IL87934A0 - Automated laminography system for inspection of electronics - Google Patents

Automated laminography system for inspection of electronics

Info

Publication number
IL87934A0
IL87934A0 IL87934A IL8793488A IL87934A0 IL 87934 A0 IL87934 A0 IL 87934A0 IL 87934 A IL87934 A IL 87934A IL 8793488 A IL8793488 A IL 8793488A IL 87934 A0 IL87934 A0 IL 87934A0
Authority
IL
Israel
Prior art keywords
computer system
inspection
item
synchronization
electron beam
Prior art date
Application number
IL87934A
Other languages
English (en)
Original Assignee
Four Pi Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Four Pi Systems Corp filed Critical Four Pi Systems Corp
Publication of IL87934A0 publication Critical patent/IL87934A0/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/043—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using fluoroscopic examination, with visual observation or video transmission of fluoroscopic images
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/304—Contactless testing of printed or hybrid circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Multimedia (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
IL87934A 1987-10-30 1988-10-05 Automated laminography system for inspection of electronics IL87934A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/115,171 US4926452A (en) 1987-10-30 1987-10-30 Automated laminography system for inspection of electronics

Publications (1)

Publication Number Publication Date
IL87934A0 true IL87934A0 (en) 1989-03-31

Family

ID=22359695

Family Applications (1)

Application Number Title Priority Date Filing Date
IL87934A IL87934A0 (en) 1987-10-30 1988-10-05 Automated laminography system for inspection of electronics

Country Status (8)

Country Link
US (1) US4926452A (de)
EP (1) EP0355128B1 (de)
JP (1) JPH06100451B2 (de)
AT (1) ATE132627T1 (de)
CA (1) CA1323453C (de)
DE (1) DE3854865T2 (de)
IL (1) IL87934A0 (de)
WO (1) WO1989004477A1 (de)

