IL112765A - An active vibration isolation system that uses a hard stimulus - Google Patents

An active vibration isolation system that uses a hard stimulus

Info

Publication number: IL112765A
Authority: IL; Israel
Prior art keywords: small mass; payload; stiff; mass; vibration isolation
Prior art date: 1994-04-04

Application number

IL112765A

Other languages

English (en)

Hebrew (he)

Other versions

IL112765A0 (en

Original Assignee

Applied Power Ind Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-04-04

Filing date

1995-02-23

Publication date

1998-03-10

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22835727&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL112765(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1995-02-23 Application filed by Applied Power Ind Inc filed Critical Applied Power Ind Inc

1995-05-26 Publication of IL112765A0 publication Critical patent/IL112765A0/xx

1998-03-10 Publication of IL112765A publication Critical patent/IL112765A/en

Links

238000002955 isolation Methods 0.000 title claims description 70
238000006073 displacement reaction Methods 0.000 claims description 45
230000033001 locomotion Effects 0.000 claims description 40
229920001971 elastomer Polymers 0.000 claims description 22
239000000806 elastomer Substances 0.000 claims description 17
238000000034 method Methods 0.000 claims description 13
238000012546 transfer Methods 0.000 claims description 11
230000000903 blocking effect Effects 0.000 claims description 7
230000009467 reduction Effects 0.000 claims description 7
230000008878 coupling Effects 0.000 claims description 5
238000010168 coupling process Methods 0.000 claims description 5
238000005859 coupling reaction Methods 0.000 claims description 5
239000000725 suspension Substances 0.000 claims description 3
230000003993 interaction Effects 0.000 claims description 2
230000010363 phase shift Effects 0.000 claims description 2
230000000284 resting effect Effects 0.000 claims 1
230000006870 function Effects 0.000 description 39
239000003990 capacitor Substances 0.000 description 36
238000010586 diagram Methods 0.000 description 17
235000012431 wafers Nutrition 0.000 description 17
229910052751 metal Inorganic materials 0.000 description 14
239000002184 metal Substances 0.000 description 14
230000006835 compression Effects 0.000 description 13
238000007906 compression Methods 0.000 description 13
230000000712 assembly Effects 0.000 description 6
238000000429 assembly Methods 0.000 description 6
238000013016 damping Methods 0.000 description 6
238000013461 design Methods 0.000 description 6
229910000831 Steel Inorganic materials 0.000 description 5
230000010354 integration Effects 0.000 description 5
239000005060 rubber Substances 0.000 description 5
239000010959 steel Substances 0.000 description 5
230000007613 environmental effect Effects 0.000 description 4
230000036316 preload Effects 0.000 description 4
230000035945 sensitivity Effects 0.000 description 4
229910052782 aluminium Inorganic materials 0.000 description 3
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
230000003321 amplification Effects 0.000 description 3
238000005452 bending Methods 0.000 description 3
230000008901 benefit Effects 0.000 description 3
230000008602 contraction Effects 0.000 description 3
238000001914 filtration Methods 0.000 description 3
230000005291 magnetic effect Effects 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
239000000463 material Substances 0.000 description 3
238000003199 nucleic acid amplification method Methods 0.000 description 3
230000004044 response Effects 0.000 description 3
CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
239000000872 buffer Substances 0.000 description 2
230000008859 change Effects 0.000 description 2
238000004891 communication Methods 0.000 description 2
239000004020 conductor Substances 0.000 description 2
230000007423 decrease Effects 0.000 description 2
230000001419 dependent effect Effects 0.000 description 2
230000004069 differentiation Effects 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000005259 measurement Methods 0.000 description 2
229920001084 poly(chloroprene) Polymers 0.000 description 2
238000012545 processing Methods 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
229910001369 Brass Inorganic materials 0.000 description 1
CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
230000005355 Hall effect Effects 0.000 description 1
230000009286 beneficial effect Effects 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
239000010951 brass Substances 0.000 description 1
239000006229 carbon black Substances 0.000 description 1
238000005266 casting Methods 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000012937 correction Methods 0.000 description 1
238000004512 die casting Methods 0.000 description 1
239000013536 elastomeric material Substances 0.000 description 1
229920006332 epoxy adhesive Polymers 0.000 description 1
230000005284 excitation Effects 0.000 description 1
238000000695 excitation spectrum Methods 0.000 description 1
230000005294 ferromagnetic effect Effects 0.000 description 1
230000005484 gravity Effects 0.000 description 1
238000009499 grossing Methods 0.000 description 1
238000012905 input function Methods 0.000 description 1
238000003780 insertion Methods 0.000 description 1
230000037431 insertion Effects 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
230000008569 process Effects 0.000 description 1
239000012763 reinforcing filler Substances 0.000 description 1
230000010076 replication Effects 0.000 description 1
125000006850 spacer group Chemical group 0.000 description 1
238000001228 spectrum Methods 0.000 description 1
238000013519 translation Methods 0.000 description 1
238000005303 weighing Methods 0.000 description 1

