IL138258A - Modular surface mount manifold - Google Patents

Modular surface mount manifold

Info

Publication number
IL138258A
IL138258A IL13825899A IL13825899A IL138258A IL 138258 A IL138258 A IL 138258A IL 13825899 A IL13825899 A IL 13825899A IL 13825899 A IL13825899 A IL 13825899A IL 138258 A IL138258 A IL 138258A
Authority
IL
Israel
Prior art keywords
surface mount
modular surface
mount manifold
manifold
modular
Prior art date
Application number
IL13825899A
Other languages
English (en)
Other versions
IL138258A0 (en
Original Assignee
Swagelok Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swagelok Co filed Critical Swagelok Co
Publication of IL138258A0 publication Critical patent/IL138258A0/xx
Publication of IL138258A publication Critical patent/IL138258A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0814—Monoblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0821—Attachment or sealing of modular units to each other
    • F15B13/0825—Attachment or sealing of modular units to each other the modular elements being mounted on a common member, e.g. on a rail
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0846—Electrical details
    • F15B13/086—Sensing means, e.g. pressure sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
IL13825899A 1998-03-05 1999-03-05 Modular surface mount manifold IL138258A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US7687198P 1998-03-05 1998-03-05
PCT/US1999/004972 WO1999045302A1 (fr) 1998-03-05 1999-03-05 Collecteur modulaire pour montage en surface

Publications (2)

Publication Number Publication Date
IL138258A0 IL138258A0 (en) 2001-10-31
IL138258A true IL138258A (en) 2005-08-31

Family

ID=22134680

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13825899A IL138258A (en) 1998-03-05 1999-03-05 Modular surface mount manifold

Country Status (9)