Families Citing this family (126)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5561696A (en) * 1987-10-30 1996-10-01 Hewlett-Packard Company Method and apparatus for inspecting electrical connections
US5621811A (en) * 1987-10-30 1997-04-15 Hewlett-Packard Co. Learning method and apparatus for detecting and controlling solder defects
US5097492A (en) * 1987-10-30 1992-03-17 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US5081656A (en) * 1987-10-30 1992-01-14 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US4852131A (en) * 1988-05-13 1989-07-25 Advanced Research & Applications Corporation Computed tomography inspection of electronic devices
NL8802556A (nl) * 1988-10-18 1990-05-16 Philips Nv Computertomografiescanner met tomosynthetisch scanogram.
US5027418A (en) * 1989-02-13 1991-06-25 Matsushita Electric Industrial Co., Ltd. Electro-optical inspection apparatus for printed-circuit boards with components mounted thereon
US5113425A (en) * 1989-06-02 1992-05-12 Glenbrook Technologies, Inc. X-ray inspection system for electronic components
EP0407685B1 (de) * 1989-07-14 1995-06-28 Hitachi, Ltd. Verfahren und Vorrichtung zur Untersuchung von Lötstellen mittels eines röntgenfluoroskopischen Bildes
US5150394A (en) 1989-12-05 1992-09-22 University Of Massachusetts Medical School Dual-energy system for quantitative radiographic imaging
US6031892A (en) * 1989-12-05 2000-02-29 University Of Massachusetts Medical Center System for quantitative radiographic imaging
US5164994A (en) * 1989-12-21 1992-11-17 Hughes Aircraft Company Solder joint locator
US5182775A (en) * 1990-01-12 1993-01-26 Kawasaki Jukogyo Kabushiki Kaisha Method of processing radiographic image data for detecting a welding defect
US5259012A (en) * 1990-08-30 1993-11-02 Four Pi Systems Corporation Laminography system and method with electromagnetically directed multipath radiation source
US5199054A (en) * 1990-08-30 1993-03-30 Four Pi Systems Corporation Method and apparatus for high resolution inspection of electronic items
DE4222804A1 (de) * 1991-07-10 1993-04-01 Raytheon Co Einrichtung und verfahren zur automatischen visuellen pruefung elektrischer und elektronischer baueinheiten
DE4244925C2 (de) * 1991-11-27 2001-08-30 Thermo Trex Corp CCD-Bildaufnahmeanordnung zur Umwandlung von Röntgenstrahlung in ein elektronisches, digitales Bildausgangssignal
US5289520A (en) * 1991-11-27 1994-02-22 Lorad Corporation Stereotactic mammography imaging system with prone position examination table and CCD camera
GB9214114D0 (en) * 1992-07-03 1992-08-12 Ibm X-ray inspection apparatus for electronic circuits
DE4235183C2 (de) * 1992-10-19 1997-10-23 Fraunhofer Ges Forschung Verfahren zur Erzeugung von Schichtaufnahmen von einem Meßobjekt mittels Röntgenstrahlung
JP3051279B2 (ja) * 1993-05-13 2000-06-12 シャープ株式会社 バンプ外観検査方法およびバンプ外観検査装置
US5541856A (en) * 1993-11-08 1996-07-30 Imaging Systems International X-ray inspection system
CA2113752C (en) 1994-01-19 1999-03-02 Stephen Michael Rooks Inspection system for cross-sectional imaging
US5500886A (en) * 1994-04-06 1996-03-19 Thermospectra X-ray position measuring and calibration device
EP0683389A1 (de) 1994-05-12 1995-11-22 Kabushiki Kaisha Toshiba Laminographie-Tomograph und damit aufgebautes Inspektions- und Reparaturgerät
US5594770A (en) * 1994-11-18 1997-01-14 Thermospectra Corporation Method and apparatus for imaging obscured areas of a test object
US5583904A (en) * 1995-04-11 1996-12-10 Hewlett-Packard Co. Continuous linear scan laminography system and method
US5687209A (en) * 1995-04-11 1997-11-11 Hewlett-Packard Co. Automatic warp compensation for laminographic circuit board inspection
US5524132A (en) * 1995-05-12 1996-06-04 International Business Machines Corporation Process for revealing defects in testpieces using attenuated high-energy x-rays to form images in reusable photographs
