IT1399075B1 - Metodo di rilevazione di posizioni di fotoni che impingono su un fotodiodo a valanga geiger-mode, relativi fotodiodi a valanga geiger-mode e processo di fabbricazione - Google Patents

Metodo di rilevazione di posizioni di fotoni che impingono su un fotodiodo a valanga geiger-mode, relativi fotodiodi a valanga geiger-mode e processo di fabbricazione

Info

Publication number
IT1399075B1
IT1399075B1 ITVA2010A000026A ITVA20100026A IT1399075B1 IT 1399075 B1 IT1399075 B1 IT 1399075B1 IT VA2010A000026 A ITVA2010A000026 A IT VA2010A000026A IT VA20100026 A ITVA20100026 A IT VA20100026A IT 1399075 B1 IT1399075 B1 IT 1399075B1
Authority
IT
Italy
Prior art keywords
geiger
mode
photodiods
photodiodo
photons
Prior art date
Application number
ITVA2010A000026A
Other languages
English (en)
Inventor
Giovanni Condorelli
Delfo Nunziato Sanfilippo
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITVA2010A000026A priority Critical patent/IT1399075B1/it
Priority to US13/053,595 priority patent/US8723100B2/en
Publication of ITVA20100026A1 publication Critical patent/ITVA20100026A1/it
Priority to US13/460,007 priority patent/US8860166B2/en
Application granted granted Critical
Publication of IT1399075B1 publication Critical patent/IT1399075B1/it

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/107—Integrated devices having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014—Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
ITVA2010A000026A 2010-03-23 2010-03-23 Metodo di rilevazione di posizioni di fotoni che impingono su un fotodiodo a valanga geiger-mode, relativi fotodiodi a valanga geiger-mode e processo di fabbricazione IT1399075B1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
ITVA2010A000026A IT1399075B1 (it) 2010-03-23 2010-03-23 Metodo di rilevazione di posizioni di fotoni che impingono su un fotodiodo a valanga geiger-mode, relativi fotodiodi a valanga geiger-mode e processo di fabbricazione
US13/053,595 US8723100B2 (en) 2010-03-23 2011-03-22 Method of detecting impinging position of photons on a geiger-mode avalanche photodiode, related geiger-mode avalanche photodiode and fabrication process
US13/460,007 US8860166B2 (en) 2010-03-23 2012-04-30 Photo detector array of geiger mode avalanche photodiodes for computed tomography systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITVA2010A000026A IT1399075B1 (it) 2010-03-23 2010-03-23 Metodo di rilevazione di posizioni di fotoni che impingono su un fotodiodo a valanga geiger-mode, relativi fotodiodi a valanga geiger-mode e processo di fabbricazione

Publications (2)

Publication Number Publication Date
ITVA20100026A1 ITVA20100026A1 (it) 2011-09-24
IT1399075B1 true IT1399075B1 (it) 2013-04-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
ITVA2010A000026A IT1399075B1 (it) 2010-03-23 2010-03-23 Metodo di rilevazione di posizioni di fotoni che impingono su un fotodiodo a valanga geiger-mode, relativi fotodiodi a valanga geiger-mode e processo di fabbricazione

Country Status (2)

Country Link
US (1) US8723100B2 (it)
IT (1) IT1399075B1 (it)

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Also Published As

Publication number Publication date
US8723100B2 (en) 2014-05-13
US20110272561A1 (en) 2011-11-10
ITVA20100026A1 (it) 2011-09-24

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