US3590777A - Ingot feed drive - Google Patents

Ingot feed drive Download PDF

Info

Publication number
US3590777A
US3590777A US806957A US3590777DA US3590777A US 3590777 A US3590777 A US 3590777A US 806957 A US806957 A US 806957A US 3590777D A US3590777D A US 3590777DA US 3590777 A US3590777 A US 3590777A
Authority
US
United States
Prior art keywords
crucible
pool
radiation
ingot
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US806957A
Other languages
English (en)
Inventor
Richard C Elam
Frank P Talboom Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNITED AIRCARFT CORP
Original Assignee
UNITED AIRCARFT CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UNITED AIRCARFT CORP filed Critical UNITED AIRCARFT CORP
Application granted granted Critical
Publication of US3590777A publication Critical patent/US3590777A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Definitions

  • ABSTRACT Apparatus for controlling the feed rate of a bar n a m m .5" Mm A. S mm mm & m m mm 7 m u mm; D w mm m; WW s n. M1 2 H 1 1 of coating alloy into the crucible from which the alloy is 1305c 11/10 vaporized to be deposited on an article.
  • a constant evaporation rate and constant vapor chemistry is achieved.
  • One feature of the invention is the control of the level of the pool of metal or alloy in the crucible thereby assuring, when using a constant electron beam power, a more uniform rate of vaporization and a vapor of constant chemistry.
  • Another feature is the control of the pool height by a variable speed ingot feed which is responsive to a variable affected by the pool height. Because of the temperatures involved in the melting and evaporation of the alloy by an electron beam, it is necessary that the pool height sensing means not be aflected by the beam. Accordingly, one feature of the invention is the sensing of pool height by a device insensitive to thebeam and controlling the speed of the ingot feed in response to this device.
  • One particular feature is the maintenance of a constant evaporation rate and a constant vapor chemistry thereby assuring a uniform rate of vapor deposition and constant coating chemistry on the article being coated. This is assured by operating with a constant electron beam power and'a constant pool height on which the beam impinges. In this way two of the variables that cause a nonuniform coating process are eliminated.
  • FIG. 1 is a vertical sectional view, diagrammatic, through a crucible and associated mechanism incorporating the inven tion.
  • FIG. 2 is a fragmentary view similar to. FIG. 1 showing a modification.
  • the arrangement is shown in a device for the coating of articles by a metallic alloy in which the alloy is vaporized by use of an electron beam.
  • the vaporizing alloy is in the form of an ingot or bar 10 extending upwardly into a watercooled bottom-feed crucible 12.
  • the ingot is fed upwardly as it is consumed by a variable speed motor 14 driving, for example, through a reduction gear mechanism 16 to a pair of ingot feed rollers 18.
  • the end of the ingot within the crucible is melted and vaporized by an electron beam 20 from a filament 22 forming part of an electron gun 24.
  • a potential 25 is supplied from the filament to the accelerating electrode 26.
  • the beam is focused directly on the end of the ingot and melts the surface of the ingot and then vaporizes it into the vacuum chamber 28 that surrounds the gun and the crucible.
  • the power to the gun the electron beam energy is maintained constant so that the pool is exposed to a substantially constant heat input.
  • a workpiece or article 30 shown as a turbine vane, held in position on a support device 32 preferably equipped with a clamp 34 for releasable attachment of the workpiece.
  • the level of the pool of molten alloy may be sensed by a suitable sensing device which is, for example, a light sensitive cell 36 beamed toward the wall of the crucible at the pool level, the light radiation increasing as the pool level rises.
  • the light intensity is measured and through a suitable computing mechanism 38 adjusts the speed of the ingot-driving motor.
  • a suitable computing mechanism 38 adjusts the speed of the ingot-driving motor.
  • Such a computing mechanism is conventional and does not require a detailed description. It will be understood that the motor speed is decreased as the light radiation increases to reduce the ingot speed and the speed is increased as the radiation decreases.
  • the light-measuring means is described and claimed in Blecherman et al., Ser. No. 806,871.
  • the same type of device may be beamed directly into the vapors above the pool as these vapor atoms will be excited by the electron beam and will radiate light of an intensity proportional to the density of the vapor. If the beam energy is constant by reason of a constant power supply to the source of the beam, this density is directly related to the pool height and thus a satisfactory measure of pool height.
  • This concept is also disclosed and claimed in the above-identified application of Blecherman et al., Ser. No. 806,871. With this arrangement the light sensitive device of FIG. 1 is beamed through the vapors above the pool and the operation is the same as above described.
  • Another device for controlling the speed of the ingot-feeding motor is a radioactive device described and claimed in the other above-identified copending application of Blecherman, Ser. No. 806,953.
  • the device uses a radioactive material 40, for example, cesium in glass, in a shielding chamber 42, with the radiation directed by a tube 44 horizontally through the crucible and across the pool surface to a radiation-sensing device 46 which may be an ionization chamber.
  • This device measures the intensity of the radiation which increases as the pool level is lowered and the sensed variation in radiation is fed into a computer 48 that determines the change in driving motor speed for restoring the pool level to the desired position.
  • This level-sensing device may sense the liquid-solid interface level at the bottom of the molten pool which level is directly related to the top level of the pool so long as a beam of constant energy is directed onto the pool.
  • the speed of the ingot feed motor is reduced as the radiation is reduced as a reduced radiation represents a higher level of the pool within the crucible.
  • the motor speed is directly related to the intensity of the radiation sensed by the sensor.
  • a bottom-feed crucible into which an ingot of the coating material is fed, means for heating the material exposed in the crucible to form a molten pool of material therein and to vaporize the molten material,
  • variable speed drive means for feeding the ingot of material into the crucible to replace the vaporized material and means actuated by changes sensed by said receiving means for varying the rate of feed of the ingot to maintain a constant pool height during the coating operation.
  • a coating apparatus for applying a metallic alloy to a substrate including:
  • variable drive means for feeding a bar of alloy into said crucible to replace vaporized material
  • constant energy electron beam means for melting the alloy in the crucible and vaporizing it to provide a vapor to be deposited on the substrate
  • means for sensing the level of the pool of molten alloy in the crucible including a radioactive source and a radiation sensor positioned to direct the radiation through the crucibles with the sensed radiation varying as the pool height changes, and
  • Apparatus as in claim 2 in which the crucible is a bottomfeed crucible and the radioactive source and sensor are positioned to direct the radiation across the top surface of the pool.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
US806957A 1969-03-13 1969-03-13 Ingot feed drive Expired - Lifetime US3590777A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80695769A 1969-03-13 1969-03-13