FR2749396B1 (fr) * 1996-05-29 1998-08-07 Softlink Outil d'aide pour appareil de test de composants electroniques
US5659483A (en) * 1996-07-12 1997-08-19 National Center For Manufacturing Sciences System and method for analyzing conductor formation processes
US5751784A (en) * 1996-09-27 1998-05-12 Kevex X-Ray X-ray tube
US6076411A (en) * 1996-12-09 2000-06-20 Advent Engineering Services, Inc. Method and apparatus for determining remaining life of conductor insulation systems through void size and density correlation
US6002790A (en) * 1996-12-09 1999-12-14 Advent Engineering Services, Inc. Method for detecting and measuring voids in conductor insulation systems
JP2842426B2 (ja) * 1997-01-28 1999-01-06 日本電気株式会社 アクティブマトリクス型液晶表示装置およびその製造方法
US6084663A (en) * 1997-04-07 2000-07-04 Hewlett-Packard Company Method and an apparatus for inspection of a printed circuit board assembly
US6002739A (en) 1998-04-28 1999-12-14 Hewlett Packard Company Computed tomography with iterative reconstruction of thin cross-sectional planes
KR100344587B1 (ko) 1998-09-30 2003-03-26 삼성전자 주식회사 단층검사장치
US6314201B1 (en) 1998-10-16 2001-11-06 Agilent Technologies, Inc. Automatic X-ray determination of solder joint and view delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography
US6201850B1 (en) 1999-01-26 2001-03-13 Agilent Technologies, Inc. Enhanced thickness calibration and shading correction for automatic X-ray inspection
TW418342B (en) 1999-02-02 2001-01-11 Samsung Electronics Co Ltd Sectional image photography system and method thereof
US6463121B1 (en) 1999-10-13 2002-10-08 General Electric Company Interactive x-ray position and exposure control using image data as reference information
KR100522560B1 (ko) * 1999-11-08 2005-10-20 테라다인 인코퍼레이티드 수직 슬라이스 이미징을 이용한 검사 방법
US6826173B1 (en) 1999-12-30 2004-11-30 At&T Corp. Enhanced subscriber IP alerting
JP3629397B2 (ja) * 2000-03-28 2005-03-16 松下電器産業株式会社 接合検査装置及び方法、並びに接合検査方法を実行させるプログラムを記録した記録媒体
JP2002014057A (ja) * 2000-06-30 2002-01-18 Nidek Co Ltd 欠陥検査装置
US6630675B2 (en) * 2000-07-26 2003-10-07 Siemens Medical Solutions Usa, Inc. X-ray scintillator compositions for X-ray imaging applications
US6825856B1 (en) 2000-07-26 2004-11-30 Agilent Technologies, Inc. Method and apparatus for extracting measurement information and setting specifications using three dimensional visualization
US6373917B1 (en) 2000-08-30 2002-04-16 Agilent Technologies, Inc. Z-axis elimination in an X-ray laminography system using image magnification for Z plane adjustment
US6980627B2 (en) * 2000-10-06 2005-12-27 Xintek, Inc. Devices and methods for producing multiple x-ray beams from multiple locations
US20040240616A1 (en) * 2003-05-30 2004-12-02 Applied Nanotechnologies, Inc. Devices and methods for producing multiple X-ray beams from multiple locations
US7082182B2 (en) * 2000-10-06 2006-07-25 The University Of North Carolina At Chapel Hill Computed tomography system for imaging of human and small animal
US6485176B1 (en) * 2000-10-12 2002-11-26 Photon Dynamics, Inc. Inspection system with rho-theta x-ray source transport system
US6483890B1 (en) * 2000-12-01 2002-11-19 Koninklijke Philips Electronics, N.V. Digital x-ray imaging apparatus with a multiple position irradiation source and improved spatial resolution
US6748046B2 (en) * 2000-12-06 2004-06-08 Teradyne, Inc. Off-center tomosynthesis
US6324249B1 (en) 2001-03-21 2001-11-27 Agilent Technologies, Inc. Electronic planar laminography system and method
US6563905B1 (en) * 2001-10-30 2003-05-13 Qualcomm, Incorporated Ball grid array X-ray orientation mark
US6618465B2 (en) 2001-11-12 2003-09-09 General Electric Company X-ray shielding system and shielded digital radiographic inspection system and method
US6853744B2 (en) * 2001-12-14 2005-02-08 Agilent Technologies, Inc. System and method for confirming electrical connection defects