Country Link
US (6) US6644353B1 (fr)
EP (1) EP1068464B1 (fr)
JP (1) JP2002506181A (fr)
KR (1) KR100538130B1 (fr)
CN (2) CN1289851C (fr)
AU (1) AU2988099A (fr)
IL (1) IL138258A (fr)
TW (1) TW394834B (fr)
WO (1) WO1999045302A1 (fr)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
US7048007B2 (en) 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
CN1289851C (zh) 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
EP1471296B1 (fr) * 1998-05-18 2006-11-02 Swagelok Company Assemblages distributeurs modulaire pour montage en surface
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
US6186177B1 (en) * 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
US6729353B2 (en) * 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus
US7017792B2 (en) 2001-02-02 2006-03-28 Mitsubishi Heavy Industries, Ltd. Integrated piping plate, machining method for same, machining apparatus for same, and machining equipment for same
US7080666B2 (en) 2002-03-21 2006-07-25 Siemens Aktiengesellschaft System for treating fluids
DE10212611A1 (de) 2002-03-21 2003-10-30 Siemens Ag Anordnung zur Behandlung von Fluiden
JP2004044634A (ja) * 2002-07-09 2004-02-12 Ichimaru Giken:Kk パネルバルブ
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
CA2507589A1 (fr) * 2002-11-26 2004-06-10 Swagelok Company Circuit de fluide monte sur une surface modulaire
AU2003303439A1 (en) * 2002-12-20 2004-07-22 Applied Materials, Inc. Micromachined intergrated fluid delivery system
US6736370B1 (en) * 2002-12-20 2004-05-18 Applied Materials, Inc. Diaphragm valve with dynamic metal seat and coned disk springs
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
CN100360845C (zh) * 2003-04-03 2008-01-09 阿洛伊斯·施瓦茨 用于控制液体或气体介质流动的装置
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
US7048008B2 (en) * 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US20060011246A1 (en) * 2004-07-09 2006-01-19 Leys John A Fluid flow control system and method
US7458397B2 (en) * 2004-07-09 2008-12-02 Michael Doyle Modular fluid distribution system
JP2006022926A (ja) * 2004-07-09 2006-01-26 Ckd Corp 集積弁用下部ブロック
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
NO322524B1 (no) * 2005-03-31 2006-10-16 Framo Eng As Manifold
US7299825B2 (en) * 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7204272B2 (en) * 2005-06-07 2007-04-17 Micad Marine Systems, Llc Modular manifold
USD546419S1 (en) 2005-06-07 2007-07-10 Micad Marine Systems, Llc Modular manifold
RU2414640C2 (ru) * 2005-09-12 2011-03-20 Теском Корпорейшн Блок манифольда бака
JP4780558B2 (ja) * 2005-12-09 2011-09-28 株式会社フジキン 流体制御装置用継手およびそれを用いた流体制御装置
KR101522725B1 (ko) * 2006-01-19 2015-05-26 에이에스엠 아메리카, 인코포레이티드 고온 원자층 증착용 인렛 매니폴드
US20070224708A1 (en) * 2006-03-21 2007-09-27 Sowmya Krishnan Mass pulse sensor and process-gas system and method
DE102007027810A1 (de) * 2006-06-14 2008-01-10 Friedrich Westphal Ventil
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
US20100112814A1 (en) * 2006-09-06 2010-05-06 Sowmya Krishnan Pre-certified process chamber and method
US20100071782A1 (en) * 2007-01-11 2010-03-25 Gary Scheffel Retainer for component connectors
US20080283084A1 (en) * 2007-05-16 2008-11-20 M.E.S. S.R.L. Method for the removal of sediments, fouling agents and the like from ducts and tanks, and apparatus adapted to perform the said method
US7784497B2 (en) * 2007-07-12 2010-08-31 Eriksson Mark L MSM component and associated gas panel assembly
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US7905853B2 (en) * 2007-10-30 2011-03-15 Baxter International Inc. Dialysis system having integrated pneumatic manifold
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