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
- E04H9/00—Buildings, groups of buildings or shelters adapted to withstand or provide protection against abnormal external influences, e.g. war-like action, earthquake or extreme climate
- E04H9/02—Buildings, groups of buildings or shelters adapted to withstand or provide protection against abnormal external influences, e.g. war-like action, earthquake or extreme climate withstanding earthquake or sinking of ground
- E04H9/021—Bearing, supporting or connecting constructions specially adapted for such buildings
- E04H9/0215—Bearing, supporting or connecting constructions specially adapted for such buildings involving active or passive dynamic mass damping systems
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2600/00—Indexing codes relating to particular elements, systems or processes used on suspension systems or suspension control systems
- B60G2600/18—Automatic control means
- B60G2600/182—Active control means
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41191—Cancel vibration by positioning two slides, opposite acceleration

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
General Engineering & Computer Science (AREA)
Architecture (AREA)
Environmental & Geological Engineering (AREA)
Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Mechanical Engineering (AREA)
Aviation & Aerospace Engineering (AREA)
Acoustics & Sound (AREA)
Emergency Management (AREA)
Business, Economics & Management (AREA)
Public Health (AREA)
Epidemiology (AREA)
Toxicology (AREA)
Civil Engineering (AREA)
Structural Engineering (AREA)
Atmospheric Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Vibration Prevention Devices (AREA)

IL112765A 1994-04-04 1995-02-23 An active vibration isolation system that uses a hard stimulus IL112765A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US08/223,256 US5660255A (en)	1994-04-04	1994-04-04	Stiff actuator active vibration isolation system

Publications (2)

Publication Number	Publication Date
IL112765A0 IL112765A0 (en)	1995-05-26
IL112765A true IL112765A (en)	1998-03-10

Family

ID=22835727

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL112765A IL112765A (en)	1994-04-04	1995-02-23	An active vibration isolation system that uses a hard stimulus

Country Status (8)

Country	Link
US (2)	US5660255A (de)
EP (1)	EP0676558B1 (de)
JP (1)	JP3729888B2 (de)
KR (1)	KR0162280B1 (de)
BR (1)	BR9501432A (de)
CA (1)	CA2146200A1 (de)
DE (1)	DE69509819T2 (de)
IL (1)	IL112765A (de)

