IN2012DN02079A - - Google Patents

Info

Publication number
IN2012DN02079A
IN2012DN02079A IN2079DEN2012A IN2012DN02079A IN 2012DN02079 A IN2012DN02079 A IN 2012DN02079A IN 2079DEN2012 A IN2079DEN2012 A IN 2079DEN2012A IN 2012DN02079 A IN2012DN02079 A IN 2012DN02079A
Authority
IN
India
Prior art keywords
film
metal
oxide
intermediate film
heat treatment
Prior art date
Application number
Other languages
English (en)
Inventor
Andriy Kharchenko
Anne Durandeau
Nicolas Nadaud
Original Assignee
Saint Gobain
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain filed Critical Saint Gobain
Publication of IN2012DN02079A publication Critical patent/IN2012DN02079A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C23C14/5813—Thermal treatment using lasers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/71—Photocatalytic coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/322—Oxidation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/755—Nanosheet or quantum barrier/well, i.e. layer structure having one dimension or thickness of 100 nm or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/89—Deposition of materials, e.g. coating, cvd, or ald
    • Y10S977/891—Vapor phase deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Thermal Sciences (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Catalysts (AREA)
  • Physical Vapour Deposition (AREA)
IN2079DEN2012 2009-10-01 2010-09-30 IN2012DN02079A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0956866A FR2950878B1 (fr) 2009-10-01 2009-10-01 Procede de depot de couche mince
PCT/FR2010/052073 WO2011039488A1 (fr) 2009-10-01 2010-09-30 Procede de depot de couche mince

Publications (1)

Publication Number Publication Date
IN2012DN02079A true IN2012DN02079A (fr) 2015-08-21

Family

ID=42144618

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2079DEN2012 IN2012DN02079A (fr) 2009-10-01 2010-09-30

Country Status (19)

Country Link
US (1) US9011649B2 (fr)
EP (1) EP2483214B1 (fr)
JP (1) JP5681194B2 (fr)
KR (1) KR101746245B1 (fr)
CN (1) CN102574731B (fr)
AU (1) AU2010302459B2 (fr)
BR (1) BR112012006868B8 (fr)
CA (1) CA2774937C (fr)
DE (1) DE202010018173U1 (fr)
DK (1) DK2483214T3 (fr)
EA (1) EA022598B1 (fr)
EG (1) EG27080A (fr)
ES (1) ES2530270T3 (fr)
FR (1) FR2950878B1 (fr)
IN (1) IN2012DN02079A (fr)
MX (1) MX336914B (fr)
PL (1) PL2483214T3 (fr)
PT (1) PT2483214E (fr)
WO (1) WO2011039488A1 (fr)