Publications (1)

Publication Number Publication Date
US3590777A true US3590777A (en) 1971-07-06

Family

ID=25195220

Family Applications (1)

Application Number Title Priority Date Filing Date
US806957A Expired - Lifetime US3590777A (en) 1969-03-13 1969-03-13 Ingot feed drive

Country Status (11)

Country Link
US (1) US3590777A (fr)
BE (1) BE744849A (fr)
BR (1) BR7017400D0 (fr)
CH (1) CH526641A (fr)
DE (1) DE2012077B2 (fr)
ES (1) ES376669A1 (fr)
FR (1) FR2032895A5 (fr)
GB (1) GB1273336A (fr)
IL (1) IL33785A (fr)
NL (1) NL7001998A (fr)
SE (1) SE364075B (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4433242A (en) * 1981-08-20 1984-02-21 Cabot Corporation ESR Hollows molten metal/slag interface detection
US4514469A (en) * 1981-09-10 1985-04-30 United Technologies Corporation Peened overlay coatings
US4744407A (en) * 1986-10-20 1988-05-17 Inductotherm Corp. Apparatus and method for controlling the pour of molten metal into molds
US5273102A (en) * 1991-06-05 1993-12-28 General Electric Company Method and apparatus for casting an electron beam melted metallic material in ingot form
US6145470A (en) * 1998-12-11 2000-11-14 General Electric Company Apparatus for electron beam physical vapor deposition
US6589351B1 (en) * 1999-08-04 2003-07-08 General Electric Company Electron beam physical vapor deposition apparatus and crucible therefor
US20070141233A1 (en) * 2005-12-21 2007-06-21 United Technologies Corporation EB-PVD system with automatic melt pool height control
WO2009010468A1 (fr) * 2007-07-19 2009-01-22 Applied Materials, Inc. Appareil d'évaporation sous vide pour substances solides
US20090020070A1 (en) * 2007-07-19 2009-01-22 Michael Schafer Vacuum evaporation apparatus for solid materials
US20140261080A1 (en) * 2010-08-27 2014-09-18 Rolls-Royce Corporation Rare earth silicate environmental barrier coatings