US20100282993A1 (en) * 2009-05-11 2010-11-11 Timothy Robert Kerrigan Continuous Flow Bypass Manifold
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
US8235067B2 (en) * 2009-05-15 2012-08-07 Alphabio, Inc. Encapsulated valve system
WO2010144541A2 (fr) 2009-06-10 2010-12-16 Vistadeltek, Llc Substrats d'amenée de fluide pour débits extrêmes et / ou hautes températures
JP5277278B2 (ja) * 2011-03-29 2013-08-28 株式会社フジキン 流体制御装置用継手
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
DE102011111055B4 (de) * 2011-08-24 2014-06-18 Viega Gmbh & Co. Kg System aus einer Befestigungsvorrichtung und einem Fitting
JP5576991B2 (ja) * 2011-09-30 2014-08-20 株式会社フジキン ガス供給装置
US9574268B1 (en) 2011-10-28 2017-02-21 Asm America, Inc. Pulsed valve manifold for atomic layer deposition
US9388492B2 (en) 2011-12-27 2016-07-12 Asm America, Inc. Vapor flow control apparatus for atomic layer deposition
JP5753831B2 (ja) * 2012-11-29 2015-07-22 株式会社フジキン 流体制御装置
WO2015066229A2 (fr) 2013-10-30 2015-05-07 Alphinity, Llc Dispositif de contrôle de fluide à revêtement intérieur jetable avec capteur intégré
CN106233119B (zh) 2014-01-17 2019-07-26 艾尔菲能堤有限责任公司 具有传感器功能的流体监测组件
TWI693638B (zh) 2014-04-07 2020-05-11 美商蘭姆研究公司 獨立於配置的氣體輸送系統
DE202014102389U1 (de) * 2014-05-21 2014-06-20 Johnson Electric Germany GmbH & Co. KG Modulares Ventilsystem
DE102014012279B3 (de) * 2014-08-22 2015-08-20 Gea Tds Gmbh Krümmer für einen Rohrbündel-Wärmeaustauscher für große Produktdrücke, Herstellverfahren für einen und Rohrbündel-Wärmeaustauscher mit einem solchen Krümmer und Verwendung eines Rohrbündel-Wärmeaustauschers für große Produktdrücke mit einem solchen Krümmer in einer Zerstäubungstrocknungsanlage
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
KR102639104B1 (ko) 2015-05-19 2024-02-22 리플리겐 코포레이션 유동 센서를 구비한 유체 모니터링 조립체
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
EP3349843B1 (fr) 2015-09-15 2021-06-30 Repligen Corporation Système de gestion de tubulure flexible pour applications pharmaceutiques, liées aux bio-procédés, et applications alimentaires/liées aux produits laitiers
AU2016332061B2 (en) 2015-10-01 2022-04-07 Repligen Corporation Valve assembly with directional flow path
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
DE102016107161A1 (de) * 2016-04-18 2017-10-19 Eto Magnetic Gmbh Pneumatische Mehrventilvorrichtung sowie Herstellverfahren
US10662527B2 (en) 2016-06-01 2020-05-26 Asm Ip Holding B.V. Manifolds for uniform vapor deposition
US11225982B2 (en) * 2017-06-16 2022-01-18 Festo Se & Co. Kg Process control device
WO2019075285A1 (fr) * 2017-10-13 2019-04-18 Saint-Gobain Performance Plastics Corporation Collecteur de fluide et procédé de fabrication d'un tel collecteur de fluide
WO2020016817A1 (fr) * 2018-07-17 2020-01-23 Compart Systems Pte. Ltd. Structures de montage pour substrats d'écoulement
IL312930B2 (en) * 2018-12-17 2025-07-01 Compart Systems Pte Ltd Universal tube stub plug with seal port
US11492701B2 (en) 2019-03-19 2022-11-08 Asm Ip Holding B.V. Reactor manifolds
US12516414B2 (en) 2019-03-19 2026-01-06 Asm Ip Holding B.V. Reactor manifolds
EP3738694B1 (fr) 2019-05-14 2022-06-29 Bühler AG Dispositif hydraulique pour une machine à coulée sous pression
KR20210048408A (ko) 2019-10-22 2021-05-03 에이에스엠 아이피 홀딩 비.브이. 반도체 증착 반응기 매니폴드
JP7393788B2 (ja) * 2020-01-08 2023-12-07 アドバンス電気工業株式会社 弁構造体
WO2021231537A1 (fr) * 2020-05-12 2021-11-18 Ichor Systems, Inc. Dispositif de retenue de joints d'étanchéité pour un assemblage de composants dans un appareil pour réguler l'écoulement
TWI829260B (zh) * 2021-07-28 2024-01-11 美商艾克爾系統公司 模組化配件組件以及包含該組件的系統