Families Citing this family (124)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6791098B2 (en) *	1994-01-27	2004-09-14	Cymer, Inc.	Multi-input, multi-output motion control for lithography system
US5750897A (en) *	1995-06-14	1998-05-12	Canon Kabushiki Kaisha	Active anti-vibration apparatus and method of manufacturing the same
US5975508A (en) *	1995-09-06	1999-11-02	Applied Power Inc.	Active vehicle seat suspension system
JPH09184537A (ja) *	1996-01-05	1997-07-15	Canon Inc	除振装置
GB9621498D0 (en) *	1996-10-15	1996-12-04	Secr Defence	Vibration attenuation system
US5826864A (en) *	1997-02-26	1998-10-27	Gte Internetworking Incorporated	Active vibration mount
JP3825869B2 (ja) *	1997-03-19	2006-09-27	キヤノン株式会社	能動除振装置
US5973440A (en) *	1997-07-07	1999-10-26	Nitzsche; Fred	Structural component having means for actively varying its stiffness to control vibrations
JPH11230246A (ja) *	1998-02-18	1999-08-27	Tokkyo Kiki Kk	アクティブ除振装置
US6394407B1 (en)	1998-07-14	2002-05-28	Newport Corporation	Passive vibration isolator with profiled supports
US6209841B1 (en)	1998-07-14	2001-04-03	Newport Corporation	Active isolation module
US6198580B1 (en)	1998-08-17	2001-03-06	Newport Corporation	Gimballed optical mount
US6378672B1 (en)	1998-10-13	2002-04-30	Canon Kabushiki Kaisha	Active vibration isolation device and its control method
GB9824151D0 (en) *	1998-11-04	1998-12-30	Marconi Electronic Syst Ltd	Structural elements
US6516130B1 (en)	1998-12-30	2003-02-04	Newport Corporation	Clip that aligns a fiber optic cable with a laser diode within a fiber optic module
US6996506B2 (en)	1999-02-23	2006-02-07	Newport Corporation	Process and device for displacing a moveable unit on a base
FR2790115B1 (fr)	1999-02-23	2001-05-04	Micro Controle	Procede et dispositif pour deplacer un mobile sur une base montee elastiquement par rapport au sol
FR2792554B1 (fr) *	1999-04-22	2001-06-29	Vibrachoc Sa	Dispositif resonant, tel que batteur ou generateur d'efforts
US6511035B1 (en)	1999-08-03	2003-01-28	Newport Corporation	Active vibration isolation systems with nonlinear compensation to account for actuator saturation
US6354576B1 (en) *	1999-10-22	2002-03-12	Honeywell International Inc.	Hybrid passive and active vibration isolator architecture
WO2001044681A2 (en) *	1999-11-17	2001-06-21	Board Of Trustees Operating Michigan State University	Hybrid digital-analog controller
US6570298B2 (en)	2000-05-09	2003-05-27	Tokkyokiki Co., Ltd.	Vibration control device and driving method thereof
DE10043128C2 (de) *	2000-08-31	2003-05-08	Univ Hannover	Tilgervorrichtung zur Absorption einer unerwünschten Erregung
US6681152B1 (en) *	2000-11-30	2004-01-20	Bbnt Solutions Llc	Predictive active compensation systems
NL1017304C2 (nl) *	2001-02-07	2002-08-08	Ten Cate Nicolon B V	Werkwijze en inrichting voor het bepalen van waarden voor de stijfheid en demping van oppervlakken.
US6655840B2 (en)	2001-02-13	2003-12-02	Newport Corporation	Stiff cross roller bearing configuration
US6601524B2 (en)	2001-03-28	2003-08-05	Newport Corporation	Translation table with a spring biased dovetail bearing
DE50110153D1 (de) *	2001-04-24	2006-07-27	Peter Heiland	Vorrichtung zur schwingungsisolierenden Aufnahme von Lasten
US6791058B2 (en)	2001-04-25	2004-09-14	Newport Corporation	Automatic laser weld machine for assembling photonic components
US6568666B2 (en)	2001-06-13	2003-05-27	Newport Corporation	Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload
US6619611B2 (en)	2001-07-02	2003-09-16	Newport Corporation	Pneumatic vibration isolator utilizing an elastomeric element for isolation and attenuation of horizontal vibration
EP1281889A1 (de) *	2001-08-03	2003-02-05	Peter Heiland	Verfahren zum Erfassen eines Schwingungsisolationssystems
DE10145145A1 (de) *	2001-09-13	2003-04-03	Bsh Bosch Siemens Hausgeraete	Anordnung zur Schwingungsdämpfung
WO2003029842A2 (en) *	2001-10-03	2003-04-10	The Penn State Research Foundation	Active floor vibration control system
EP1321822A1 (de) *	2001-12-21	2003-06-25	ASML Netherlands B.V.	Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
US20030168295A1 (en) *	2002-02-12	2003-09-11	Zhixiu Han	Active vibration isolation system
US6966535B2 (en)	2002-05-07	2005-11-22	Newport Corporation	Snubber for pneumatically isolated platforms
US7346509B2 (en) *	2002-09-27	2008-03-18	Callminer, Inc.	Software for statistical analysis of speech
US6953109B2 (en)	2002-10-08	2005-10-11	Nikon Corporation	Vibration isolator with low lateral stiffness
CN100384075C (zh) *	2003-02-12	2008-04-23	北京磁伸稀土技术发展有限公司	一种振动驱动器输出功率的优化方法、设备及其产品