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2101638B (en) * 1981-07-16 1985-07-24 Ampex Moveable cathodes/targets for high rate sputtering system
DE3136465A1 (de) * 1981-09-15 1983-03-31 Siemens AG, 1000 Berlin und 8000 München Vorrichtung und verfahren zum bedampfen von substraten
DE4242652A1 (de) * 1992-12-17 1994-06-23 Leybold Ag Tiegel für Bedampfungsanlagen
DE102005049906B4 (de) * 2005-10-17 2009-12-03 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Verdampfung von Verdampfungsmaterial

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2415644A (en) * 1942-11-16 1947-02-11 Harold L Austin Method and apparatus for continuously applying a coating to a web and controlling the thickness of the same
US2584660A (en) * 1949-09-24 1952-02-05 Eastman Kodak Co Vacuum coating process and apparatus therefor
US2746420A (en) * 1951-11-05 1956-05-22 Steigerwald Karl Heinz Apparatus for evaporating and depositing a material
US3086889A (en) * 1960-03-21 1963-04-23 Stokes F J Corp Method and apparatus for coating a continuous sheet of material
US3167454A (en) * 1959-12-24 1965-01-26 Zenith Radio Corp Fluidized-bed type of coating apparatus
US3347701A (en) * 1963-02-05 1967-10-17 Fujitsu Ltd Method and apparatus for vapor deposition employing an electron beam
US3373278A (en) * 1965-01-06 1968-03-12 United States Steel Corp Determination of vapor coating rate by x-rays emitted from said vapor
US3388736A (en) * 1963-04-04 1968-06-18 Commissariat Energie Atomique Furnace for manufacturing ingots or bars of metal or alloys, particularly bars of uranium carbide

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2415644A (en) * 1942-11-16 1947-02-11 Harold L Austin Method and apparatus for continuously applying a coating to a web and controlling the thickness of the same
US2584660A (en) * 1949-09-24 1952-02-05 Eastman Kodak Co Vacuum coating process and apparatus therefor
US2746420A (en) * 1951-11-05 1956-05-22 Steigerwald Karl Heinz Apparatus for evaporating and depositing a material
US3167454A (en) * 1959-12-24 1965-01-26 Zenith Radio Corp Fluidized-bed type of coating apparatus
US3086889A (en) * 1960-03-21 1963-04-23 Stokes F J Corp Method and apparatus for coating a continuous sheet of material
US3347701A (en) * 1963-02-05 1967-10-17 Fujitsu Ltd Method and apparatus for vapor deposition employing an electron beam
US3388736A (en) * 1963-04-04 1968-06-18 Commissariat Energie Atomique Furnace for manufacturing ingots or bars of metal or alloys, particularly bars of uranium carbide
US3373278A (en) * 1965-01-06 1968-03-12 United States Steel Corp Determination of vapor coating rate by x-rays emitted from said vapor