Family Cites Families (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2225760A (en) * 1938-05-09 1940-12-24 Superheater Co Ltd Return bend clamp block
US2283126A (en) 1939-08-18 1942-05-12 Allis Chalmers Mfg Co Turbine nozzle
US2879788A (en) 1955-04-07 1959-03-31 Beckett Harcum Co Manifold mounted valve
US3523600A (en) 1968-02-13 1970-08-11 Acf Ind Inc Modular hydraulic control system
US3589387A (en) 1969-08-22 1971-06-29 Int Basic Economy Corp Integrated manifold circuits and method of assembly
US3572368A (en) 1969-09-02 1971-03-23 Honeywell Inc Pneumatic control system manifold means
US3806088A (en) 1972-05-01 1974-04-23 Hydro Syst Inc Manifold apparatus
DK134080B (da) 1972-08-08 1976-09-06 Teknova As Apparatsæt til indkobling i en mediumledning, navnlig en trykluftledning.
DE2302267B1 (de) 1973-01-18 1974-06-12 Abex Gmbh Denison, 4010 Hilden Leitungssäule für hydraulische Ventile
DE2630050A1 (de) * 1976-09-29 1978-01-12 Hyman W Paley Verteiler aus kunststoff
US4082324A (en) 1976-10-04 1978-04-04 Obrecht Robert E Connection arrangement for manifold blocks
DE2752938C2 (de) 1977-11-26 1985-06-20 Bürkert GmbH, 7118 Ingelfingen Steuerventilanordnung für zahnärztliche Geräte
SE423269B (sv) 1978-05-08 1982-04-26 Wallberg Kurt Ake Sett att anordna ett stellbart flodesbegrensande ventilorgan vid en rorledning, jemte anordning for utovande av settet
FR2470886A1 (fr) 1979-11-30 1981-06-12 Telemecanique Electrique Sectionneur pneumatique apte a etre place en amont ou en aval d'un groupe de distributeurs
US4458841A (en) 1981-01-22 1984-07-10 Johnson Controls, Inc. Function control module for air treating systems
FR2511448B1 (fr) 1981-08-14 1986-12-12 Compair Climax Sa Systeme modulaire de distribution d'un fluide sous pression de commande d'un dispositif moteur comprenant au moins un distributeur principal et au moins une unite auxiliaire telle qu'un demarreur progressif ou purgeur-bloqueur, montee en amont du distributeur
US4483365A (en) 1982-07-27 1984-11-20 Louis G. Basso, Jr. Interlocking modular valve mounting assembly
JPS6021188A (ja) 1983-07-15 1985-02-02 Kobe Steel Ltd 外部プレハブ式容器内面クラツド方法
US4807660A (en) * 1984-07-13 1989-02-28 Aslanian Jerry L Flow control device for administration of intravenous fluids
US4934411A (en) 1984-08-06 1990-06-19 Albrecht David E Insert means for fluid flow system
US4657047A (en) 1984-12-10 1987-04-14 Nordson Corporation Modular color changers with improved valves and manifolds
US4687020A (en) * 1985-05-17 1987-08-18 Doyle James H Fluid mass flow controller
JPH058510Y2 (fr) * 1986-02-21 1993-03-03
US4848393A (en) 1986-06-27 1989-07-18 West Robert E Fault tolerant fluid flow apparatus
US4741354A (en) 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold
US4938251A (en) 1989-07-11 1990-07-03 Gilbarco Inc. Universal hose adapter for gasoline pump
US5040714A (en) 1990-04-23 1991-08-20 Vemco Corporation Bore forming sealed coupling and process
US5020570A (en) 1990-08-17 1991-06-04 Power Components, Inc. Combined valve modular control panel
US5178191A (en) 1990-09-05 1993-01-12 Newmatic Controls Inc. Modular pneumatic control systems
US5106169A (en) 1991-02-08 1992-04-21 Eilcon National, Inc. Adapter for interconnecting empty/load valve with storage canister
DE4111893C2 (de) 1991-04-09 1995-04-13 Mannesmann Ag Ventil-Grundplatte, insbesondere für gasförmige Medien
US5178651A (en) 1991-08-07 1993-01-12 Balma Frank R Method for purifying gas distribution systems
US5368062A (en) 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
JPH05321879A (ja) * 1992-05-22 1993-12-07 Hitachi Ltd 真空ポンプ
US5305788A (en) 1992-08-13 1994-04-26 Whitey Co. Stream selector for process analyzer
US5439026A (en) 1992-12-11 1995-08-08 Tokyo Electron Limited Processing apparatus and flow control arrangement therefor
US5435349A (en) 1993-04-15 1995-07-25 Emhart Glass Machinery Investments Inc. Valve block assembly for I.S. machine
FR2708702B1 (fr) * 1993-08-06 1995-10-20 Vygon Rampe de robinets.
JPH07122500A (ja) * 1993-10-28 1995-05-12 Fujitsu Ltd ガス機器及びこれを利用したガス供給装置
US5660201A (en) 1993-12-21 1997-08-26 Lockheed Martin Idaho Technologies Company Multiple source/multiple target fluid transfer apparatus