US6847900B2 (en) * 2001-12-17 2005-01-25 Agilent Technologies, Inc. System and method for identifying solder joint defects
DE10224292A1 (de) * 2002-05-31 2003-12-11 Philips Intellectual Property Röntgenröhre
US6907103B2 (en) * 2002-06-19 2005-06-14 Agilent Technologies, Inc. Capturing images of moving objects with a moving illumination point source
DE10240628B4 (de) * 2002-09-03 2012-06-21 Siemens Ag Röntgenröhre mit Ringanode und Röntgen-System mit einer solchen Röntgenröhre
US6895073B2 (en) * 2002-11-22 2005-05-17 Agilent Technologies, Inc. High-speed x-ray inspection apparatus and method
US6819739B2 (en) * 2002-11-27 2004-11-16 Agilent Technologies, Inc. Method and apparatus for calibrating an x-ray laminography imaging system
US6738450B1 (en) 2002-12-10 2004-05-18 Agilent Technologies, Inc. System and method for cost-effective classification of an object under inspection
US6965662B2 (en) 2002-12-17 2005-11-15 Agilent Technologies, Inc. Nonplanar x-ray target anode for use in a laminography imaging system
US7231013B2 (en) * 2003-03-21 2007-06-12 Agilent Technologies, Inc. Precise x-ray inspection system utilizing multiple linear sensors
US7742620B2 (en) * 2003-03-21 2010-06-22 Lockhead Martin Corporation Target detection improvements using temporal integrations and spatial fusion
US6826255B2 (en) * 2003-03-26 2004-11-30 General Electric Company X-ray inspection system and method of operating
US20040263862A1 (en) * 2003-06-24 2004-12-30 Amparan Alfonso Benjamin Detecting peripheral points of reflected radiation beam spots for topographically mapping a surface
US7330528B2 (en) 2003-08-19 2008-02-12 Agilent Technologies, Inc. System and method for parallel image reconstruction of multiple depth layers of an object under inspection from radiographic images
US7099432B2 (en) * 2003-08-27 2006-08-29 Matsushita Electric Industrial Co., Ltd. X-ray inspection apparatus and X-ray inspection method
US7436991B2 (en) * 2003-08-29 2008-10-14 Agilent Technologies, Inc. Image buffers and access schedules for image reconstruction systems
US7424141B2 (en) * 2003-08-29 2008-09-09 Agilent Technologies, Inc. System and method for performing auto-focused tomosynthesis
JP4356413B2 (ja) * 2003-09-25 2009-11-04 株式会社島津製作所 Ｘ線ｃｔ装置
US20050084173A1 (en) * 2003-10-15 2005-04-21 Smith David R. Laminograph deshadowing
US7099435B2 (en) * 2003-11-15 2006-08-29 Agilent Technologies, Inc Highly constrained tomography for automated inspection of area arrays
JP2005241575A (ja) * 2004-02-27 2005-09-08 Toshiba Corp Ｘ線断層撮影装置および立体透視画像構成装置
US7565034B2 (en) * 2004-06-17 2009-07-21 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Determination of a navigation window in an optical navigation system
US7480363B2 (en) * 2004-09-15 2009-01-20 Ge Betz, Inc. Converting a digital radiograph to an absolute thickness map
US7200534B2 (en) * 2005-03-07 2007-04-03 Agilent Technologies, Inc. Radiographic imaging systems and methods for designing same
CN101296658B (zh) * 2005-04-25 2011-01-12 北卡罗来纳大学查珀尔希尔分校 使用时间数字信号处理的x射线成像
US8155262B2 (en) * 2005-04-25 2012-04-10 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for multiplexing computed tomography
US20070014468A1 (en) * 2005-07-12 2007-01-18 Gines David L System and method for confidence measures for mult-resolution auto-focused tomosynthesis
US7570794B2 (en) * 2005-09-02 2009-08-04 Gm Global Technology Operations, Inc. System and method for evaluating a machined surface of a cast metal component
US7336764B2 (en) * 2005-10-20 2008-02-26 Agilent Technologies, Inc. Electron beam accelerator and ceramic stage with electrically-conductive layer or coating therefor
US20070237287A1 (en) * 2006-03-28 2007-10-11 Predrag Sukovic Ct scanner with automatic determination of volume of interest
US20070248206A1 (en) * 2006-04-19 2007-10-25 Predrag Sukovic Ct scanner with untracked markers
JP4707605B2 (ja) * 2006-05-16 2011-06-22 三菱電機株式会社 画像検査方法およびその方法を用いた画像検査装置
