IT1060578B - Procediemnto per fabbricare elementi a semiconduttori - Google Patents
Procediemnto per fabbricare elementi a semiconduttoriInfo
- Publication number
- IT1060578B IT1060578B IT23255/76A IT2325576A IT1060578B IT 1060578 B IT1060578 B IT 1060578B IT 23255/76 A IT23255/76 A IT 23255/76A IT 2325576 A IT2325576 A IT 2325576A IT 1060578 B IT1060578 B IT 1060578B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- semiconductor elements
- manufacturing semiconductor
- manufacturing
- elements
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P54/00—Cutting or separating of wafers, substrates or parts of devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/945—Special, e.g. metal
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2522346A DE2522346C3 (de) | 1975-05-20 | 1975-05-20 | Verfahren zum Herstellen von Halbleiterbauelementen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT1060578B true IT1060578B (it) | 1982-08-20 |
Family
ID=5946996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT23255/76A IT1060578B (it) | 1975-05-20 | 1976-05-14 | Procediemnto per fabbricare elementi a semiconduttori |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4047286A (it) |
| JP (1) | JPS51142974A (it) |
| CA (1) | CA1061013A (it) |
| DE (1) | DE2522346C3 (it) |
| FR (1) | FR2312116A1 (it) |
| GB (1) | GB1477129A (it) |
| IT (1) | IT1060578B (it) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5368008A (en) * | 1976-11-30 | 1978-06-17 | Hitachi Ltd | B board k-charging system |
| JPS5368006A (en) * | 1976-11-30 | 1978-06-17 | Hitachi Ltd | B board k-charging system |
| US4232059A (en) * | 1979-06-06 | 1980-11-04 | E-Systems, Inc. | Process of defining film patterns on microelectronic substrates by air abrading |
| FR2480034A1 (fr) * | 1980-04-04 | 1981-10-09 | Thomson Csf | Procede de fabrication et de montage d'une pastille semi-conductrice et structure obtenue |
| US4636073A (en) * | 1984-10-31 | 1987-01-13 | International Business Machines Corporation | Universal calibration standard for surface inspection systems |
| US5170245A (en) * | 1988-06-15 | 1992-12-08 | International Business Machines Corp. | Semiconductor device having metallic interconnects formed by grit blasting |
| US4896464A (en) * | 1988-06-15 | 1990-01-30 | International Business Machines Corporation | Formation of metallic interconnects by grit blasting |
| US6686225B2 (en) * | 2001-07-27 | 2004-02-03 | Texas Instruments Incorporated | Method of separating semiconductor dies from a wafer |
| US20080153265A1 (en) * | 2006-12-21 | 2008-06-26 | Texas Instruments Incorporated | Semiconductor Device Manufactured Using an Etch to Separate Wafer into Dies and Increase Device Space on a Wafer |
| JP6302644B2 (ja) * | 2013-11-11 | 2018-03-28 | 株式会社ディスコ | ウェーハの加工方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3152939A (en) * | 1960-08-12 | 1964-10-13 | Westinghouse Electric Corp | Process for preparing semiconductor members |
| FR1303118A (fr) * | 1961-07-27 | 1962-09-07 | Lignes Telegraph Telephon | Perfectionnements aux procédés de fabrication des dispositifs à semi-conducteur |
| DE1514304A1 (de) * | 1964-04-03 | 1969-05-14 | Philco Ford Corp | Halbleiteranordnung und Herstellungsverfahren hierfuer |
| DE1282794C2 (de) * | 1965-04-01 | 1975-10-09 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen einer legierungsmaske fuer die gleichzeitige fertigung mehrerer halbleiteranordnungen |
| BE668918A (it) * | 1965-08-27 | 1900-01-01 | ||
| US3466510A (en) * | 1967-01-07 | 1969-09-09 | Telefunken Patent | Integrated graetz rectifier circuit |
| CH465722A (de) * | 1967-12-01 | 1968-11-30 | Battelle Development Corp | Verfahren zur Herstellung eines durch einen Markierungsstoff gebildeten Musters auf einer Unterlage |
| CH504783A (de) * | 1969-06-20 | 1971-03-15 | Siemens Ag | Verfahren zum Abtrennen eines Körpers von einem scheibenförmigen Kristall und Vorrichtung zur Durchführung dieses Verfahrens |
| FR2146929A1 (en) * | 1971-07-26 | 1973-03-09 | Silec Semi Conducteurs | Semiconductor elements separation - from diffused semiconductor wafer,using solder as mask for etching and cutting |
| DE2332822B2 (de) * | 1973-06-28 | 1978-04-27 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Herstellen von diffundierten, kontaktierten und oberflächenpassivierten Halbleiterbauelementen aus Halbleiterscheiben aus Silizium |
-
1975
- 1975-05-20 DE DE2522346A patent/DE2522346C3/de not_active Expired
-
1976
- 1976-03-22 GB GB1139876A patent/GB1477129A/en not_active Expired
- 1976-05-13 US US05/686,137 patent/US4047286A/en not_active Expired - Lifetime
- 1976-05-14 FR FR7614603A patent/FR2312116A1/fr not_active Withdrawn
- 1976-05-14 IT IT23255/76A patent/IT1060578B/it active
- 1976-05-17 JP JP51056420A patent/JPS51142974A/ja active Pending
- 1976-05-18 CA CA252,752A patent/CA1061013A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1061013A (en) | 1979-08-21 |
| US4047286A (en) | 1977-09-13 |
| FR2312116A1 (fr) | 1976-12-17 |
| DE2522346B2 (de) | 1978-03-09 |
| DE2522346C3 (de) | 1978-10-26 |
| JPS51142974A (en) | 1976-12-08 |
| GB1477129A (en) | 1977-06-22 |
| DE2522346A1 (de) | 1976-12-02 |
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