JP2000232080A - 被加工物の分割システム及びペレットの移し替え装置 - Google Patents

被加工物の分割システム及びペレットの移し替え装置

Info

Publication number
JP2000232080A
JP2000232080A JP3279799A JP3279799A JP2000232080A JP 2000232080 A JP2000232080 A JP 2000232080A JP 3279799 A JP3279799 A JP 3279799A JP 3279799 A JP3279799 A JP 3279799A JP 2000232080 A JP2000232080 A JP 2000232080A
Authority
JP
Japan
Prior art keywords
workpiece
transfer
pellets
divided
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3279799A
Other languages
English (en)
Japanese (ja)
Inventor
Kazuma Sekiya
一馬 関家
Takayuki Mabashi
隆之 馬橋
Shinichi Namioka
伸一 波岡
Takeo Hidaka
剛生 日高
Masahiro Yoshii
政弘 吉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Abrasive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd
Priority to JP3279799A priority Critical patent/JP2000232080A/ja
Priority to TW89101023A priority patent/TW473931B/zh
Priority to SG200000590A priority patent/SG86373A1/en
Priority to US09/496,964 priority patent/US6341740B2/en
Priority to KR1020000005387A priority patent/KR20000057913A/ko
Priority to KR1020000005388A priority patent/KR100564825B1/ko
Priority to EP20000102151 priority patent/EP1028455A3/de
Priority to MYPI20000460 priority patent/MY116071A/en
Publication of JP2000232080A publication Critical patent/JP2000232080A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P54/00—Cutting or separating of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0446—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0428—Apparatus for mechanical treatment or grinding or cutting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/647—With means to convey work relative to tool station
    • Y10T83/6492—Plural passes of diminishing work piece through tool station
    • Y10T83/6494—Work alternately, angularly re-oriented relative to tool station

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP3279799A 1999-02-10 1999-02-10 被加工物の分割システム及びペレットの移し替え装置 Pending JP2000232080A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP3279799A JP2000232080A (ja) 1999-02-10 1999-02-10 被加工物の分割システム及びペレットの移し替え装置
TW89101023A TW473931B (en) 1999-02-10 2000-01-21 Workpiece dividing system, and pellet-shifting apparatus
SG200000590A SG86373A1 (en) 1999-02-10 2000-02-02 Cutting-and-transferring system and pellet transferring apparatus
US09/496,964 US6341740B2 (en) 1999-02-10 2000-02-03 Cutting-and-transferring system and pellet transferring apparatus
KR1020000005387A KR20000057913A (ko) 1999-02-10 2000-02-03 피가공물의 분할시스템 및 펠릿의 이체장치
KR1020000005388A KR100564825B1 (ko) 1999-02-10 2000-02-03 피가공물의 분할시스템 및 펠릿의 이체장치
EP20000102151 EP1028455A3 (de) 1999-02-10 2000-02-08 Schneid- und Transfersystem und Pellettransfervorrichtung
MYPI20000460 MY116071A (en) 1999-02-10 2000-02-10 Cutting-and-transferring system and pellet transferring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3279799A JP2000232080A (ja) 1999-02-10 1999-02-10 被加工物の分割システム及びペレットの移し替え装置

Publications (1)

Publication Number Publication Date
JP2000232080A true JP2000232080A (ja) 2000-08-22

Family

ID=12368850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3279799A Pending JP2000232080A (ja) 1999-02-10 1999-02-10 被加工物の分割システム及びペレットの移し替え装置

Country Status (7)