DE10361481B4 (de)	2003-07-22	2006-08-17	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Modulare Schnittstelle zum Dämpfen mechanischer Schwingungen
CN100465473C (zh) *	2003-09-05	2009-03-04	皇家飞利浦电子股份有限公司	包括惯性基准质量的用于主动隔振的致动器装置
US8091694B2 (en) *	2003-09-05	2012-01-10	Koninklijke Philips Electronics N.V.	Actuator arrangement for active vibration isolation comprising an inertial reference mass
DE10344538A1 (de) *	2003-09-25	2005-05-12	Integrated Dynamics Eng Gmbh	Verfahren und Vorrichtung zur Schwingungsisolation, insbesondere für Elektronenstrahl-Meßwerkzeuge
US20050077129A1 (en) *	2003-10-06	2005-04-14	Joel Sloan	Multi-axis shock and vibration relay isolator
US7320455B2 (en)	2003-10-24	2008-01-22	Newport Corporation	Instrumented platform for vibration-sensitive equipment
DE10351303A1 (de) *	2003-10-31	2005-05-25	Daimlerchrysler Ag	Vorrichtung zur Schwingungsdämpfung
CN1914436A (zh) *	2004-01-26	2007-02-14	皇家飞利浦电子股份有限公司	使用有效载荷作为惯性参考质量的有源隔振的致动器装置
DE102004019242A1 (de)	2004-04-16	2005-11-17	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Schnittstelle mit Schubableitung zum Dämpfen mechanischer Schwingungen
US8231098B2 (en)	2004-12-07	2012-07-31	Newport Corporation	Methods and devices for active vibration damping of an optical structure
TWI283732B (en) *	2004-12-22	2007-07-11	Ind Tech Res Inst	Vibration isolation device
DE102005003013B3 (de) *	2005-01-21	2006-09-28	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Vorrichtung zur dynamischen Belastungsprüfung einer Probe
US20060236456A1 (en) *	2005-03-03	2006-10-26	Beale Robert S	Patient transport method and apparatus
US20060226289A1 (en) *	2005-04-06	2006-10-12	Emiph, Llc	Method and apparatus for an adaptive suspension support system
GB0506990D0 (en) *	2005-04-06	2005-05-11	Bae Systems Plc	Vibration isolation
US8424885B2 (en) *	2005-12-22	2013-04-23	Elliptical Mobile Solutions, LLC	Method and apparatus for an environmentally-protected electronic equipment enclosure
US8400613B2 (en) *	2005-05-02	2013-03-19	Nikon Corporation	Optical element driving apparatus, projection optical system, exposure apparatus and device manufacturing method
US7726452B2 (en) *	2005-06-02	2010-06-01	Technical Manufacturing Corporation	Systems and methods for active vibration damping
EP1966653A2 (de) *	2005-12-20	2008-09-10	Koninklijke Philips Electronics N.V.	Gemischtes sensorsystem und verfahren
US8302456B2 (en)	2006-02-23	2012-11-06	Asylum Research Corporation	Active damping of high speed scanning probe microscope components
US7550880B1 (en)	2006-04-12	2009-06-23	Motran Industries Inc	Folded spring flexure suspension for linearly actuated devices
WO2008060681A2 (en) *	2006-05-06	2008-05-22	Lord Corporation	Helicopter reduced vibration isolator axial support strut
US7819013B2 (en) *	2006-07-05	2010-10-26	The Hong Kong Polytechnic University	Method and apparatus for measuring oscillation amplitude of an ultrasonic device
DE102006046593B4 (de) *	2006-09-30	2009-12-10	Deutsches Zentrum für Luft- und Raumfahrt e.V.	Vorrichtung zur Reduktion von Schwingungen einer Struktur
US8584820B2 (en) *	2006-10-31	2013-11-19	Nissan Motor Co., Ltd.	Vibration reducing device and vibration reducing method
GB2447231B (en) *	2007-03-05	2012-03-07	Ultra Electronics Ltd	Active tuned vibration absorber
KR100887281B1 (ko) *	2007-05-23	2009-03-06	한국과학기술원	인공위성의 지터 저감 방법
NL1036161A1 (nl) *	2007-11-20	2009-05-25	Asml Netherlands Bv	Combination of structure and an active damping system, and a lithographic apparatus.
EP2075484A1 (de) *	2007-12-31	2009-07-01	Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO	System zur Isolierung aktiver Vibrationen mit träger Bezugsmasse
EP2119938A1 (de) *	2008-05-15	2009-11-18	Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO	Schwingungssensor und System zur Schwingungsisolierung
JP2009293758A (ja) *	2008-06-09	2009-12-17	Konica Minolta Business Technologies Inc	マウントダンパーおよびそれを用いた画像形成装置
US20100030384A1 (en) *	2008-07-29	2010-02-04	Technical Manufacturing Corporation	Vibration Isolation System With Design For Offloading Payload Forces Acting on Actuator
JP5322710B2 (ja) *	2009-03-06	2013-10-23	特許機器株式会社	サーボ型振動センサ及び振動制御装置
EP2261530A1 (de) *	2009-06-12	2010-12-15	Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO	Aktives Vibrationsisolierungs- und -dämpfungssystem
JP5308249B2 (ja) *	2009-06-22	2013-10-09	三菱重工業株式会社	サーボ制御装置
US8314585B2 (en) *	2009-09-25	2012-11-20	Drs Rsta, Inc.	Methods and systems for eliminating structural modes in a servo mechanism employed to control a flexible structure
WO2011065441A1 (ja) *	2009-11-25	2011-06-03	シンフォニアテクノロジー株式会社	制振装置及びこれを備えた車両
TWI467099B (zh) *	2009-12-04	2015-01-01	Fu Cheng Wang	一種雙層平台減震裝置及其減震的方法