US8189893B2 (en) * 2006-05-19 2012-05-29 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for binary multiplexing x-ray radiography
GB2438439A (en) * 2006-05-27 2007-11-28 X Tek Systems Ltd An automatic x-ray inspection system
US7746974B2 (en) * 2006-09-29 2010-06-29 Siemens Medical Solutions Usa, Inc. Radiographic and fluoroscopic CT imaging
US20080159477A1 (en) * 2006-12-29 2008-07-03 General Electric Company System and method for radiographic inspection without a-priori information of inspected object
JP4671988B2 (ja) * 2007-04-24 2011-04-20 セイコープレシジョン株式会社 基準スケールとその製造方法、及び、加工装置
US7529336B2 (en) 2007-05-31 2009-05-05 Test Research, Inc. System and method for laminography inspection
US7706912B2 (en) * 2007-11-30 2010-04-27 Caterpillar Inc. Orifice formation control system
US7986764B2 (en) 2008-12-08 2011-07-26 Morpho Detection, Inc. X-ray laminography device, object imaging system, and method for operating a security system
US8600003B2 (en) 2009-01-16 2013-12-03 The University Of North Carolina At Chapel Hill Compact microbeam radiation therapy systems and methods for cancer treatment and research
US8184898B2 (en) * 2009-03-31 2012-05-22 International Business Machines Corporation Analysis of leaded components
US8369481B2 (en) 2009-06-08 2013-02-05 Ishida Co., Ltd. X-ray inspection device
KR101717678B1 (ko) * 2010-01-28 2017-03-20 주식회사 쎄크 인라인 ｃｔ 검사시스템 및 그 검사방법
DE102010010723B4 (de) 2010-03-09 2017-05-04 Yxlon International Gmbh Verwendung einer Laminographieanlage
CN101839871B (zh) * 2010-05-18 2011-12-28 华南理工大学 一种x射线分层摄影检测方法与系统
US8358739B2 (en) 2010-09-03 2013-01-22 The University Of North Carolina At Chapel Hill Systems and methods for temporal multiplexing X-ray imaging
RU2656245C2 (ru) 2012-03-26 2018-06-04 Конинклейке Филипс Н.В. Имитированный пространственный просмотр объекта в реальном времени с различных точек наблюдения
CN103903940B (zh) 2012-12-27 2017-09-26 清华大学 一种产生分布式x射线的设备和方法
CN103903941B (zh) 2012-12-31 2018-07-06 同方威视技术股份有限公司 阴控多阴极分布式x射线装置及具有该装置的ct设备
CN104470178A (zh) 2013-09-18 2015-03-25 清华大学 X射线装置以及具有该x射线装置的ct设备
CN104470176B (zh) * 2013-09-18 2017-11-14 同方威视技术股份有限公司 X射线装置以及具有该x射线装置的ct设备
WO2015039603A1 (zh) 2013-09-18 2015-03-26 清华大学 X射线装置以及具有该x射线装置的ct设备
CN104470177B (zh) 2013-09-18 2017-08-25 同方威视技术股份有限公司 X射线装置及具有该x射线装置的ct设备
JP6277754B2 (ja) * 2014-02-06 2018-02-14 オムロン株式会社 品質管理システムおよび内部検査装置
US10980494B2 (en) 2014-10-20 2021-04-20 The University Of North Carolina At Chapel Hill Systems and related methods for stationary digital chest tomosynthesis (s-DCT) imaging
JP6359474B2 (ja) * 2015-03-10 2018-07-18 株式会社東芝 放射線を用いたろう付け接合長さの定量評価のための装置および方法
CN106353828B (zh) * 2015-07-22 2018-09-21 清华大学 在安检系统中估算被检查物体重量的方法和装置
US10835199B2 (en) 2016-02-01 2020-11-17 The University Of North Carolina At Chapel Hill Optical geometry calibration devices, systems, and related methods for three dimensional x-ray imaging
US10741297B2 (en) 2017-11-13 2020-08-11 Lawrence Livermore National Security, Llc 3-dimensional x-ray imager
JP7157948B2 (ja) * 2018-04-25 2022-10-21 パナソニックＩｐマネジメント株式会社 部品実装ライン、部品実装方法及び品質管理システム
JP2020020730A (ja) * 2018-08-03 2020-02-06 株式会社日立ハイテクサイエンス Ｘ線透過検査装置及びｘ線透過検査方法
US10801973B2 (en) * 2018-10-04 2020-10-13 The Boeing Company Composite structure bondline inspection
JP7224598B2 (ja) * 2019-02-07 2023-02-20 リョーエイ株式会社 傾斜ｘ線検査方法、傾斜ｘ線検査装置及びその精度評価方法
EP3764086A1 (de) * 2019-07-12 2021-01-13 Excillum AB Verfahren zur röntgenbildgebung einer probe, entsprechende röntgenquelle und röntgensystem
CN114068267B (zh) 2020-08-04 2023-03-28 清华大学 偏转电极组件、x射线源和x射线成像系统
DE112023001408T5 (de) * 2022-03-15 2025-02-13 Sigray, Inc. System und verfahren für die kompakte laminographie unter verwendung einer mikrofokus-transmissionsröntgenquelle und eines röntgendetektors mit variabler vergrösserung
CN120870142B (zh) * 2025-09-25 2025-12-23 宜宾三江机械有限责任公司 一种回转体微群孔零件表面缺陷视觉检测方法及装置

