-27 2000-09-27 Dispositif laser de forte puissance crete et application a la generation de lumiere dans l'extreme ultra violet
CNB018162320A CN1279666C (zh) 2000-09-27 2001-09-19 高峰值功率激光设备及其在产生远紫外光中的应用
KR10-2003-7004352A KR20030036839A (ko) 2000-09-27 2001-09-19 하이 피크 파워 레이저 장치 및 극 자외선 광의생성으로의 적용
JP2002531558A JP5036118B2 (ja) 2000-09-27 2001-09-19 高ピーク出力レーザ装置および該装置の極紫外線光生成への適用
AU2001286170A AU2001286170A1 (en) 2000-09-27 2001-09-19 High-peak-power laser device and application to the generation of light in the extreme ultraviolet
RU2003112229/28A RU2301485C2 (ru) 2000-09-27 2001-09-19 Лазерное устройство с высокой пиковой мощностью для генерирования света в вакуумной ультрафиолетовой области спектра
US10/381,015 US20040022295A1 (en) 2000-09-27 2001-09-19 High-peak-power laser device and application to the generation of light in the extreme ultraviolet
AT01965537T ATE263447T1 (de) 2000-09-27 2001-09-19 Laser mit hoher spitzenleistung und dessen anwendung zur erzeugung von licht im extrem-uv- bereich
PCT/IB2001/001714 WO2002027872A1 (fr) 2000-09-27 2001-09-19 Systeme de lasers possedant une puissance de crete elevee et son utilisation pour generer de la lumiere dans l'ultraviolet extreme
EP01965537A EP1320913B1 (fr) 2000-09-27 2001-09-19 Systeme de lasers possedant une puissance de crete elevee et son utilisation pour generer de la lumiere dans l'ultraviolet extreme
KR1020087013881A KR100900164B1 (ko) 2000-09-27 2001-09-19 하이 피크 파워 레이저 장치 및 극 자외선 광의 생성으로의적용
DE60102597T DE60102597T2 (de) 2000-09-27 2001-09-19 Laser mit hoher spitzenleistung und dessen anwendung zur erzeugung von licht im extrem-uv-bereich
TW090123750A TW515134B (en) 2000-09-27 2001-09-26 High-peak-power laser device and application to the generation of light in the extreme ultraviolet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0012286A FR2814599B1 (fr) 2000-09-27 2000-09-27 Dispositif laser de forte puissance crete et application a la generation de lumiere dans l'extreme ultra violet

Publications (2)

Publication Number Publication Date
FR2814599A1 FR2814599A1 (fr) 2002-03-29
FR2814599B1 true FR2814599B1 (fr) 2005-05-20

Family

ID=8854730

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0012286A Expired - Fee Related FR2814599B1 (fr) 2000-09-27 2000-09-27 Dispositif laser de forte puissance crete et application a la generation de lumiere dans l'extreme ultra violet

Country Status (12)