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US11155493B2 (en) 2010-01-16 2021-10-26 Cardinal Cg Company Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods
US10000965B2 (en) 2010-01-16 2018-06-19 Cardinal Cg Company Insulating glass unit transparent conductive coating technology
US10060180B2 (en) 2010-01-16 2018-08-28 Cardinal Cg Company Flash-treated indium tin oxide coatings, production methods, and insulating glass unit transparent conductive coating technology
FR2972447B1 (fr) 2011-03-08 2019-06-07 Saint-Gobain Glass France Procede d'obtention d'un substrat muni d'un revetement
DE102011089884B4 (de) * 2011-08-19 2016-03-10 Von Ardenne Gmbh Niedrigemittierende Beschichtung und Verfahren zur Herstellung eines niedrigemittierenden Schichtsystems
FR2989388B1 (fr) * 2012-04-17 2019-10-18 Saint-Gobain Glass France Procede d'obtention d'un substrat muni d'un revetement
US9038419B2 (en) 2012-06-08 2015-05-26 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Method of making heat treated coated article using carbon based coating and protective film
FR2991980A1 (fr) * 2012-06-13 2013-12-20 Saint Gobain Procede de depot de couches minces avec etape de traitement sous vide et produit obtenu
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US9976230B2 (en) * 2014-09-19 2018-05-22 Corning Incorporated Method for forming a scratch resistant crystallized layer on a substrate and article formed therefrom
US9810017B2 (en) 2015-12-15 2017-11-07 Cardinal Cg Company Glazing perimeter anticondensation coating technology
US9674895B1 (en) 2015-12-15 2017-06-06 Cardinal Cg Company Glazing perimeter anticondensation coating production technology
FR3048244B1 (fr) * 2016-02-26 2018-03-16 Saint-Gobain Glass France Procede de gravure selective d'une couche ou d'un empilement de couches sur substrat verrier
FR3051804B1 (fr) * 2016-05-24 2018-06-29 Saint-Gobain Glass France Procede de depot de couches minces
US10526242B2 (en) * 2016-07-11 2020-01-07 Guardian Glass, LLC Coated article supporting titanium-based coating, and method of making the same
RU2635617C1 (ru) * 2016-12-23 2017-11-14 Федеральное государственное бюджетное образовательное учреждение высшего образования "Российский химико-технологический университет имени Д.И. Менделеева" Способ изготовления фильтрующего материала
MX2019008880A (es) 2017-01-26 2019-09-18 Composecure Llc Tarjetas de transaccion de metal patinado o preparado para patina y procesos de fabricacion.
FR3065722B1 (fr) * 2017-04-28 2021-09-24 Saint Gobain Vitrage colore et son procede d'obtention
US10822270B2 (en) 2018-08-01 2020-11-03 Guardian Glass, LLC Coated article including ultra-fast laser treated silver-inclusive layer in low-emissivity thin film coating, and/or method of making the same
US11028012B2 (en) 2018-10-31 2021-06-08 Cardinal Cg Company Low solar heat gain coatings, laminated glass assemblies, and methods of producing same
CN112779509A (zh) * 2019-11-07 2021-05-11 有研工程技术研究院有限公司 一种过渡金属氮化物核壳结构薄膜及其制备方法
EP3828304A1 (fr) 2019-11-29 2021-06-02 Saint-Gobain Glass France Procédé de dépôt de couche mince
FR3113672B1 (fr) 2020-08-25 2023-02-24 Saint Gobain Procede d’obtention d’un materiau revetu d’un revetement photocatalytique
EP4132890A1 (fr) 2020-04-08 2023-02-15 Saint-Gobain Glass France Procede de depot de couches minces
FR3109147B1 (fr) 2020-04-08 2023-03-24 Saint Gobain Procede de depot de couches minces
FR3122420A1 (fr) 2021-04-29 2022-11-04 Saint-Gobain Glass France Revêtement photocatalytique et procede d’obtention d’un revêtement photocatalytique
DE102021210660A1 (de) 2021-09-24 2023-03-30 Dr. Johannes Heidenhain Gmbh Photokatalytische Schichtanordnung und Verfahren zum Herstellen einer derartigen Schichtanordnung

