IL33785A - Apparatus for evaporation-coating with a metallic alloy - Google Patents
Apparatus for evaporation-coating with a metallic alloyInfo
- Publication number
- IL33785A IL33785A IL33785A IL3378570A IL33785A IL 33785 A IL33785 A IL 33785A IL 33785 A IL33785 A IL 33785A IL 3378570 A IL3378570 A IL 3378570A IL 33785 A IL33785 A IL 33785A
- Authority
- IL
- Israel
- Prior art keywords
- crucible
- pool
- level
- alloy
- radiation
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims description 13
- 239000011248 coating agent Substances 0.000 title claims description 10
- 229910001092 metal group alloy Inorganic materials 0.000 title claims description 4
- 230000005855 radiation Effects 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 230000008016 vaporization Effects 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000002285 radioactive effect Effects 0.000 claims 1
- 239000011364 vaporized material Substances 0.000 claims 1
- 230000007246 mechanism Effects 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 2
- 241001573476 Filodes Species 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000012857 radioactive material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US80695769A | 1969-03-13 | 1969-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL33785A0 IL33785A0 (en) | 1970-03-22 |
| IL33785A true IL33785A (en) | 1973-07-30 |
Family
ID=25195220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL33785A IL33785A (en) | 1969-03-13 | 1970-01-27 | Apparatus for evaporation-coating with a metallic alloy |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3590777A (fr) |
| BE (1) | BE744849A (fr) |
| BR (1) | BR7017400D0 (fr) |
| CH (1) | CH526641A (fr) |
| DE (1) | DE2012077B2 (fr) |
| ES (1) | ES376669A1 (fr) |
| FR (1) | FR2032895A5 (fr) |
| GB (1) | GB1273336A (fr) |
| IL (1) | IL33785A (fr) |
| NL (1) | NL7001998A (fr) |
| SE (1) | SE364075B (fr) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2101638B (en) * | 1981-07-16 | 1985-07-24 | Ampex | Moveable cathodes/targets for high rate sputtering system |
| US4433242A (en) * | 1981-08-20 | 1984-02-21 | Cabot Corporation | ESR Hollows molten metal/slag interface detection |
| US4514469A (en) * | 1981-09-10 | 1985-04-30 | United Technologies Corporation | Peened overlay coatings |
| DE3136465A1 (de) * | 1981-09-15 | 1983-03-31 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung und verfahren zum bedampfen von substraten |
| US4744407A (en) * | 1986-10-20 | 1988-05-17 | Inductotherm Corp. | Apparatus and method for controlling the pour of molten metal into molds |
| US5273102A (en) * | 1991-06-05 | 1993-12-28 | General Electric Company | Method and apparatus for casting an electron beam melted metallic material in ingot form |
| DE4242652A1 (de) * | 1992-12-17 | 1994-06-23 | Leybold Ag | Tiegel für Bedampfungsanlagen |
| US6145470A (en) * | 1998-12-11 | 2000-11-14 | General Electric Company | Apparatus for electron beam physical vapor deposition |
| UA71572C2 (uk) * | 1999-08-04 | 2004-12-15 | Дженерал Електрік Компані | Електронно-променевий пристрій для нанесення покриття на вироби конденсацією із парової фази |
| DE102005049906B4 (de) * | 2005-10-17 | 2009-12-03 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur Verdampfung von Verdampfungsmaterial |
| US20070141233A1 (en) * | 2005-12-21 | 2007-06-21 | United Technologies Corporation | EB-PVD system with automatic melt pool height control |
| US20090020070A1 (en) * | 2007-07-19 | 2009-01-22 | Michael Schafer | Vacuum evaporation apparatus for solid materials |
| EP2025773A1 (fr) * | 2007-07-19 | 2009-02-18 | Applied Materials, Inc. | Appareil d'évaporation sous vide pour matériaux solides |
| US20140261080A1 (en) * | 2010-08-27 | 2014-09-18 | Rolls-Royce Corporation | Rare earth silicate environmental barrier coatings |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2415644A (en) * | 1942-11-16 | 1947-02-11 | Harold L Austin | Method and apparatus for continuously applying a coating to a web and controlling the thickness of the same |
| US2584660A (en) * | 1949-09-24 | 1952-02-05 | Eastman Kodak Co | Vacuum coating process and apparatus therefor |
| CH311812A (de) * | 1951-11-05 | 1955-12-15 | Zeiss Carl Fa | Aufdampfeinrichtung. |
| US3167454A (en) * | 1959-12-24 | 1965-01-26 | Zenith Radio Corp | Fluidized-bed type of coating apparatus |
| US3086889A (en) * | 1960-03-21 | 1963-04-23 | Stokes F J Corp | Method and apparatus for coating a continuous sheet of material |
| US3347701A (en) * | 1963-02-05 | 1967-10-17 | Fujitsu Ltd | Method and apparatus for vapor deposition employing an electron beam |
| FR84908E (fr) * | 1963-04-04 | 1965-05-07 | Commissaria A L En Atomique | Perfectionnements apportés aux procédés de coulée, notamment de lingots, et en particulier de carbure d'uranium |
| US3373278A (en) * | 1965-01-06 | 1968-03-12 | United States Steel Corp | Determination of vapor coating rate by x-rays emitted from said vapor |
-
1969
- 1969-03-13 US US806957A patent/US3590777A/en not_active Expired - Lifetime
-
1970
- 1970-01-23 BE BE744849D patent/BE744849A/fr unknown
- 1970-01-26 GB GB3647/70A patent/GB1273336A/en not_active Expired
- 1970-01-27 IL IL33785A patent/IL33785A/en unknown
- 1970-02-12 NL NL7001998A patent/NL7001998A/xx unknown
- 1970-02-13 FR FR7005320A patent/FR2032895A5/fr not_active Expired
- 1970-02-18 ES ES376669A patent/ES376669A1/es not_active Expired
- 1970-02-24 SE SE02394/70A patent/SE364075B/xx unknown
- 1970-02-26 CH CH280470A patent/CH526641A/de not_active IP Right Cessation
- 1970-03-12 BR BR217400/70A patent/BR7017400D0/pt unknown
- 1970-03-13 DE DE2012077A patent/DE2012077B2/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| SE364075B (fr) | 1974-02-11 |
| CH526641A (de) | 1972-08-15 |
| DE2012077B2 (de) | 1974-01-03 |
| GB1273336A (en) | 1972-05-10 |
| US3590777A (en) | 1971-07-06 |
| BR7017400D0 (pt) | 1973-04-05 |
| IL33785A0 (en) | 1970-03-22 |
| NL7001998A (fr) | 1970-09-15 |
| BE744849A (fr) | 1970-07-01 |
| DE2012077A1 (de) | 1970-09-17 |
| ES376669A1 (es) | 1972-05-01 |
| FR2032895A5 (fr) | 1970-11-27 |
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