CN102141733B (zh) *	2010-01-28	2012-11-14	上海微电子装备有限公司	减振装置及应用其的光刻装置
EP2447777B1 (de) *	2010-10-27	2019-08-07	ASML Netherlands BV	Lithografische Vorrichtung zur Übertragung von Mustern von einer Musterungsvorrichtung auf ein Substrat sowie Dämpfungsverfahren
EP2469340B1 (de)	2010-12-21	2021-01-06	ASML Netherlands B.V.	Lithografische Vorrichtung und Verfahren zur Herstellung einer Vorrichtung
EP2659159B1 (de)	2010-12-29	2019-05-08	Newport Corporation	Abstimmbare schwingungsdämpfer und verfahren zu ihrer herstellung und abstimmung
EP2668485A1 (de) *	2011-01-30	2013-12-04	Aquarius Spectrum Ltd.	Verfahren und system zur leckerkennung in einem rohrleitungsnetz
CN102162500B (zh) *	2011-03-11	2012-05-23	华中科技大学	一种精密主动减振装置
DE102011006024A1 (de)	2011-03-24	2012-09-27	Carl Zeiss Smt Gmbh	Anordnung zur Vibrationsisolation einer Nutzlast
EP2505956A1 (de)	2011-03-29	2012-10-03	Hexagon Technology Center GmbH	Koordinatenmessmaschine
KR101991860B1 (ko) *	2012-05-07	2019-06-24	삼성전자주식회사	카메라 모듈에서 액추에이터 제어 방법 및 장치
US8899393B2 (en)	2012-06-08	2014-12-02	Technical Manufacturing Corporation	Active vibration isolation system
US9102209B2 (en) *	2012-06-27	2015-08-11	Bose Corporation	Anti-causal vehicle suspension
US9546946B2 (en)	2013-03-28	2017-01-17	Kla-Tencor Corporation	Metrology target indentification, design and verification
JP6302305B2 (ja) *	2014-03-18	2018-03-28	キヤノン株式会社	振動低減装置、リソグラフィ装置、および物品の製造方法
EP2930395B1 (de) *	2014-04-08	2020-03-04	Airbus Defence and Space GmbH	Rauschverringerungssystem, verfahren und hubschrauber
US9383388B2 (en)	2014-04-21	2016-07-05	Oxford Instruments Asylum Research, Inc	Automated atomic force microscope and the operation thereof
US10184539B2 (en)	2014-09-30	2019-01-22	Technical Manufacturing Corporation	Vibration isolation system
US9458907B2 (en)	2014-10-02	2016-10-04	Honeywell International Inc.	Vibration isolation systems including multi-parameter isolators providing piezoelectric-based damping
WO2016187281A1 (en)	2015-05-19	2016-11-24	Technical Manufacturing Corporation	Laminated, low-profile, vibration-damped tabletop
CN105094165B (zh) *	2015-08-24	2017-06-16	华中科技大学	一种基于Stewart主动平台的振动抑制方法
RU2654241C2 (ru) *	2016-03-09	2018-05-17	Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Омский государственный технический университет"	Динамический гаситель колебаний
US20190078643A1 (en) *	2016-03-15	2019-03-14	Technical Manufacturing Corporation	User-tuned, active vibration-isolation system
CA2950508A1 (en)	2016-12-02	2018-06-02	National Research Council Of Canada	Compact vibration reducing human support
CN106678233A (zh) *	2016-12-05	2017-05-17	湖南大学	基于pzt的新型主动减振器
US10065474B2 (en) *	2016-12-09	2018-09-04	GM Global Technology Operations LLC	Vehicle with suspension force decoupling system
CN106594172B (zh) *	2017-01-12	2019-02-26	北京理工大学	具有准零刚度的半主动控制型垂直隔振器
CN106840225B (zh) *	2017-01-24	2019-11-29	广东工业大学	用于绝对式光栅尺的一体化振动控制系统及方法
CN107165979B (zh) *	2017-06-06	2018-09-14	哈尔滨工业大学	基于超磁致伸缩与石英摆线复合机理的隔微振装置
CN107023605B (zh) *	2017-06-06	2018-08-17	哈尔滨工业大学	基于磁致伸缩与螺旋结构石英摆线复合机理的隔微振装置
CN107084224B (zh) *	2017-06-06	2018-09-11	哈尔滨工业大学	基于磁致伸缩与直槽结构石英摆线复合机理的隔微振装置
CN107044505B (zh) *	2017-06-06	2018-10-30	哈尔滨工业大学	基于超磁致伸缩与石英摆线复合冷却机理的隔微振装置
US11512757B2 (en)	2017-08-15	2022-11-29	Technical Manufacturing Coporation	Precision vibration-isolation system with floor feedforward assistance
CN109261476B (zh) *	2018-10-18	2023-10-27	四川大学	一种用于夹心式压电超声换能器的新型后盖板
CN109268442B (zh) *	2018-10-30	2024-06-18	中国船舶重工集团公司第七一九研究所	一种一体化主动隔振作动器
WO2020210183A1 (en)	2019-04-08	2020-10-15	Technical Manufacturing Corporation	Magnetic field suppression system
US11434973B2 (en)	2019-04-10	2022-09-06	Ohio University	Passive variable stiffness device for vibration isolation
US11898926B2 (en)	2019-09-13	2024-02-13	Technical Manufacturing Corporation	Inspection apparatus and methods for precision vibration-isolation tabletops
GB2599614B (en) *	2020-06-04	2024-10-30	Bombardier Inc	Active tuned vibration absorber
CN111997217A (zh) *	2020-08-24	2020-11-27	南京丹枫机械科技有限公司	一种杠杆式调频质量阻尼器
KR102481350B1 (ko) *	2021-02-16	2022-12-27	에피텍(주)	건축물의 진동을 이용하여 서비스를 제공하기 위한 시스템 및 그 방법
CN113202897A (zh) *	2021-05-07	2021-08-03	华中科技大学	一种基于压电陶瓷的主被动减振装置及六自由度减振系统
CN114384798B (zh) *	2021-12-08	2023-08-08	北京理工大学	减振控制装置及应用其的减振系统
CN114183497B (zh) *	2021-12-17	2024-02-27	中国船舶重工集团公司第七0九研究所	一种基于压电效应的三轴向主动减振器及其系统
CN114707349B (zh) *	2022-04-21	2025-02-11	南京航空航天大学	基于机械阻抗的直升机振动控制方法、装置和存储介质
CN115276464B (zh) *	2022-06-23	2025-03-28	中国空间技术研究院	多自由度作动器
CN115059730B (zh) *	2022-07-01	2023-09-26	上海隐冠半导体技术有限公司	运动系统
TWI869920B (zh) *	2023-07-10	2025-01-11	友達光電股份有限公司	抗振單元