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FR2841894B1 (fr) 2002-07-03 2006-03-10 Saint Gobain Substrat transparent comportant un revetement antireflet
FR2856627B1 (fr) 2003-06-26 2006-08-11 Saint Gobain Substrat transparent muni d'un revetement avec proprietes de resistance mecanique
FR2856677B1 (fr) 2003-06-27 2006-12-01 Saint Gobain Substrat revetu d'une couche dielectrique et procede pour sa fabrication
FR2857030B1 (fr) 2003-07-01 2006-10-27 Saint Gobain Procede de depot d'oxyde de titane par source plasma
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FR2858816B1 (fr) 2003-08-13 2006-11-17 Saint Gobain Substrat transparent comportant un revetement antireflet
FR2858975B1 (fr) 2003-08-20 2006-01-27 Saint Gobain Substrat transparent revetu d'un empilement de couches minces a proprietes de reflexion dans l'infrarouge et/ou dans le domaine du rayonnement solaire
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FR2861386B1 (fr) 2003-10-23 2006-02-17 Saint Gobain Substrat, notamment substrat verrier, portant une couche a propriete photocatalytique revetue d'une couche mince protectrice.
FR2862961B1 (fr) 2003-11-28 2006-02-17 Saint Gobain Substrat transparent utilisable alternativement ou cumulativement pour le controle thermique, le blindage electromagnetique et le vitrage chauffant.
FR2865420B1 (fr) 2004-01-28 2007-09-14 Saint Gobain Procede de nettoyage d'un substrat
FR2868770B1 (fr) 2004-04-09 2006-06-02 Saint Gobain Substrat, notamment substrat verrier, portant une couche a propriete photocatalytique modifiee pour pouvoir absorber des photons du visible
FR2868792B1 (fr) 2004-04-13 2006-05-26 Saint Gobain Substrat photocatalytique actif sous lumiere visible
FR2869324B1 (fr) 2004-04-21 2007-08-10 Saint Gobain Procede de depot sous vide
EP1666927A1 (fr) * 2004-12-03 2006-06-07 Nanogate Advanced Materials GmbH Feuille de protection solaire
FR2881757B1 (fr) 2005-02-08 2007-03-30 Saint Gobain Procede d'elaboration par projection thermique d'une cible a base de silicium et de zirconium
DE602006021417D1 (de) * 2005-06-07 2011-06-01 Fujifilm Corp Struktur enthaltender funktionaler film und verfahren zur herstellung eines funktionalen films
FR2889202B1 (fr) 2005-08-01 2007-09-14 Saint Gobain Procede de depot d'une couche anti-rayure
RU2430897C2 (ru) 2005-10-21 2011-10-10 Сэн-Гобэн Гласс Франс Незагрязняющийся материал и способ его получения
FR2892409B1 (fr) 2005-10-25 2007-12-14 Saint Gobain Procede de traitement d'un substrat
FR2893023B1 (fr) 2005-11-08 2007-12-21 Saint Gobain Substrat muni d'un empilement a proprietes thermiques
FR2898122B1 (fr) 2006-03-06 2008-12-05 Saint Gobain Substrat muni d'un empilement a proprietes thermiques
FR2902422B1 (fr) 2006-06-16 2008-07-25 Saint Gobain Procede de depot par plasma atmopherique d'un revetement hydrophobe/oleophobe a durabilite amelioree
US20090202807A1 (en) * 2006-06-22 2009-08-13 National Kuniversity Corporation Kitami Institue Of Technology Method for producing metal nitride film, oxide film, metal carbide film or composite film of them, and production apparatus therefor
FR2911130B1 (fr) 2007-01-05 2009-11-27 Saint Gobain Procede de depot de couche mince et produit obtenu
JP5475461B2 (ja) 2007-01-15 2014-04-16 サン−ゴバン グラス フランス 改良された機械的強度を有する層でコーティングされたガラス基板
FR2918981B1 (fr) 2007-07-20 2009-09-04 Saint Gobain Procede de texturation de surface d'un substrat a fonction verriere, produit verrier a surface texturee.
FR2929938B1 (fr) 2008-04-11 2010-05-07 Saint Gobain Procede de depot de couche mince.
WO2009157064A1 (fr) * 2008-06-25 2009-12-30 キヤノンアネルバ株式会社 Procédé et équipement permettant de fabriquer un élément de magnétorésistance à effet tunnel
FR2943050A1 (fr) 2009-03-11 2010-09-17 Saint Gobain Procede de depot de couche mince.
FR2946335B1 (fr) 2009-06-05 2011-09-02 Saint Gobain Procede de depot de couche mince et produit obtenu.
FR2946639B1 (fr) 2009-06-12 2011-07-15 Saint Gobain Procede de depot de couche mince et produit obtenu.

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DK2483214T3 (da) 2015-02-09
BR112012006868B1 (pt) 2021-03-02
EP2483214B1 (fr) 2014-11-19
CN102574731A (zh) 2012-07-11
EG27080A (en) 2015-05-19
CA2774937A1 (fr) 2011-04-07
JP5681194B2 (ja) 2015-03-04
PL2483214T3 (pl) 2015-04-30
AU2010302459A1 (en) 2012-05-10
FR2950878A1 (fr) 2011-04-08
ES2530270T3 (es) 2015-02-27
EA201270487A1 (ru) 2012-08-30
FR2950878B1 (fr) 2011-10-21
KR101746245B1 (ko) 2017-06-12
EA022598B1 (ru) 2016-01-29
MX2012003610A (es) 2012-04-19
DE202010018173U1 (de) 2014-10-16
EP2483214A1 (fr) 2012-08-08
MX336914B (es) 2016-02-05
US9011649B2 (en) 2015-04-21
BR112012006868B8 (pt) 2021-05-18
KR20120091043A (ko) 2012-08-17
PT2483214E (pt) 2015-02-25
AU2010302459B2 (en) 2014-08-14
CN102574731B (zh) 2016-02-24
US20120171439A1 (en) 2012-07-05
WO2011039488A1 (fr) 2011-04-07
JP2013506758A (ja) 2013-02-28

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