Country Link
US (1) US20040022295A1 (fr)
EP (1) EP1320913B1 (fr)
JP (1) JP5036118B2 (fr)
KR (2) KR100900164B1 (fr)
CN (1) CN1279666C (fr)
AT (1) ATE263447T1 (fr)
AU (1) AU2001286170A1 (fr)
DE (1) DE60102597T2 (fr)
FR (1) FR2814599B1 (fr)
RU (1) RU2301485C2 (fr)
TW (1) TW515134B (fr)
WO (1) WO2002027872A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
WO2004036705A1 (fr) 2002-10-17 2004-04-29 Lumenis Inc. Systeme, procede et appareil pour produire des faisceaux laser d'au moins deux longueurs d'onde
FR2859545B1 (fr) 2003-09-05 2005-11-11 Commissariat Energie Atomique Procede et dispositif de lithographie par rayonnement dans l'extreme utraviolet
FR2884652B1 (fr) * 2005-04-19 2009-07-10 Femlight Sa Dispositif de generation d'impulsions laser amplifiees par fibres optiques a couches photoniques
JP4959956B2 (ja) * 2005-06-07 2012-06-27 株式会社日立製作所 アンテナ
US8253123B2 (en) 2008-12-16 2012-08-28 Koninklijke Philips Electronics N.V. Method and device for generating EUV radiation or soft X-rays with enhanced efficiency
JP5314433B2 (ja) * 2009-01-06 2013-10-16 ギガフォトン株式会社 極端紫外光源装置
JP5312959B2 (ja) * 2009-01-09 2013-10-09 ギガフォトン株式会社 極端紫外光源装置
WO2011013779A1 (fr) 2009-07-29 2011-02-03 株式会社小松製作所 Source de lumière ultraviolette extrême, son procédé de commande, et support d’enregistrement sur lequel est enregistré un programme pour ledit procédé
JP5578483B2 (ja) * 2009-09-01 2014-08-27 株式会社Ｉｈｉ Ｌｐｐ方式のｅｕｖ光源とその発生方法
US8462425B2 (en) 2010-10-18 2013-06-11 Cymer, Inc. Oscillator-amplifier drive laser with seed protection for an EUV light source
US9335637B2 (en) 2011-09-08 2016-05-10 Kla-Tencor Corporation Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
JP6021454B2 (ja) * 2011-10-05 2016-11-09 ギガフォトン株式会社 極端紫外光生成装置および極端紫外光生成方法
CN115119373B (zh) * 2022-05-31 2025-12-05 广东省智能机器人研究院 极紫外光产生方法及装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4264869A (en) * 1978-11-13 1981-04-28 Hunter Robert O Compressed pulse laser
JPS62160781A (ja) * 1986-01-09 1987-07-16 Agency Of Ind Science & Technol レ−ザ光照射装置
JPS63272092A (ja) * 1987-04-30 1988-11-09 Yoshiaki Arata 超強力複合レ−ザ・ビ−ム造出法
EP0377710A4 (en) * 1988-06-16 1991-04-10 Australasian Lasers Pty. Ltd. Hybrid laser
US5009658A (en) * 1989-04-14 1991-04-23 Karl Storz Endoscopy-America, Inc. Dual frequency laser lithotripter
JPH0442979A (ja) * 1990-06-07 1992-02-13 Asahi Glass Co Ltd レーザダイオード励起固体レーザ
RU2014690C1 (ru) * 1990-11-28 1994-06-15 Научно-исследовательский институт комплексных испытаний оптико-электронных приборов и систем Всесоюзного научного центра "Государственный оптический институт им.С.И.Вавилова" Способ получения импульса мощного лазерного излучения
US5235607A (en) * 1990-12-27 1993-08-10 Mitsui Petrochemical Industries, Ltd. Solid-state laser device and machining apparatus
JPH06174660A (ja) * 1992-10-08 1994-06-24 Rikagaku Kenkyusho Ｘ線像形成装置
US5375132A (en) * 1993-05-05 1994-12-20 Coherent, Inc. Solid state laser with interleaved output
US5488619A (en) * 1994-10-06 1996-01-30 Trw Inc. Ultracompact Q-switched microlasers and related method
KR100371125B1 (ko) * 1994-11-15 2003-08-19 제이엠에이알 테크놀로지 컴파니 저가의 평균 전력과 휘도가 높은 고상 펄스 레이저 시스템
JPH08327794A (ja) * 1995-06-01 1996-12-13 Olympus Optical Co Ltd レーザプラズマ光源
US5838709A (en) * 1995-06-07 1998-11-17 Nikon Corporation Ultraviolet laser source
JPH11233867A (ja) * 1998-02-10 1999-08-27 Nikon Corp パルスレーザ光発生装置
JP2002529918A (ja) * 1998-11-04 2002-09-10 レイテック レーザー インダストリーズ リミテッド 放射加算器
JP2000208799A (ja) * 1999-01-13 2000-07-28 Kanegafuchi Chem Ind Co Ltd 薄膜構成体の加工方法
US6097742A (en) * 1999-03-05 2000-08-01 Coherent, Inc. High-power external-cavity optically-pumped semiconductor lasers
FR2798781B1 (fr) * 1999-09-22 2002-08-30 Saint Louis Inst Source laser pouvant emettre des faisceaux a implusions multiples programmables
US6541731B2 (en) * 2000-01-25 2003-04-01 Aculight Corporation Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates
US7068689B2 (en) * 2001-01-18 2006-06-27 Spectra-Physics Gmbh Frequency-converted laser apparatus with frequency conversion crystals