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4433242A (en) * 1981-08-20 1984-02-21 Cabot Corporation ESR Hollows molten metal/slag interface detection
US4514469A (en) * 1981-09-10 1985-04-30 United Technologies Corporation Peened overlay coatings
US4744407A (en) * 1986-10-20 1988-05-17 Inductotherm Corp. Apparatus and method for controlling the pour of molten metal into molds
US5273102A (en) * 1991-06-05 1993-12-28 General Electric Company Method and apparatus for casting an electron beam melted metallic material in ingot form
US6145470A (en) * 1998-12-11 2000-11-14 General Electric Company Apparatus for electron beam physical vapor deposition
US6589351B1 (en) * 1999-08-04 2003-07-08 General Electric Company Electron beam physical vapor deposition apparatus and crucible therefor
US20070141233A1 (en) * 2005-12-21 2007-06-21 United Technologies Corporation EB-PVD system with automatic melt pool height control
EP1917379A4 (fr) * 2005-12-21 2008-09-10 United Technologies Corp Systeme eb-pvd a controle de hauteur de bain de fusion automatique
WO2009010468A1 (fr) * 2007-07-19 2009-01-22 Applied Materials, Inc. Appareil d'évaporation sous vide pour substances solides
US20090020070A1 (en) * 2007-07-19 2009-01-22 Michael Schafer Vacuum evaporation apparatus for solid materials
EP2025773A1 (fr) * 2007-07-19 2009-02-18 Applied Materials, Inc. Appareil d'évaporation sous vide pour matériaux solides
US20140261080A1 (en) * 2010-08-27 2014-09-18 Rolls-Royce Corporation Rare earth silicate environmental barrier coatings
US10125618B2 (en) 2010-08-27 2018-11-13 Rolls-Royce Corporation Vapor deposition of rare earth silicate environmental barrier coatings

Also Published As

Publication number Publication date
IL33785A0 (en) 1970-03-22
ES376669A1 (es) 1972-05-01
FR2032895A5 (fr) 1970-11-27
DE2012077A1 (de) 1970-09-17
DE2012077B2 (de) 1974-01-03
CH526641A (de) 1972-08-15
BR7017400D0 (pt) 1973-04-05
SE364075B (fr) 1974-02-11
IL33785A (en) 1973-07-30
NL7001998A (fr) 1970-09-15
BE744849A (fr) 1970-07-01
GB1273336A (en) 1972-05-10

Similar Documents

Publication Publication Date Title
IL33785A (en) Apparatus for evaporation-coating with a metallic alloy
US3570449A (en) Sensor system for a vacuum deposition apparatus
US3730962A (en) Electron beam furance with material-evaporant equilibrium control
US3219435A (en) Method and apparatus for producing metal blocks by electron beams
US4895631A (en) Process and apparatus for controlling the reactive deposit of coatings on substrates by means of magnetron cathodes
GB2028380A (en) Method and apparatus for regulating the evaporation rate in reactive vacuum deposition processes
US3667421A (en) Mechanism for controlling the thickness of a coating in a vapor deposition apparatus
US3826226A (en) Apparatus for coating particulate material
US3668386A (en) Apparatus for measuirng height of a molten metal pool
US4368689A (en) Beam source for deposition of thin film alloys
US3673006A (en) Method and apparatus for surface coating articles
JPH06128728A (ja) 超微粒子のガスデポジション方法及び装置
JPH11335820A (ja) 蒸着方法及び蒸着装置
US3575132A (en) Vapor deposition apparatus
JPH02122068A (ja) ドライプレーティング処理における蒸発原料供給方法およびその装置
US4400407A (en) Method for deposition of thin film alloys utilizing electron beam vaporization
JPH07126839A (ja) 金属蒸気発生装置
JPS6046367A (ja) 蒸着装置
JPH0688232A (ja) 真空成膜方法
GB1122577A (en) Method of and devices for the vaporisation of materials
JPH09324261A (ja) 真空蒸着装置とその膜厚制御方法
JPS6135138B2 (fr)
JPH08505433A (ja) 電子ビーム蒸発中のプロセス安定化方法及び装置
JPH0688214A (ja) 蒸着めっき方法
JPH02141539A (ja) 電子ビーム溶解の溶融状態測定方法及びその装置