ATE132627T1 - Selbsttätiges laminographie-system zur inspektion von elektronika - Google Patents

Selbsttätiges laminographie-system zur inspektion von elektronika

Info

Publication number
ATE132627T1
ATE132627T1 AT88909919T AT88909919T ATE132627T1 AT E132627 T1 ATE132627 T1 AT E132627T1 AT 88909919 T AT88909919 T AT 88909919T AT 88909919 T AT88909919 T AT 88909919T AT E132627 T1 ATE132627 T1 AT E132627T1
Authority
AT
Austria
Prior art keywords
computer system
item
synchronization
electron beam
image
Prior art date
Application number
AT88909919T
Other languages
English (en)
Inventor
Bruce D Baker
Robert L Corey
John A Adams
Edward W Ross
Original Assignee
Four Pi Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Four Pi Systems Corp filed Critical Four Pi Systems Corp
Application granted granted Critical
Publication of ATE132627T1 publication Critical patent/ATE132627T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/043—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using fluoroscopic examination, with visual observation or video transmission of fluoroscopic images
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/304—Contactless testing of printed or hybrid circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Multimedia (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AT88909919T 1987-10-30 1988-10-04 Selbsttätiges laminographie-system zur inspektion von elektronika ATE132627T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/115,171 US4926452A (en) 1987-10-30 1987-10-30 Automated laminography system for inspection of electronics

Publications (1)

Publication Number Publication Date
ATE132627T1 true ATE132627T1 (de) 1996-01-15

Family

ID=22359695

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88909919T ATE132627T1 (de) 1987-10-30 1988-10-04 Selbsttätiges laminographie-system zur inspektion von elektronika

Country Status (8)

Country Link
US (1) US4926452A (de)
EP (1) EP0355128B1 (de)
JP (1) JPH06100451B2 (de)
AT (1) ATE132627T1 (de)
CA (1) CA1323453C (de)
DE (1) DE3854865T2 (de)
IL (1) IL87934A0 (de)
WO (1) WO1989004477A1 (de)

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US4926452A (en) 1990-05-15
JPH02501411A (ja) 1990-05-17
CA1323453C (en) 1993-10-19
JPH06100451B2 (ja) 1994-12-12
EP0355128A1 (de) 1990-02-28
DE3854865D1 (de) 1996-02-15
IL87934A0 (en) 1989-03-31
EP0355128B1 (de) 1996-01-03
DE3854865T2 (de) 1996-06-13
EP0355128A4 (en) 1991-07-17
WO1989004477A1 (en) 1989-05-18

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