Family Cites Families (74)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3701499A (en) *	1968-04-08	1972-10-31	Wright Barry Corp	Active fluid isolation system
US3807678A (en) *	1972-09-19	1974-04-30	Lord Corp	System for controlling the transmission of energy between spaced members
GB1577322A (en) *	1976-05-13	1980-10-22	Bearcroft R	Active attenuation of recurring vibrations
US4122303A (en) *	1976-12-10	1978-10-24	Sound Attenuators Limited	Improvements in and relating to active sound attenuation
JPH0740199B2 (ja) *	1979-08-16	1995-05-01	チャプリンパテンツホ−ルディングカンパニ− インコ−ポレ−テッド	繰り返し振動の相殺の方法
EP0040613B1 (de) *	1979-11-21	1986-02-05	Sound Attenuators Limited	Verbessertes verfahren und apparat zum dämpfen der vibration
US4473906A (en) *	1980-12-05	1984-09-25	Lord Corporation	Active acoustic attenuator
ZA825676B (en) *	1981-08-11	1983-06-29	Sound Attenuators Ltd	Method and apparatus for low frequency active attennuation
US4490841A (en) *	1981-10-21	1984-12-25	Sound Attenuators Limited	Method and apparatus for cancelling vibrations
ZA828700B (en) *	1981-11-26	1983-09-28	Sound Attenuators Ltd	Method of and apparatus for cancelling vibrations from a source of repetitive vibrations
AU571834B2 (en) *	1982-04-19	1988-04-28	Chaplin Patents Holding Co. Ltd	Method of and apparatus for active vibration isolation
US4477505A (en) *	1982-12-13	1984-10-16	Lord Corporation	Structure for absorbing acoustic and other wave energy
US4562589A (en) *	1982-12-15	1985-12-31	Lord Corporation	Active attenuation of noise in a closed structure
JPS61182112A (ja) *	1985-02-06	1986-08-14	Rion Co Ltd	精密変位駆動装置
US4742998A (en) *	1985-03-26	1988-05-10	Barry Wright Corporation	Active vibration isolation system employing an electro-rheological fluid
IL77057A (en) *	1985-03-26	1990-03-19	Wright Barry Corp	Active vibration isolation system
JPS61286634A (ja) *	1985-06-14	1986-12-17	Meiritsu Seiki Kk	除振装置
US4757980A (en) *	1985-07-31	1988-07-19	Barry Wright Corporation	Parametrically controlled active vibration isolation system
US4677677A (en) *	1985-09-19	1987-06-30	Nelson Industries Inc.	Active sound attenuation system with on-line adaptive feedback cancellation
US4665549A (en) *	1985-12-18	1987-05-12	Nelson Industries Inc.	Hybrid active silencer
US4677676A (en) *	1986-02-11	1987-06-30	Nelson Industries, Inc.	Active attenuation system with on-line modeling of speaker, error path and feedback pack
US4821205A (en) *	1986-05-30	1989-04-11	Eaton Corporation	Seismic isolation system with reaction mass
JPS6392851A (ja) *	1986-10-06	1988-04-23	Mitsui Eng & Shipbuild Co Ltd	アクテイブ振動絶縁装置
US4736431A (en) *	1986-10-23	1988-04-05	Nelson Industries, Inc.	Active attenuation system with increased dynamic range
NL8701633A (nl) *	1987-07-10	1989-02-01	Philips Nv	Digitale echocompensator.
US4838392A (en) *	1987-08-05	1989-06-13	Lord Corporation	Semi-active damper for vehicles and the like
US4811309A (en) *	1987-09-04	1989-03-07	Nelson Industries Inc.	Microphone probe for acoustic measurement in turbulent flow
JP2814241B2 (ja) *	1987-09-25	1998-10-22	株式会社ブリヂストン	振動制御装置
US4907680A (en) *	1988-01-29	1990-03-13	Lord Corporation	Semi-active damper piston valve assembly
US4862506A (en) *	1988-02-24	1989-08-29	Noise Cancellation Technologies, Inc.	Monitoring, testing and operator controlling of active noise and vibration cancellation systems
US4815139A (en) *	1988-03-16	1989-03-21	Nelson Industries, Inc.	Active acoustic attenuation system for higher order mode non-uniform sound field in a duct
US4903249A (en) *	1988-03-24	1990-02-20	Nelson Industries	Rigid foraminous microphone probe for acoustic measurement in turbulent flow
US4947435A (en) *	1988-03-25	1990-08-07	Active Noise & Vibration Tech	Method of transfer function generation and active noise cancellation in a vibrating system
US4837834A (en) *	1988-05-04	1989-06-06	Nelson Industries, Inc.	Active acoustic attenuation system with differential filtering
US4953089A (en) *	1988-05-09	1990-08-28	Lord Corporation	Hybrid analog digital control method and apparatus for estimation of absolute velocity in active suspension systems
US4977600A (en) *	1988-06-07	1990-12-11	Noise Cancellation Technologies, Inc.	Sound attenuation system for personal seat
GB2222053B (en) *	1988-08-17	1993-03-31	Topexpress Ltd	Signal processing means for sensing a periodic signal in the presence of another interfering periodic noise
US4878188A (en) *	1988-08-30	1989-10-31	Noise Cancellation Tech	Selective active cancellation system for repetitive phenomena
GB8820922D0 (en) *	1988-09-06	1988-10-05	Topexpress Ltd	Noise reduction in vehicles cabins
GB2222657B (en) *	1988-09-09	1992-10-07	Topexpress Ltd	Active control of vibration
JP2668990B2 (ja) *	1988-10-06	1997-10-27	石川島播磨重工業株式会社	構造物制振装置
US4936425A (en) *	1989-02-10	1990-06-26	Lord Corporation	Method of operating a vibration attenuating system having semiactive damper means
US4887699A (en) *	1989-02-10	1989-12-19	Lord Corporation	Vibration attenuating method utilizing continuously variable semiactive damper
US5004079A (en) *	1989-02-10	1991-04-02	Lord Corporation	Semi-active damper valve means and method
US4993523A (en) *	1989-02-10	1991-02-19	Lord Corporation	Fluid circuit for semiactive damper means
US4921272A (en) *	1989-02-10	1990-05-01	Lord Corporation	Semi-active damper valve means with electromagnetically movable discs in the piston
GB2229511B (en) *	1989-03-16	1993-11-10	Topexpress Ltd	Active vibration control
GB2229789B (en) *	1989-03-16	1992-08-05	Topexpress Ltd	Improved methods and apparatus for the active control of vibration
DE4007443A1 (de) *	1989-03-16	1991-09-12	Topexpress Ltd	Aktive vibrationssteuerung
US4898264A (en) *	1989-04-03	1990-02-06	Lord Corporation	Semiactive damper with motion responsive valve means
GB2230920B (en) *	1989-04-25	1993-12-22	Topexpress Ltd	Active sound and/or vibration control
US5255764A (en) *	1989-06-06	1993-10-26	Takafumi Fujita	Active/passive damping apparatus
US5109939A (en) *	1989-07-25	1992-05-05	Richard Conaway	Vibration dampening suspension device for the cab of a truck vehicle
US4989684A (en) *	1989-07-25	1991-02-05	Richard Conaway	Suspension device for the cab of a truck vehicle
US5000415A (en) *	1989-11-08	1991-03-19	Newport Corporation	Active vibration isolation systems
JP2806438B2 (ja) *	1990-04-06	1998-09-30	ダイセル化学工業株式会社	配管の漏れ止め修理方法
JP2930363B2 (ja) *	1990-04-10	1999-08-03	三菱重工業株式会社	制振装置
US4987598A (en) *	1990-05-03	1991-01-22	Nelson Industries	Active acoustic attenuation system with overall modeling
SU1765571A1 (ru) *	1990-05-31	1992-09-30	Московский Институт Электронного Машиностроения	Устройство дл амортизации
JPH0434538U (de) *	1990-07-18	1992-03-23
FR2675559B1 (fr) *	1991-04-16	1993-08-27	Mecanique Magnetique Sa	Amortisseur de vibrations hybride a vibrateur magnetique actif.
JPH04339019A (ja) *	1991-05-15	1992-11-26	Toyota Motor Corp	防振装置
JPH05238435A (ja) *	1991-07-09	1993-09-17	Mitsubishi Motors Corp	車両用キャブサスペンション装置
US5174552A (en) *	1991-10-15	1992-12-29	Lord Corporation	Fluid mount with active vibration control
JPH05149379A (ja) *	1991-11-29	1993-06-15	Takenaka Komuten Co Ltd	アクテイブ除振装置
JPH05222863A (ja) *	1992-02-14	1993-08-31	Kajima Corp	構造物の振動制御装置
WO1993019973A1 (en) *	1992-04-07	1993-10-14	Ab Volvo	Shock absorbing and sprung suspension system
JPH05346136A (ja) *	1992-04-14	1993-12-27	Bridgestone Corp	防振装置
DE4223037A1 (de) *	1992-07-14	1994-01-20	Iveco Magirus	Aktive Fahrzeugfederung, insbesondere Fahrerhausfederung eines Nutzfahrzeuges
US5253853A (en) *	1992-09-15	1993-10-19	Applied Power Inc.	Vibration dampening device
JPH06107242A (ja) *	1992-09-29	1994-04-19	Isuzu Motors Ltd	キヤブの姿勢制御装置
US5456341A (en) *	1993-04-23	1995-10-10	Moog Inc.	Method and apparatus for actively adjusting and controlling a resonant mass-spring system
US5374025A (en) *	1993-06-28	1994-12-20	Alliedsignal Inc.	Fluidic vibration cancellation actuator and method
US5390121A (en) *	1993-08-19	1995-02-14	Lord Corporation	Banded on-off control method for semi-active dampers