Country Link
US (1) US6341740B2 (de)
EP (1) EP1028455A3 (de)
JP (1) JP2000232080A (de)
KR (2) KR100564825B1 (de)
MY (1) MY116071A (de)
SG (1) SG86373A1 (de)
TW (1) TW473931B (de)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003086543A (ja) * 2001-09-14 2003-03-20 Disco Abrasive Syst Ltd 板状物の搬送機構および搬送機構を備えたダイシング装置
JP2006156777A (ja) * 2004-11-30 2006-06-15 Disco Abrasive Syst Ltd 矩形基板の分割装置
JP2007536727A (ja) * 2004-05-07 2007-12-13 ハンミ セミコンダクター カンパニー リミテッド 半導体パッケージ製造工程用切断及びハンドラシステム
KR100884057B1 (ko) 2006-08-28 2009-02-19 한미반도체 주식회사 반도체 패키지 가공시스템 및 그 방법
DE10101090B4 (de) * 2000-01-12 2009-07-23 Disco Corp. Verfahren des Schneidens von CSP-Substraten
JP2010118376A (ja) * 2008-11-11 2010-05-27 Disco Abrasive Syst Ltd 搬送機構
WO2011084972A3 (en) * 2010-01-08 2011-11-24 Kla-Tencor Corporation Dual tray carrier unit
JP2014116461A (ja) * 2012-12-10 2014-06-26 Disco Abrasive Syst Ltd 分割装置
KR20160070703A (ko) 2014-12-10 2016-06-20 가부시기가이샤 디스코 절삭 장치
US9431299B2 (en) 2014-11-26 2016-08-30 Disco Corporation Package substrate dividing method
KR20160128224A (ko) * 2015-04-28 2016-11-07 가부시기가이샤 디스코 절삭 장치
KR101828381B1 (ko) * 2016-08-31 2018-02-12 (주)임펙 엔터프라이즈 복합 이송툴을 구비하는 기판절단장비 및 이를 이용한 기판 이송 방법
KR101863139B1 (ko) * 2017-10-23 2018-05-31 (주)임펙 엔터프라이즈 언로딩영역의 하부에 스크랩수집부가 설치된 기판절단장비
JP2019140172A (ja) * 2018-02-07 2019-08-22 株式会社ディスコ 加工装置
JP2020092143A (ja) * 2018-12-04 2020-06-11 株式会社ディスコ 加工装置
CN115291076A (zh) * 2022-07-20 2022-11-04 浙江珵美科技有限公司 一种to封装芯片的生产及测试装置

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4680362B2 (ja) * 2000-09-22 2011-05-11 株式会社石井工作研究所 電子部品の製造方法及び製造装置
GB2370411B (en) * 2000-12-20 2003-08-13 Hanmi Co Ltd Handler system for cutting a semiconductor package device
GB2380602B (en) * 2001-05-19 2005-03-02 Wentworth Lab Ltd Wafer alignment device
SG111091A1 (en) * 2002-10-29 2005-05-30 Advanced Systems Automation Handler for semiconductor singulation and method therefor
US7281535B2 (en) * 2004-02-23 2007-10-16 Towa Intercon Technology, Inc. Saw singulation
GB2412786A (en) * 2004-03-24 2005-10-05 E2V Tech Uk Ltd Method and apparatus for manufacturing chip scale components or microcomponents
CN101969038B (zh) * 2004-08-23 2012-02-15 洛克系统有限公司 支承一组集成电路单元的支承装置
JP4293150B2 (ja) * 2005-03-29 2009-07-08 セイコーエプソン株式会社 基板移載装置、基板移載方法、および電気光学装置の製造方法
NL2001790C2 (nl) 2008-07-11 2010-01-12 Fico Bv Inrichting en werkwijze voor het zagen van elektronische componenten.
KR101923531B1 (ko) 2011-12-23 2018-11-30 삼성전자주식회사 반도체 칩 본딩 장치
JP6388823B2 (ja) * 2014-12-01 2018-09-12 株式会社ディスコ レーザー加工装置
CN105107831A (zh) * 2015-09-27 2015-12-02 王卫华 一种自动化程度较高的电子垃圾处理装置
JP7184620B2 (ja) * 2018-12-11 2022-12-06 株式会社ディスコ 切削装置
US11173631B2 (en) * 2019-06-17 2021-11-16 Disco Corporation Cutting apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2738091B2 (ja) * 1989-12-15 1998-04-08 富士通株式会社 半導体装置の製造方法
JPH0563057A (ja) * 1991-08-30 1993-03-12 Nec Kansai Ltd 半導体製造装置
JPH07171754A (ja) * 1993-12-20 1995-07-11 Disco Abrasive Syst Ltd 外観検査機能付きダイシング装置
JPH07240452A (ja) * 1994-02-28 1995-09-12 Seiko Seiki Co Ltd 半導体ウエハ加工装置
JPH07240453A (ja) * 1994-02-28 1995-09-12 Seiko Seiki Co Ltd 半導体ウエハ加工装置
JPH09306873A (ja) * 1996-05-16 1997-11-28 Disco Abrasive Syst Ltd ウェーハの分割システム
JP2000094290A (ja) * 1998-09-24 2000-04-04 Disco Abrasive Syst Ltd 表面加工方法