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2511853A (en) * 1950-06-20 Radiographic scanning unit
US2720596A (en) * 1955-10-11 Spiral laminagraph
US2259708A (en) * 1937-06-14 1941-10-21 Schiebold Ernst Testing materials by x-ray
US2667585A (en) * 1951-02-15 1954-01-26 Hartford Nat Bank & Trust Co Device for producing screening images of body sections
DE1033844B (de) * 1951-09-04 1958-07-10 Ialicenciaia Talalmanyokat Ert Roentgenapparat fuer Bewegungsbestrahlung
BE533316A (de) * 1953-11-14
NL90018C (de) * 1956-05-09
DE1138617B (de) * 1960-01-22 1962-10-25 Zuder Di G Zurli & Dr A De Reg Vorrichtung zur Durchfuehrung von Roentgenaufnahmen, insbesondere von Schichtaufnahmen
US3149257A (en) * 1962-04-25 1964-09-15 Dean E Wintermute X-ray devices for use on the human body
US3780291A (en) * 1971-07-07 1973-12-18 American Science & Eng Inc Radiant energy imaging with scanning pencil beam
US3818220A (en) * 1971-11-03 1974-06-18 A Richards Variable depth laminagraphy
US3832546A (en) * 1972-04-14 1974-08-27 Xonics Inc X-ray system with aligned source and slits
DE2218384C3 (de) * 1972-04-15 1980-03-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Holographisches Verfahren zur Herstellung eines dreidimensionalen Bildes aus einer Serie von zweidimensionalen Bildern unterschiedlicher Perspektive
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system
US3928769A (en) * 1973-03-19 1975-12-23 Trw Inc Laminographic instrument
US3894234A (en) * 1974-01-28 1975-07-08 Us Navy Radial scanner
US3984684A (en) * 1974-02-06 1976-10-05 Douglas Fredwill Winnek Three-dimensional radiography
US3962579A (en) * 1974-02-28 1976-06-08 Douglas Fredwill Winnek Three-dimensional radiography
US4032785A (en) * 1974-03-28 1977-06-28 United States Steel Corporation Tire inspection machine presenting an x-ray image of the entire width of the tire
US4007375A (en) * 1975-07-14 1977-02-08 Albert Richard D Multi-target X-ray source
DE2647167C2 (de) * 1976-10-19 1987-01-29 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Herstellung von Schichtaufnahmen mit Röntgen- oder ähnlich durchdringenden Strahlen
US4075489A (en) * 1977-01-21 1978-02-21 Simulation Physics Method and apparatus involving the generation of x-rays
US4130759A (en) * 1977-03-17 1978-12-19 Haimson Research Corporation Method and apparatus incorporating no moving parts, for producing and selectively directing x-rays to different points on an object
US4139776A (en) * 1977-09-22 1979-02-13 Cgr Medical Corporation System for circular and complex tomography
US4234792A (en) * 1977-09-29 1980-11-18 Raytheon Company Scintillator crystal radiation detector
JPS54143290A (en) * 1978-04-28 1979-11-08 Toshiba Corp Soldered part inspecting device
US4228353A (en) * 1978-05-02 1980-10-14 Johnson Steven A Multiple-phase flowmeter and materials analysis apparatus and method
JPS5523616A (en) * 1978-08-07 1980-02-20 Hitachi Denshi Ltd Monitor system of state of terminal station at polling the time of dispatching command
US4260898A (en) * 1978-09-28 1981-04-07 American Science And Engineering, Inc. X-ray imaging variable resolution
US4211927A (en) * 1978-11-24 1980-07-08 Cgr Medical Corporation Computerized tomography system
US4287425A (en) * 1979-12-31 1981-09-01 Pfizer, Incorporated Construction of a CT scanner using heavy ions or protons
US4352021A (en) * 1980-01-07 1982-09-28 The Regents Of The University Of California X-Ray transmission scanning system and method and electron beam X-ray scan tube for use therewith
US4400620A (en) * 1980-06-26 1983-08-23 Blum Alvin S Photon emission tomographic apparatus
US4414682A (en) * 1980-11-17 1983-11-08 American Science And Engineering, Inc. Penetrating radiant energy imaging system with multiple resolution
EP0054596B1 (de) * 1980-12-18 1985-05-29 International Business Machines Corporation Verfahren für die Inspektion und die automatische Sortierung von Objekten, die Konfigurationen mit dimensionellen Toleranzen aufweisen und platzabhängige Kriterien für die Verwerfung, Anlage und Schaltung dafür
US4415980A (en) * 1981-03-02 1983-11-15 Lockheed Missiles & Space Co., Inc. Automated radiographic inspection system
US4426722A (en) * 1981-03-12 1984-01-17 Bell Telephone Laboratories, Incorporated X-Ray microbeam generator
US4385434A (en) * 1981-06-08 1983-05-31 Visidyne, Inc. Alignment system
DE3134076A1 (de) * 1981-08-28 1983-03-10 Philips Patentverwaltung Gmbh, 2000 Hamburg "vorrichtung zur schichtweisen darstellung eines koerpers"
US4472824A (en) * 1982-08-04 1984-09-18 The Perkin-Elmer Corporation Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography
US4491956A (en) * 1982-09-10 1985-01-01 Winnek Douglas Fredwill Method and apparatus for making three-dimensional radiographs
JPS59157505A (ja) * 1983-02-28 1984-09-06 Hitachi Ltd パタ−ン検査装置
GB2149630A (en) * 1983-09-20 1985-06-12 British Gas Corp Real time radiographic inspection
US4575751A (en) * 1983-11-15 1986-03-11 Rca Corporation Method and subsystem for plotting the perimeter of an object
US4561104A (en) * 1984-01-16 1985-12-24 Honeywell Inc. Automated inspection of hot steel slabs
JPS60161551A (ja) * 1984-01-31 1985-08-23 Shimadzu Corp 多層基板の検査方法
JPS60188833A (ja) * 1984-03-09 1985-09-26 Nippon Steel Corp 放射線によるフラツクス入りワイヤの透過検査方法
JPS60193445A (ja) * 1984-03-15 1985-10-01 横河メディカルシステム株式会社 Ｘ線ｃｔの骨領域識別装置
JPS60196654A (ja) * 1984-03-19 1985-10-05 Nippon Steel Corp 放射線による被覆溶接棒の透過検査方法
US4731855A (en) * 1984-04-06 1988-03-15 Hitachi, Ltd. Pattern defect inspection apparatus
JPS61154645A (ja) * 1984-12-28 1986-07-14 株式会社東芝 断層撮影装置
JPS61293657A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
JPH0680420B2 (ja) * 1985-09-20 1994-10-12 株式会社日立製作所 Ｘ線ｃｔ装置
JPH0678993B2 (ja) * 1985-11-15 1994-10-05 株式会社日立メデイコ Ｘ線ｃｔ装置
US4688939A (en) * 1985-12-27 1987-08-25 At&T Technologies, Inc. Method and apparatus for inspecting articles
US4809308A (en) * 1986-02-20 1989-02-28 Irt Corporation Method and apparatus for performing automated circuit board solder quality inspections
US4803639A (en) * 1986-02-25 1989-02-07 General Electric Company X-ray inspection system