US5448925A (en) * 1994-02-16 1995-09-12 Mcfadden; Patrick A. Shifting apparatus for controlling a transmission in a vehicle
JP3486238B2 (ja) 1994-09-21 2004-01-13 Ｓｍｃ株式会社 切換弁
DE4443081A1 (de) * 1994-12-03 1996-06-05 Mueller A & K Gmbh Co Kg Einrichtung zum Zusammenschalten mehrerer Elektromagnetventile
US5567868A (en) 1995-01-23 1996-10-22 Hewlett-Packard Company Planar manifold assembly
US5605179A (en) 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3343313B2 (ja) * 1995-06-30 2002-11-11 株式会社フジキン ダイヤフラム弁
JP3546275B2 (ja) 1995-06-30 2004-07-21 忠弘 大見 流体制御装置
JP3605705B2 (ja) * 1995-07-19 2004-12-22 株式会社フジキン 流体制御器
US5709247A (en) 1995-12-15 1998-01-20 Hutton; Peter B. Multiple valve manifold for use with a pressure processing apparatus
US5680883A (en) 1996-04-24 1997-10-28 Eaton Corporation Manifold and valve assembly and filter/gasket therefor
US5662143A (en) 1996-05-16 1997-09-02 Gasonics International Modular gas box system
JP3650859B2 (ja) * 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
US5720317A (en) 1996-08-21 1998-02-24 Pgi International, Ltd. Low profile flanged manifold valve
TW354821B (en) 1996-10-15 1999-03-21 Tadahiro Omi Fluid coupling
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US5890747A (en) * 1996-11-18 1999-04-06 Brockhage Associates, A Trust Double containment butt weld pipe fitting
JP3997337B2 (ja) 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
JP4022696B2 (ja) 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
US5836355A (en) 1996-12-03 1998-11-17 Insync Systems, Inc. Building blocks for integrated gas panel
US5735532A (en) 1997-01-03 1998-04-07 Eg&G Pressure Science, Inc. Seal compression limiting retainer
US5730448A (en) 1997-01-03 1998-03-24 Eg&G Pressure Science, Inc. Seal retainer plate
US5735533A (en) 1997-01-03 1998-04-07 Eg&G Pressure Science, Inc. Cavity depth increasing retainer
US5713582A (en) 1997-01-03 1998-02-03 Eg&G Pressure Science, Inc. Seal retainer
JP3997338B2 (ja) 1997-02-14 2007-10-24 忠弘 大見 流体制御装置
JP3814704B2 (ja) * 1997-05-08 2006-08-30 忠弘 大見 流体制御器用継手
JP3774800B2 (ja) 1997-09-24 2006-05-17 株式会社フジキン 下段部材の固定装置およびこれを備えた流体制御装置
JP4066004B2 (ja) 1997-10-13 2008-03-26 忠弘 大見 上段部材取付けの基準となる孔を有する複数の下段部材の固定方法および固定用治具
US5975590A (en) * 1998-02-17 1999-11-02 Applied Materials, Inc. High pressure fitting
US7048007B2 (en) * 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
CN1289851C (zh) * 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
JP3991490B2 (ja) * 1998-04-14 2007-10-17 東レ株式会社 衣服
US6085783A (en) 1998-09-02 2000-07-11 Hollingshead; J. Gregory Unified modular multi-directional flow chemical distribution block
US6345642B1 (en) * 1999-02-19 2002-02-12 Applied Materials, Inc. Method and apparatus for removing processing liquid from a processing liquid path
US6418960B1 (en) * 1999-10-06 2002-07-16 Applied Materials, Inc. Ultrasonic enhancement for solvent purge of a liquid delivery system
US6283155B1 (en) * 1999-12-06 2001-09-04 Insync Systems, Inc. System of modular substrates for enabling the distribution of process fluids through removable components
US6546960B1 (en) * 2000-03-03 2003-04-15 Creative Pathways, Inc. Self-aligning SmartStrate™
KR100714755B1 (ko) * 2000-03-10 2007-05-07 동경 엘렉트론 주식회사 유체 제어장치
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
JP4655423B2 (ja) * 2001-07-05 2011-03-23 株式会社フジキン 流体制御装置
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system

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US6938644B2 (en) 2005-09-06
CN1289851C (zh) 2006-12-13
US7712486B2 (en) 2010-05-11
IL138258A0 (en) 2001-10-31
US20030145895A1 (en) 2003-08-07
WO1999045302A1 (fr) 1999-09-10
JP2002506181A (ja) 2002-02-26
US7195037B2 (en) 2007-03-27
CN1432758A (zh) 2003-07-30
KR100538130B1 (ko) 2005-12-22
CN1298478A (zh) 2001-06-06
US7404417B2 (en) 2008-07-29
US6644353B1 (en) 2003-11-11
AU2988099A (en) 1999-09-20
US20040112447A1 (en) 2004-06-17
US20080202615A1 (en) 2008-08-28
CN1107830C (zh) 2003-05-07
EP1068464B1 (fr) 2006-10-04
TW394834B (en) 2000-06-21
US6776193B2 (en) 2004-08-17
KR20010041622A (ko) 2001-05-25
EP1068464A1 (fr) 2001-01-17
US20070157984A1 (en) 2007-07-12
US20050263197A1 (en) 2005-12-01

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