1994
- 1994-04-04 US US08/223,256 patent/US5660255A/en not_active Expired - Lifetime
1995
- 1995-02-23 IL IL112765A patent/IL112765A/en not_active IP Right Cessation
- 1995-03-07 KR KR1019950005026A patent/KR0162280B1/ko not_active Expired - Fee Related
- 1995-03-10 JP JP05162795A patent/JP3729888B2/ja not_active Expired - Lifetime
- 1995-04-03 DE DE69509819T patent/DE69509819T2/de not_active Expired - Lifetime
- 1995-04-03 EP EP95302223A patent/EP0676558B1/de not_active Expired - Lifetime
- 1995-04-03 CA CA002146200A patent/CA2146200A1/en not_active Abandoned
- 1995-04-04 BR BR9501432A patent/BR9501432A/pt not_active Application Discontinuation
1997
- 1997-05-02 US US08/850,045 patent/US5823307A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CA2146200A1 (en)	1995-10-05
DE69509819T2 (de)	2000-01-13
JP3729888B2 (ja)	2005-12-21
DE69509819D1 (de)	1999-07-01
IL112765A0 (en)	1995-05-26
KR0162280B1 (ko)	1998-12-01
EP0676558B1 (de)	1999-05-26
JPH0854039A (ja)	1996-02-27
EP0676558A1 (de)	1995-10-11
KR950033751A (ko)	1995-12-26
BR9501432A (pt)	1995-12-19
US5660255A (en)	1997-08-26
US5823307A (en)	1998-10-20