Also Published As

Publication number Publication date
RU2301485C2 (ru) 2007-06-20
JP2004510356A (ja) 2004-04-02
KR20030036839A (ko) 2003-05-09
US20040022295A1 (en) 2004-02-05
EP1320913B1 (fr) 2004-03-31
JP5036118B2 (ja) 2012-09-26
EP1320913A1 (fr) 2003-06-25
FR2814599A1 (fr) 2002-03-29
KR100900164B1 (ko) 2009-06-02
DE60102597T2 (de) 2005-03-03
ATE263447T1 (de) 2004-04-15
AU2001286170A1 (en) 2002-04-08
CN1505857A (zh) 2004-06-16
WO2002027872A1 (fr) 2002-04-04
DE60102597D1 (de) 2004-05-06
TW515134B (en) 2002-12-21
KR20080059476A (ko) 2008-06-27
CN1279666C (zh) 2006-10-11

Similar Documents

Publication Publication Date Title
FR2814599B1 (fr) Dispositif laser de forte puissance crete et application a la generation de lumiere dans l'extreme ultra violet
EP1830442A3 (fr) Procédé et dispositif pour la génération d'une lumière à conjugaison de phases et conversion de longueur d'onde, et système doté du dispositif
BR0212039A (pt) Dispositivo manual a laser aperfeiçoado
ES2137699T3 (es) Laser de colorante con impulsos ultra-largos, excitado por lamparas destello utilizado para fines terapeuticos.
ATE287079T1 (de) Referenzlaserstrahlvorrichtung
FR2647973B1 (fr) Lasers de puissance pompes par diodes lasers
FR2694423B1 (fr) Dispositif de contrôle de la puissance de sortie des diodes laser.
DE602006009640D1 (de) Lasermikroporator
JPH11245439A5 (ja) レーザ駆動装置およびその制御方法
KR950034940A (ko) 높은 반복 속도의 미드 적외선 레이저
SE9601547D0 (sv) Laser-plasma röntgenkälla utnyttjande vätskor som strålmål
DE69732939D1 (de) Diodengepumptes Lasersystem und Verfahren
WO2002021643A3 (fr) Appareil et procede de generation de faisceaux lumineux de longueurs d'onde de sortie differente au moyen d'un opo et opo
WO2003096497A8 (fr) Laser ultraviolet profond a grande puissance equipe d'une optique a longue duree de vie
FR2667810B1 (fr) Procede et dispositif de travail au laser avec controle a distance.
AU2001248206A1 (en) Device for inscribing objects using laser beams
RU2003112229A (ru) Лазерное устройство с высокой пиковой мощностью для генерирования света в вакуумной ультрафиолетовой области спектра
KR970707619A (ko) 저가의 평균 전력과 휘도가 높은 고상 펄스 레이저 시스템(low cost, high average power, high brightness solid state laser)
FR2667733B1 (fr) Ensemble capteur-element de reglage, pour le reglage du faisceau de lasers de forte puissance.
KR970072567A (ko) 수직 캐버티 표면 방출 레이저용 반사 전력 모니터링 시스템
FR2786938B1 (fr) Dispositif de generation d'un faisceau laser de puissance, de haute qualite
TW200407529A (en) Rod lens, laser marking apparatus equipped with the rod lens and line-beam generating optical system
WO2002063399A1 (fr) Appareil et procede de formation d'hologrammes
FR2691589B1 (fr) Dispositif générateur d'oscillations pour faisceaux laser de forte puissance.
SE0002145D0 (sv) IR laser pointer

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20060531