ID21012A - Aparatus pengangkut - Google Patents
Aparatus pengangkutInfo
- Publication number
- ID21012A ID21012A IDP981324A ID981324A ID21012A ID 21012 A ID21012 A ID 21012A ID P981324 A IDP981324 A ID P981324A ID 981324 A ID981324 A ID 981324A ID 21012 A ID21012 A ID 21012A
- Authority
- ID
- Indonesia
- Prior art keywords
- aparatus
- transport
- aparatus transport
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
- H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
- H10P72/0456—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0402—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3216—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9290460A JPH11111809A (ja) | 1997-10-07 | 1997-10-07 | 搬送装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ID21012A true ID21012A (id) | 1999-04-08 |
Family
ID=17756315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IDP981324A ID21012A (id) | 1997-10-07 | 1998-10-05 | Aparatus pengangkut |
Country Status (9)
| Country | Link |
|---|---|
| EP (1) | EP0908931A3 (id) |
| JP (1) | JPH11111809A (id) |
| KR (1) | KR19990036696A (id) |
| CN (1) | CN1075665C (id) |
| AU (1) | AU707884B2 (id) |
| CA (1) | CA2249771A1 (id) |
| ID (1) | ID21012A (id) |
| SG (1) | SG67570A1 (id) |
| TW (1) | TW447007B (id) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19900804C2 (de) | 1999-01-12 | 2000-10-19 | Siemens Ag | Fördersystem |
| US6135698A (en) * | 1999-04-30 | 2000-10-24 | Asyst Technologies, Inc. | Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications |
| WO2001013423A1 (en) * | 1999-08-10 | 2001-02-22 | Ibiden Co., Ltd. | Semiconductor production device ceramic plate |
| JP2004356606A (ja) * | 2003-04-03 | 2004-12-16 | Seiko Epson Corp | 製造装置及び製造方法 |
| CN107673073A (zh) * | 2017-09-16 | 2018-02-09 | 合肥惠科金扬科技有限公司 | 一种液晶面板输送装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3418243A1 (de) * | 1983-05-20 | 1984-11-22 | Varian Associates, Inc., Palo Alto, Calif. | Automatisierte kassettenfoerderanlage |
| JPS6162739A (ja) * | 1984-09-03 | 1986-03-31 | Sanki Eng Co Ltd | クリ−ントンネル |
| US4723480A (en) * | 1985-04-19 | 1988-02-09 | Hitachi, Ltd. | Manufacturing apparatus with air cleaning device |
| JPH0756879B2 (ja) * | 1988-03-31 | 1995-06-14 | 日鉄セミコンダクター株式会社 | 半導体の無塵化製造装置 |
| US5326316A (en) * | 1991-04-17 | 1994-07-05 | Matsushita Electric Industrial Co., Ltd. | Coupling type clean space apparatus |
| US5752796A (en) * | 1996-01-24 | 1998-05-19 | Muka; Richard S. | Vacuum integrated SMIF system |
| JP3218425B2 (ja) * | 1996-03-25 | 2001-10-15 | 東京エレクトロン株式会社 | 処理方法及び処理装置 |
-
1997
- 1997-10-07 JP JP9290460A patent/JPH11111809A/ja active Pending
-
1998
- 1998-09-25 SG SG1998004170A patent/SG67570A1/en unknown
- 1998-09-29 KR KR1019980040462A patent/KR19990036696A/ko not_active Ceased
- 1998-09-30 TW TW087116303A patent/TW447007B/zh not_active IP Right Cessation
- 1998-09-30 EP EP98203286A patent/EP0908931A3/en not_active Withdrawn
- 1998-10-02 AU AU87882/98A patent/AU707884B2/en not_active Ceased
- 1998-10-05 ID IDP981324A patent/ID21012A/id unknown
- 1998-10-06 CN CN98118288A patent/CN1075665C/zh not_active Expired - Fee Related
- 1998-10-07 CA CA002249771A patent/CA2249771A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CA2249771A1 (en) | 1999-04-07 |
| CN1075665C (zh) | 2001-11-28 |
| KR19990036696A (ko) | 1999-05-25 |
| AU707884B2 (en) | 1999-07-22 |
| TW447007B (en) | 2001-07-21 |
| CN1213637A (zh) | 1999-04-14 |
| SG67570A1 (en) | 1999-09-21 |
| JPH11111809A (ja) | 1999-04-23 |
| EP0908931A3 (en) | 2003-08-27 |
| AU8788298A (en) | 1999-04-29 |
| EP0908931A2 (en) | 1999-04-14 |
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