Also Published As

Publication number Publication date
US4926452A (en) 1990-05-15
JPH02501411A (ja) 1990-05-17
CA1323453C (en) 1993-10-19
JPH06100451B2 (ja) 1994-12-12
EP0355128A1 (de) 1990-02-28
DE3854865D1 (de) 1996-02-15
EP0355128B1 (de) 1996-01-03
DE3854865T2 (de) 1996-06-13
EP0355128A4 (en) 1991-07-17
ATE132627T1 (de) 1996-01-15
WO1989004477A1 (en) 1989-05-18

Similar Documents

Publication Publication Date Title
IL87934A0 (en) Automated laminography system for inspection of electronics
WO1992004620A3 (en) Method and apparatus for high resolution inspection of electronic items
US6373917B1 (en) Z-axis elimination in an X-ray laminography system using image magnification for Z plane adjustment
US5081656A (en) Automated laminography system for inspection of electronics
US5291535A (en) Method and apparatus for detecting excess/insufficient solder defects
US6314201B1 (en) Automatic X-ray determination of solder joint and view delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography
EP0236001B1 (de) Verfahren und Vorrichtung zur Ausführung der Güteuntersuchung von gedruckten Schaltungen
US20030058983A1 (en) Off-center tomosynthesis
JPH07306165A (ja) Ｘ線検査装置およびｘ線検査補修装置
US7231013B2 (en) Precise x-ray inspection system utilizing multiple linear sensors
JPS54114264A (en) Screw inspection method
JPH0785520B2 (ja) 電子回路用のｘ線検査装置
US6823040B1 (en) X-ray inspection method and apparatus used for the same
JPH01235839A (ja) 透過線像を作製するための装置及び方法
KR920003641Y1 (ko) 불량품 판정화상 처리장치
KR100625641B1 (ko) Ｘ선 검사장치와 이를 이용한 검사방법
KR100287715B1 (ko) X－ray를 이용한 인쇄회로기판의 단층 검사장치 및 검사방법
KR100300586B1 (ko) X－ray를이용한인쇄회로기판의단층검사장치및검사방법
Teramoto et al. High speed oblique CT system for solder bump inspection
JPH0743329B2 (ja) 内部欠陥検査方法及びその装置
KR100339008B1 (ko) Ｘ-선을 이용한 ｐｃｂ의 단층 검사방법
JPH08297103A (ja) Ｘ線断層撮影方法及びその装置