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10101090B4 (de) * 2000-01-12 2009-07-23 Disco Corp. Verfahren des Schneidens von CSP-Substraten
JP2003086543A (ja) * 2001-09-14 2003-03-20 Disco Abrasive Syst Ltd 板状物の搬送機構および搬送機構を備えたダイシング装置
JP2007536727A (ja) * 2004-05-07 2007-12-13 ハンミ セミコンダクター カンパニー リミテッド 半導体パッケージ製造工程用切断及びハンドラシステム
JP2006156777A (ja) * 2004-11-30 2006-06-15 Disco Abrasive Syst Ltd 矩形基板の分割装置
US7644747B2 (en) 2004-11-30 2010-01-12 Disco Corporation Rectangular substrate dividing apparatus
KR100884057B1 (ko) 2006-08-28 2009-02-19 한미반도체 주식회사 반도체 패키지 가공시스템 및 그 방법
JP2010118376A (ja) * 2008-11-11 2010-05-27 Disco Abrasive Syst Ltd 搬送機構
WO2011084972A3 (en) * 2010-01-08 2011-11-24 Kla-Tencor Corporation Dual tray carrier unit
US9099509B2 (en) 2010-01-08 2015-08-04 Kla-Tencor Corporation Dual tray carrier unit
JP2014116461A (ja) * 2012-12-10 2014-06-26 Disco Abrasive Syst Ltd 分割装置
US9431299B2 (en) 2014-11-26 2016-08-30 Disco Corporation Package substrate dividing method
KR20160070703A (ko) 2014-12-10 2016-06-20 가부시기가이샤 디스코 절삭 장치
KR20160128224A (ko) * 2015-04-28 2016-11-07 가부시기가이샤 디스코 절삭 장치
KR102405690B1 (ko) 2015-04-28 2022-06-03 가부시기가이샤 디스코 절삭 장치
KR101828381B1 (ko) * 2016-08-31 2018-02-12 (주)임펙 엔터프라이즈 복합 이송툴을 구비하는 기판절단장비 및 이를 이용한 기판 이송 방법
KR101863139B1 (ko) * 2017-10-23 2018-05-31 (주)임펙 엔터프라이즈 언로딩영역의 하부에 스크랩수집부가 설치된 기판절단장비
JP2019140172A (ja) * 2018-02-07 2019-08-22 株式会社ディスコ 加工装置
JP2020092143A (ja) * 2018-12-04 2020-06-11 株式会社ディスコ 加工装置
JP7233813B2 (ja) 2018-12-04 2023-03-07 株式会社ディスコ 加工装置
CN115291076A (zh) * 2022-07-20 2022-11-04 浙江珵美科技有限公司 一种to封装芯片的生产及测试装置

Also Published As

Publication number Publication date
EP1028455A2 (de) 2000-08-16
US20010040197A1 (en) 2001-11-15
SG86373A1 (en) 2002-02-19
EP1028455A3 (de) 2007-08-22
KR100564825B1 (ko) 2006-03-27
TW473931B (en) 2002-01-21
MY116071A (en) 2003-10-31
KR20000057913A (ko) 2000-09-25
KR20000057914A (ko) 2000-09-25
US6341740B2 (en) 2002-01-29

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