Legal Events

Date	Code	Title
1998-09-24	FF	Patent granted
1999-01-26	KB	Patent renewed
2001-11-25	MM9K	Patent not in force due to non-payment of renewal fees
2015-09-24	EXP	Patent expired

Publication	Publication Date	Title
US5823307A (en)	1998-10-20	Stiff actuator active vibration isolation system
US7726452B2 (en)	2010-06-01	Systems and methods for active vibration damping
US5000415A (en)	1991-03-19	Active vibration isolation systems
USRE33937E (en)	1992-05-26	Active vibration isolation system
JP3614755B2 (ja)	2005-01-26	全方向振動絶縁システム
US5133527A (en)	1992-07-28	Active mounts
US4742998A (en)	1988-05-10	Active vibration isolation system employing an electro-rheological fluid
US5121898A (en)	1992-06-16	Method of controlling positions and vibrations and active vibration control apparatus therefor
Serrand et al.	2000	Multichannel feedback control for the isolation of base-excited vibration
JP4856685B2 (ja)	2012-01-18	負荷の振動絶縁支持の装置および方法
US4643385A (en)	1987-02-17	Anti-vibration system
EP2075484A1 (de)	2009-07-01	System zur Isolierung aktiver Vibrationen mit träger Bezugsmasse
US20030168295A1 (en)	2003-09-11	Active vibration isolation system
WO2010014547A1 (en)	2010-02-04	Vibration isolation system with design for offloading payload forces acting on actuator
US5011108A (en)	1991-04-30	Active mounts
EP2286110B1 (de)	2013-10-16	Schwingungssensor und system zur schwingungsisolierung
Anderson et al.	1996	Ultraquiet platform for active vibration isolation
Ko et al.	1995	Acoustic control using a self-sensing actuator
Gani et al.	2003	Active vibration control of a beam with piezoelectric patches: real-time implementation with xPC target
Neubauer et al.	2008	Brake squeal control with shunted piezoceramics—efficient modelling and experiments
HAGOOD et al.	1989	Experimental investigation into passive damping enhancement for space structures
Veitch et al.	1996	Can piezoelectric accelerometers be used to actively damp the mechanical suspensions in laser interferometric gravitational wave detectors
Lin et al.	1990	Use of piezoelectric actuators in active vibration control of rotating machinery
Wilson et al.	1996	Dynamic characterization of smart structures for active vibration control applications
JPS63106019A (ja)	1988-05-11	アクティブ防振支持装置の制御方法